Accurate adding device

Abstract

The utility model provides an accurate adding device. The accurate adding device comprises a box body; the first pipeline comprises a first three-way pipe fitting, a large valve, a first float flowmeter, a second three-way pipe fitting and an ultrasonic flowmeter which are sequentially connected through a pipeline from top to bottom; the second pipeline comprises a third three-way pipe fitting, a small valve, a second float flowmeter and a fourth three-way pipe fitting which are sequentially connected from top to bottom; the third pipeline comprises a micro-compensation valve and a third float flowmeter which are sequentially connected from top to bottom; the intelligent all-in-one machine is mounted at the top of the box body in an embedded manner; and the electromagnetic valve group is installed in the intelligent all-in-one machine, and the electromagnetic valve group is further electrically connected with the large valve, the small valve and the micro-compensation valve. According to the utility model, the stock solution adding amount can be monitored in real time, the adding of the stock solution can be more accurately controlled, and the mixing and diluting success rate is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical mixing and adding equipment, and particularly relates to an accurate adding device. Background Art

[0002] At present, the production and manufacturing processes of products in the semiconductor, display panel, and new energy industries are becoming more and more standardized. Any problem in the chemical supply system during the manufacturing process will cause immeasurable losses to the entire production. Therefore, it is crucial to continuously improve the stability and reliability of the chemical supply system. In the production process, different concentrations of the same chemical are often used, for example: 45% KOH, 4.5% KOH, 0.045% KOH, etc. Therefore, it is necessary to design and manufacture special mixed acid dilution equipment to directly add a controlled amount of high-concentration stock solution to pure water to prepare chemicals with the target concentration. The core of the mixing and dilution equipment is to control the addition amount of the stock solution. Currently, the existing method for adding high-concentration stock solution is to use a metering tank and a level gauge. By calculating the amount of high-concentration stock solution required for a single batch in advance, and based on the selected size of the metering tank, the liquid level height of the high-concentration stock solution in the metering tank can be obtained, and the level gauge is adjusted to this height. When the added high-concentration stock solution reaches the set height of the level gauge, the level gauge detects the signal and stops adding the high-concentration stock solution, thereby achieving the control of the addition amount of the high-concentration stock solution. However, the existing method for adding high-concentration stock solution has several problems and disadvantages:

[0003] (1) The position debugging of the level gauge of the metering tank is complex. Due to different detection accuracies of the level gauge, after determining the installation height of the level gauge according to the calculation, the mixing and dilution system needs to test and verify the addition amount of the high-concentration stock solution multiple times, and confirm whether the level gauge can detect when the liquid level reaches the required level, so as to finely adjust the position of the level gauge and repeat the verification multiple times;

[0004] (2) The volume of the metering tank and the height of the level gauge are selected and confirmed based on the amount of high-concentration stock solution required for a single batch of mixing calculated, so the metering tank system cannot flexibly respond to changes in the chemical concentration required by customers;

[0005] (3) The finished metering tank is large in volume, and installing it in the equipment makes the mixing and dilution equipment large in size, wasting space;

[0006] (4) Welding at the inlet and outlet of the non-standard metering tank is prone to being insecure, resulting in leakage of the high-concentration stock solution. Content of the Utility Model

[0007] To solve the above problems, the utility model provides an accurate adding device, and the specific technical solution is as follows:

[0008] An accurate adding device, comprising:

[0009] A box body, with an inlet internal thread joint provided at the upper end of the box body and an outlet internal thread joint provided at the lower end of the box body;

[0010] A first pipeline, the first pipeline includes a first three-way pipe fitting, a large valve, a first rotameter, a second three-way pipe fitting and an ultrasonic flowmeter connected in sequence from top to bottom through pipelines. The first three-way pipe fitting is connected to the inlet internal thread joint through a pipeline, and the ultrasonic flowmeter is connected to the outlet internal thread joint through a pipeline;

[0011] A second pipeline, the second pipeline includes a third three-way pipe fitting, a small valve, a second rotameter, a fourth three-way pipe fitting connected in sequence from top to bottom. The third three-way pipe fitting is connected to the first three-way pipe fitting, and the fourth three-way pipe fitting is connected to the second three-way pipe fitting;

