Clamp

Abstract

The utility model relates to a clamp. The clamp comprises a clamping plate assembly; cleaning cloth and a transmission assembly. Wherein the clamping plate assembly comprises a bottom plate, a first top plate and a second top plate, and the first top plate and the second top plate are connected to the bottom plate and can rotate relative to the bottom plate, so that the clamping plate assembly is switched between an unfolded state and a folded state; wherein the bottom plate is provided with a plurality of bus bars 1011 which are arranged in a communicating manner and a plurality of through holes which are communicated with the bus bars 1011. The cleaning cloth is arranged on the clamping plate assembly. The conveying assembly comprises a conveying pipeline and a plurality of valves arranged on the conveying pipeline; wherein the transmission pipeline is communicated with at least one bus bar. The cleaning cloth is arranged on the clamping plate assembly, so that the problems that dust in the hot plate is increased and the working time is prolonged due to the fact that the cleaning cloth 20 repeatedly enters and exits from the hot plate to add alcohol when the hot plate is cleaned are solved, and the efficiency and the quality of the photoetching process of semiconductor products are improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and particularly to a fixture. Background Art

[0002] In the lithography process of semiconductor products, it is necessary to bake the wafer on a hot plate to form it. During the production process, a robotic arm is required to place the wafer on the hot plate. The movement of the robotic arm and the dust particles carried by the wafer itself will also be brought into the hot plate, triggering the Fault Detection and Classification (FDC) system to issue an alarm. If not handled in time, it will even affect the product quality. In actual operation, the narrow space of the hot plate cavity limits the cleaning operation, and a fixture needs to be used to hold a cleaning cloth soaked with alcohol for cleaning. However, the cleaning cloth needs to repeatedly enter and exit the hot plate to add alcohol, resulting in an increase in dust in the hot plate and an increase in the operation time. Summary of the Utility Model

[0003] The purpose of this application is to provide a fixture, which solves the problems of increased dust in the hot plate and extended operation time caused by the need for the cleaning cloth to repeatedly enter and exit the hot plate to add alcohol when cleaning the hot plate. To achieve the purpose of this application, the following technical solutions are provided:

[0004] This application provides a fixture, including:

[0005] A clamping plate assembly, including a bottom plate, a first top plate, and a second top plate. The first top plate and the second top plate are connected to the bottom plate and can rotate relative to the bottom plate to switch the clamping plate assembly between an unfolded state and a folded state. Among them, a plurality of communicating busbars and a plurality of through holes communicating with the busbars are provided on the bottom plate;

[0006] A cleaning cloth, arranged on the clamping plate assembly;

[0007] A transmission assembly, including a transmission pipeline and a plurality of valves arranged on the transmission pipeline. Among them, the transmission pipeline communicates with at least one of the busbars.

[0008] The fixture of the present application includes a clamping plate assembly, a cleaning cloth, and a transmission assembly. The clamping plate assembly includes a bottom plate, a first top plate, and a second top plate. The first top plate and the second top plate are connected to the bottom plate and can rotate relative to the bottom plate to switch the clamping plate assembly between an unfolded state and a folded state. Wherein, a plurality of communicating busbars and a plurality of through holes communicating with the busbars are formed on the bottom plate. By arranging the cleaning cloth on the clamping plate assembly in the unfolded state and then placing the clamping plate assembly in the folded state, the cleaning cloth wraps the clamping plate assembly. The transmission assembly includes a transmission pipe and a plurality of valves arranged on the transmission pipe. Wherein, the transmission pipe is communicated with at least one busbar, and alcohol flows into the cleaning cloth through the busbar through the transmission pipe of the transmission assembly to wet the cleaning cloth and wipe the inside of the hot plate, solving the problem that the cleaning cloth repeatedly enters and exits the hot plate to add alcohol during cleaning of the hot plate, resulting in an increase in dust inside the hot plate and an extension of the operation time, and improving the efficiency and quality of the lithography process of semiconductor products.

