Single crystal furnace centering device and single crystal furnace

Abstract

The utility model provides a single crystal furnace centering device and a single crystal furnace, and relates to the technical field of single crystal furnaces. The single crystal furnace centering device comprises: a support arm provided with a first through hole, a second through hole and a third through hole between the first through hole and the second through hole; the supporting shaft is embedded in the first through hole; the base is movably connected with the supporting arm through the second through hole; and the pulley is rotationally arranged in the third through hole, and the pulley extends out of the openings in the two sides of the third through hole. The single crystal furnace comprises a crucible and a guide cylinder arranged in the crucible; the water cooling screen is arranged above the crucible and provided with hanging walls on the two sides, and hanging wall grooves are formed in the hanging walls; and the at least two single crystal furnace centering devices are arranged on the two sides of the end opening of the guide cylinder. According to the utility model, the installation of the single crystal furnace is convenient and fast, and the concentricity of the guide cylinder and the water cooling screen is kept stable.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, and particularly to an alignment device for a single crystal furnace and a single crystal furnace. Background Art

[0002] The Czochralski process, also known as the direct pulling method, abbreviated as the CZ method, is a crystal growth method used to obtain semiconductors (such as silicon, germanium, and gallium arsenide), metals (such as palladium, platinum, silver, gold, etc.), salts, and synthetic gemstones. In the single crystal furnace used in the CZ method, a deflector tube for guiding the flow of the melt and a water-cooled screen for creating a uniform thermal field are usually provided, which can further increase the cooling rate of the single crystal rod.

[0003] During the process of pulling a single crystal by the CZ method, the concentricity between the deflector tube and the water-cooled screen (the deviation distance between the center of the deflector tube and the geometric center of the water-cooled screen) has an important influence on normal crystal pulling. If the deflector tube is not aligned and has a poor concentricity with the water-cooled screen, it will cause a large deviation in the determination of the liquid level distance (the distance between the liquid surface and the deflector tube) during crystal pulling. The liquid level distance is mainly measured by an industrial camera CCD through visual capture on both sides in the horizontal direction of the deflector tube. If the captured differences in the liquid level distance are large, it will cause a large deviation in calculating the actual liquid level distance through the measured values, and the instability of the liquid level distance will affect the temperature gradient, liquid level temperature, etc. during single crystal pulling, resulting in poor crystal formation stability and affecting production output. The existing deflector tubes are usually connected to the hanging wall of the water-cooled screen through a conventional hook structure, and it is very easy to displace during the lifting process of the furnace platform operation, resulting in a large deviation in the distances on both sides of the deflector tube; however, if the deflector tube and the water-cooled screen are completely fixed, there are certain production safety risks. Summary of the Utility Model

[0004] The utility model provides an alignment device for a single crystal furnace and a single crystal furnace that can improve the accuracy and stability of capturing the crucible position and liquid level distance of the single crystal furnace, and is beneficial to improving the crystal formation stability, aiming at solving the problems in the prior art that the deflector tube is usually connected to the hanging wall of the water-cooled screen through a conventional hook structure, resulting in a large deviation in the distances on both sides of the deflector tube, thus affecting the determination of the liquid level distance and causing poor crystal formation stability and fluctuating production output.

[0005] The technical solution adopted by the utility model is as follows:

[0006] An alignment device for a single crystal furnace, comprising:

[0007] A support arm, provided with a first through hole, a second through hole, and a third through hole between the first through hole and the second through hole;

[0008] A support shaft, embedded in the first through hole;

[0009] A base, movably connected to the support arm through the second through hole; and

[0010] A pulley, rotatably arranged in the third through hole, and the pulley extends out from the openings on both sides of the third through hole.

[0011] Further, an arc surface is provided at one end of the support arm close to the first through hole.

[0012] Further, both sides of the support shaft are cylinders with rectangular cross-sections.

[0013] Further, two connecting ears are provided at the top of the base, and corresponding first mounting holes and second mounting holes are respectively provided between the two connecting ears; and

[0014] The single crystal furnace centering device further includes a movable shaft, both ends of the movable shaft are respectively arranged in the first mounting hole and the second mounting hole, and the middle part of the movable shaft is embedded in the second through hole;

[0015] Wherein, the support arm can slide up and down and rotate relative to the movable shaft.

