Manipulator and mechanical equipment

Abstract

The embodiment of the utility model provides a manipulator and mechanical equipment. The mechanical arm comprises a supporting component, a first driving component, a second driving component, an arm component and a cable, the first driving component is arranged on the supporting component, the second driving component is connected with the first driving component, the first driving component is used for driving the second driving component and the arm component to move in the height direction, and the second driving component is used for driving the arm component to move. The cable comprises a fixed end and a moving end, the fixed end is connected with the supporting component, the moving end is connected to the second driving component and can move along with the second driving component, the cable is located on the side portion of the second driving component in the transverse direction, and the transverse direction is perpendicular to the height direction. As the cable is located on the side portion of the second driving component in the transverse direction, the size of the supporting component in the height direction can be reduced, the installation size needed by the supporting component in the height direction is reduced, and installation and use of the mechanical arm in the scene with the limited height are facilitated.

Description

Technical Field

[0001] This application relates to the technical field of manipulators, and particularly relates to a manipulator and a mechanical device. Background Art

[0002] Manipulators have the need to transfer workpieces at different height workstations. Therefore, they have a certain range of movement strokes in the height direction. Manipulators require moving cables to transmit power and signals, and the moving cables will move up and down in the height direction along with the manipulator's arm. In the height direction, the moving cables are usually arranged at the bottom of the driving components of the manipulator, that is, the moving cables of the manipulator often adopt a longitudinal layout form. In this way, the size of the manipulator in the height direction is increased, which is not conducive to the installation and use of the manipulator in scenarios where the height is restricted. Summary of the Utility Model

[0003] The purpose of this application is to provide a manipulator and a mechanical device that can reduce the size in the height direction.

[0004] To achieve the purpose of this application, the following technical solutions are provided in this application:

[0005] In a first aspect, an embodiment of this application provides a manipulator. The manipulator includes a support component, a first driving component, a second driving component, an arm component, and a cable. The first driving component is arranged on the support component. The second driving component is connected to the first driving component and the arm component. The first driving component is used to drive the second driving component and the arm component to move in the height direction. The second driving component is used to drive the arm component to move. The cable includes a fixed end and a moving end. The fixed end is connected to the support component. The moving end is connected to the second driving component and can move relative to the support component together with the second driving component. The cable is located at the side of the second driving component in the transverse direction, and the transverse direction is perpendicular to the height direction.

[0006] For the manipulator provided in this application, the cable is located at the side of the second driving component in the transverse direction, rather than being arranged at the bottom of the second driving component in the height direction. In this way, it is beneficial to reduce the size of the manipulator in the height direction, thereby reducing the installation size required by the support component in the height direction, and is conducive to the installation and use of the manipulator in scenarios where the height is restricted.

[0007] According to the first aspect, in a possible implementation manner of this application, the cable encloses a bent structure with an opening, and the opening is located at one end of the bent structure in the height direction.

[0008] In a possible implementation of this type, since the cable forms a bent structure and the opening is located at one end of the bent structure in the height direction, that is, the bent structure is generally in a "U" shape.

[0009] According to the first aspect, in a possible implementation of this application, the cable includes a first cable and a second cable, and the first cable and the second cable are arranged along the height direction.

[0010] In a possible implementation of this type, the first cable and the second cable are arranged along the height direction to reduce the clutter of wiring and improve the regularity of wiring inside the manipulator.

[0011] According to the first aspect, in a possible implementation of this application, the bending radius of the first cable is smaller than that of the second cable, and the first cable is accommodated in the second cable, or the wire diameter of the first cable is smaller than that of the second cable, and the first cable is accommodated in the second cable.

[0012] In a possible implementation of this type, the cable with a smaller bending radius is accommodated in the cable with a larger bending radius, or the cable with a smaller wire diameter is accommodated in the cable with a larger wire diameter, saving the occupied space of the cable so that more cables can be laid.

[0013] According to the first aspect, in a possible implementation of this application, the manipulator further includes a control panel, the control panel is fixed to the support member, and the fixed end of the cable is connected to the control panel.

[0014] In a possible implementation of this type, the control panel is used to realize the connection between the manipulator and external devices. Interfaces connected to external devices can be set on the control panel, for example, a power interface, a communication interface, and so on.

[0015] According to the first aspect, in a possible implementation of this application, the support member includes a connected support bottom wall and a support side wall, the support bottom wall and the support side wall enclose a receiving space with a mounting opening, the support bottom wall and the mounting opening are oppositely arranged in the height direction, the first driving member and the second driving member are both located in the receiving space, the cable is located in the gap between the second driving member and the support side wall, and the arm member is located outside the receiving space.

[0016] In a possible implementation of this type, the cable is arranged in the gap between the second driving member and the support side wall. In this way, the redundant space between the second driving member in the lateral direction and the support side wall is effectively utilized, which is beneficial to greatly reducing the height dimension of the manipulator while keeping the lateral dimension of the support member unchanged, and occupying less space on the machine platform.

