Boat piece assembly, heating carrier and machining equipment

Abstract

The utility model provides a boat piece assembly, a heating carrier and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problems that a reaction furnace is low in heating efficiency and a vacuum cavity of the reaction furnace is easy to burst at a high temperature. The boat piece assembly comprises a boat piece main body which extends along a first direction and is provided with an accommodating space; the heating assembly is arranged in the accommodating space; the shielding piece is arranged between the boat piece main body and the heating assembly; and the insulating parts are arranged between the boat piece main body and the shielding part and between the shielding part and the heating assembly. By means of the structure, the distance between the heating assembly and the sheet-shaped material is short, so that the heating efficiency and the heating uniformity are improved; and a thermal field does not need to be arranged outside the vacuum cavity for heating, so that the vacuum cavity can be made of a metal material with higher toughness or a silicon carbide material with higher strength instead of a transparent quartz material with higher heat transfer speed, and the service life of the vacuum cavity can be prolonged.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, and specifically relates to a boat sheet assembly, a heating carrier, and a processing device. Background Art

[0002] In the field of semiconductor or photovoltaic material processing, Chemical Vapor Deposition (CVD) technology or diffusion processes are often used to process sheet materials. During processing, the sheet material is usually placed in a carrier, and then the carrier is sent into a reaction furnace for high-temperature processing.

[0003] Traditional reaction furnaces use an electric heating wire heating method. The entire furnace body structure from the outside to the inside is the outer shell, the insulation layer, the electric heating wire, the vacuum chamber (since the transparent quartz material has strong light transmittance and faster heat transfer speed, the vacuum chamber is usually a quartz vacuum chamber), and the sheet material (such as a silicon wafer). After the electric heating wire is energized, it generates heat, and the heat is transmitted through the quartz vacuum chamber to the boat and the sheet material in the reaction furnace, so that the sheet material reaches the temperature required for the reaction. However, with this structure, during the heating process, there is a certain distance between the electric heating wire and the sheet material, so the heating speed is slow and the thermal hysteresis is large; moreover, after long-term use, the quartz vacuum chamber will be coated with a film, reducing the light transmittance, thereby reducing the heating efficiency and heating speed; in addition, the quartz vacuum chamber is prone to tube explosion and fragmentation at high temperatures, and the residue remains on the electric heating wire and is difficult to clean, which will cause the scrapping of the reaction furnace. Therefore, how to improve the heating efficiency of the reaction furnace and avoid the explosion of the vacuum chamber has become an urgent problem to be solved. Summary of the Utility Model

[0004] To solve the above technical problems, this application is proposed. An embodiment of this application provides a boat sheet assembly, a heating carrier, and a processing device.

[0005] In a first aspect, an embodiment of this application provides a boat sheet assembly, including: a boat sheet main body extending along a first direction and configured to carry a sheet material; a heating assembly disposed on the boat sheet main body and configured to heat the sheet material carried by the boat sheet main body; and a shielding assembly disposed between the boat sheet main body and the heating assembly.

[0006] In some embodiments, it further includes an insulating assembly disposed between the boat sheet main body and the shielding assembly, and between the shielding assembly and the heating assembly.

[0007] In some embodiments, the boat sheet main body includes: a first sub-boat sheet extending along the first direction; a second sub-boat sheet extending along the first direction and disposed opposite to the first sub-boat sheet, the first sub-boat sheet and the second sub-boat sheet are in partial contact, and a receiving space is formed between the first sub-boat sheet and the second sub-boat sheet; the heating assembly is disposed in the receiving space.

[0008] In some embodiments, the first sub-boat piece includes: a first bearing portion extending along a first direction; a first protruding portion disposed on a side of the first bearing portion close to the accommodation space; the second sub-boat piece includes: a second bearing portion extending along the first direction; a second protruding portion disposed on a side of the second bearing portion close to the accommodation space; wherein, an accommodation space is formed between the first bearing portion and the second bearing portion, and the first protruding portion contacts the second protruding portion.