[0009] In one embodiment, the bottom plate includes a first end portion and a second end portion arranged opposite to each other. The first top plate is connected to the first end portion of the bottom plate, and the second top plate is connected to the second end portion of the bottom plate. Wherein,

[0010] In the unfolded state, the first top plate, the bottom plate, and the second top plate are unfolded on the same plane.

[0011] In the folded state, the first top plate and the second top plate are stacked on the bottom plate.

[0012] In one embodiment, in the folded state, the cleaning cloth wraps the clamping plate assembly.

[0013] In one embodiment, the fixture further includes a first elastic member and a second elastic member. The first top plate is connected to the first end portion of the bottom plate through the first elastic member, and the second top plate is connected to the second end portion of the bottom plate through the second elastic member.

[0014] In one embodiment, the transmission assembly further includes a transmission rod. The transmission pipe is built in the transmission rod, and an opening is formed in the transmission rod. The transmission pipe is communicated with the opening.

[0015] In one embodiment, the opening is arranged at an end of the transmission rod away from the clamping plate assembly.

[0016] In one embodiment, the plurality of valves include:

[0017] A filling valve arranged at a position of the transmission pipe close to the opening;

[0018] A pipeline valve is arranged at a position on the transmission pipeline close to the clamping plate assembly;

[0019] A pipeline valve switch is arranged between the filling valve and the pipeline valve and close to the filling valve.

[0020] In one embodiment, the transmission pipeline includes a main pipeline and a branch pipeline. The main pipeline is parallel to the extending direction of the transmission rod, and the branch pipeline is communicated with the main pipeline and is arranged to be communicated with the opening.

[0021] In one embodiment, the plurality of bus bars include a first bus bar extending in a first direction and a plurality of second bus bars extending in a second direction. Among them, the first bus bar is communicated with the transmission pipeline.

[0022] In one embodiment, the bottom plate, the first top plate and the second top plate are respectively rectangular plates.

[0023] The fixture of the present application has the following unexpected effects:

[0024] The fixture of the present application includes a clamping plate assembly, a cleaning cloth and a transmission assembly. The clamping plate assembly includes a bottom plate, a first top plate and a second top plate. The first top plate and the second top plate are connected to the bottom plate and can rotate relative to the bottom plate so that the clamping plate assembly can be switched between an unfolded state and a folded state. Among them, a plurality of communicated bus bars and a plurality of through holes communicated with the bus bars are opened on the bottom plate; by arranging the cleaning cloth on the clamping plate assembly in the unfolded state of the clamping plate assembly and then placing the clamping plate assembly in the folded state, the cleaning cloth wraps the clamping plate assembly; the transmission assembly includes a transmission pipeline and a plurality of valves arranged on the transmission pipeline; among them, the transmission pipeline is communicated with at least one bus bar, and then alcohol flows into the cleaning cloth through the bus bar through the transmission pipeline of the transmission assembly to wet the cleaning cloth and wipe the inside of the hot plate, solving the problem that the cleaning cloth repeatedly enters and exits the hot plate to add alcohol when cleaning the hot plate, resulting in an increase in dust in the hot plate and an extension of the operation time, and improving the efficiency and quality of the lithography process of semiconductor products. Description of the Drawings

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present disclosure. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 It is a top view of a fixture provided in an embodiment;

[0027] Figure 2It is a top view of the folded state of the clamping plate assembly in a fixture provided in an embodiment;

[0028] Figure 3 It is a top view of a fixture without a cleaning cloth provided in an embodiment;

[0029] Figure 4 It is a front view of the folded state of the clamping plate assembly in a fixture provided in an embodiment;

[0030] Figure 5 It is a bottom view of the folded state of the clamping plate assembly in a fixture provided in an embodiment;

[0031] Figure 6 It is a schematic cross-sectional structure diagram of the transmission component 30 in a fixture provided in an embodiment.