[0017] According to a first aspect, in a possible implementation of the present application, the second driving component is configured to drive the arm component to rotate and / or translate within a plane perpendicular to the height direction.

[0018] In a second aspect, the present application provides a mechanical device, which includes a machine table and a manipulator according to any possible implementation of the first aspect, and the manipulator is disposed on the machine table.

[0019] According to the second aspect, in a possible implementation of the present application, the machine table includes an inner cavity and a mounting opening communicating with the inner cavity. The supporting component is received in the inner cavity, the second driving component is exposed outside the machine table through the mounting opening, the arm component is located outside the machine table, and a clearance is formed between the supporting bottom wall of the supporting component and the bottom wall of the inner cavity in the height direction.

[0020] In this possible implementation, a clearance is formed between the supporting bottom wall of the supporting component and the bottom wall of the inner cavity in the height direction. Since sufficient installation margin is reserved for the manipulator, it is convenient to install the manipulator on the machine table. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 is a schematic structural diagram of a mechanical device provided by an embodiment of the present application;

[0023] Figure 2 is a schematic structural diagram of the machine table of the mechanical device;

[0024] Figure 3 is Figure 1 a schematic diagram of another perspective of the shown mechanical device;

[0025] Figure 4 is a schematic structural diagram of the manipulator of the mechanical device;

[0026] Figure 5 is a schematic structural diagram of a mechanical device provided by another embodiment of the present application.

[0027] Description of the reference numerals:

[0028] 1 - Mechanical equipment; 10 - Machine platform; 12 - Inner cavity; 14 - Installation opening; 50 - Manipulator; 51 - Support component; 510 - Support part; 122 - Bottom wall; 512 - Support bottom wall; 124 - Side wall; 514 - Support side wall; 511 - Flange; 518 - Receiving space; 519 - Gap; 52 - First driving component; 53 - Second driving component; 54 - Arm component; 55 - Cable; 552 - Fixed end; 554 - Moving end; 556 - First cable; 558 - Second cable; 56 - Control panel. Detailed implementation manners

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0030] It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there may also be an intermediate component. When a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediate component at the same time.

[0031] Unless otherwise defined, all technical and scientific terms used in the present application have the same meaning as commonly understood by those of ordinary skill in the technical field to which the present application belongs. The terms used in the present application in the specification are only for the purpose of describing specific embodiments, and are not intended to limit the present application. The term "and / or" used in the present application includes any and all combinations of one or more of the related listed items.

[0032] The following will describe in detail some embodiments of the present application with reference to the accompanying drawings. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0033] Please refer to Figure 1 , an embodiment of the present application provides a mechanical equipment 1, including a machine platform 10 and a manipulator 50. The machine platform 10 is used to carry the manipulator 50. Please refer to Figure 2, the machine tool 10 includes an inner cavity 12 and a mounting opening 14 communicating with the inner cavity 12. The mounting opening 14 is provided on the top surface of the machine tool 10 in the height direction. The inner cavity 12 is used to accommodate a part of the manipulator 50. The mounting opening 14 is used for the manipulator 50 to pass through. The inner wall of the inner cavity 12 includes a bottom wall 122 and a side wall 124. The bottom wall 122 and the mounting opening 14 are oppositely arranged in the height direction. The manipulator 50 is an automatic operating device that can be used to grasp, transport objects or operate tools. The manipulator 50 can replace heavy human labor to achieve the mechanization and automation of production. For example, the manipulator 50 can be applied in the semiconductor manufacturing field to transport wafers and the like.

[0034] Please refer to Figure 1 , Figure 3 and Figure 4 , the manipulator 50 includes a support member 51, a first driving member 52 (as shown in Figure 4 ), a second driving member 53, an arm member 54 and a cable 55. The support member 51 is used to be installed in the inner cavity 12 of the machine tool 10 and is used to support the first driving member 52, the second driving member 53, the arm member 54 and the cable 55. The first driving member 52 is provided on the support member 51 and is received in the inner cavity 12 of the machine tool 10. The second driving member 53 is connected to the first driving member 52, and a part of the second driving member 53 is received in the inner cavity 12 of the machine tool 10 and a part is exposed outside the machine tool 10. The first driving member 52 is used to drive the second driving member 53 and the arm member 54 to move in the height direction so as to raise or lower the second driving member 53 and the arm member 54 in the height direction. The second driving member 53 is used to drive the arm member 54 to move. The cable 55 includes a fixed end 552 and a moving end 554. The fixed end 552 is connected to the support member 51, and the moving end 554 is connected to the second driving member 53 and can move relative to the support member 51 along with the second driving member 53. The cable 55 is located at the side of the second driving member 53 in the lateral direction. The lateral direction is perpendicular to the height direction. The cable 55 is used to transmit electric energy or signals to the second driving member 53.