[0016] Further, the movable shaft includes:

[0017] A base bolt, sequentially passing through the first mounting hole, the second through hole and the second mounting hole; and

[0018] A base nut, arranged outside the second mounting hole.

[0019] Further, grooves are respectively provided outside the first mounting hole and the second mounting hole of the base, and the two grooves respectively fit the head of the base bolt and the base nut.

[0020] Further, a rotating shaft is arranged in the third through hole, and the pulley is rotatably arranged on the rotating shaft through a bearing.

[0021] Further, the rotating shaft includes a pulley bolt and a pulley nut.

[0022] A single crystal furnace, comprising:

[0023] A crucible,

[0024] A flow guiding cylinder, arranged inside the crucible

[0025] A water cooling screen, arranged above the crucible, and having hanging walls on both sides, and hanging wall grooves are provided on the hanging walls; and

[0026] At least two single crystal furnace centering devices as described above, arranged on both sides at the port of the flow guiding cylinder;

[0027] Among them, the support arm is inserted into the wall hanging groove, the support shaft is arranged above the wall hanging, the base is arranged at the port of the diversion cylinder, and the pulley is arranged in the wall hanging groove.

[0028] Furthermore, the distance between the pulley and the inner side walls on both sides of the wall hanging groove is 1 - 2 mm.

[0029] The beneficial effects of the present utility model are as follows:

[0030] 1. By setting the radial limit of the pulley and the vertical limit of the support shaft, and cooperating with the movable connection of the support arm and the base, the present utility model realizes the convenient and flexible relative position fixation of the diversion cylinder and the water-cooled screen, which is not only convenient for installation, but also can maintain the stability of the concentricity of the diversion cylinder and the water-cooled screen. Thus, it solves the problem in the prior art that the diversion cylinder is usually connected to the wall hanging of the water-cooled screen only through a conventional hook structure, resulting in a large deviation in the distance between both sides of the diversion cylinder, thereby affecting the determination of the liquid port distance, causing the crystal formation stability to deteriorate, and the production output to fluctuate.

[0031] 2. The present utility model also reduces the frictional force by setting the rotational connection between the pulley and the support arm, enabling the pulley to roll friction with the inner side wall of the wall hanging groove of the wall hanging, thereby reducing the generation of metal chips that affect production. Description of the Drawings

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0033] Figure 1 It is the first-side three-dimensional schematic diagram of the centering device according to the embodiment of the present utility model;

[0034] Figure 2 It is the second-side three-dimensional schematic diagram of the centering device according to the embodiment of the present utility model;

[0035] Figure 3 It is the three-dimensional schematic diagram of the support arm according to the embodiment of the present utility model;

[0036] Figure 4 It is the three-dimensional schematic diagram of the support shaft according to the embodiment of the present utility model;

[0037] Figure 5 It is the three-dimensional schematic diagram of the base according to the embodiment of the present utility model;

[0038] Figure 6 It is the installation schematic diagram of the centering device according to the embodiment of the present utility model;

[0039] Figure 7 This is a schematic structural diagram of a single crystal furnace according to an embodiment of the present invention.

[0040] Reference numerals:

[0041] 100 - support arm, 101 - arc surface, 110 - first through hole, 120 - second through hole, 130 - third through hole;

[0042] 200 - support shaft;

[0043] 300 - base, 301 - screw hole, 310 - connecting ear, 311 - first mounting hole, 313 - second mounting hole, 315 - groove, 320 - base bolt, 330 - base nut;

[0044] 400 - pulley, 420 - pulley bolt, 430 - pulley nut;

[0045] 500 - water - cooled screen, 510 - wall - hanging part, 511 - wall - hanging groove;

[0046] 600 - draft tube;

[0047] 700 - crucible. Detailed implementation manners

[0048] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0049] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present invention.

[0050] The embodiments of the present invention will be described in detail below with reference to the drawings.