[0009] In some embodiments, the heating assembly includes: a heating wire configured to heat the sheet material, and the heating wire is disposed between the first sub-boat piece and the second sub-boat piece; wherein, when the boat piece assembly includes an insulating assembly, the insulating assembly includes: a first insulating member extending along the first direction and disposed between the heating wire and the first sub-boat piece; a second insulating member extending along the first direction and disposed between the heating wire and the second sub-boat piece.

[0010] In some embodiments, at least one shielding member includes: a first shielding member disposed between the first insulating member and the first sub-boat piece; a second shielding member disposed between the second insulating member and the second sub-boat piece; wherein, the insulating assembly further includes: a third insulating member disposed between the first shielding member and the first sub-boat piece; a fourth insulating member disposed between the second shielding member and the second sub-boat piece.

[0011] In some embodiments, the materials of the first insulating member, the second insulating member, the third insulating member, and the fourth insulating member are any one of quartz, ceramic, and silicon carbide.

[0012] In some embodiments, the thickness range of the boat piece assembly is less than or equal to 5 millimeters. When the boat piece assembly includes an insulating assembly, the range of the sum of the dimensions of the heating assembly, the shielding assembly, and the insulating assembly in the thickness direction of the boat piece assembly is 1 millimeter to 2 millimeters.

[0013] In a second aspect, an embodiment of the present application provides a heating carrier, including: at least two boat piece assemblies according to any one of the first aspects, spaced apart along a second direction, the boat piece assemblies being configured to carry the sheet material and heat the sheet material, and the second direction intersects the extending direction of the boat piece assemblies; a connecting member configured to connect at least two boat piece assemblies.

[0014] In a third aspect, an embodiment of the present application provides a processing device, including: a reaction furnace having a reaction chamber configured to process the sheet material; the heating carrier according to any one of the second aspects above, which can be placed in the reaction chamber and is configured to carry the sheet material and heat the sheet material.

[0015] The boat piece assembly, heating carrier, and processing equipment proposed in the embodiments of the present application have the following advantages: First, since the heating component is arranged in the accommodation space of the boat piece main body, the distance between the heating component and the sheet material is relatively close, which improves the heating efficiency and uniformity. Second, the heat generated by the heating component is first transferred to the boat piece main body and then to the sheet material, without passing through the vacuum chamber. Therefore, even if the vacuum chamber is coated after long-term use, it will not affect the heating speed. Third, since there is no need to set up a thermal field outside the vacuum chamber for heating, the equipment cost is saved. Moreover, the vacuum chamber does not need to use transparent quartz material with a faster heat transfer speed, and a vacuum chamber made of metal or silicon carbide material can be used. Since the metal material has stronger toughness and the silicon carbide material has higher strength, using a vacuum chamber made of metal or silicon carbide material can extend the service life of the vacuum chamber. Fourth, by setting up a shielding part, the electromagnetic field of the boat piece main body and the electromagnetic field of other charged structures in the heating carrier can be isolated from affecting the heating component. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other objects, features, and advantages of the present application will become more obvious. The accompanying drawings are used to provide a further understanding of the embodiments of the present application, and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application, and do not constitute a limitation to the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The following shows a schematic structural diagram of a boat piece assembly provided by an exemplary embodiment of the present application.

[0018] Figure 2 The following shows an exemplary embodiment of the present application Figure 1 A partial enlarged view of area A.

[0019] Figure 3 The following shows a side view of a boat piece assembly provided by an exemplary embodiment of the present application.

[0020] Figure 4 The following shows an exemplary embodiment of the present application along Figure 1 A cross-sectional view taken along the MN direction.

[0021] Figure 5a The following shows a schematic structural diagram of a heating wire, an insulating part, and a shielding part provided by an exemplary embodiment of the present application.

[0022] Figure 5b The following shows a top view of a heating component provided by an exemplary embodiment of the present application.

[0023] Figure 6 The following shows a schematic structural diagram of a heating carrier provided by an exemplary embodiment of the present application.

[0024] Figure 7 The following is a schematic structural diagram of a connecting member provided by an exemplary embodiment of the present application.

