Substrate grinding device

Abstract

The utility model relates to the technical field of substrate grinding, and provides a substrate grinding device, which is used for simultaneously grinding the upper surface and the lower surface of a substrate, and comprises a workbench, the first grinding table is arranged on the workbench; the grinding cloth is arranged on the first grinding table, the grinding cloth is used for grinding the lower surface of the substrate, the grinding cloth is provided with a groove, and the groove is used for discharging grinding fluid and residues; the pressing piece is arranged on the workbench, and the pressing piece is provided with a pressing end; the second grinding table is rotationally arranged on the workbench, the second grinding table is provided with a grinding surface, and the grinding surface is used for grinding the upper surface of the substrate; the pressing end abuts against the top face of the second grinding table, and the pressing piece is used for driving the second grinding table to press the substrate. By means of the technical scheme, the problems that in a grinding machine in the related technology, grinding fluid and grinding residues cannot be discharged in time, and the surface of a substrate is damaged during continuous grinding are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate grinding, and particularly to a substrate grinding device. Background Art

[0002] Substrate Grinding refers to a precision machining process in the fields of semiconductors, optical components, electronic packaging, precision machining, etc., for surface planarization of substrate materials (such as silicon wafers, glass, ceramics, sapphires, etc.). Its main purpose is to remove the unevenness, defects (such as scratches, bumps) and thickness deviations on the substrate surface to obtain a highly flat, smooth and precisely thick surface, providing a high-quality substrate for subsequent microelectronic device manufacturing, optical coating, packaging and other processes.

[0003] After the existing grinding machine grinds for a period of time, since some of the ground waste cannot be discharged in time, this part of the waste often adheres to the substrate, the grinding surface and the grinding cloth, and it is necessary to stop the machine for cleaning. The existing cleaning method usually uses manual cleaning and trimming, which not only wastes time but also cannot be cleaned thoroughly. Summary of the Utility Model

[0004] The utility model provides a substrate grinding device, which solves the problem in the related technology that when grinding the substrate, manual cleaning and correction are required, which is not only time-consuming and laborious but also cannot be cleaned thoroughly.

[0005] The technical solution of the utility model is as follows:

[0006] A substrate grinding device for simultaneously grinding the upper surface and the lower surface of a substrate, comprising:

[0007] A workbench;

[0008] A first grinding table disposed on the workbench;

[0009] A grinding cloth disposed on the first grinding table, the grinding cloth being used for grinding the lower surface of the substrate, the grinding cloth having grooves for discharging grinding fluid and residues;

[0010] A second grinding table rotatably disposed on the workbench, the second grinding table having a grinding surface for grinding the upper surface of the substrate, and a placement area being formed between the grinding cloth and the second grinding table;

[0011] A central shaft rotatably disposed on the workbench, the central shaft passing through the first grinding table and rotating relative to the first grinding table; a through hole is formed in the middle of the second grinding table, and the central shaft slidably passes through the through hole;

[0012] The mounting plate is disc-shaped. There are several such mounting plates, and the several mounting plates are arranged at intervals in a ring centered on the central axis in the placement area. The mounting plate has a placement groove, and the substrate is arranged in the placement groove;

[0013] There are several grinding discs, and the several grinding discs are arranged at intervals in the placement area. The grinding discs are used to grind and trim the grinding surface and the grinding cloth;

[0014] The replacement component is slidably arranged on one side of the workbench. The replacement component is used to take out the mounting plate and put in the grinding disc.

[0015] Preferably, it further includes:

[0016] The work box, and the workbench is arranged on the work box;

[0017] The replacement component includes:

[0018] The sliding seat is slidably arranged on the work box;

[0019] The cross arm is rotatably and slidably arranged on the sliding seat;

[0020] The first material taking part is arranged on the lower surface of the cross arm. The first material taking part is used to take out or put in the grinding disc in the placement area;

[0021] The second material taking part is arranged on the upper surface of the cross arm. The second material taking part is used to take out or put in the mounting plate in the placement area.

[0022] Preferably, it further includes:

[0023] The annular rack is rotatably arranged on the workbench, and the annular rack is coaxially arranged with the first grinding table.

[0024] Preferably, the first material taking part includes:

[0025] The base is arranged on the cross arm

[0026] There are several limiting rods, and the several limiting rods are arranged at intervals in a ring on the base. One end of the limiting rod slidably penetrates through the base,

[0027] The first positioning ring is arranged at the other end of the limiting rod;

[0028] There are several springs, and each limiting rod is sleeved with one spring. One end of the spring abuts against the base, and the other end of the spring abuts against the first positioning ring;

[0029] The positioning rod is arranged on the surface of the first positioning ring away from the limiting rod. There are positioning points on the annular rack, and the positioning points are used to determine the position of the positioning rod;

[0030] There are several clamps, and the several clamps correspond to the several grinding discs one by one. The clamps are used to hold the grinding discs;

[0031] The guiding gear assembly is rotatably arranged in the middle of the base, and the guiding gear assembly meshes with the grinding disc;

[0032] The pushing rod is arranged to move up and down between two adjacent clamps. After the first positioning ring is aligned with the annular rack, the pushing rod is used to push the grinding disc into the placement area.

[0033] Preferably, the second material taking part includes:

[0034] The fixing rod has one end arranged on the cross arm;

[0035] The second positioning ring is arranged at the other end of the fixing rod;

[0036] The suction cup is arranged in the second positioning ring. After the second positioning ring is aligned with the annular rack, the suction cup is used to adsorb the mounting plate and the substrate.