[0032] Explanation of reference numerals

[0033] 10. Clamping plate assembly; 101. Bottom plate; 1011. Bus bar; 10111. First bus bar; 10112. Second bus bar; 1012. Through hole; 102. First top plate; 103. Second top plate; 20. Cleaning cloth; 30. Transmission component; 301. Transmission pipeline; 3011. Main pipeline; 3012. Branch pipeline; 302. Transmission rod; 3021. Transmission handle; 303. Opening; 40. First elastic member; 50. Second elastic member; 60. Filling valve; 70. Pipeline valve; 80. Pipeline valve switch. Detailed implementation manners

[0034] To facilitate the understanding of this application, the following will describe this application more comprehensively with reference to the relevant drawings. The preferred embodiments of this application are shown in the drawings. However, this application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the disclosure of this application more thorough and comprehensive.

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which this application belongs. The terms used in the description of this application herein are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0036] It should be understood that when an element or layer is referred to as "on", "adjacent to", "connected to" or "coupled to" another element or layer, it can be directly on, adjacent to, connected or coupled to the other element or layer, or there may be intervening elements or layers. In contrast, when an element is referred to as "directly on", "directly adjacent to", "directly connected to" or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, doping types and / or parts, these elements, components, regions, layers, doping types and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, doping type or part from another element, component, region, layer, doping type or part. Thus, without departing from the teachings of the present invention, the first element, component, region, layer, doping type or part discussed below may be referred to as a second element, component, region, layer or part; for example, the first doping type may be referred to as the second doping type, and similarly, the second doping type may be referred to as the first doping type; the first doping type and the second doping type are different doping types, for example, the first doping type may be P-type and the second doping type may be N-type, or the first doping type may be N-type and the second doping type may be P-type.

[0037] Spatial relationship terms such as "under", "below", "lower", "beneath", "above", "upper", etc. are used herein to describe the relationship of one element or feature shown in the figures to other elements or features. It should be understood that, in addition to the orientation shown in the figures, spatial relationship terms also include different orientations of the device in use and operation. For example, if the device in the figures is flipped, an element or feature described as "under" or "beneath" or "underneath" another element or feature will be oriented "on" the other element or feature. Thus, the exemplary terms "under" and "beneath" can include both an upper and a lower orientation. In addition, the device may also include additional orientations (such as, rotated 90 degrees or other orientations), and the spatial descriptors used herein are to be interpreted accordingly.

[0038] As used herein, the singular forms "a", "an" and "the" may also include the plural forms unless the context clearly dictates otherwise. It should also be understood that when the terms "comprise" and / or "include" are used in this specification, the presence of the stated features, integers, steps, operations, elements and / or components can be determined, but one or more other features, integers, steps, operations, elements, components and / or groups are not excluded from the presence or addition. Also, as used herein, the term "and / or" includes any and all combinations of the associated listed items.

[0039] An embodiment of the present application provides a fixture. Please refer to Figures 1 to 3 , the fixture may include: a splint assembly 10, a cleaning cloth 20, and a transmission assembly 30.

[0040] Among them, the splint assembly 10 includes a bottom plate 101, a first top plate 102, and a second top plate 103. The first top plate 102 and the second top plate 103 are connected to the bottom plate 101 and can rotate relative to the bottom plate 101 so that the splint assembly 10 can switch between an unfolded state and a folded state; among them, a plurality of communicating busbars 1011 are provided on the bottom plate 101, and a plurality of through holes 1012 communicating with the busbars 1011 are provided.