[0025] Figure 8 The following is a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0026] Reference numerals:

[0027] 100, boat piece assembly; 110, boat piece main body; 111, first sub-boat piece; 1111, first bearing part; 1112, first protruding part; 112, second sub-boat piece; 1121, second bearing part; 1122, second protruding part; 120, heating assembly; 121, heating wire; 122, lead wire; 130, third protruding part; 140, shielding assembly; 141, first shielding member; 142, second shielding member; 150, insulating assembly; 151, first insulating member; 152, second insulating member; 153, third insulating member; 154, fourth insulating member; 200, heating carrier; 210, connecting member; 211, ceramic rod; 212, ceramic sleeve; 213, first nut; 214, second nut; 215, first gasket; 216, second gasket; 220, first spacer; 221, first electrode port; 230, second spacer; 231, second electrode port; 300, processing device; 310, reaction furnace. Detailed implementation manners

[0028] Next, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0029] Summary of the Application

[0030] Semiconductor or photovoltaic materials are widely used in industries such as electronics and new energy. Semiconductor and photovoltaic materials usually need to be chemically processed before they can be applied to products. Chemical Vapor Deposition (CVD) technology is one of the processing methods. CVD technology has currently been widely used in the processing of semiconductor or photovoltaic materials. Common processing equipment includes Plasma Enhanced Chemical Vapor Deposition (PECVD) equipment, Low Pressure Chemical Vapor Deposition (LPCVD) equipment, Atmospheric Pressure Chemical Vapor Deposition (APCVD) equipment, etc. In addition to CVD, there is also a diffusion process, such as phosphorus diffusion, boron diffusion, etc., which can all process raw materials by means of gas diffusion.

[0031] There are already many related equipment in the industry, and corresponding equipment can be selected according to specific processing requirements. When processing semiconductor or photovoltaic materials, it is usually to send sheet materials into the furnace and react under certain temperature and pressure conditions to achieve the processing. In the industry, this kind of furnace is usually called a hot field, a heating furnace or a reaction furnace, and some devices are usually used to load or move the materials to be processed, being processed or processed. In the industry, this kind of loading or moving device is usually called a carrier, a boat, a graphite boat, a small boat or a flower basket.

[0032] In traditional reaction furnaces, heat is generated by heating wires outside the vacuum chamber, and the heat is transmitted through the vacuum chamber to the carrier inside the vacuum chamber to heat the sheet material. Since the heating wires are far from the sheet material and the heat needs to pass through the vacuum chamber, the heating speed is slow and the thermal hysteresis is large; moreover, after long-term use, the quartz vacuum chamber will be coated with a film, reducing the light transmittance, thereby reducing the heating efficiency and heating speed; in addition, the quartz vacuum chamber is prone to tube explosion and fragmentation at high temperatures, and the residues are difficult to clean on the heating wires, which will cause the scrapping of the reaction furnace. Therefore, how to improve the heating efficiency of the reaction furnace and avoid the explosion of the vacuum chamber has become an urgent problem to be solved.

[0033] The boat piece assembly, heating carrier, and processing equipment provided by the embodiments of the present application have the following advantages: First, since the heating component is disposed in the accommodation space of the boat piece main body, the distance between the heating component and the sheet material is relatively close, which improves the heating efficiency and heating uniformity. Second, the heat generated by the heating component is first transferred to the boat piece main body and then to the sheet material, without passing through the vacuum chamber. Therefore, even if the vacuum chamber is coated after long-term use, it will not affect the heating speed. Third, since there is no need to set up a thermal field outside the vacuum chamber for heating, the equipment cost is saved. Moreover, the vacuum chamber does not need to use a transparent quartz material with a faster heat transfer speed, and a vacuum chamber made of metal or silicon carbide can be used. Since the metal material has stronger toughness and the silicon carbide material has higher strength, using a vacuum chamber made of metal or silicon carbide can extend the service life of the vacuum chamber. Fourth, by setting up a shielding member, the electromagnetic field of the boat piece main body and the electromagnetic field of other charged structures in the heating carrier can be isolated from affecting the heating component.