[0037] Preferably, a placement area is formed between the inner wall of the annular rack and the outer wall of the central shaft. The central shaft has a first tooth groove, and the outer circumference of the mounting plate has a second tooth groove. The second tooth groove meshes with the first tooth groove and the annular rack respectively. After the central shaft drives the mounting plate to rotate, the mounting plate drives the annular rack to rotate; the shape of the placement groove is adapted to the shape of the substrate.

[0038] Preferably, the second grinding table includes:

[0039] The table body, the through hole is arranged in the middle of the table body. The table body has several material discharge ports, and the several material discharge ports are all communicated with the placement area. The several material discharge ports are annularly and spaced apart around the central shaft on the table body;

[0040] The bracket is arranged on the table body;

[0041] The material tray is arranged on the side of the bracket away from the table body. The material tray has a storage tank, and the storage tank has several outlets;

[0042] There are several feeding pipes. One end of each feeding pipe is communicated with an outlet, and the other end is communicated with the material discharge port;

[0043] The discharge head is arranged on the material tray, and a material box is externally connected to the discharge head. The discharge head is used to convey the grinding fluid in the material box into the storage tank.

[0044] Preferably, it further includes:

[0045] A pressing member is arranged on the workbench, and the pressing member has a pressing end;

[0046] The pressing member includes:

[0047] A support column is rotatably arranged on one side of the workbench;

[0048] A cross beam is arranged on the support column;

[0049] A hydraulic rod is arranged on the cross beam. The pressing end is located on the hydraulic rod, and the pressing end abuts against the middle of the material tray. The hydraulic rod is used to push the table body downward.

[0050] Preferably, the outer wall of the grinding disc has third tooth grooves in the circumferential direction. The third tooth grooves are respectively engaged with the first tooth grooves and the annular rack. The guiding gear assembly is engaged with the third tooth grooves. The front surface of the grinding disc has a plurality of grinding wheels, and the back surface of the grinding disc has a liquid discharge groove. Adjacent grinding discs are arranged at intervals, one positive and one negative, in the placement area. After the central shaft rotates, it drives the grinding disc to drive the annular rack to rotate.

[0051] Preferably, the working box has a storage space inside; there is a gap between the central shaft and the workbench, and the gap is communicated with the storage space. The gap is used to allow the grinding fluid to flow into the storage space.

[0052] The working principle and beneficial effects of the present invention are as follows:

[0053] During the short-term shutdown in the grinding process of the replacement component in the present invention, the mounting plate and the substrate are taken out of the placement area all at once, and then the replacement component will put the entire grinding disc into the placement area for grinding. There is no need for manual placement of the mounting plate and the grinding disc throughout the process, effectively reducing the replacement time; moreover, the grinding device can not only grind the upper surface and the lower surface of the substrate efficiently at the same time, but also the grinding cloth with grid grooves can significantly improve the discharge efficiency of the grinding fluid and residues, effectively avoiding damage to the surface of the substrate and improving the grinding quality and the finished product rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] The above characteristics, technical features, advantages and their implementation manners of the present invention will be further described below in a clear and understandable manner in combination with the drawings of the preferred embodiments.

[0055] Figure 1Structural schematic diagram of the grinding device of the present utility model;

[0056] Figure 2 Structural schematic diagram of the present utility model with the first material taking part and the second material taking part added;

[0057] Figure 3 Structural schematic diagram of the workbench, the first grinding table and the second grinding table of the present utility model;

[0058] Figure 4 is Figure 1 Partial enlarged view at A in;

[0059] Figure 5 Structural schematic diagram of the first grinding table and the grinding cloth of the present utility model;

[0060] Figure 6 Structural schematic diagram of the workbench of the present utility model;

[0061] Figure 7 Schematic diagram of the positional relationship between the grinding disc and the placement area of the present utility model;

[0062] Figure 8 Structural schematic diagram of the reverse side of the grinding disc of the present utility model;

[0063] Figure 9 Structural schematic diagram of the front side of the grinding disc of the present utility model;

[0064] Figure 10 Structural schematic diagram of the mounting plate of the present utility model;

[0065] Figure 11 Structural schematic diagram of the second grinding table of the present utility model;

[0066] Figure 12 Structural schematic diagram of the bottom surface of the second grinding table of the present utility model;

[0067] Figure 13 Structural schematic diagram when the grinding device of the present utility model is working.

[0068] In the figure: 1, workbench; 2, first grinding table; 3, central shaft; 301, first tooth groove; 4, gap; 5, positioning point; 6, annular rack; 7, work box; 8, pressing member; 801, support column; 802, cross beam; 803, hydraulic rod; 9, mounting plate; 901, second tooth groove; 902, placement groove; 10, placement area; 11, second grinding table; 1101, table body; 1102, support; 1103, material tray; 1104, outlet; 1105, discharge head; 1106, storage tank; 1107, blanking port; 1108, material conveying pipe; 1109, fixture; 1110, through hole; 12, grinding cloth; 1201, groove; 13, grinding disc; 1301, third tooth groove; 1302, liquid drainage groove; 1303, grinding wheel; 14, replacement component; 141, first material taking member; 1401, cross arm; 1402, sliding seat; 1411, fixed rod; 1412, second positioning ring; 1413, suction cup; 142, second material taking member; 1421, base; 1422, limiting rod; 1423, spring; 1424, first positioning ring; 1425, positioning rod; 1426, clamp; 1427, guiding gear assembly; 1428, material pushing rod. Detailed implementation manners

[0069] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the specific implementation manners of the present invention will be described below with reference to the accompanying drawings. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts, and other implementation manners can also be obtained.