[0041] Exemplarily, when the cleaning agent enters the splint assembly 10, the cleaning agent is transmitted to the cleaning cloth 20 inside the splint assembly 10 through the busbars 1011 in the splint assembly 10, and then the cleaning agent in the busbars 1011 is input into the cleaning cloth 20 wrapping the outside of the splint assembly 10 through the through holes 1012 of the bottom plate 101. Since the busbars 1011 and the through holes 1012 are widely distributed on the area of the bottom plate 101, the cleaning agent can be more dispersedly transported to the cleaning cloth 20 to uniformly wet the cleaning cloth 20. Specifically, in this embodiment, the cleaning agent is alcohol.

[0042] The cleaning cloth 20, please refer to Figure 6 , is provided on the splint assembly 10.

[0043] Exemplarily, the cleaning cloth 20 can wrap the splint assembly to wipe off dust, mold, miscellaneous bacteria, etc. in the hot plate. The cleaning cloth 20 can be made of but not limited to dust-free cloth. The dust-free cloth has good adsorption capacity for alcohol, and the surface of the dust-free cloth is soft. It will not cause wear to the inside of the hot plate during the cleaning process, nor will it undergo chemical reactions. In addition, the edge of the dust-free cloth is sealed by an advanced trimming machine and will not leave particles and thread ends after wiping, and has strong dust removal ability.

[0044] The transmission assembly 30, please continue to refer to Figure 1 , includes a transmission pipeline 301 and a plurality of valves provided on the transmission pipeline 301; among them, the transmission pipeline 301 is communicated with at least one busbar 1011.

[0045] Exemplarily, the transmission assembly 30 transmits alcohol to the busbars 1011 inside the splint assembly 10 through the transmission pipeline 301, and then wets the cleaning cloth 20 through the busbars 1011 and the through holes 1012 to clean the inside of the hot plate. The multiple valves of the transmission assembly can control the connection and disconnection between the transmission pipeline 301 and the splint assembly 10, and can also control the connection and disconnection between the transmission pipeline 301 and the outside.

[0046] In the embodiments of the present application, the fixture includes a clamping plate assembly 10, a cleaning cloth 20, and a transmission assembly 30. The clamping plate assembly 10 includes a bottom plate 101, a first top plate 102, and a second top plate 103. The first top plate 102 and the second top plate 103 are connected to the bottom plate 101 and can rotate relative to the bottom plate 101 to enable the clamping plate assembly 10 to switch between an unfolded state and a folded state. Among them, a plurality of communicating busbars 1011 and a plurality of through holes 1012 communicating with the busbars 1011 are provided on the bottom plate 101. By placing the cleaning cloth 20 on the clamping plate assembly 10 in the unfolded state of the clamping plate assembly 10 and then placing the clamping plate assembly 10 in the folded state, the cleaning cloth 20 wraps the clamping plate assembly 10. The transmission assembly 30 includes a transmission pipe 301 and a plurality of valves provided on the transmission pipe 301. Among them, the transmission pipe 301 communicates with at least one busbar 1011, and then alcohol flows into the cleaning cloth 20 through the busbar 1011 through the transmission pipe 301 of the transmission assembly 30 to wet the cleaning cloth 20 and wipe the inside of the hot plate, solving the problem that the cleaning cloth 20 repeatedly enters and exits the hot plate to add alcohol during the cleaning of the hot plate, resulting in an increase in dust inside the hot plate and an extension of the operation time, and improving the efficiency and quality of the lithography process of semiconductor products.

[0047] In some embodiments, please continue to refer to Figures 1 to 2 , the bottom plate 101 includes a first end portion and a second end portion arranged opposite to each other. The first top plate 102 is connected to the first end portion of the bottom plate 101, and the second top plate 103 is connected to the second end portion of the bottom plate 101. Among them, in the unfolded state, the first top plate 102, the bottom plate 101, and the second top plate 103 are unfolded on the same plane; in the folded state, the first top plate 102 and the second top plate 103 are stacked on the bottom plate 101.