[0034] Exemplary Device

[0035] Figure 1 The following shows a schematic structural diagram of a boat piece assembly provided by an exemplary embodiment of the present application. Figure 2 The following shows an exemplary embodiment provided by the present application. Figure 1 A partial enlarged view of area A in the following. Figure 3 The following shows a side view of a boat piece assembly provided by an exemplary embodiment of the present application. Figure 4 The following shows an exemplary embodiment provided by the present application along Figure 1 A cross-sectional view taken along the MN direction in the following. Figure 5a The following shows a schematic structural diagram of a heating wire, an insulating member, and a shielding member provided by an exemplary embodiment of the present application. Figure 5b The following shows a top view of a heating component provided by an exemplary embodiment of the present application.

[0036] As Figures 1 to 5b As shown in the following, an embodiment of the present application provides a boat piece assembly 100. The boat piece assembly 100 includes a boat piece main body 110 and a heating component 120. The boat piece main body 110 extends in a first direction and is configured to carry a sheet material. The heating component 120 is disposed on the boat piece main body 110 and is configured to heat the sheet material carried by the boat piece main body 110; a shielding component 140 is disposed between the boat piece main body 110 and the heating component 120.

[0037] The boat slice assembly 100 can be applied to a horizontal graphite boat or a vertical graphite boat. The sheet material can be, for example, a silicon wafer or a glass substrate. The heating assembly 120 can be, for example, a heating plate or a heating wire 121. The heating plate can be sintered and formed by placing a heating wire in an insulating and heat-resistant plate such as a ceramic plate or a mica plate. The heating assembly 120 includes a lead wire 122, and the lead wire 122 is electrically connected to an AC power supply, so as to heat the boat slice main body 110 and the sheet material, and provide sufficient temperature for the ionization process gas. The material of the boat slice main body 110 is, for example, graphite.

[0038] In the above embodiment, first, since the heating assembly 120 is disposed in the accommodation space of the boat slice main body 110, the distance between the heating assembly 120 and the sheet material is relatively close, which improves the heating efficiency and the heating uniformity; second, the heat generated by the heating assembly 120 will be transferred to the boat slice main body 110 first and then to the sheet material, without passing through the vacuum chamber. Therefore, even if the vacuum chamber is coated after long-term use, it will not affect the heating speed; third, since there is no need to set a thermal field outside the vacuum chamber for heating, the equipment cost is saved. Moreover, the vacuum chamber can use a metal or silicon carbide material instead of a transparent quartz material with a faster heat transfer speed. Since the metal material has stronger toughness and the silicon carbide material has higher strength, using a vacuum chamber made of metal or silicon carbide material can improve the service life of the vacuum chamber; fourth, by setting the shielding assembly 140, the electromagnetic field of the boat slice main body 110 and the electromagnetic field of other charged structures in the heating carrier can be isolated from affecting the heating assembly 120.

[0039] In some embodiments, the boat slice assembly further includes an insulating assembly 150. The insulating assembly 150 is disposed between the boat slice main body 110 and the shielding assembly 140, and between the shielding assembly 140 and the heating assembly 120. By setting the insulating assembly 150, the boat slice main body 110 can be prevented from being electrically connected to the shielding assembly 140, and the shielding assembly 140 can be prevented from being electrically connected to the heating assembly 120.

[0040] In some embodiments, as Figures 2 to 4 shown, the boat slice main body 110 includes a first sub-boat slice 111 and a second sub-boat slice 112. The first sub-boat slice 111 extends along a first direction; the second sub-boat slice 112 extends along the first direction and is disposed opposite to the first sub-boat slice 111. The first sub-boat slice 111 and the second sub-boat slice 112 are in partial contact, and an accommodation space is formed between the first sub-boat slice 111 and the second sub-boat slice 112.

[0041] Specifically, the heating carrier generally includes a plurality of boat assemblies 100. Adjacent boat assemblies 100 are respectively electrically connected to different electrodes, so that there is a potential difference between adjacent boat assemblies 100 to discharge, thereby ionizing the process gas entering between adjacent boat assemblies 100. Therefore, the first sub-boat 111 and the second sub-boat 112 in each boat assembly 100 need to be electrically connected to each other to have the same potential. By making the first sub-boat 111 and the second sub-boat 112 in partial contact, the first sub-boat 111 and the second sub-boat 112 can be electrically connected to each other. With this structure, while ensuring that the boat body 110 has the same potential, the heating assembly 120 can be arranged inside the boat body 110, so that the heating assembly 120 can quickly heat the boat body 110, and thus the heat can be quickly transferred from the boat body 110 to the sheet material carried by the boat body 110.