[0070] To make the drawings concise, only the parts related to the utility model are schematically shown in each drawing, and they do not represent the actual structure of the product. In addition, to make the drawings concise and easy to understand, in some drawings, parts with the same structure or function are only schematically shown for one of them, or only one of them is marked. In this article, "one" not only means "only this one", but also means "more than one" situation, and "several" includes "two" and "more than two".

[0071] In this article, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0072] In addition, in the description of the present application, terms such as "first" and "second" are only used for distinguishing descriptions and cannot be construed as indicating or implying relative importance.

[0073] Referring to Figures 1 to 13 , an embodiment of the present utility model provides a substrate grinding device for simultaneously grinding the upper and lower surfaces of a substrate, including: a workbench 1; a first grinding table 2 disposed on the workbench 1; a grinding cloth 12 disposed on the first grinding table 2, the grinding cloth 12 being used for grinding the lower surface of the substrate, the grinding cloth 12 having grooves 1201 for discharging grinding fluid and residues; a second grinding table 11 rotatably disposed on the workbench 1, the second grinding table 11 having a grinding surface for grinding the upper surface of the substrate, a placement area 10 being formed between the grinding cloth 12 and the second grinding table 11; a central shaft 3 rotatably disposed on the workbench 1, the central shaft 3 passing through the first grinding table 2 and rotating relative to the first grinding table 2; a through hole 1110 being provided in the middle of the second grinding table 11, the central shaft 3 sliding through the through hole 1110; a mounting plate 9 being in a disc shape, there being a plurality of mounting plates 9, the plurality of mounting plates 9 being annularly spaced in the placement area 10 with the central shaft 3 as the center, the mounting plate 9 having a placement groove 902, the substrate being disposed in the placement groove 902; a plurality of grinding discs 13 being spaced in the placement area 10, the grinding discs 13 being used for grinding and trimming the grinding surface and the grinding cloth 12; a replacement assembly 14 slidably disposed on one side of the workbench 1, the replacement assembly 14 being used for taking out the mounting plate 9 and putting in the grinding disc 13.

[0074] In the above solution, it is used to solve the problem that it is difficult to effectively discharge grinding fluid and grinding residues in the prior art, thereby improving the grinding accuracy and protecting the surface of the substrate from damage. The workbench 1 is frustum-shaped and is used to support the first grinding table 2. The surface of the workbench 1 is flat, which can ensure that the first grinding table 2 is placed flat on the workbench 1. The first grinding table 2 is fixedly installed on the workbench 1, and a grinding cloth 12 is pasted and laid on the first grinding table 2. The grinding cloth 12 is made of wear-resistant and water-absorbent synthetic fiber material, and evenly distributed grid-shaped grooves 1201 are provided on the surface of the grinding cloth 12 in contact with the substrate. The depth of these grooves 1201 is about 0.3 - 0.5 mm, and the width is about 1 - 2 mm, forming an effective guiding path for liquid and solid substances, facilitating the rapid discharge of grinding fluid and grinding residues, and reducing residues. The second grinding table 11 is installed on the central shaft 3 and can rotate counterclockwise or clockwise at a preset speed. The second grinding table 11 also has grid-shaped grooves 1201, which also facilitate the rapid discharge of grinding fluid and grinding residues to achieve efficient grinding. The entire grinding device is equipped with an advanced PLC control system, and parameters such as grinding time, speed, and pressure can be programmed and set to achieve automated operation. At the same time, sensors are installed to monitor the grinding liquid level, temperature, and filter screen clogging situation to ensure the safety and efficiency of the grinding process; when the replacement component 14 causes a short-term shutdown during the grinding process, the mounting plate 9 and the substrate are taken out and placed in the placement area 10 at the same time. Then, the replacement component 14 will put the grinding disc 13 into the placement area 10 for grinding. There is no need for manual placement of the mounting plate 9 and the grinding disc 13 throughout the process, effectively reducing the replacement time; the substrate grinding device of this embodiment can not only grind the upper and lower surfaces of the substrate efficiently, but also the grinding cloth 12 with grid grooves 1201 can significantly improve the discharge efficiency of grinding fluid and residues, effectively avoiding damage to the substrate surface and improving the grinding quality and yield.

[0075] Further, it further includes: a work box 7, and the workbench 1 is arranged on the work box 7; the replacement component 14 includes: a sliding seat 1402, which is slidably arranged on the work box 7; a cross arm 1401, which is rotatably and slidably arranged on the sliding seat 1402; a first material taking member 141, which is arranged on the lower surface of the cross arm 1401, and the first material taking member 141 is used to take out or put the grinding disc 13 into the placement area 10; a second material taking member 142, which is arranged on the upper surface of the cross arm 1401, and the second material taking member 142 is used to take out or put the mounting plate 9 into the placement area 10.

