Cleaning device

Abstract

The utility model relates to the technical field of cleaning equipment, in particular to a cleaning device which comprises a cleaning tank and a plurality of auxiliary cleaning parts, the cleaning tank is used for containing cleaning liquid and a carrier, and the carrier is used for being immersed in the cleaning liquid for cleaning; the auxiliary cleaning parts comprise the first auxiliary cleaning part and the second auxiliary cleaning part, the density of the first auxiliary cleaning part is smaller than that of the cleaning fluid, the density of the second auxiliary cleaning part is equal to or larger than that of the cleaning fluid, and the auxiliary cleaning parts are geometric parts. The cleaning device is used for cleaning the carrier, the usage amount of the cleaning liquid can be reduced, and meanwhile the influence of volatilization of the cleaning liquid on the cleaning effect is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning equipment, in particular to a cleaning device. Background Art

[0002] Carriers such as quartz boats play an important role in semiconductor manufacturing and the photovoltaic industry. Before use, the surface dirt of the carriers needs to be cleaned before they can be put into use. When cleaning such carriers, a large amount of cleaning liquid is required to immerse the carriers, and the carriers are soaked for a long time to achieve the purpose of thorough cleaning. However, since such carriers often have hollow cavities or many hollow areas, a large amount of cleaning liquid is wasted. In addition, as the cleaning time increases, the cleaning liquid will volatilize and its concentration will decrease, affecting the cleaning effect. Summary of the Utility Model

[0003] The purpose of the embodiments of the present application is to provide a cleaning device, which can reduce the usage amount of the cleaning liquid and at the same time reduce the influence of the volatilization of the cleaning liquid on the cleaning effect.

[0004] In order to achieve the above purpose, the present application provides the following technical solutions:

[0005] In a first aspect, the present application provides a cleaning device for cleaning a carrier. The cleaning device includes a cleaning tank and a plurality of auxiliary cleaning members. Among them, the cleaning tank is used to place the cleaning liquid and the carrier, and the carrier is used to be immersed in the cleaning liquid for cleaning;

[0006] The auxiliary cleaning members include a first auxiliary cleaning member and a second auxiliary cleaning member. The density of the first auxiliary cleaning member is less than that of the cleaning liquid, and the density of the second auxiliary cleaning member is equal to or greater than that of the cleaning liquid. The auxiliary cleaning members are geometric body components.

[0007] Further, the auxiliary cleaning member includes:

[0008] A main body, the interior of the main body has a cavity, and the main body also has an opening formed by concave inward from the surface of the main body towards the cavity;

[0009] A weight component, the weight component is arranged in the opening; wherein, the cavity and / or the weight component are used to adjust the density of the auxiliary cleaning member.

[0010] Further, the auxiliary cleaning member further includes a plug arranged in the opening and outside the weight component, and the plug is hermetically connected to the main body.

[0011] Further, the weight component is a magnetic component, and the cleaning device further includes an electromagnetic induction grasping part arranged above the cleaning tank, and the electromagnetic induction grasping part is used to grasp the auxiliary cleaning member.

[0012] Further, the auxiliary cleaning member includes one or more of an auxiliary cleaning ball or an auxiliary cleaning block.

[0013] Further, the auxiliary cleaning member is a silicon material auxiliary cleaning ball, and the carrier includes a carrier used in the processing of crystalline silicon solar cells.

[0014] Further, the diameter of the auxiliary cleaning member is 1 cm to 10 cm.

[0015] Further, the cleaning liquid is an aqueous cleaning liquid, and the auxiliary cleaning member is a hydrophobic auxiliary cleaning member.

[0016] Further, the carrier includes a carrier having a frame structure or a boat-shaped carrier.

[0017] Further, the carrier includes a quartz boat and a graphite boat.

[0018] Further, the cleaning device further includes an ultrasonic generator for ultrasonically cleaning the carrier.