[0035] For the manipulator 50 provided in the present application, the cable 55 is located at the side of the second driving member 53 in the lateral direction instead of being arranged at the bottom of the second driving member 53 in the height direction. In this way, it is beneficial to reduce the size of the support member 51 in the height direction, thereby reducing the required installation size of the support member 51 in the height direction of the machine tool 10, which is beneficial to the installation and use of the manipulator 50 in scenarios where the height is limited.

[0036] It can be understood that the support member 51 may not be arranged on the machine tool 10 but on other supports. For example, the support member 51 is directly installed on the ground.

[0037] It can be understood that the structure of the machine tool 10 is not limited in the present application.

[0038] The support member 51 includes a support portion 510 and a flange 511 connected to the support portion 510. The support portion 510 includes a connected support bottom wall 512 and a support side wall 514. The support bottom wall 512 and the support side wall 514 enclose a receiving space 518 having a mounting opening. The support bottom wall 512 and the mounting opening are oppositely arranged in the height direction. The first driving member 52 and the second driving member 53 are both located in the receiving space 518. The cable 55 is located in the gap 519 between the second driving member 53 and the support side wall 514. The arm member 54 is located outside the receiving space 518 and outside the machine table 10. The fixed end 552 can be fixed on the support side wall 514. The flange 511 is used for mounting in the mounting opening 14 and is located outside the machine table 10.

[0039] The cable 55 is arranged in the gap 519 (as Figure 4 shown) between the second driving member 53 and the support side wall 514. In this way, the redundant space between the second driving member 53 and the support side wall 514 in the lateral direction is effectively utilized, which is beneficial to greatly reducing the height dimension of the manipulator 50 while keeping the lateral dimension of the support member 51 unchanged, and occupying less space of the machine table 10.

[0040] It can be understood that the bottom wall 512 and the support side wall 514 of the support portion 510 may not enclose the receiving space 518, and the present application does not limit the cable 55 to be arranged in the gap 519 between the second driving member 53 and the support side wall 514. In the lateral direction, the cable 55 can be located in the gap between the second driving member 53 and the side wall 124 of the inner cavity 12. In this way, the redundant space between the second driving member 53 and the side wall of the inner cavity 12 in the lateral direction is effectively utilized.

[0041] A clearance is formed in the height direction between the support bottom wall 512 of the support member 51 and the bottom wall 122 of the inner cavity 12. Please refer to Figure 1 . In the height direction, the occupied height of the manipulator 50 in the machine table 10 is H1, and the height of the clearance is H2. A clearance is formed in the height direction between the support bottom wall 512 of the support member 51 and the bottom wall 122 of the inner cavity 12. Since sufficient installation allowance is reserved for the manipulator 50, it is convenient to install the manipulator 50 on the machine table 10.

[0042] In some embodiments of the present application, the first driving component 52 may be referred to as a Z-axis driving component. The first driving component 52 may include electronic and electrical components such as a driving member, a transmission mechanism, an encoder, and other actuators or sensors. The driving member of the first driving component 52 is used to output power for driving the second driving component 53 and the arm component 54 to move in the height direction. The driving member of the first driving component 52 may be a motor, an oil cylinder, etc., and the present application does not limit the type of the first driving component 52. The transmission mechanism of the first driving component 52 is used to transmit power to the second driving component 53 and the arm component 54. The encoder of the first driving component 52 can be used to obtain data such as the displacement of the second driving component 53 and the arm component 54 moving in the height direction.

[0043] In some embodiments of the present application, the second driving component 53 may be referred to as a T-axis driving component. The second driving component 53 may include electronic and electrical components such as a driving member, a transmission mechanism, an encoder, and other actuators or sensors. The driving member of the second driving component 53 is used to output power for driving the arm component 54 to move. The driving member of the second driving component 53 may be a motor, an oil cylinder, etc., and the present application does not limit the type of the second driving component 53. The transmission mechanism of the second driving component 53 is used to transmit power to the arm component 54. In this embodiment, the second driving component 53 is used to drive the arm component 54 to rotate and translate. The encoder of the second driving component 53 can be used to obtain the movement data of the arm component 54 in the plane of the vertical height. It can be understood that the present application does not limit the structure of the second driving component 53, as long as the second driving component 53 can drive the arm component 54 to move.

[0044] The arm component 54 may include joints and / or other actuators to achieve grasping, handling objects, or operating tools.