[0076] In the above solution, the sliding seat 1402 can slide freely on the track of the working box 7. The cross arm 1401 is installed on the sliding seat 1402 and can slide vertically along the sliding seat 1402 and also rotate around its own axis. After the cross arm 1401 moves, it can cover the entire working area. A first picking member 141 is installed on the lower surface of the cross arm 1401. The first picking member 141 is used to pick up or place the grinding disc 13 and has an accurate grasping and releasing mechanism to ensure that the picking and placing are completed without damaging the grinding disc 13. At the same time, a second picking member 142 is assembled on the upper surface of the cross arm 1401. The function of the second picking member 142 is for the automatic picking and placing of the mounting plate 9. After the operator or the control system issues an instruction, the sliding seat 1402 first slides along the track to the target position. Subsequently, the cross arm 1401 rotates to an appropriate angle as needed, and the first picking member 141 or the second picking member 142 is accurately positioned above the corresponding annular rack 6. Through devices such as the built-in fixture 1426 or the suction cup 1413, the target object is smoothly picked up or placed. This automated process significantly shortens the material change time, reduces the manual labor intensity, and improves the overall operation efficiency. Moreover, even during the grinding process, the grinding can be temporarily stopped, and the grinding cloth 12 and the second grinding disc can be ground. To ensure operation safety, sensors and limit devices are equipped for the movement track of the cross arm 1401 and the actions of the picking members to prevent collisions or exceeding the predetermined range.

[0077] Further, it further includes: an annular rack 6, rotatably arranged on the workbench 1, and the annular rack 6 is coaxially arranged with the first grinding table 2; a central shaft 3, rotatably arranged on the workbench 1, the central shaft 3 penetrates through the first grinding table 2 and rotates relative to the first grinding table 2; a through hole 1110 is formed in the middle of the second grinding table 11, the central shaft 3 penetrates through the through hole 1110, and after the pressing member 8 pushes the second grinding table 11, the second grinding table 11 slides along the central shaft 3.

[0078] In the above solution, the central shaft 3 is rotatably arranged at the center of the workbench 1. The central shaft 3 can penetrate through the middle parts of the first workbench 1 and the second workbench 1, and serves as the guiding shaft for the sliding of the second grinding table 11 and the power output shaft for the rotation of the second grinding table 11. The central shaft 3 is driven to rotate by a motor, and the motor can be placed on one side of the workbench 1 or inside the workbench 1. The central shaft 3 penetrates through the first grinding table 2 and rotates independently relative to the first grinding table 2. The central shaft 3 is the power source of the overall grinding device. A through hole 1110 is provided in the middle of the second grinding table 11 to facilitate the penetration of the central shaft 3 through the second grinding strip. When the pressing member 8 applies a downward force, the second grinding table 11 slides downward along the axis of the central shaft 3, realizing the extrusion of the substrate during the grinding process, ensuring that the upper surface receives uniform and sufficient pressure during the grinding process, and improving the grinding effect of the substrate. The grinding cloth 12 is directly and smoothly laid on the upper surface of the overall first grinding table 2 by bonding, so as to grind the lower surface of the substrate, realizing the simultaneous grinding of the upper surface and the lower surface of the substrate. This can not only improve the grinding speed, but also the grooves 1201 on the grinding cloth 12 and the second grinding table 11 can improve the liquid drainage and slag discharge effects, and also improve the grinding precision of the device. It should be noted that the residue can quickly flow away from the grooves 1201 under the drive of the grinding fluid, reducing the residue retention time, and thus improving the grinding precision.

[0079] Further, the first material taking member 141 includes: a base 1421, arranged on the cross arm 1401; a plurality of limiting rods 1422, which are annularly and spacedly arranged on the base 1421. One end of each limiting rod 1422 is slidably penetrated through the base 1421; a first positioning ring 1424, arranged at the other end of the limiting rod 1422; a plurality of springs 1423, with one spring 1423 sleeved on each limiting rod 1422. One end of the spring 1423 abuts against the base 1421, and the other end of the spring 1423 abuts against the first positioning ring 1424; a positioning rod 1425, arranged on the surface of the first positioning ring 1424 away from the limiting rod 1422. There are positioning points 5 on the annular rack 6, and the positioning points 5 are used to determine the position of the positioning rod 1425; a plurality of clamps 1426, corresponding to the plurality of grinding discs 13 one by one, and the clamps 1426 are used to clamp the grinding discs 13; a guiding gear assembly 1427, rotatably arranged in the middle of the base 1421, and the guiding gear assembly 1427 meshes with the grinding discs 13; a pushing rod 1428, arranged to move up and down between two adjacent clamps 1426. After the first positioning ring 1424 is aligned with the annular rack 6, the pushing rod 1428 is used to push the grinding disc 13 into the placement area 10.

