Capacitor film coating nozzle plate

Abstract

The utility model discloses a capacitor film coating nozzle plate which comprises a base plate, a plurality of nozzles are arranged on the base plate, two obliquely arranged gas guide plates are arranged at the bottom of the base plate, an opening between the two gas guide plates is gradually reduced from bottom to top, and clamping parts are arranged at the bottoms of the two gas guide plates and used for being clamped at the upper edge of a crucible below; the nozzle comprises an air inlet part, a buffer cavity and an air outlet part from bottom to top, wherein the cross sectional area of the buffer cavity is larger than that of the air inlet part and that of the air outlet part. According to the utility model, the two inclined gas guide plates are arranged at the bottom of the base plate, metal steam in the crucible passes between the two gas guide plates when flowing upwards, as the opening between the two gas guide plates is gradually reduced, the drift diameter is reduced and the flow velocity is increased in the upward gathering process of the metal steam, and the gas can uniformly enter each nozzle above at the flow velocity; the buffer cavity with the large cross section area is formed in the nozzle, the flow speed of gas in the buffer cavity is decreased, and the situation that the flow speed of steam is too high to affect the spraying quality is avoided, and then the steam evenly flows out of a substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum evaporation equipment, in particular to a capacitance film coating nozzle plate. Background Art

[0002] Capacitor film generally refers to metallized film capacitors. Metallized film capacitors are made by vapor-depositing a layer of metal film on the surface of polyester film instead of metal foil as an electrode. Because the thickness of the metallized film layer is much smaller than that of the metal foil, the volume after winding is much smaller than that of metal foil capacitors. It also has the advantages of "self-healing" characteristics and no short-circuit failure mode.

[0003] When a metallized film layer is evaporated on a base film, there is generally a crucible with a metal evaporation source at the bottom, a nozzle plate is installed on the top of the crucible, and the base film to be evaporated is above the nozzle plate. By heating the crucible, the metal evaporation source in the crucible is evaporated to form vapor, and the metal vapor flows upward through the nozzle on the nozzle plate to be evaporated onto the base film, thereby forming a metal coating on the base film.

[0004] At present, in the process of evaporating the metallized film layer on the base film, the problem of uneven evaporation often occurs due to the different temperatures and air pressures at different positions, which affects the quality of the finished film. This is closely related to the regulation of temperature and air pressure, but it is also closely related to the structure, installation method and quality of the nozzle plate. By changing the structure of the nozzle plate, the problem of uneven evaporation can be adjusted to a certain extent. Utility Model Content

[0005] In view of the shortcomings of the prior art, the utility model aims to provide a capacitive film coating nozzle plate to solve the problem of uneven evaporation of the metallized film layer in the prior art and ensure the quality of the finished film. The specific technical solution is as follows:

[0006] A capacitive thin film coating nozzle plate, comprising a substrate, a plurality of nozzles are provided on the substrate, two obliquely arranged air guide plates are provided at the bottom of the substrate, the opening between the two air guide plates gradually becomes smaller from bottom to top, and a clamping part is provided at the bottom of the two air guide plates for clamping on the upper edge of the crucible below;

[0007] The nozzle comprises an air inlet, a buffer cavity and an air outlet from bottom to top, wherein the cross-sectional area of ​​the buffer cavity is larger than the cross-sectional areas of the air inlet and the air outlet.

[0008] As a preferred implementation manner: a plurality of the nozzles are arranged in a straight line on the substrate.

[0009] As a preferred implementation manner: the cross-sectional area of ​​the air outlet portion gradually decreases from bottom to top.

[0010] As a preferred embodiment: The cross-sectional area of the buffer cavity gradually increases from bottom to top and then gradually decreases.

[0011] As a preferred embodiment: The inner wall of the buffer cavity is a smooth curved surface.

[0012] As a preferred embodiment: An air guiding member is fixedly installed at the lower center of the buffer cavity, and the bottom of the air guiding member is a downwardly convex arc surface for guiding the steam below into both sides of the buffer cavity.

[0013] As a preferred embodiment: The air guiding member is spherical in shape.