[0048] As an example, in the unfolded state, the first top plate 102, the bottom plate 101, and the second top plate 103 are unfolded on the same plane. At this time, the clamping plate assembly 10 is placed on the cleaning cloth 20, the cleaning cloth 20 is folded in half to wrap the first top plate 102, the bottom plate 101, and the second top plate 103, and then the clamping plate assembly 10 is set in the folded state so that the cleaning cloth 20 wraps the clamping plate assembly 10 and the first top plate 102 and the second top plate 103 are stacked on the bottom plate 101.

[0049] In this embodiment, in the unfolded state, the first top plate 102, the bottom plate 101, and the second top plate 103 are unfolded on the same plane. At this time, the clamping plate assembly 10 is placed on the cleaning cloth 20, so that the cleaning cloth 20 is folded in half to wrap the first top plate 102, the bottom plate 101, and the second top plate 103. Then, the clamping plate assembly 10 is set to the folded state, so that the cleaning cloth 20 wraps around the clamping plate assembly 10, and the first top plate 102 and the second top plate 103 are stacked on the bottom plate 101. It can make the cleaning cloth 20 better wrap the clamping plate assembly 10 during the conversion between the unfolded state and the folded state of the clamping plate assembly 10, so as to clean the hot plate with higher efficiency.

[0050] In some embodiments, please continue to refer to Figure 2 , in the folded state, the cleaning cloth 20 wraps around the clamping plate assembly 10.

[0051] As an example, the cleaning cloth 20 wraps around the first top plate 102, the bottom plate 101, and the second top plate 103, so that in the folded state of the clamping plate assembly 10, the cleaning cloth 20 wraps both the inside and outside of the clamping plate assembly 10, so as to achieve the effect that the fixture is tightly wrapped by the cleaning cloth 20. After the cleaning cloth 20 wraps around the clamping plate assembly 10, the transmission assembly 30 transports alcohol to the bus bar 1011 inside the clamping plate assembly 10 through the transmission pipe 301, and then wets the cleaning cloth 20 through the bus bar 1011 and the through hole 1012 to clean the inside of the hot plate. When the alcohol in the cleaning cloth 20 is consumed, alcohol can be transported to the cleaning cloth through the transmission assembly 30, without repeatedly taking the cleaning cloth in and out of the hot plate to add alcohol, thereby reducing the dust in the hot plate and shortening the operation time.

[0052] In this embodiment, the cleaning cloth 20 wraps around the first top plate 102, the bottom plate 101, and the second top plate 103, so that in the folded state of the clamping plate assembly 10, the cleaning cloth 20 wraps both the inside and outside of the clamping plate assembly 10, so as to achieve the effect that the fixture is tightly wrapped by the cleaning cloth 20. When the alcohol in the cleaning cloth 20 is consumed, alcohol can be transported to the cleaning cloth through the transmission assembly 30, without repeatedly taking the cleaning cloth in and out of the hot plate to add alcohol, thereby reducing the dust in the hot plate and shortening the operation time, and better cleaning of the hot plate can be achieved.

[0053] In some embodiments, please refer to Figure 4 and Figure 5 , the fixture further includes a first elastic member 40 and a second elastic member 50. The first top plate 102 is connected to the first end of the bottom plate 101 through the first elastic member 40, and the second top plate 103 is connected to the second end of the bottom plate 101 through the second elastic member 50.

[0054] As an example, Figure 4 is the front view of the clamping plate assembly 10, Figure 5It is a bottom view of the splint assembly 10. The first elastic member 40 and the second elastic member 50 may include springs or other elastic devices. The first top plate 102 is connected to the first end of the bottom plate 101 through the first elastic member 40, so that the first top plate 102 and the bottom plate 101 can be switched between the unfolded state and the folded state through the elasticity of the first elastic member 40; the second top plate 103 is connected to the second end of the bottom plate 101 through the second elastic member 50, so that the second top plate 103 and the bottom plate 101 can be switched between the unfolded state and the folded state through the elasticity of the second elastic member 50.