[0080] In the above solution, the base 1421 is installed on the cross arm 1401. A number of limiting rods 1422 are evenly distributed around the base 1421. These limiting rods 1422 are connected to the base 1421, and the base 1421 has a sliding through hole, enabling the limiting rods 1422 to move along the axial direction. A spring 1423 is sleeved on each limiting rod 1422. One end of the spring 1423 is fixed to the base 1421, and the other end is connected to the first positioning ring 1424 at the distal end of the limiting rod 1422. The function of the spring 1423 is to provide the necessary elastic force to quickly reset after the first positioning ring 1424 disengages from the annular rack 6. A positioning rod 1425 is provided on the positioning ring, and there are corresponding positioning points 5 on the annular rack 6. When the first material taking part 141 moves to a specific position, the alignment of the positioning rod 1425 and the positioning point 5 ensures the precise positioning of the material taking part for subsequent picking and placing actions. A number of jigs 1426 correspond one-to-one with the limiting rods 1422. Each jig 1426 is used to firmly clamp the middle part of the grinding disc 13 to ensure that it will not fall off or be damaged during handling. A set of guiding gear assemblies 1427 is installed in the middle of the base 1421. The guiding gear assembly 1427 includes a lifting platform installed on the base 1421; a motor arranged on the piston end of the lifting platform; and a gear arranged on the motor. The motor is used to drive the gear to rotate. The guiding gear assembly 1427 meshes with the third tooth groove 1301 on the grinding disc 13. When the guiding gear assembly 1427 rotates, it can drive the rotation of the grinding disc 13 so that the grinding disc 13 can quickly align with the annular rack 6 and the first tooth groove 301, facilitating the placement of the grinding disc 13 into the placement area 10. A lifting push rod 1428 is arranged between two adjacent jigs 1426. When the first positioning ring 1424 aligns with the positioning point 5 on the annular rack 6 to confirm the correct position, the push rod 1428 will automatically rise to push the grinding disc 13 accurately into the placement area 10. Automated picking and placing process: At the start of the operation, the cross arm 1401 moves to the specified position of the grinding disc 13 according to the control system instructions. The positioning rod 1425 engages with the positioning point 5 of the annular rack 6, and the cross arm 1401 moves down until the grinding wheel 1303 abuts against the upper surface of the annular rack 6 or the first tooth groove 301 of the central shaft 3. The clamping force of the jig 1426 is initially reduced. The round hole in the middle of the grinding wheel 1303 will slide relative to the jig 1426, but the jig 1426 still has the function of limiting the grinding wheel 1303. Then the guiding gear assembly 1427 rotates slowly. Driven by the guiding gear assembly 1427, the grinding disc 13 can rotate relative to the jig 1426 but will not slip out of the jig 1426. At this time, the push rod 1428 acts and presses down the grinding disc 13 at the same time. When the third tooth groove 1301 on the grinding disc 13 aligns with the annular rack 6 and the first tooth groove 301, the grinding disc 13 will be directly installed in place under the action of the push rod 1428. When it is necessary to take out the grinding disc 13, only the jig 1426 is needed.It should be noted that when removing and installing the grinding disc 13 and the mounting plate 9, the second grinding table 11 is removed, and the hydraulic rod 803 will also move to one side under the action of the support column 801, without affecting the material taking work of the first material taking member 141 and the second material taking member 142.

[0081] Furthermore, the second material taking member 142 includes: a fixing rod 1411, one end of which is arranged on the cross arm 1401; a second positioning ring 1412, arranged at the other end of the fixing rod 1411; a suction cup 1413, arranged within the second positioning ring 1412. After the second positioning ring 1412 is aligned with the annular rack 6, the suction cup 1413 is used to adsorb the mounting plate 9 and the substrate.

[0082] In the above solution, one end of the fixing rod 1411 is fixed to the cross arm 1401, and the other end is provided with a second positioning ring 1412. The suction cup 1413 has a number of adsorption holes. The up and down movement of the fixing rod 1411 is controlled by an electric or pneumatic drive system, ensuring the flexible movement of the second material taking member. The suction cup 1413 located inside the second positioning ring 1412 adopts the negative pressure adsorption principle, and firmly adsorbs the mounting plate 9 or the substrate by quickly establishing a vacuum environment through a number of adsorption holes. The material of the suction cup 1413 is selected as high-performance rubber or silica gel with wear resistance and corrosion resistance, ensuring good adsorption performance after multiple uses, and being gentle and non-damaging to the adsorption surface. When the second positioning ring 1412 is aligned with the positioning point 5 on the annular rack 6, the cross arm 1401 moves downward, and the system detects and confirms the correct position through a sensor, and then activates the adsorption function of the suction cup 1413. This process ensures extremely high precision during the removal and installation of the mounting plate 9 and the substrate, avoiding misalignment or damage that may be caused by manual operation. Handling process: Under the guidance of the control system command, the cross arm 1401 first moves to the position where the mounting plate 9 or the substrate is located, and the fixing rod 1411 adjusts its height accordingly to ensure the precise alignment of the second positioning ring 1412 with the surface of the target object. As the second positioning ring 1412 engages with the positioning point 5 of the annular rack 6, the suction cup 1413 is activated, and firmly adsorbs the mounting plate 9 or the substrate. Then, the mounting plate 9 or the substrate is smoothly lifted and transferred to a designated position, such as the placement area 10 or the storage area. During unloading, the mounting plate 9 or the substrate is gently released by releasing the negative pressure.

[0083] Furthermore, a placement area 10 is formed between the inner wall of the annular rack 6 and the outer wall of the central shaft 3. The central shaft 3 has a first tooth groove 301, and the outer circumference of the mounting plate 9 has a second tooth groove 901. The second tooth groove 901 meshes with the first tooth groove 301 and the annular rack 6 respectively. After the central shaft 3 drives the mounting plate 9 to rotate, the mounting plate 9 drives the annular rack 6 to rotate; the shape of the placement groove 902 is adapted to the shape of the substrate.