[0019] Compared with the prior art, the beneficial effects of the embodiments of the present application are as follows:

[0020] The present application provides a cleaning device with an auxiliary cleaning member, which can reduce the amount of cleaning liquid used and the degree of volatilization of the cleaning liquid while ensuring the cleaning effect. The auxiliary cleaning member in the present application includes a first auxiliary cleaning liquid with a density less than that of the cleaning liquid and a second auxiliary cleaning member with a density equal to or greater than that of the cleaning liquid. Placing the auxiliary cleaning member in the cleaning liquid, on the one hand, the first auxiliary cleaning member with a density smaller than that of the cleaning liquid can float on the liquid surface of the cleaning liquid, reducing the contact between the cleaning liquid and the air, reducing the volatilization of the cleaning liquid, and thus reducing the impact of the volatilization of the cleaning liquid on the cleaning effect; on the other hand, the second auxiliary cleaning member with a density greater than or equal to that of the cleaning liquid can suspend or sink into the cleaning liquid, increasing the liquid level of the cleaning liquid in the cleaning tank, so that the cleaning liquid can still immerse the carrier while significantly reducing the amount of cleaning liquid required during cleaning when the overall amount of cleaning liquid used is reduced, effectively cleaning the carrier. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 It is a schematic structural diagram of a cleaning device equipped with a carrier for cleaning;

[0023] Figure 2 It is a schematic structural diagram of the cleaning device provided by an embodiment of the present application;

[0024] Figure 3 It is a schematic structural diagram of the cleaning device (equipped with a carrier to be cleaned) provided by an embodiment of the present application;

[0025] Figure 4 It is a schematic structural diagram of an auxiliary cleaning ball provided by the present utility model.

[0026] Reference numerals:

[0027] 1. Cleaning device; 11. Cleaning tank; 12. Auxiliary cleaning member; 121. Main body; 122. Counterweight member; 123. Plug; 124. Cavity; 2. Carrier; 3. Cleaning liquid. Detailed implementation manners

[0028] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0029] In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are mainly used to better describe the present application and its embodiments, and are not used to limit that the indicated device, element or component must have a specific orientation, or be constructed and operated in a specific orientation.

[0030] Moreover, in addition to being able to represent the orientation or positional relationship, some of the above terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in the present application can be understood according to specific circumstances.

[0031] In addition, the terms "installed", "set", "provided with", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, or there is an internal connection between two devices, elements or components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0032] In addition, terms such as "first", "second", etc. are mainly used to distinguish different devices, components or parts (specific types and structures may be the same or different), and are not used to indicate or imply the relative importance and quantity of the indicated devices, components or parts. Unless otherwise specified, "a plurality of" means two or more.

[0033] The technical solution provided by the present application will be further described below in conjunction with embodiments and drawings.

[0034] A carrier is a type of load-bearing transportation tool that is widely used in various fields. Common carriers include quartz boats, graphite boats, etc. Taking the application of a quartz boat in the diffusion process of solar cell production and manufacturing as an example, after the wet chemical texturing process, the silicon wafers are carried on the quartz boat and enter the diffusion furnace tube for high-temperature diffusion. During diffusion, the diffusion source gas reacts with the silicon wafers, and the reaction residues will adhere to the surface of the quartz boat and gradually deposit. Therefore, the quartz boat needs to be cleaned before it can be used again after multiple uses. As Figure 1 shown, in order to ensure the cleaning effect, a large amount of cleaning liquid is required to immerse the quartz boat during cleaning. Usually, a quartz boat with a frame structure or a boat-shaped structure requires more cleaning liquid for sufficient immersion. After the cleaning liquid is used multiple times and becomes waste liquid, the amount of waste liquid to be treated is also large; in addition, the commonly used cleaning liquid for cleaning the quartz boat is hydrofluoric acid, which has a certain volatility, and its concentration will also decrease during repeated use, thereby affecting the cleaning effect.

[0035] Based on this, as Figure 2 shown, the present application provides a cleaning device 1, including a cleaning tank 11 and a plurality of auxiliary cleaning members 12. Among them, a cleaning liquid 3 is placed in the cleaning tank 11, and the carrier 2 is immersed in the cleaning liquid 3 for cleaning; the auxiliary cleaning members 12 include a first auxiliary cleaning member with a density less than that of the cleaning liquid 3 and a second auxiliary cleaning member with a density equal to or greater than that of the cleaning liquid 3, and the auxiliary cleaning members 12 are geometric body parts.