[0014] As a preferred embodiment: Connecting plates are integrally provided on both sides of the substrate, and a ceramic heating element is installed between the connecting plates and the air guiding plate;

[0015] The bottom of the connecting plate is integrally connected with a support plate for installing on the outer shell of the crucible below.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] In the present utility model, two inclined air guiding plates are provided at the bottom of the substrate, and the air guiding plates are erected on the upper edge of the crucible below. When the metal vapor in the crucible flows upward, it passes between the two air guiding plates. Since the opening between the two air guiding plates gradually decreases from bottom to top, the through diameter gradually decreases during the upward convergence of the metal vapor, and the flow rate increases. However, the upper limit of the flow rate in the same environment at each position is almost the same. Therefore, the gas flow rate at each position will also enter the upper nozzles more uniformly. A buffer cavity with a relatively large cross-sectional area is provided in the nozzle. The gas flow rate in the buffer cavity slows down, avoiding the problem that the vapor flow rate is too fast and affecting the sputtering quality, and then uniformly flowing out of the substrate from the air outlet part, preferably avoiding the problem of uneven sputtering. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic structural diagram of the capacitive thin film coating nozzle plate of the present utility model installed on the crucible and its outer shell;

[0019] Figure 2 is a top view of the capacitive thin film coating nozzle plate of the present utility model;

[0020] Figure 3 is a schematic cross-sectional structure diagram of the nozzle in the capacitive thin film coating nozzle plate of the present utility model.

[0021] In the figure, 1 is a substrate; 10 is a nozzle; 100 is an air inlet part; 101 is a buffer chamber; 102 is an air outlet part; 11 is a gas guide plate; 110 is a clamping part; 12 is a connecting plate; 120 is a support plate; 2 is a crucible; 3 is a gas guide member; 4 is a ceramic heating member; 5 is a housing; 6 is a bolt. Detailed implementation manners

[0022] The embodiments of the present disclosure will be described in detail below with reference to the accompanying drawings.

[0023] The following uses specific specific examples to illustrate the implementation manners of the present disclosure. Those skilled in the art can easily understand other advantages and effects of the present disclosure from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. The present disclosure can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present disclosure. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present disclosure without creative efforts belong to the scope of protection of the present disclosure.

[0024] Embodiment 1

[0025] As Figure 1 and Figure 2 shown, a capacitive thin film coating nozzle plate includes a substrate 1, and the substrate 1 is installed above the crucible 2. A metal evaporation source is placed in the crucible 2, and the top of the crucible 2 is open. A plurality of ceramic heating members 4 are arranged outside the crucible 2 to heat the crucible 2, and a housing 5 is arranged outside the ceramic heating members 4. The crucible 2 has a long strip structure, and the substrate 1 is arranged correspondingly to allow the metal evaporation source in the crucible 2 to evaporate. A plurality of nozzles 10 are linearly arranged on the substrate 1, and the metal vapor in the crucible 2 flows upward through each nozzle 10.

[0026] At the bottom of the substrate 1, there are two inclined air guide plates 11. The opening between the two air guide plates 11 gradually decreases from bottom to top. At the bottom of each of the two air guide plates 11, there is a clamping portion 110, which is respectively used to clamp the edge of the top of the crucible 2, so that it is stably installed on the top of the crucible 2, thereby preventing the vapor in the crucible 2 from leaking easily. The clamping portion 110 is in an inverted U shape with an open bottom, which is used to be erected on the edges of the two sides of the top of the crucible 2. On both sides of the substrate 1, there are integrally provided connecting plates 11. The connecting plates 11 are arranged vertically or obliquely according to the shape of the outer shell 5. At the bottom of the connecting plates 11, there is integrally connected a horizontal support plate 12. An installation hole is also opened at the top of the outer shell 5. The support plate 12 is fixedly installed on the top of the outer shell 5 through a plurality of bolts 6, so as to stably limit the substrate 1 above the crucible 2 together with the clamping portion 110 erected on the top of the crucible 2. A ceramic heating element 4 can also be installed in the area between the connecting plate 12 and the air guide plate 11 to ensure the temperature of the top of the crucible 2 and the substrate. The metal vapor in the crucible 2 rises due to heat. Since the opening between the two air guide plates 11 gradually decreases, the rising flow rate of the metal vapor also gradually increases, and finally the flow rate basically reaches the same value at each position and enters each nozzle 10 in the upper substrate 1.