[0084] In the above solution, continuous first tooth grooves 301 are machined on the outer surface of the central shaft 3. These tooth grooves are similar to traditional gears, facilitating precise meshing with the second tooth grooves 901 on the mounting plate 9 to transmit rotational power. A number of disc-shaped mounting plates 9 are arranged in a ring at intervals with the central shaft 3 as the center within the placement area 10. Second tooth grooves 901 are evenly distributed on each mounting plate 9. These second tooth grooves 901 mesh with the first tooth grooves 301 of the central shaft 3 and the teeth of the annular rack 6. It should be noted that the cooperative transmission method of the central shaft 3, the mounting plate 9, and the annular rack 6 is the same as that of a planetary gear. Among them, the central shaft 3 is equivalent to the sun gear, a number of mounting plates 9 are equivalent to the planetary gears distributed around the sun gear, and the annular rack 6 is equivalent to the annular rack 6 outside the planetary gears. Specifically, when the central shaft 3 rotates, it drives the mounting plate 9 to rotate around the central shaft 3 while rotating itself through the first tooth grooves 301, which can greatly improve the substrate grinding speed and grinding effect. Furthermore, the second tooth grooves 901 on the mounting plate 9 drive the annular rack 6 to rotate synchronously, achieving efficient power transmission and precise control of the grinding motion. A plurality of placement grooves 902 are circumferentially arranged on the outer side of each mounting plate 9. The shapes of these placement grooves 902 are adapted to the substrates (such as circular silicon wafers) for limiting the substrates to ensure their stability during the grinding process. The substrates are placed in these placement grooves 902, avoiding processing errors caused by sliding or offset during the grinding process. After the grinding operation is started, the rotation of the central shaft 3 is transmitted through the tooth grooves, not only driving the first grinding table 2 and the annular rack 6 on the mounting plate 9 to work together, but also directly carrying and driving the substrates to run synchronously through the mounting plate 9. It not only improves the grinding uniformity and precision, but also realizes the stable clamping and precise position control of the substrates, greatly optimizing the efficiency and quality of double-sided substrate grinding.

[0085] Furthermore, the second grinding table 11 includes: a table body 1101, a through hole 1110 is arranged in the middle of the table body 1101. The table body 1101 has a number of material discharge ports 1107, and a number of material discharge ports 1107 are all communicated with the placement area 10. A number of material discharge ports 1107 are arranged in a ring at intervals with the central shaft 3 as the center on the table body 1101; a bracket 1102, arranged on the table body 1101; a material tray 1103, arranged on the side of the bracket 1102 away from the table body 1101. The material tray 1103 has a storage groove 1106, and the storage groove 1106 has a number of outlets 1104; a number of material conveying pipes 1108, one end of each material conveying pipe 1108 is communicated with an outlet 1104, and the other end is communicated with the material discharge port 1107; a discharge head 1105, arranged on the material tray 1103, and a material box is externally connected to the discharge head 1105. The discharge head 1105 is used to convey the grinding fluid in the material box into the storage groove 1106.

[0086] In the above solution, a number of material discharge ports 1107 are provided on the table body 1101, which are arranged at annular intervals centered on the central axis 3. These material discharge ports 1107 are directly communicated with the placement area 10, ensuring that the grinding fluid can be evenly distributed to the grinding area. A material tray 1103 is provided on the support 1102 above the table body 1101. A storage tank 1106 is provided on the side of the material tray 1103 away from the table body 1101. The storage tank 1106 is designed with a number of outlets 1104, and these outlets 1104 are connected to the material conveying pipes 1108 described below, forming the starting point of the grinding fluid conveying. One end of each material conveying pipe 1108 is connected to an outlet 1104 of the storage tank 1106 of the material tray 1103, and the other end is butted against the material discharge port 1107 on the table body 1101, ensuring that the grinding fluid can be smoothly conveyed from the material tray 1103 to the direct contact point of the grinding operation. A discharge head 1105 is also installed on the material tray 1103, and a material box is externally connected to the discharge head 1105. The function of the material box is to store sufficient grinding fluid, and the discharge head 1105 serves as a control valve to adjust the outflow volume of the grinding fluid according to actual needs, ensuring continuous supply during the grinding process. The discharge head 1105 not only ensures the smooth output of the grinding fluid but also prevents excessive overflow to keep the working environment clean. Moreover, the discharge head 1105 can also push the grinding fluid located in the storage tank 1106 into the outlet 1104 to ensure continuous supply of the grinding fluid. Before the grinding operation starts, an appropriate amount of grinding fluid is pre-filled in the material box. During the operation, the discharge head 1105 is opened, so that the grinding fluid flows into the storage tank 1106 of the material tray 1103 and enters the material conveying pipes 1108 through the respective outlets 1104, and finally is evenly distributed to each material discharge port 1107, and then directly acts on the grinding area through the material discharge port 1107, effectively cooling and lubricating the grinding interface, and at the same time assisting in removing the heat and residues generated by grinding.

[0087] Further, it further includes: a pressing member 8, which is arranged on the workbench 1, and the pressing member 8 has a pressing end; the pressing member 8 includes: a support column 801, which is rotatably arranged on one side of the workbench 1; a cross beam 802, which is arranged on the support column 801; a hydraulic rod 803, which is arranged on the cross beam 802, the pressing end is located on the hydraulic rod 803, the pressing end abuts against the middle of the material tray 1103, and the hydraulic rod 803 is used to push the table body 1101 downward.