[0036] It can be understood that when the density of an object is less than the density of a liquid, the buoyancy force on the object is greater than its gravity, and the object will float on the liquid surface; when the density of the object is equal to the density of the liquid, the object will suspend in the liquid; when the density of the object is greater than the density of the liquid, the object will sink to the bottom of the liquid. As Figure 3As shown, in the present application, by providing the auxiliary cleaning member 12, on the one hand, the first auxiliary cleaning member with a density smaller than that of the cleaning liquid 3 can float on the liquid surface of the cleaning liquid 3, reducing the contact between the cleaning liquid 3 and the air, and thus reducing the volatilization of the cleaning liquid 3. On the other hand, the second auxiliary cleaning member with a density greater than or equal to that of the cleaning liquid 3 can be suspended or sink into the cleaning liquid 3, which can increase the liquid level of the cleaning liquid 3 in the cleaning tank 11. When the overall amount of the cleaning liquid 3 is reduced, the cleaning liquid 3 can still immerse the carrier 2, effectively cleaning the carrier 2 while significantly reducing the amount of the cleaning liquid 3 required during cleaning. That is to say, when using the cleaning device 1 in the present application, while ensuring the cleaning effect, it can not only reduce the usage amount of the cleaning liquid 3 but also reduce the volatilization degree of the cleaning liquid 3.

[0037] The cleaning device 1 in the present application does not limit the material and shape of the carrier 2. For example, frame carriers, boat-shaped carriers, etc. Using this cleaning device 1 can achieve the effects of reducing the usage amount of the cleaning liquid 3 and reducing the volatilization of the cleaning liquid 3. Frame carriers and boat-shaped carriers have more space to accommodate the auxiliary cleaning member 12, and more auxiliary cleaning members 12 have an obvious effect in reducing the usage amount of the cleaning liquid 3.

[0038] The auxiliary cleaning member 12 is a geometric body, that is, the auxiliary cleaning member 12 can be of any shape, including columnar bodies, cuboids, spheres, etc. It can be an auxiliary cleaning block, an auxiliary cleaning ball, or a part of an auxiliary cleaning ball and a part of an auxiliary cleaning block. As a preferred implementation manner, the auxiliary cleaning member 12 is an auxiliary cleaning ball. The contact between the auxiliary cleaning ball and the cleaning liquid 3 presents a more uniform spherical surface contact. This contact helps to reduce the friction between the liquid and the object, making it easier for the object to move in the liquid. In addition, the auxiliary cleaning ball has no sharp edges and corners and is not easy to damage the carrier 2 to be cleaned.

[0039] Furthermore, in the present application, the auxiliary cleaning member 12 includes a main body 121 and a weight member 122. Among them, the main body 121 has a cavity 124 inside and an opening formed by concave inward from the surface of the main body 121 towards the cavity 124. The weight member 122 is disposed in the opening. When the density of the material of the main body 121 is less than that of the cleaning liquid, the density of the auxiliary cleaning member can be increased by providing the weight member 122. When the density of the material of the main body 121 is greater than that of the cleaning liquid, the auxiliary cleaning member 12 with a density less than that of the cleaning liquid 3 can be obtained by providing the cavity 124. By adjusting the size of the cavity 124 and the size and material of the weight member 122, the density of the auxiliary cleaning member 12 can be adjusted.

[0040] Even further, after placing the weight member 122 in the opening, a plug 123 is provided outside the weight member 122. The plug 123 and the main body 121 form a sealed structure to prevent the cleaning liquid 3 from entering the auxiliary cleaning member 12 through the opening.

[0041] As an implementation mode, Figure 4 The figure shows a schematic structural diagram of an auxiliary cleaning ball provided by the present utility model. The auxiliary cleaning ball main body 121 has a cavity 124 inside, the weight component is arranged in the opening, and a plug 123 is arranged outside the weight component 122. Both the main body 121 and the plug 123 are made of silicon material. The weight component 122 is placed into the silicon material main body 121, and the silicon material plug 123 can be used for sealing. Because the silicon material has hydrophobicity, it is difficult for the cleaning liquid 3 to enter the auxiliary cleaning part 12 through the silicon material, thereby affecting the density of the auxiliary cleaning part 12. By adjusting the size of the cavity 124 and the size and material of the weight component, the density of the auxiliary cleaning part 12 can be controlled.

[0042] As another implementation mode, the plug 123 and the main body 121 can be connected in a detachable manner. For example, by providing a groove in the main body 121 and a protrusion at the plug 123, a tight and seamless connection between the main body 121 and the plug 123 can be achieved. This implementation mode can more conveniently replace the weight component 122 by removing the plug 123, thereby adjusting the density of the auxiliary cleaning part 12.

[0043] Furthermore, the weight component 122 in the auxiliary cleaning part 12 is a magnetic component. An electromagnetic induction grasping part is arranged above the cleaning tank 11. After being powered on, the electromagnetic induction grasping part generates a strong magnetic field, and thus the auxiliary cleaning part 12 in the cleaning tank 11 can be removed by magnetic adsorption.