[0051] Embodiment 1

[0052] Please refer to Figures 1-6, the first embodiment provides a centering device for a single crystal furnace, which is used to be installed at the upper port of the deflector 600 to perform the central positioning of the deflector 600 and the water-cooled screen 500. This centering device for the single crystal furnace can maintain the concentricity of the deflector 600 and the water-cooled screen 500, improve the accuracy and stability of capturing the crucible position and the liquid orifice distance of the single crystal furnace, and is beneficial to improving the crystal growth stability. The centering device for the single crystal furnace mainly includes: a support arm 100, a support shaft 200, a base 300, a pulley 400, etc.

[0053] As Figure 3 shown in the figure, the support arm 100 is generally in a flat strip shape. The support arm 100 is provided with a first through hole 110, a second through hole 120, and a third through hole 130 between the first through hole 110 and the second through hole 120. Among them, the first through hole 110 is arranged at a position close to one end of the support arm 100, and its cross-section is circular. The second through hole 120 is arranged at a position close to the other end of the support arm 100, and its cross-section is in a groove shape, that is, rectangular in the middle and semicircular at both ends. The third through hole 130 is arranged at the middle position of the support arm 100, and its cross-section is also in a groove shape, that is, rectangular in the middle and semicircular at both ends.

[0054] The support shaft 200 is embedded in the first through hole 110 and is installed above the hanging wall 510 of the water-cooled screen 500 during use, for limiting the movement of the centering device in the vertical direction and preventing the deflector 600 and the water-cooled screen 500 from separating. In this embodiment, as Figure 4 shown in the figure, the middle part of the support shaft 200 is in a cylindrical shape, with a size adapted to the first through hole 110 for being embedded in the first through hole 110; the two sides of the middle cylinder are also cylinders, but the cross-sectional area is smaller than that of the middle cylinder and is generally rectangular, so that when the water-cooled screen 500 is lifted and adjusted, the two side cylinders can stably abut against the upper surface of the hanging wall 510 through their flat sides to prevent the deflector 600 from deflecting relative to the water-cooled screen 500.

[0055] The base 300 is movably connected to the support arm 100 through the second through hole 120 and is installed at the port of the deflector 600 during use, for connecting the centering device and the deflector 600 and facilitating the movement and rotation of the support arm 100 in the direction perpendicular to the radial direction of the deflector 600. In this embodiment, as Figure 5As shown, the bottom of the base 300 is generally rectangular in shape, and two connecting ears 310 are provided on the top of the base 300; the two connecting ears 310 are generally rectangular plate-shaped and parallel to each other, and corresponding first mounting holes 311 and second mounting holes 313 are respectively provided in the middle of the two connecting ears 310. The centering device further includes a movable shaft, the two ends of which are arranged in the two mounting holes, and the middle part of the movable shaft is embedded in the second through hole 120 on the support arm 100, and the support arm 100 can slide up and down and rotate relative to the movable shaft, so that the support arm 100 has a certain adjustment space, which is convenient for the installation and disassembly of the centering device.

[0056] The pulley 400 is rotatably arranged in the third through hole 130, and the pulley 400 extends out from the two side openings of the third through hole 130. During use, the pulley 400 is installed in the hanging wall groove 511 of the hanging wall 510 of the water-cooled screen 500 and can roll along the inner side wall of the hanging wall groove 511, thereby restricting the position of the hanging wall 510. The pulley 400 is used for guiding the docking of the water-cooled screen 500 and the guide cylinder 600 during the installation of the single crystal furnace, restricting the concentricity of the two within the required range; and during the lifting and adjustment process of the water-cooled screen 500, controlling the radial offset between the guide cylinder 600 and the water-cooled screen 500 within a certain range and stabilizing the concentricity of the two. In this embodiment, a rotating shaft is provided in the third through hole 130, and the pulley 400 does not contact the inner side surface of the third through hole 130 and is rotatably arranged on the rotating shaft through a bearing.