[0088] In the above solution, the pressing member 8 is driven pneumatically or hydraulically, and the pressure is adjusted by the control unit to ensure that a uniform and appropriate pressing force is applied to the second grinding table 11. The pressing member 8 itself does not rotate with the second grinding table 11 and does not affect the rotation of the second grinding table 11. The support column 801 is rotatably installed on one side of the workbench 1. Above the support column 801, a cross beam 802 is installed. The cross beam 802 spans across the workbench 1, providing a stable platform for the installation of the hydraulic rod 803, ensuring the stability of the hydraulic rod 803. The hydraulic rod 803 can extend and retract according to the control signal, and its end, i.e., the pressing end, abuts against the material tray 1103. The pressing end is aligned with and gently abuts against the middle of the material tray 1103 to ensure uniform pressure during the grinding process. When the hydraulic rod 803 receives the start command, it extends due to the change in internal oil pressure, pushing the pressing end downward, and then causing the entire second grinding table 11 with the material tray 1103 installed to smoothly move downward along the central axis 3 direction. The pressing force on the substrate is controlled by the controller to ensure the stability of the substrate during the grinding process and avoid unnecessary damage to the substrate caused by excessive pressure. The operation of the entire hydraulic rod 803 is managed by the control system. The operator or the preset program can adjust the extension length and pressing force of the hydraulic rod 803 according to different grinding requirements to achieve precise control of the grinding pressure.

[0089] Further, the outer wall of the grinding disc 13 has third tooth grooves 1301 in the circumferential direction. The third tooth grooves 1301 are respectively engaged with the first tooth groove 301 and the annular rack 6. The front surface of the grinding disc 13 has a number of grinding wheels 1303, and the back surface of the grinding disc 13 has a liquid discharge groove 1302. The adjacent grinding discs 13 are arranged at intervals with one side facing up and the other side facing down in the placement area 10. After the central axis 3 rotates, it drives the grinding disc 13 to drive the annular rack 6 to rotate.

[0090] In the above solution, the outer wall of each grinding disc 13 is equipped with third tooth grooves 1301 in the circumferential direction. These third tooth grooves 1301 are engaged with the first tooth groove 301 on the central axis 3 and the tooth grooves of the annular rack 6. When the central axis 3 rotates, it can not only drive the annular rack 6 to rotate but also drive all the grinding discs 13 to rotate synchronously.

[0091] Further, the working box 7 has a storage space inside; there is a gap 4 between the central axis 3 and the workbench 1. The gap 4 is communicated with the storage space, and the gap 4 is used to allow the grinding fluid to flow into the storage space.

[0092] In the above solution, the workbench 1 of the grinding device is installed above the workbox 7. The workbox 7 not only provides a stable support platform for the grinding device, but also has a built-in storage space dedicated to collecting and storing grinding fluid. A certain gap 4 is left between the central shaft 3 and the workbench 1, which not only takes into account the operating freedom of each component, but more importantly, this gap 4 is directly connected to the storage space inside the workbox 7. During the grinding process, the grinding fluid discharged through the grinding cloth 12 and the drain groove 1302 can smoothly flow through this gap 4 into the storage space. A grinding fluid circulation pump and a filtering device can be installed inside the storage space. Once a certain amount of grinding fluid accumulates in the storage space, the circulation pump will automatically start and pump the liquid back to the front end of the grinding process, such as the nozzle, for reuse. The filtering device is responsible for removing solid residues in the grinding fluid, ensuring the cleanliness of the recycled grinding fluid, extending its service life, and reducing environmental pollution and costs.

[0093] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A substrate grinding device for grinding the upper surface and the lower surface of a substrate simultaneously, characterized in that: include: Workbench (1); A first grinding table (2) is arranged on the workbench (1); A grinding cloth (12) is arranged on the first grinding table (2), the grinding cloth (12) is used to grind the lower surface of the substrate, the grinding cloth (12) has a groove (1201), and the groove (1201) is used to discharge grinding fluid and residue; a second grinding table (11) rotatably disposed on the workbench (1), the second grinding table (11) having a grinding surface, the grinding surface being used to grind the upper surface of the substrate, and a placement area (10) being formed between the grinding cloth (12) and the second grinding table (11); A central shaft (3) is rotatably disposed on the workbench (1), the central shaft (3) passes through the first grinding table (2) and rotates relative to the first grinding table (2); a through hole (1110) is provided in the middle of the second grinding table (11), and the central shaft (3) slides through the through hole (1110); The mounting plate (9) is in the shape of a disk, and there are a plurality of the mounting plates (9). The plurality of mounting plates (9) are arranged in a circular manner and spaced apart in the placement area (10) with the central axis (3) as the center. The mounting plate (9) has a placement groove (902), and the substrate is arranged in the placement groove (902); A plurality of grinding discs (13), wherein the plurality of grinding discs (13) are arranged at intervals in the placement area (10), and the grinding discs (13) are used to grind and trim the grinding surface and the grinding cloth; A replacement component (14) is slidably arranged on one side of the workbench (1), and the replacement component (14) is used to take out the mounting plate (9) and put in the grinding disc (13).