[0044] It can be understood that when an electric current passes through a conductor, a magnetic field will be generated around it, that is, the phenomenon of electromagnetic induction. In this application, the material of the electromagnetic induction grasping part is a conductive material. After being powered on, the electromagnetic induction grasping part generates a magnetic field, and the magnetic component is grasped by the electromagnetic induction grasping part under the action of the magnetic field, achieving the purpose of removing the auxiliary cleaning part 12 in the cleaning tank 11. Exemplarily, the electromagnetic induction grasping part in the auxiliary cleaning part 12 can be designed in the form of a gripper with a robotic arm. The gripper form can more stably fix the auxiliary cleaning part 12 and transfer it under the action of the robotic arm; the electromagnetic induction grasping part can also be designed in the form of a suction cup, a gripper, etc. This application does not limit this.

[0045] As a preferred embodiment, the counterweight member 122 may be a soft magnetic member. Soft magnetic materials are a class of magnetic materials with relatively low coercivity and high magnetic permeability. Low coercivity means that its magnetism easily disappears after the external magnetic field is removed, that is, demagnetization is relatively easy; high magnetic permeability means that it can conduct the magnetic field more effectively and exhibits a higher magnetic induction intensity in the magnetic field. This property of soft magnetic materials enables the soft magnetic member to be adsorbed after the electromagnetic induction gripping portion is energized to generate a magnetic field. When the electromagnetic induction gripping portion is de-energized, that is, after the external magnetic field disappears, its magnetism also basically disappears, and thus it will not affect other devices or processes due to the presence of magnetism.

[0046] The material and size of the auxiliary cleaning member 12 can be set according to the specific use scenario. For example, in the production process of crystalline silicon solar cells, as a preferred embodiment, the auxiliary cleaning member 12 is a silicon material auxiliary cleaning ball, and the diameter of the auxiliary cleaning ball is 1 cm to 10 cm. Specifically, the quartz boat is a commonly used carrier in the production of crystalline silicon solar cells. Using the auxiliary cleaning member 12 made of silicon material, the silicon material has corrosion resistance and is difficult to be corroded by the cleaning liquid 3. Even if there are residues of silicon material in the cleaning liquid 3, it will not affect the subsequent process due to the introduction of other impurities; and the auxiliary cleaning ball with a diameter of 1 cm to 10 cm can freely enter and exit the gaps of the common quartz boat frame. When the cleaning liquid 3 vibrates under external force, the movement of the auxiliary cleaning ball can make the cleaning more thorough. Here, the diameter of 1 cm to 10 cm means that the diameter can be any point value within the above range, including but not limited to 1 cm, 3 cm, 6 cm, 7 cm, 10 cm, etc. The volume of the auxiliary cleaning member 12 can be uniform or non-uniform, and the present application does not limit this.

[0047] Further, when the cleaning liquid 3 is an aqueous cleaning liquid, as a preferred embodiment, the auxiliary cleaning member 12 is a hydrophobic auxiliary cleaning member. This is because the hydrophobic auxiliary cleaning member can greatly reduce the isolation contact of the auxiliary cleaning member 12 floating on the surface of the cleaning liquid 3, improving the effect of reducing liquid volatilization. In addition, the aqueous cleaning liquid rarely adheres to the hydrophobic auxiliary cleaning member, facilitating the cleaning of the auxiliary cleaning member 12 after use. For example, in the production of crystalline silicon solar cells, hydrofluoric acid is usually used for cleaning quartz boats. Hydrofluoric acid is an aqueous cleaning liquid. Using a hydrophobic silicon material auxiliary cleaning member can better avoid the volatilization of hydrofluoric acid and is easy to clean after use. It can be understood that after cleaning the carrier 2 with the aqueous cleaning liquid, pure water is usually used for soaking and rinsing to thoroughly clean the carrier 2. For example, in the cleaning of quartz boats in the production of crystalline silicon solar cells, after soaking the quartz boat in hydrofluoric acid, the hydrofluoric acid is drained, and then pure water is injected. After soaking in pure water for a period of time, it is rinsed and dried. Using the cleaning device including the auxiliary cleaning member in the present application can also reduce the usage amount of pure water, and there is less water residue on the surface of the hydrophobic auxiliary cleaning member, facilitating cleaning and drying.