[0055] In the embodiment of the present application, the first top plate 102 is connected to the first end of the bottom plate 101 through the first elastic member 40, so that the first top plate 102 and the bottom plate 101 can be switched between the unfolded state and the folded state through the elasticity of the first elastic member 40; the second top plate 103 is connected to the second end of the bottom plate 101 through the second elastic member 50, so that the second top plate 103 and the bottom plate 101 can be switched between the unfolded state and the folded state through the elasticity of the second elastic member 50. So that the cleaning cloth 20 can be more conveniently installed and disassembled when arranged on the splint assembly 10, and the elasticity of the first elastic member 40 and the second elastic member 50 can make the cleaning cloth 20 wrap the splint assembly 10 more tightly, thereby enhancing the cleaning effect of the clamp.

[0056] In some embodiments, please refer to Figure 6 , the transmission assembly 30 may further include a transmission rod 302. The transmission pipe 301 is built in the transmission rod 302, and the transmission rod 302 is also provided with an opening 303, and the transmission pipe 301 communicates with the opening 303.

[0057] As an example, the length of the transmission rod 302 can be set according to the actual situation. The transmission rod 302 can also be provided with a transmission rod handle 3021, so that the splint assembly 10 can be placed on the hot plate for cleaning by holding the transmission rod handle 3021. The transmission rod 302 is also provided with an opening 303, and the transmission pipe 301 communicates with the opening 303. Alcohol can be placed into the transmission pipe 301 through the opening, and then enter the splint assembly 10 through the transmission pipe 301. The alcohol is transmitted to the cleaning cloth 20 inside the splint assembly 10 through the bus bar 1011 inside the splint assembly 10, and then the alcohol in the bus bar 1011 is input into the cleaning cloth 20 wrapping the outside of the splint assembly 10 through the through hole 1012 of the bottom plate 101 to wet the cleaning cloth 20 evenly.

[0058] In the embodiment of the present application, the setting of the transmission rod is more conducive to placing the splint assembly 10 on the hot plate, and the operation is more convenient. And the opening 303 is more conducive to placing alcohol into the transmission pipe 301, and then entering the splint assembly 10 through the transmission pipe 301 to wet the cleaning cloth 20, avoiding the cleaning cloth 20 repeatedly entering and exiting the hot plate to add alcohol.

[0059] In some embodiments, please continue to refer to Figure 6 , the opening 303 is provided at the end of the transfer rod 302 on the side away from the clamping plate assembly 10.

[0060] As an example, the opening 303 is provided at the end of the transfer rod 302 on the side away from the clamping plate assembly 10, so that alcohol can be added through the opening 303 without taking out the clamping plate assembly 10 from the hot plate.

[0061] In the embodiments of the present application, by providing the opening 303 at the end of the transfer rod 302 on the side away from the clamping plate assembly 10, alcohol can be added through the opening 303 without taking out the clamping plate assembly 10 from the hot plate, avoiding the cleaning cloth 20 repeatedly entering and exiting the hot plate to add alcohol. The problem of the increase in dust in the hot plate and the extension of the operation time caused by the cleaning cloth 20 repeatedly entering and exiting the hot plate to add alcohol during the cleaning of the hot plate is solved, improving the efficiency and quality of the lithography process of semiconductor products.

[0062] In some embodiments, please continue to refer to Figure 6 , the multiple valves may include a filling valve 60 provided at a position of the transfer pipeline 301 close to the opening 303; a pipeline valve 70 provided at a position of the transfer pipeline 301 close to the clamping plate assembly 10; and a pipeline valve switch 80 provided between the filling valve 60 and the pipeline valve 70 and close to the filling valve 60.