[0012] A third pipeline, the third pipeline includes a micro-compensation valve and a third rotameter connected in sequence from top to bottom. The micro-compensation valve is connected to the third three-way pipe fitting, and the third rotameter is connected to the fourth three-way pipe fitting;

[0013] An intelligent all-in-one machine, which is embedded and installed on the top of the box body;

[0014] An electromagnetic valve group, the electromagnetic valve group is installed inside the intelligent all-in-one machine, and the electromagnetic valve group is also electrically connected to the large valve, the small valve and the micro-compensation valve.

[0015] In a preferred implementation, a liquid discharge port is further provided at the lower end of the box body, a liquid discharge pipeline is installed at the liquid discharge port, and a leakage sensor and a liquid discharge manual valve are provided on the liquid discharge pipeline. The leakage sensor is electrically connected to the intelligent all-in-one machine.

[0016] In a preferred implementation, the ultrasonic flowmeter adopts a clamp-type high-precision flowmeter with a built-in LCD display.

[0017] In a preferred implementation, the large valve, the small valve and the micro-compensation valve are all fixed inside the box body through U-shaped steel channels.

[0018] In a preferred implementation, the intelligent all-in-one machine includes a touch display screen and a PLC controller, and the touch display screen is arranged at the top of the front of the box body.

[0019] In a preferred implementation, a detachable electrical installation board of the intelligent all-in-one machine is arranged on the upper surface of the box body.

[0020] In a preferred implementation, a cabinet door is provided on the front of the box body, and the cabinet door is hinged to the box body.

[0021] In a preferred implementation, the cabinet door is made of transparent PVC material.

[0022] Beneficial effects of the utility model:

[0023] (1) The utility model adopts an ultrasonic flow meter, which is connected to an intelligent all-in-one machine through a line, and a PLC controller is linked to form a closed-loop control of the amount of stock solution added, and the amount of stock solution added is monitored in real time. It can more accurately control the addition of stock solution and improve the success rate of mixing and dilution. It is easy to operate and can eliminate human errors during operation by technicians. It has an operating parameter management function and can save, modify and reuse various parameters.

[0024] (2) The precise adding device of the utility model is structurally sealed, which ensures the neatness of the raw liquid addition. At the same time, the leakage sensor can perform leakage monitoring, which takes the safety of the operator into consideration to the greatest extent.

[0025] (3) The precise adding device of the utility model can be directly fixed above the mixing and dilution tank and does not need to be installed inside the mixing and dilution equipment. The size of the mixing and dilution equipment is reduced, saving equipment cost and plant space. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0027] Figure 2 The internal structure of the utility model is shown in FIG. Figure 1 .

[0028] Figure 3 The internal structure of the utility model is shown in FIG. Figure 2 .

[0029] Figure 4 It is a schematic diagram of the top cross-sectional structure of the utility model.

[0030] In the figure: 1. Box body; 2. Inlet female joint; 3. Outlet female joint; 4. First three-way pipe fitting; 5. Large valve; 6. First float flowmeter; 7. Second three-way pipe fitting; 8. Ultrasonic flowmeter; 9. Third three-way pipe fitting; 10. Small valve; 11. Second float flowmeter; 12. Fourth three-way pipe fitting; 13. Micro-make-up valve; 14. Third float flowmeter; 15. Touch screen; 16. Solenoid valve group; 17. Drain pipe; 18. Leakage sensor; 19. Drain hand valve; 20. Removable electrical installation plate; 21. U-shaped channel steel; 22. Cabinet door. DETAILED DESCRIPTION

[0031] The following will be combined with the present utility model Figures 1 to 4, the technical solutions in the embodiments of the present utility model are clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0032] As Figures 1 to 4 shown, a precise addition device includes:

[0033] A box body 1, an inlet internal thread joint 2 is provided at the upper end of the box body 1, and an outlet internal thread joint 3 is provided at the lower end of the box body 1. The inlet internal thread joint 2 and the outlet internal thread joint 3 are connected to external pipelines;