[0042] In some embodiments, as Figure 4 shown, the first sub-boat 111 includes a first bearing portion 1111 and a first protruding portion 1112. The first bearing portion 1111 extends along the first direction, and the first protruding portion 1112 is arranged on the side of the first bearing portion 1111 close to the accommodation space; the second sub-boat 112 includes a second bearing portion 1121 and a second protruding portion 1122. The second bearing portion 1121 extends along the first direction, and the second protruding portion 1122 is arranged on the side of the second bearing portion 1121 close to the accommodation space; wherein, an accommodation space is formed between the first bearing portion 1111 and the second bearing portion 1121, and the first protruding portion 1112 contacts the second protruding portion 1122.

[0043] Specifically, the first sub-boat 111 may have one or more first protruding portions 1112, and the first protruding portion 1112 may be exemplarily arranged at one or both ends of the first bearing portion 1111. The second sub-boat 112 may have one or more second protruding portions 1122, and the second protruding portion 1122 may be exemplarily arranged at one or both ends of the second bearing portion 1121. By providing the first protruding portion 1112 and the second protruding portion 1122, the first sub-boat 111 and the second sub-boat 112 can be electrically connected, and there is a gap between the first bearing portion 1111 and the second bearing portion 1121, so as to form an accommodation space for accommodating the heating assembly 120.

[0044] In some embodiments, as Figure 5aAs shown, the heating component 120 includes a heating wire 121 configured to heat the sheet material, and the heating wire 121 is disposed between the first sub-boat plate 111 and the second sub-boat plate 112. The insulating component 150 includes a first insulating member 151 and a second insulating member 152. The first insulating member 151 extends along a first direction and is disposed between the heating wire 121 and the first sub-boat plate 111; the second insulating member 152 extends along the first direction and is disposed between the heating wire 121 and the second sub-boat plate 112. By providing the first insulating member 151, the heating wire 121 can be prevented from being electrically connected to the first sub-boat plate 111, and by providing the second insulating member 152, the heating wire 121 can be prevented from being electrically connected to the second sub-boat plate 112.

[0045] In some embodiments, as Figure 5a shown, the shielding component 140 includes a first shielding member 141 and a second shielding member 142. The first shielding member 141 is disposed between the first insulating member 151 and the first sub-boat plate 111, and the second shielding member 142 is disposed between the second insulating member 152 and the second sub-boat plate 112. The insulating component 150 further includes a third insulating member 153 and a fourth insulating member 154. The third insulating member 153 is disposed between the first shielding member 141 and the first sub-boat plate 111, and the fourth insulating member 154 is disposed between the second shielding member 142 and the second sub-boat plate 112, that is, between the first sub-boat plate 111 and the second sub-boat plate 112, there are sequentially arranged: the third insulating member 153, the first shielding member 141, the first insulating member 151, the heating wire 121, the second insulating member 152, the second shielding member 142, and the fourth insulating member 154.

[0046] Among them, the first shielding member 141 and the second shielding member 142 can be exemplarily metal plates. With this structure, the third insulating member 153 can prevent the first sub-boat plate 111 from being electrically connected to the first shielding member 141. The first shielding member 141 can prevent the electromagnetic field of the first sub-boat plate 111 or the electromagnetic field of other charged structures in the heating carrier on the side where the first shielding member 141 is located from interfering with the heating wire 121. The first insulating member 151 can prevent the first shielding member 141 from being electrically connected to the heating wire 121. The fourth insulating member 154 can prevent the second sub-boat plate 112 from being electrically connected to the second shielding member 142. The second shielding member 142 can prevent the electromagnetic field of the second sub-boat plate 112 or the electromagnetic field of other charged structures in the heating carrier on the side where the second shielding member 142 is located from interfering with the heating wire 121. The second insulating member 152 can prevent the second shielding member 142 from being electrically connected to the heating wire 121.