[0027] Combined with Figure 3 As shown, the nozzle 10 includes an air inlet portion 100, a buffer chamber 101 and an air outlet portion 102 from bottom to top. Among them, the cross-sectional area of the buffer chamber 101 is larger than that of the air inlet portion 100 and the air outlet portion 102. Specifically, the inner wall of the buffer chamber 101 is a smooth curved surface, and its cross-section gradually increases first and then decreases from bottom to top. Its function is to gradually slow down the flow rate of the metal vapor and make it flow out upward more concentratedly, so as to prevent the too high flow rate of the vapor from affecting the quality of thin film evaporation coating. Preferably, the cross-sectional area of the air outlet portion 102 above the buffer chamber 101 gradually decreases from bottom to top. However, due to its short stroke and small inclination angle, its main function is to play a certain guiding role when the vapor exits, and the influence on the gas flow rate is also small.

[0028] In some preferred embodiments, a gas guide member 3 is fixedly installed at the lower center of the buffer chamber 101. The bottom of the gas guide member 3 is a downward convex arc surface for guiding the vapor below to both sides of the buffer chamber 101, so as to prevent the gas in the middle from directly flushing upward too fast. The gas guide member 3 can be set as an arc-shaped guide plate or a sphere, which is relatively convenient to generate. The gas guide member 3 is fixedly installed on the inner wall of the nozzle 10 through a connecting rod.

[0029] When the metal evaporation source in the crucible 2 of the present utility model evaporates, it first converges upward along the wires of the air guide plate 11. At the same time, the air flow velocity increases and gradually becomes the same at each position, so as to enter each nozzle 10 above more uniformly. After entering the nozzle 10, the flow velocity gradually decreases and tends to be stable as it flows into the buffer chamber 101, and finally flows out from above the substrate 1 along the wires of the air outlet part 102. The velocity and amount of the vapor flowing out of each nozzle 10 are basically the same, and the evaporation coating is relatively uniform, which is suitable for popularization and use.

[0030] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "middle", "length", "upper", "lower", "front", "rear", "vertical", "horizontal", "inner", "outer", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0031] In the present utility model, unless otherwise clearly specified and limited, the first feature being "on" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. The meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically limited.

[0032] In the present utility model, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection, an electrical connection, or communication with each other; it may be directly connected, or indirectly connected through an intermediate medium, and may be the internal communication of two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0033] The above is only to illustrate the implementation mode of the present utility model and is not used to limit the present utility model. For those skilled in the art, any modification, equivalent replacement, improvement, etc. made without creative labor within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A capacitive thin film coating nozzle plate, comprising a substrate (1), a plurality of nozzles (10) being provided on the substrate (1), characterized in that: Two obliquely arranged air guide plates (11) are provided at the bottom of the substrate (1), the opening between the two air guide plates (11) gradually becomes smaller from bottom to top, and a clamping portion (110) is provided at the bottom of the two air guide plates (11) for clamping on the upper edge of the crucible (2) below; The nozzle (10) comprises, from bottom to top, an air inlet portion (100), a buffer chamber (101) and an air outlet portion (102), wherein the cross-sectional area of ​​the buffer chamber (101) is larger than the cross-sectional areas of the air inlet portion (100) and the air outlet portion (102).

2. The capacitive thin film coating nozzle plate according to claim 1, characterized in that: A plurality of nozzles (10) are arranged in a straight line on the substrate (1).

3. The capacitive thin film coating nozzle plate according to claim 1, characterized in that: The cross-sectional area of ​​the air outlet portion (102) gradually decreases from bottom to top.

4. The capacitive thin film coating nozzle plate according to claim 1, characterized in that: The cross-sectional area of ​​the buffer cavity (101) gradually increases from bottom to top and then gradually decreases.

5. The capacitive thin film coating nozzle plate according to claim 4, characterized in that: The inner wall of the buffer cavity (101) is a smooth curved surface.

6. The capacitive thin film coating nozzle plate according to claim 4, characterized in that: An air guide (3) is fixedly installed at the lower center of the buffer chamber (101); the bottom of the air guide (3) is a downwardly protruding arc surface used to guide the steam below into the two sides of the buffer chamber (101).

7. The capacitive thin film coating nozzle plate according to claim 6, characterized in that: The air guide member (3) is in the shape of a sphere.

8. The capacitive thin film coating nozzle plate according to any one of claims 1 to 7, characterized in that: Connecting plates (12) are integrally provided on both sides of the base plate (1), and a ceramic heating element (4) is installed between the connecting plate (12) and the air guide plate (11); The bottom of the connecting plate (12) is integrally connected with a supporting plate (120) for being mounted on an outer shell (5) outside the crucible (2) below.

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