[0063] As an example, the filling valve 60 is provided at a position of the transfer pipeline 301 close to the opening 303, which can control the opening and closing of the opening 303. When the filling valve 60 controls the opening 303 to open, alcohol is filled into the transfer pipeline 301 through the opening 303. Then, the filling valve 60 controls the opening 303 to close to prevent the alcohol in the transfer pipeline 301 from flowing out of the transfer pipeline 301. The pipeline valve 70 is provided at a position of the transfer pipeline 301 close to the clamping plate assembly 10. The pipeline valve 70 can control the connection and disconnection between the transfer pipeline 301 and the clamping plate assembly 10. When it is necessary to transfer alcohol from the transfer pipeline 301 to the cleaning cloth 20 inside the clamping plate assembly 10, the transfer pipeline 301 and the clamping plate assembly 10 are connected through the pipeline valve 70. When the cleaning cloth 20 inside the clamping plate assembly 10 does not need alcohol, the transfer pipeline 301 and the clamping plate assembly 10 are disconnected through the pipeline valve 70 to stop supplying alcohol to the cleaning cloth 20. The pipeline valve switch 80 is provided between the filling valve 60 and the pipeline valve 70 and close to the filling valve 60. The pipeline valve switch 80 can control the pipeline valve 70. The pipeline valve switch 80 is provided close to the filling valve 60, which can more conveniently operate the pipeline valve 70 at the proximal end.

[0064] In the embodiments of the present application, the opening and closing of the opening 303 is controlled by the filling valve 60. When the filling valve 60 controls the opening 303 to open, alcohol is filled into the transmission pipeline 301 through the opening 303. Then, the filling valve 60 is used to control the closing of the opening 303 to prevent the alcohol in the transmission pipeline 301 from flowing out of the transmission pipeline 301. The connection and disconnection between the transmission pipeline 301 and the splint assembly 10 are controlled by the pipeline valve 70. When it is necessary to transmit alcohol from the transmission pipeline 301 to the cleaning cloth 20 inside the splint assembly 10, the transmission pipeline 301 and the splint assembly 10 are connected through the pipeline valve 70. When the cleaning cloth 20 inside the splint assembly 10 does not require alcohol, the transmission pipeline 301 and the splint assembly 10 are disconnected through the pipeline valve 70 to stop supplying alcohol to the cleaning cloth 20. The pipeline valve 70 is controlled by the pipeline valve switch 80, and the pipeline valve switch 80 is arranged close to the filling valve 60, which enables more convenient operation of the pipeline valve at the proximal end. The setting of multiple valves can facilitate the transmission of alcohol between the transmission pipeline 301 and the splint assembly 10 more conveniently.

[0065] In some embodiments, please continue to refer to Figure 6 , the transmission pipeline 301 may include a main pipeline 3011 and a branch pipeline 3012. The main pipeline 3011 is parallel to the extension direction of the transmission rod 302, and the branch pipeline 3012 is connected to the main pipeline 3011 and is communicatively arranged with the opening 303.

[0066] As an example, the main pipeline 3011 can transmit alcohol into the splint assembly 10. The branch pipeline 3012 can transmit alcohol from the opening to the main pipeline 3011.

[0067] In this embodiment, the main pipeline 3011 is provided to transmit alcohol into the splint assembly 10, and the branch pipeline 3012 is provided to transmit alcohol from the opening to the main pipeline 3011.

[0068] In some embodiments, please refer to Figure 1 , a plurality of busbars 1011 include a first busbar 10111 extending in a first direction and a plurality of second busbars 10112 extending in a second direction. Among them, the first busbar 10111 is connected to the transmission pipeline.

[0069] As an example, the first busbar 10111 is connected to the transmission pipeline 301 to transmit the alcohol in the transmission pipeline 301 to the first busbar 10111 and the second busbars 10112, and then the first busbar 10111 and the second busbars 10112 wet the cleaning cloth 20 wrapped around the splint assembly 10 with alcohol through the through holes 1012.

[0070] In this embodiment, by providing a first bus bar 10111 extending along a first direction and a plurality of second bus bars 10112 extending along a second direction, the alcohol in the transfer pipe 301 can be better transferred to the cleaning cloth 20.