[0047] In some embodiments, the thickness range of the boat plate assembly 100 is less than or equal to 5 millimeters.

[0048] In some embodiments, the sum of the dimensions of the heating component 120, the shielding component 140, and the insulating component 150 in the thickness direction of the boat component 100 ranges from 1 millimeter to 2 millimeters. Preferably, the range of the sum of the dimensions is from 1.2 millimeters to 1.8 millimeters. More preferably, the sum of the dimensions is 1.5 millimeters.

[0049] Since the volume of the reaction chamber of the reaction furnace is fixed, if the boat component 100 is too thick, the number of boat components 100 in the heating carrier that the reaction chamber can accommodate is less, so that the number of sheet materials that the heating carrier can carry is less and the production capacity is low. By making the thickness of the boat component 100 small enough, that is, within 5 millimeters, the number of boat components 100 in the heating carrier that the reaction chamber can accommodate can be more, so that more sheet materials can be carried and the production capacity can be improved. By making the sum of the dimensions of the heating component 120, the shielding component 140, and the insulating component 150 in the thickness direction of the boat component 100 small enough, the boat component 100 can be made thinner. However, if the thickness of the heating component 120 is too thin, the heating efficiency will be low. Making the range of the sum of the dimensions from 1 millimeter to 2 millimeters can ensure the heating efficiency while making the boat component 100 thin enough.

[0050] In some embodiments, the first insulating member 151, the second insulating member 152, the third insulating member 153, and the fourth insulating member 154 can be in a plate-like structure, or can be insulating blocks, insulating sheets, or insulating layers.

[0051] In some embodiments, the materials of the first insulating member 151, the second insulating member 152, the third insulating member 153, and the fourth insulating member 154 are any one of quartz, ceramics, and silicon carbide. Quartz, ceramics, and silicon carbide materials have good insulation properties.

[0052] Figure 6 The figure shows a schematic structural diagram of a heating carrier provided by an exemplary embodiment of the present application.

[0053] Based on the same concept, as Figure 6 shown, the embodiment of the present application further provides a heating carrier 200. The heating carrier 200 includes at least two boat components 100 and a connecting member 210 in any of the above embodiments; wherein, at least two boat components 100 are arranged at intervals along the second direction, and the boat component 100 is configured to carry sheet materials and heat the sheet materials, and the second direction intersects with the extending direction (i.e., the first direction) of the boat component 100; the connecting member 210 is configured to connect at least two boat components 100.

[0054] Figure 7 The figure shows a schematic structural diagram of a connecting member provided by an exemplary embodiment of the present application.

[0055] In some embodiments, asFigure 7 As shown, the boat piece assembly 100 has a first through hole extending in the second direction (i.e., the boat piece main body 110 and the heating assembly 120 have a first through hole). The connecting piece 210 includes a ceramic rod 211, a ceramic sleeve 212, a first nut 213, a second nut 214, a first gasket 215, and a second gasket 216. Among them, the ceramic rod 211 passes through the first through holes of at least two boat piece assemblies 100. The ceramic sleeve 212 is sleeved on the ceramic rod 211 and is located between adjacent boat piece assemblies 100. The first nut 213 is screwed to the first end of the ceramic rod 211 and is located on the side of the first boat piece assembly 100 away from the last boat piece assembly 100. The second nut 214 is screwed to the second end of the ceramic rod 211 and is located on the side of the last boat piece assembly 100 away from the first boat piece assembly 100. The first gasket 215 is sleeved on the ceramic rod 211 and is disposed between the first nut 213 and the first boat piece assembly 100. The second gasket 216 is sleeved on the ceramic rod 211 and is disposed between the second nut 214 and the last boat piece assembly 100.

[0056] At least two boat piece assemblies 100 can be connected through the ceramic rod 211. The interval between the boat piece assemblies 100 can be maintained through the ceramic sleeve 212. The boat piece assemblies 100 and the ceramic sleeve 212 can be locked through the first nut 213, the first gasket 215, the second nut 214, and the second gasket 216. Therefore, at least two boat piece assemblies 100 can be stably connected through this structure.