[0045] The cable 55 encloses a bent structure with an opening. The bent structure is generally in a "U" shape. The opening is located at one end of the bent structure in the height direction. The cable 55 has a bent structure and the opening is located at one end of the bent structure in the height direction, and the bent structure is generally in a "U" shape. The bending radius refers to the radius of the circle where the arc is located when the cable is bent to form an arc with a certain radian. In some embodiments of the present application, the opening of the cable 55 may be arranged facing the supporting bottom wall 512 of the supporting component 51. It can be understood that the opening may also be arranged in a direction away from the supporting bottom wall 512 of the supporting component 51, as Figure 5 shown. It can be understood that the present application does not limit the shape of the bent structure to be "U", and the shape of the bent structure may also be other shapes, such as Z-shaped.

[0046] The number of the cables 55 may be at least two, please refer to Figure 1 , Figure 1Exemplarily shown in the figure are two cables. At least two cables include a first cable 556 and a second cable 558, and the first cable 556 and the second cable 558 are arranged along the height direction. Since the first cable 556 and the second cable 558 are arranged along the height direction, the clutter of wiring is reduced and the regularity of wiring inside the manipulator 50 is improved. It can be understood that the present application does not limit that at least two cables 55 are arranged along the height direction, and the cables 55 can be arranged on the side of the second driving component 53 in the lateral direction.

[0047] The bending radius of the first cable 556 is smaller than that of the second cable 558, and the first cable 556 is accommodated inside the second cable 558. Alternatively, the wire diameter of the first cable 556 is smaller than that of the second cable 558, and the first cable 556 is accommodated inside the second cable 558. Accommodating the cable with a smaller bending radius inside the cable with a larger bending radius, or accommodating the cable 55 with a smaller wire diameter inside the cable with a larger wire diameter saves the occupied space of multiple cables 55, so that a larger number of cables 55 can be laid.

[0048] The manipulator 50 further includes a control panel 56, which can be fixed to the support component 51 or the machine table 10, and the fixed end 552 of the cable 55 is electrically connected to the control panel 56. The control panel 56 is used to control the first driving component 52, the second driving component 53 and the arm component 54. Interfaces connected to external devices can be provided on the control panel 56, for example, a power supply interface, a communication interface, etc.

[0049] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0050] The above-disclosed is only a preferred embodiment of the present application, and of course, it cannot be used to limit the scope of rights of the present application. Those of ordinary skill in the art can understand all or part of the processes of implementing the above embodiments, and the equivalent changes made according to the claims of the present application still fall within the scope covered by the present application.

Claims

1. A robot, characterized in that: The manipulator includes a supporting component, a first driving component, a second driving component, an arm component and a cable, wherein the first driving component is arranged on the supporting component, the second driving component is connected to the first driving component and the arm component, the first driving component is used to drive the second driving component and the arm component to move along the height direction, the second driving component is used to drive the arm component to move, the cable includes a fixed end and a moving end, the fixed end is connected to the supporting component, the moving end is connected to the second driving component and can move relative to the supporting component along with the second driving component, and the cable is located on the side of the second driving component in the lateral direction, and the lateral direction is perpendicular to the height direction.

2. The robot according to claim 1, characterized in that: The cables form a curved structure with an opening, and the opening is located at one end of the curved structure in the height direction.

3. The robot according to claim 2, characterized in that: The cables include a first cable and a second cable, and the first cable and the second cable are arranged in the height direction.

4. The robot according to claim 3, characterized in that: The bending radius of the first cable is smaller than that of the second cable, and the first cable is accommodated in the second cable; or the wire diameter of the first cable is smaller than that of the second cable, and the first cable is accommodated in the second cable.

5. The robot according to claim 1, characterized in that: The robot also includes a control panel, and the fixed end of the cable is connected to the control panel.

6. The robot according to claim 1, characterized in that: The supporting component includes a supporting bottom wall and a supporting side wall that are connected to each other, and the supporting bottom wall and the supporting side wall form a receiving space with an installation opening. The supporting bottom wall and the installation opening are arranged opposite to each other in the height direction, and the first driving component and the second driving component are both located in the receiving space, the cable is located in the gap between the second driving component and the supporting side wall, and the arm component is located outside the receiving space.

7. The robot according to claim 6, characterized in that: The support component comprises a flange, the flange is fixedly connected to an end of the support side wall away from the support bottom wall, and the flange is used to be connected to a machine platform of a mechanical device.

8. The manipulator according to any one of claims 1 to 7, characterized in that: The second driving component is used to drive the arm component to rotate and / or translate in a plane perpendicular to the height direction.

9. A mechanical device, characterized in that: The mechanical equipment includes a machine platform and a robot according to any one of claims 1 to 8, and the robot is arranged on the machine platform.

10. The mechanical device according to claim 9, characterized in that: The machine includes an inner cavity and an installation port connected to the inner cavity, the support component is accommodated in the inner cavity, the second driving component is exposed outside the machine through the installation port, the arm component is located outside the machine, and the support bottom wall of the support component and the bottom wall of the inner cavity form an avoidance gap in the height direction.

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