[0071] In some embodiments, please continue to refer to Figure 1 , the bottom plate 101, the first top plate 102 and the second top plate 103 are rectangular plates respectively.

[0072] As an example, the bottom plate 101, the first top plate 102 and the second top plate 103 being rectangular plates respectively can more conveniently clean the corners inside the hot plate to avoid incomplete cleaning of the corners of the hot plate. Of course, the shapes of the bottom plate 101, the first top plate 102 and the second top plate 103 can also be set according to actual situations. For example, when the space to be cleaned is a spherical structure, the bottom plate 101, the first top plate 102 and the second top plate 103 can be respectively set as circular plates matching the spherical structure to avoid incomplete cleaning of the peripheral areas in the spherical space and achieve a better cleaning effect.

[0073] In this embodiment, by respectively setting the bottom plate 101, the first top plate 102 and the second top plate 103 as rectangular plates, the corners inside the hot plate can be more conveniently cleaned to avoid incomplete cleaning of the corners of the hot plate and achieve a better cleaning effect.

[0074] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features of the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as falling within the scope described in this specification.

[0075] The above-described embodiments only represent several implementation manners of the present application. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent application. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the appended claims.

Claims

1. A clamp, characterized in that: include: A clamping plate assembly, comprising a bottom plate, a first top plate and a second top plate, wherein the first top plate and the second top plate are connected to the bottom plate and can rotate relative to the bottom plate so that the clamping plate assembly can be switched between an unfolded state and a folded state; wherein the bottom plate is provided with a plurality of bus bars arranged in communication with each other and a plurality of through holes communicating with the bus bars; A cleaning cloth, disposed on the clamping plate assembly; The transmission component comprises a transmission pipeline and a plurality of valves arranged on the transmission pipeline; wherein the transmission pipeline is connected to at least one of the bus bars.

2. The clamp according to claim 1, characterized in that: The bottom plate includes a first end and a second end that are oppositely disposed, the first top plate is connected to the first end of the bottom plate, and the second top plate is connected to the second end of the bottom plate; wherein, In the unfolded state, the first top plate, the bottom plate, and the second top plate are unfolded in the same plane; In the folded state, the first top plate and the second top plate are stacked on the bottom plate.

3. The clamp according to claim 2, characterized in that: In the folded state, the cleaning cloth is wrapped around the clamping plate assembly.

4. The clamp according to claim 2, characterized in that: The clamp further includes a first elastic member and a second elastic member, the first top plate is connected to the first end of the bottom plate via the first elastic member, and the second top plate is connected to the second end of the bottom plate via the second elastic member.

5. The clamp according to claim 1, characterized in that: The transmission component also includes a transmission rod, the transmission pipeline is built in the transmission rod, the transmission rod is also provided with an opening, and the transmission pipeline is connected to the opening.

6. The clamp according to claim 5, characterized in that The opening is arranged at an end portion of the transmission rod away from the clamping plate assembly.

7. The clamp according to claim 5, characterized in that: Multiple valves including: A filling valve is arranged at a position of the transmission pipeline close to the opening; A pipeline valve, arranged at a position of the transmission pipeline close to the clamping plate assembly; The pipeline valve switch is arranged between the filling valve and the pipeline valve and is close to the filling valve.

8. The clamp according to claim 5, characterized in that: The transmission pipeline includes a main pipeline and a branch pipeline. The main pipeline is parallel to the extension direction of the transmission rod, and the branch pipeline is connected to the main pipeline and is connected to the opening.

9. The clamp according to claim 1, characterized in that: The plurality of bus bars include a first bus bar extending along a first direction and a plurality of second bus bars extending along a second direction, wherein the first bus bar is in communication with the transmission pipe.

10. The clamp according to claim 1, characterized in that The bottom plate, the first top plate and the second top plate are respectively rectangular plates.

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