[0057] In some embodiments, as Figure 6 shown, the number of boat piece assemblies 100 is at least four. Among them, the heating carrier 200 further includes at least one first spacer 220 and at least one second spacer 230. Among them, at least one first spacer 220 is connected between adjacent even-numbered boat piece assemblies 100. Any first spacer 220 has a first electrode port 221, and the first electrode port 221 is configured to be electrically connected to a power supply device. At least one second spacer 230 is connected between adjacent odd-numbered boat piece assemblies 100. Any second spacer 230 has a second electrode port 231, and the second electrode port 231 is configured to be electrically connected to a power supply device.

[0058] Among them, the first spacer 220 and the second spacer 230 can be exemplarily made of graphite, and the power supply device is exemplarily a radio frequency power supply. Specifically, the power supply device can provide different potentials to the first spacer 220 and the second spacer 230. Since the first spacer 220 and the boat blade assembly 100 are conductive, after any one of the first spacers 220 is energized, the other first spacers 220 and an even number of boat blade assemblies 100 will also have the same potential as it. Since the second spacer 230 and the boat blade assembly 100 are conductive, after any one of the second spacers 230 is energized, the other second spacers 230 and an odd number of boat blade assemblies 100 will also have the same potential as it, so as to achieve a potential difference between adjacent boat blade assemblies 100 to ionize the process gas introduced between adjacent boat blade assemblies 100.

[0059] In some embodiments, as Figure 6 shown, the boat blade assembly 100 has a third protrusion 130. The positions of the third protrusions 130 of an even number of boat blade assemblies 100 and the third protrusions 130 of an odd number of boat blade assemblies 100 are different in the third direction, and the third direction is a direction intersecting the first direction and the second direction. The first spacer 220 is connected between the third protrusions 130 of adjacent even-numbered boat blade assemblies 100, and the second spacer 230 is connected between the third protrusions 130 of adjacent odd-numbered boat blade assemblies 100.

[0060] In some embodiments, the connecting member 210 is also used to connect the boat blade assembly 100 and the first spacer 220, and the boat blade assembly 100 and the second spacer 230. Specifically, the connecting member 210 for connecting the boat blade assembly 100 and the first spacer 220 and the connecting member 210 for connecting the boat blade assembly 100 and the second spacer 230 both include a ceramic rod 211, a first nut 213, a first gasket 215, a second nut 214, and a second gasket 216; among them, the third protrusion 130 has a second through hole, the first spacer 220 has a third through hole, and the second spacer 230 has a fourth through hole. The ceramic rod 211 is used to pass through the second through hole and the third through hole of the third protrusion 130 of an even number of boat blade assemblies 100, and the ceramic rod 211 is also used to pass through the second through hole and the fourth through hole of the third protrusion 130 of an odd number of boat blade assemblies 100. The setting methods of the first nut 213, the first gasket 215, the second nut 214, and the second gasket 216 are the same as the above setting methods and will not be elaborated here.

[0061] In some embodiments, the heating carrier 200 further includes a temperature measuring device, and the temperature measuring device is arranged between the first insulating member 151 and the second insulating member 152 and is configured to detect the temperature of the boat blade assembly 100. Preferably, the temperature measuring device can be arranged at the central position of the area where the heating wire 121 is located, so as to accurately detect the temperature around the heating wire 121.

[0062] Figure 8 The following is a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0063] Based on the same concept, as Figure 8 shown, an embodiment of the present application further provides a processing device 300. The processing device 300 includes a reaction furnace 310 and the heating carrier 200 in any one of the above embodiments. Among them, the reaction furnace 310 has a reaction chamber, which is configured to process sheet materials. The heating carrier 200 can be placed in the reaction chamber and is configured to carry the sheet materials and heat the sheet materials. Among them, the heating carrier 200 can be a vertical graphite boat or a horizontal graphite boat.