[0057] As Figure 6 shown, it is a specific installation schematic diagram of the centering device of this embodiment. A specific working mode of this embodiment is: when installing the single crystal furnace, two centering devices of this embodiment are symmetrically installed on both sides of the port of the guide cylinder 600 to align the guide cylinder 600 and the water-cooled screen 500; during the crystal pulling process of the single crystal furnace and during the lifting and adjustment of the water-cooled screen 500, through the radial limit of the pulley 400 and the vertical limit of the support shaft 200, the guide cylinder 600 and the water-cooled screen 500 can not only maintain an appropriate distance but also maintain stable concentricity.

[0058] In this embodiment, the single crystal furnace centering device realizes the convenient and flexible relative position fixation of the guide cylinder 600 and the water-cooled screen 500 by setting the radial limit of the pulley 400 and the vertical limit of the support shaft 200, and cooperating with the movable connection between the support arm 100 and the base 300. It is not only convenient for installation but also can maintain the stable concentricity of the guide cylinder 600 and the water-cooled screen 500, thus solving the problem in the prior art that the guide cylinder is usually connected to the hanging wall of the water-cooled screen through a conventional hook structure, resulting in a large deviation in the distance between the two sides of the guide cylinder, which affects the determination of the liquid port distance, deteriorates the crystal formation stability, and causes fluctuations in production output.

[0059] Meanwhile, in this embodiment, by providing a rotational connection between the pulley 400 and the support arm 100, rolling friction is generated between the pulley 400 and the inner sidewall of the hanging groove 511 of the hanging wall 510, reducing the frictional force and thus reducing the generation of metal chips that affect production.

[0060] In this embodiment, as Figure 3 shown, since the end of the support arm 100 near the first through-hole 110 has a relatively large rotational amplitude during rotation and is exposed outward above the hanging wall 510, an arc surface 101 is provided at the end of the support arm 100 near the first through-hole 110 to reduce the collision and friction between this end and other components during rotation.

[0061] In this embodiment, as Figure 1 、 Figure 2 shown, the movable shaft on the base 300 includes a base bolt 320 and a base nut 330 to facilitate the disassembly and installation of the base 300. Among them, the base bolt 320 is sequentially arranged through the first mounting hole 311, the second through-hole 120, and the second mounting hole 313; the base nut 330 is arranged outside the second mounting hole 313. Moreover, grooves 315 adapted to the head of the base bolt 320 and the base nut 330 are respectively provided outside the first mounting hole 311 and the second mounting hole 313 of the base 300 to accommodate the head of the base bolt 320 and the base nut 330 and prevent the two from protruding outward.

[0062] In this embodiment, the rotating shaft in the third through-hole 130 includes a pulley bolt 420 and a pulley nut 430 to facilitate the disassembly and installation of the pulley 400.

[0063] In addition, in this embodiment, a screw hole 301 is further provided at the bottom of the base 300 for detachably installing the centering device at the upper port of the guide cylinder 600.

[0064] Embodiment 2

[0065] Based on the single crystal furnace centering device in the above embodiment, in the second embodiment, a single crystal furnace using this centering device is further proposed.

[0066] Please refer to Figures 6-7 , the single crystal furnace in the second embodiment mainly includes: a crucible 700, a guide cylinder 600, a water-cooled screen 500, and the single crystal furnace centering device of the above embodiment, etc.

[0067] The crucible 700 is a quartz crucible and is used for melting polysilicon raw materials.

[0068] As Figure 7As shown in the figure, the draft tube 600 is arranged inside the crucible 700. The draft tube 600 guides the melt to flow in the furnace through its specific structure and shape, forming a uniform temperature field and convection field during the single crystal growth process.

[0069] The water-cooled screen 500 is arranged above the crucible 700 and is used to create a uniform thermal field, further increasing the cooling rate of the single crystal rod. And the water-cooled screen 500 has hanging walls 510 on both sides, and the hanging walls 510 are provided with hanging wall grooves 511 for docking with the draft tube 600.