[0034] A first pipeline, the first pipeline includes a first three-way pipe fitting 4, a large valve 5, a first rotameter 6, a second three-way pipe fitting 7, and an ultrasonic flowmeter 8 that are connected by pipelines in sequence from top to bottom. The first three-way pipe fitting 4 is connected to the inlet internal thread joint 2 through a pipeline, and the ultrasonic flowmeter 8 is connected to the outlet internal thread joint 3 through a pipeline;

[0035] A second pipeline, the second pipeline includes a third three-way pipe fitting 9, a small valve 10, a second rotameter 11, and a fourth three-way pipe fitting 12 that are connected in sequence from top to bottom. The third three-way pipe fitting 9 is connected to the first three-way pipe fitting 4, and the fourth three-way pipe fitting 12 is connected to the second three-way pipe fitting 7;

[0036] A third pipeline, the third pipeline includes a micro-compensation valve 13 and a third rotameter 14 that are connected in sequence from top to bottom. The micro-compensation valve 13 is connected to the third three-way pipe fitting 9, and the third rotameter 14 is connected to the fourth three-way pipe fitting 12;

[0037] An intelligent all-in-one machine, the intelligent all-in-one machine is embedded and installed on the top of the box body 1, and is independently sealed to prevent acid-base gases from entering and corroding electrical components. The intelligent all-in-one machine includes a touch display screen 15 and a PLC controller. The touch display screen 15 is arranged at the front top of the box body and supports multiple communication methods;

[0038] An electromagnetic valve group 16, the electromagnetic valve group 16 is installed inside the intelligent all-in-one machine, and the electromagnetic valve group 16 is also electrically connected to the large valve 5, the small valve 10, and the micro-compensation valve 13.

[0039] In a preferred implementation manner, a detachable electrical installation board 20 of the intelligent all-in-one machine is provided on the upper surface of the box body 1, which is convenient for assembly and debugging and for overhauling the inside of the intelligent all-in-one machine;

[0040] In a preferred implementation, a liquid discharge port is further provided at the lower end of the box body 1, a liquid discharge pipe 17 is installed at the liquid discharge port, a leakage sensor 18 and a liquid discharge manual valve 19 are provided on the liquid discharge pipe 17, and the leakage sensor 18 is electrically connected to the intelligent all-in-one machine.

[0041] In a preferred implementation, the ultrasonic flowmeter 8 is a clamp-type high-precision flowmeter with a built-in LCD display. The ultrasonic flowmeter 8 is connected to the intelligent all-in-one machine through a line, and the PLC controller is linked to form a closed-loop control of the raw liquid addition amount, real-time monitoring the raw liquid addition amount, which can more accurately control the addition of the raw liquid and improve the success rate of mixing and dilution.

[0042] In a preferred implementation, the large valve 5, the small valve 10, and the micro-compensation valve 13 are all fixed inside the box body 1 through U-shaped steel channels 21, ensuring the stability of the internal structure of the box body 1.

[0043] In a preferred implementation, a cabinet door 22 is provided on the front of the box body 1. The cabinet door 22 is hinged to the box body 1. The cabinet door 22 is made of a transparent PVC material part, which is resistant to acid and alkali corrosion and is convenient for the staff to observe the state inside the box body.

[0044] In a preferred implementation, the box body 1 is composed of polypropylene PP plate parts and welded together. The polypropylene PP material has the advantages of low density, easy welding and processing, excellent chemical resistance, heat resistance, impact resistance, and is non-toxic and odorless.

[0045] In a preferred implementation, the first three-way pipe fitting 4, the second three-way pipe fitting 7, the third three-way pipe fitting 9, the fourth three-way pipe fitting 12 and the pipes in the precise addition device are all made of PFA material parts. The PFA material has excellent stability and corrosion resistance, is an inert material, and will not cause harm to the human body, the environment or food.