[0064] In some embodiments, the reaction furnace 310 has a vacuum chamber. There is a reaction chamber in the vacuum chamber. The material of the vacuum chamber can exemplarily be transparent quartz, silicon carbide, or metal, preferably metal or silicon carbide. Metal has strong toughness, and silicon carbide has good heat resistance and high strength. The vacuum chambers made of metal and silicon carbide materials are less likely to break at high temperatures.

[0065] The basic principles of the present application have been described above in combination with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present application are only examples and not limitations. It cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present application. In addition, the above-disclosed specific details are only for the purposes of illustration and easy understanding, rather than limitations. The above details do not limit the present application to necessarily adopt the above specific details to implement.

[0066] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only exemplary examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used here refer to the word "and / or" and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to" and can be used interchangeably with each other.

[0067] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.

[0068] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Thus, the present application is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0069] The foregoing description has been presented for purposes of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some of their variations, modifications, alterations, additions, and subcombinations.

Claims

1. A boat assembly, characterized in that: include: A boat body extending along a first direction and configured to carry a sheet material; A heating assembly, disposed on the boat body, configured to heat the sheet material carried by the boat body; The shielding component is arranged between the boat body and the heating component.

2. The boat assembly according to claim 1, characterized in that: It also includes an insulating component, which is arranged between the boat body and the shielding component, and between the shielding component and the heating component.

3. The boat assembly according to claim 2, characterized in that: The boat body comprises: A first sub-boat piece extending along the first direction; A second sub-boat sheet extending along the first direction and arranged opposite to the first sub-boat sheet, the first sub-boat sheet is in partial contact with the second sub-boat sheet, and a receiving space is formed between the first sub-boat sheet and the second sub-boat sheet; Wherein, the heating component is arranged in the accommodating space.

4. The boat assembly according to claim 3, characterized in that: The first sub-boat piece comprises: a first bearing portion, the first bearing portion extending along the first direction; A first protrusion, disposed on a side of the first bearing portion close to the accommodating space; The second sub-boat piece comprises: a second bearing portion, the second bearing portion extending along the first direction; A second protruding portion, disposed on a side of the second bearing portion close to the accommodating space; The accommodating space is formed between the first bearing portion and the second bearing portion, and the first protruding portion is in contact with the second protruding portion.

5. The boat assembly according to claim 3, characterized in that: The heating assembly comprises: A heating wire, configured to heat the sheet material, the heating wire being disposed between the first sub-boat sheet and the second sub-boat sheet; Wherein, in the case where the boat assembly includes the insulation assembly, the insulation assembly includes: A first insulating member extending along the first direction and disposed between the heating wire and the first sub-boat; The second insulating member extends along the first direction and is disposed between the heating wire and the second sub-boat.

6. The boat assembly according to claim 5, characterized in that: The shielding assembly comprises: A first shielding member, disposed between the first insulating member and the first sub-boat piece; A second shielding member is disposed between the second insulating member and the second sub-boat piece; Wherein, the insulating component further comprises: A third insulating member, disposed between the first shielding member and the first sub-boat piece; The fourth insulating member is disposed between the second shielding member and the second sub-boat piece.

7. The boat assembly according to claim 6, characterized in that: The material of the first insulating member, the second insulating member, the third insulating member and the fourth insulating member is any one of quartz, ceramic and silicon carbide.

8. The boat assembly according to claim 2, characterized in that: The thickness range of the boat assembly is less than or equal to 5 mm; when the boat assembly includes the insulating assembly, the sum of the dimensions of the heating assembly, the shielding assembly and the insulating assembly in the thickness direction of the boat assembly ranges from 1 mm to 2 mm.

9. A heating carrier, characterized in that: include: At least two boat-sheet assemblies according to any one of claims 1 to 8 are spaced apart along a second direction, the boat-sheet assemblies being configured to carry a sheet material and heat the sheet material, the second direction intersecting with an extension direction of the boat-sheet assemblies; The connecting member is configured to connect at least two of the boat assemblies.

10. A processing equipment, characterized in that: include: A reaction furnace having a reaction chamber configured to process a sheet material; The heating carrier described in claim 9 can be placed in the reaction chamber and is configured to carry the sheet material and heat the sheet material.

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