[0070] The centering device of the single crystal furnace in the above embodiment is arranged on both sides at the port of the draft tube 600 and is located between the hanging wall 510 and the draft tube 600. The support arm 100 of the centering device passes through the hanging wall groove 511; its support shaft 200 is arranged above the hanging wall 510; its base 300 is arranged at the port of the draft tube 600; its pulley 400 is arranged in the hanging wall groove 511. Among them, the hanging wall groove 511 is radially perpendicular to the draft tube 600 passing through its center, so that when the position of the pulley 400 shifts left and right in the hanging wall groove 511, the influence of this shift on the concentricity of the water-cooled screen 500 and the draft tube 600 is reduced.

[0071] In the single crystal furnace of this embodiment, the centering device of the single crystal furnace in the above embodiment is specifically applied, and a single crystal furnace in which the draft tube 600 and the water-cooled screen 500 can be conveniently docked and the concentricity between the two can be kept stable is obtained, and its crystal formation stability and production output are improved.

[0072] Preferably, the distance between the pulley 400 and the inner side walls on both sides of the hanging wall groove 511 is 1 - 2 mm. In this range, the concentricity deviation between the draft tube 600 and the water-cooled screen 500 has less influence on production, and by setting a certain distance, the pulley 400 can be prevented from getting stuck in the hanging wall groove 511.

[0073] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace centering device, characterized in that: Include: A support arm (100) provided with a first through hole (110) and a second through hole (120), and a third through hole (130) between the first through hole (110) and the second through hole (120); A support shaft (200) embedded in the first through hole (110); a base (300) movably connected to the support arm (100) via the second through hole (120); and The pulley (400) is rotatably disposed in the third through hole (130), and the pulley (400) extends out from openings on both sides of the third through hole (130).

2. The single crystal furnace centering device according to claim 1, characterized in that: An arc surface (101) is provided on one end of the support arm (100) close to the first through hole (110).

3. The single crystal furnace centering device according to claim 1, characterized in that: Both sides of the support shaft (200) are columns with rectangular cross-sections.

4. The single crystal furnace centering device according to claim 1, characterized in that: Two connecting ears (310) are arranged on the top of the base (300), and corresponding first mounting holes (311) and second mounting holes (313) are respectively arranged in the middle of the two connecting ears (310); and The single crystal furnace centering device further comprises a movable shaft, the two ends of the movable shaft are respectively arranged in the first mounting hole (311) and the second mounting hole (313), and the middle part of the movable shaft is embedded in the second through hole (120); The support arm (100) can slide up and down and rotate relative to the movable shaft.

5. The single crystal furnace centering device according to claim 4, characterized in that: The movable axis comprises: A base bolt (320) is sequentially passed through the first mounting hole (311), the second through hole (120), and the second mounting hole (313); and A base nut (330) is arranged outside the second mounting hole (313).

6. The single crystal furnace centering device according to claim 5, characterized in that: Grooves (315) are respectively arranged on the outside of the first mounting hole (311) and the second mounting hole (313) of the base (300), and the two grooves (315) are respectively adapted to the head of the base bolt (320) and the base nut (330).

7. The single crystal furnace centering device according to claim 1, characterized in that: A rotating shaft is arranged in the third through hole (130), and the pulley (400) is rotatably arranged on the rotating shaft via a bearing.

8. The single crystal furnace centering device according to claim 7, characterized in that: The rotating shaft comprises a pulley bolt (420) and a pulley nut (430).

9. A single crystal furnace, characterized in that: Include: Crucible (700), A flow guide tube (600) is arranged inside the crucible (700) A water cooling screen (500) is arranged above the crucible (700) and has hanging walls (510) on both sides, and the hanging walls (510) are provided with wall hanging grooves (511); and At least two single crystal furnace centering devices according to any one of claims 1 to 8, arranged on both sides of the port of the guide tube (600); The support arm (100) is inserted into the wall-hanging groove (511), the support shaft (200) is arranged above the wall-hanging groove (510), the base (300) is arranged at the port of the guide tube (600), and the pulley (400) is arranged in the wall-hanging groove (511).

10. The single crystal furnace according to claim 9, characterized in that: The distance between the pulley (400) and the inner side walls on both sides of the wall hanging groove (511) is 1-2 mm.

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