[0046] Working principle:

[0047] When the precise addition device of the utility model is used in the mixing system, first, set the required original liquid addition amount on the touch display screen 15 in the intelligent all-in-one machine or give the required original liquid addition amount to the intelligent all-in-one machine through communication. Then, manually set the set values of the first rotameter 6, the second rotameter 11, and the third rotameter 14 respectively. The intelligent all-in-one machine will automatically calculate the opening duration of the large valve 5, the small valve 10, and the micro-compensation valve 13 respectively and control the opening and closing of the large valve 5, the small valve 10, and the micro-compensation valve 13 by controlling the on-off of the solenoid valve group 16. The touch display screen 15 in the intelligent all-in-one machine will display the status of the pipeline and valves in real time. The addition amount of the original liquid is monitored in real time through the ultrasonic flowmeter 8 to achieve closed-loop control until the addition amount is equal to the set addition amount. After the addition is completed, the touch display screen 15 will display that the addition of this batch is completed and give a signal of addition completion to the mixing system controller. After receiving this signal, the mixing system indicates that the addition of the high-concentration original liquid is completed and the next mixing work can be carried out. In addition, if during the addition process or standby state, the leakage sensor 18 detects leakage and the intelligent all-in-one machine gives an alarm, it can be set in the touch display screen 15 whether to stop the addition when the leakage alarm occurs.

[0048] The above is only the preferred embodiment of the utility model, and its description is relatively specific and detailed. However, it should not be understood as a limitation to the scope of the utility model patent. It should be pointed out that without departing from the concept of the utility model, several improvements and deformations can still be made, and these all belong to the protection scope of the utility model.

Claims

1. A precise adding device, characterized in that: include: A box body, wherein the upper end of the box body is provided with an inlet internal thread joint, and the lower end of the box body is provided with an outlet internal thread joint; A first pipeline, wherein the first pipeline includes a first three-way pipe fitting, a large valve, a first float flowmeter, a second three-way pipe fitting and an ultrasonic flowmeter which are connected through pipelines in sequence from top to bottom, wherein the first three-way pipe fitting is connected to the inlet female connector through a pipeline, and the ultrasonic flowmeter is connected to the outlet female connector through a pipeline; A second pipeline, wherein the second pipeline includes a third three-way pipe fitting, a small valve, a second float flowmeter, and a fourth three-way pipe fitting connected in sequence from top to bottom, the third three-way pipe fitting is connected to the first three-way pipe fitting, and the fourth three-way pipe fitting is connected to the second three-way pipe fitting; A third pipeline, the third pipeline comprises a micro-supplement valve and a third float flowmeter connected in sequence from top to bottom, the micro-supplement valve is connected to the third three-way pipe fitting, and the third float flowmeter is connected to the fourth three-way pipe fitting; An intelligent all-in-one machine, which is embedded in the top of the box; The solenoid valve group is installed inside the intelligent all-in-one machine, and the solenoid valve group is also electrically connected to the large valve, the small valve, and the micro-make-up valve.

2. The precise adding device according to claim 1, characterized in that: The lower end of the box body is also provided with a drain port, a drain pipe is installed at the drain port, a leakage sensor and a drain hand valve are provided on the drain pipe, and the leakage sensor is electrically connected to the intelligent all-in-one machine.

3. The precise adding device according to claim 1, characterized in that: The ultrasonic flow meter is a clamp-type high-precision flow meter with an LCD display.

4. The precise adding device according to claim 1, characterized in that: The large valve, small valve and micro-make-up valve are all fixed inside the box body through U-shaped channel steel.

5. The precise adding device according to claim 1, characterized in that: The intelligent all-in-one machine comprises a touch screen and a PLC controller, and the touch screen is arranged on the top of the front side of the box.

6. The precise adding device according to claim 1, characterized in that: The upper surface of the box is provided with a detachable electrical installation plate of the intelligent all-in-one machine.

7. The precise adding device according to claim 1, characterized in that: A cabinet door is provided on the front of the box body, and the cabinet door is hinged to the box body.

8. The precise adding device according to claim 7, characterized in that: The cabinet door is made of transparent PVC material.

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