2. A substrate grinding device according to claim 1, characterized in that: Also includes: A work box (7), wherein the workbench (1) is arranged on the work box (7); The replacement assembly (14) comprises: A sliding seat (1402) is slidably disposed on the working box (7); A horizontal arm (1401) is rotatably and slidably disposed on the sliding seat (1402); A first material taking member (141) is arranged on the lower surface of the cross arm (1401), and the first material taking member (141) is used to take out the grinding disc (13) or put it into the placement area (10); The second material taking member (142) is arranged on the upper surface of the cross arm (1401), and the second material taking member (142) is used to take out or put the installation plate (9) into the placement area (10).

3. A substrate grinding device according to claim 2, characterized in that: Also includes: An annular rack (6) is rotatably disposed on the workbench (1), and the annular rack (6) is coaxially arranged with the first grinding table (2).

4. A substrate grinding device according to claim 3, characterized in that: The first material taking member (141) comprises: A base (1421) is disposed on the cross arm (1401) There are a plurality of limiting rods (1422), which are arranged in a ring-shaped manner and spaced apart on the base (1421). One end of the limiting rod (1422) is slidably penetrated and disposed on the base (1421). A first positioning ring (1424) is arranged on the other end of the limiting rod (1422); There are a plurality of springs (1423), each of the limiting rods (1422) is provided with a spring (1423), one end of the spring (1423) abuts against the base (1421), and the other end of the spring (1423) abuts against the first positioning ring (1424); A positioning rod (1425) is arranged on a surface of the first positioning ring (1424) away from the limiting rod (1422), and a positioning point (5) is provided on the annular rack (6), and the positioning point (5) is used to determine the position of the positioning rod (1425); A plurality of clamps (1426), wherein the plurality of clamps (1426) correspond one to one with the plurality of grinding discs (13), and the clamps (1426) are used to clamp the grinding discs (13); A guide gear assembly (1427) is rotatably disposed in the middle of the base (1421), and the guide gear assembly (1427) is meshed with the grinding disc (13); A push rod (1428) is lifted and lowered between two adjacent clamps (1426). After the first positioning ring (1424) is aligned with the annular rack (6), the push rod (1428) is used to push the grinding disc (13) into the placement area (10).

5. A substrate grinding device according to claim 3, characterized in that: The second material taking member (142) comprises: A fixing rod (1411), one end of which is arranged on the cross arm (1401); A second positioning ring (1412) is arranged on the other end of the fixing rod (1411); A suction cup (1413) is arranged in the second positioning ring (1412); after the second positioning ring (1412) is aligned with the annular rack (6), the suction cup (1413) is used to absorb the mounting plate (9) and the substrate.

6. A substrate grinding device according to claim 4, characterized in that: A placement area (10) is formed between the inner wall of the annular rack (6) and the outer wall of the central shaft (3); the central shaft (3) has a first tooth groove (301); the outer circumferential side of the mounting plate (9) has a second tooth groove (901); the second tooth groove (901) is respectively engaged with the first tooth groove (301) and the annular rack (6); after the central shaft (3) drives the mounting plate (9) to rotate, the mounting plate (9) drives the annular rack (6) to rotate; the shape of the placement groove (902) is adapted to the shape of the substrate.

7. A substrate grinding device according to claim 1, characterized in that: The second grinding station (11) comprises: A platform (1101), wherein the through hole (1110) is arranged in the middle of the platform (1101), the platform (1101) has a plurality of material discharge ports (1107), the plurality of material discharge ports (1107) are all connected to the placement area (10), and the plurality of material discharge ports (1107) are arranged on the platform (1101) in a circular manner with the central axis (3) as the center. A support (1102) is disposed on the platform (1101); A material tray (1103) is arranged on a side of the support (1102) away from the platform (1101), the material tray (1103) has a material storage trough (1106), and the material storage trough (1106) has a plurality of outlets (1104); There are a plurality of material delivery pipes (1108), one end of each of the material delivery pipes (1108) is connected to one of the outlets (1104), and the other end is connected to the material discharge port (1107); A discharge head (1105) is disposed on the material tray (1103), and the discharge head (1105) is externally connected to a material box. The discharge head (1105) is used to transport the grinding fluid in the material box to the material storage tank (1106).

8. A substrate grinding device according to claim 7, characterized in that: Also includes: A pressing piece (8) is arranged on the workbench (1), and the pressing piece (8) has a pressing end; The pressing member (8) comprises: A support column (801) is rotatably disposed on one side of the workbench (1); A crossbeam (802) is arranged on the support column (801); The hydraulic rod (803) is arranged on the cross beam (802), the pressing end is located on the hydraulic rod (803), the pressing end abuts against the middle of the material tray (1103), and the hydraulic rod (803) is used to push the platform (1101) downward.

9. A substrate grinding device according to claim 6, characterized in that: The outer wall of the grinding disc (13) has a third tooth groove (1301) in the circumferential direction, and the third tooth groove (1301) is respectively meshed with the first tooth groove (301) and the annular rack (6), and the guide gear assembly (1427) is meshed with the third tooth groove (1301). The front side of the grinding disc (13) has a plurality of grinding wheels (1303), and the back side of the grinding disc (13) has a drainage groove (1302). Adjacent grinding discs (13) are arranged in the placement area (10) in a positive and negative order. When the central shaft (3) rotates, the grinding disc (13) is driven to drive the annular rack (6) to rotate.

10. A substrate grinding device according to claim 2, characterized in that: The working box (7) has a storage space inside; there is a gap (4) between the central axis (3) and the working table (1), the gap (4) is connected to the storage space, and the gap (4) is used to allow the grinding fluid to flow into the storage space.

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