[0048] As a preferred embodiment, the cleaning device 1 in the present application further includes an ultrasonic generator to perform ultrasonic cleaning on the carrier 2 to enhance the cleaning effect. Ultrasonic cleaning is a cleaning method that utilizes the vibration effect and cavitation effect of ultrasonic waves to enhance the cleaning effect. It is widely used in various fields due to its high efficiency, precision, and non-destructiveness. When ultrasonic waves propagate in the cleaning liquid, the cleaning liquid will generate high-frequency vibrations, which will form tiny bubbles in the cleaning liquid. These bubbles will burst instantly, generating strong shock waves to enhance the flushing force. In addition, the ultrasonic vibration can also cause the flow of the cleaning liquid, strengthening the scouring effect on the object surface and further improving the cleaning effect.

[0049] Exemplarily, when the cleaning device 1 in the present application is used to clean a frame-type quartz boat, the quartz boat is placed in the cleaning tank 11, and the cleaning liquid 3 is added. At this time, not too much cleaning liquid 3 needs to be added. The second auxiliary cleaning member with a density greater than or equal to that of the cleaning liquid 3 is placed into the cleaning liquid 3, and the liquid level of the cleaning liquid 3 gradually rises to cover the surface of the quartz boat. Then, the first auxiliary cleaning member with a density equal to that of the cleaning liquid 3 is put into the cleaning liquid 3, and the first auxiliary cleaning member floats on the surface of the cleaning liquid 3, reducing the volatilization caused by the contact between the cleaning liquid 3 and the air. The auxiliary cleaning member 12 is an auxiliary cleaning ball with a diameter ranging from 1 cm to 10 cm. Under the action of ultrasonic waves, the auxiliary cleaning ball will vibrate with the cleaning liquid and move in the cleaning liquid, further enhancing the cleaning effect.

[0050] The above has introduced the cleaning device disclosed in the present application in detail, and expounded on the principle and implementation manner of the present application. The above content is only used to help understand the technical solution and its core idea of the present application. At the same time, for those of ordinary skill in the art, according to the idea of the present application, there will be changes in the specific implementation manner and application scope. In summary, the content of this specification should not be construed as a limitation on the present application.

Claims

1. A cleaning device for cleaning a carrier, characterized in that: The cleaning device comprises a cleaning tank and a plurality of auxiliary cleaning parts, wherein the cleaning tank is used to place the cleaning liquid and the carrier, and the carrier is used to be immersed in the cleaning liquid for cleaning; The auxiliary cleaning part includes a first auxiliary cleaning part and a second auxiliary cleaning part. The density of the first auxiliary cleaning part is less than that of the cleaning liquid, the density of the second auxiliary cleaning part is equal to or greater than that of the cleaning liquid, and the auxiliary cleaning part is a geometric part.

2. The cleaning device according to claim 1, characterized in that: The auxiliary cleaning part comprises: A main body, wherein the interior of the main body has a cavity, and the main body also has an opening formed by being concave from the surface of the main body toward the cavity; A weight component, the weight component is arranged in the opening; wherein, The cavity and / or the weight component are used to adjust the density of the auxiliary cleaning part.

3. The cleaning device according to claim 2, characterized in that: The auxiliary cleaning component also includes a plug disposed at the opening and located outside the counterweight component, and the plug is sealed and connected to the main body.

4. The cleaning device according to claim 2, characterized in that: The counterweight component is a magnetic component, and the cleaning device further comprises an electromagnetic induction grabbing portion disposed above the cleaning tank, and the electromagnetic induction grabbing portion is used to grab the auxiliary cleaning piece.

5. The cleaning device according to claim 1, characterized in that: The auxiliary cleaning parts include one or more of auxiliary cleaning balls and auxiliary cleaning blocks.

6. The cleaning device according to claim 5, characterized in that: The auxiliary cleaning piece is an auxiliary cleaning ball made of silicon, and the carrier includes a carrier used for processing crystalline silicon solar cells.

7. The cleaning device according to claim 6, characterized in that: The diameter of the auxiliary cleaning piece is 1 cm to 10 cm.

8. The cleaning device according to claim 1, characterized in that: The cleaning liquid is an aqueous cleaning liquid, and the auxiliary cleaning component is a hydrophobic auxiliary cleaning component.

9. The cleaning device according to any one of claims 1 to 8, characterized in that: The carrier includes a carrier with a frame structure or a boat-shaped carrier.

10. The cleaning device according to claim 9, characterized in that: The carrier includes a quartz boat and a graphite boat.

11. The cleaning device according to any one of claims 1 to 8, characterized in that: The cleaning device also includes an ultrasonic generator, which is used for ultrasonic cleaning of the carrier.

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