Graphite heater for polycrystalline silicon ingot furnace
By designing a detachable single-chip heater structure, the fixing installation of the upper and lower limit plates and the misaligned movement of the fastening bolts is solved, and the problem of deformation and shortening service life of the graphite heater due to thermal stress is achieved, achieving a longer service life and lower production costs.
Patent Information
- Application Number
- CN202420826787.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-22
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-04-22
AI Technical Summary
The existing polysilicon ingot furnace graphite heaters are prone to thermal stress due to thermal expansion and contraction after long-term use, resulting in internal bending deformation, cracks and fractures, shortening service life and increasing production costs.
A single-chip heater consisting of hook-shaped segments, L-shaped connecting segments, U-shaped segments and straight segments is designed. Through the engagement and installation of the upper and lower limit plates, the fastening bolts are dislocated and moved in the long horizontal and vertical holes, reducing thermal stress, and can be disassembled and replaced separately when partially damaged.
It extends the service life of graphite heaters, reduces resource waste and production costs, and improves the practicality of the equipment.
Smart Images
Figure CN222908157U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of graphite heaters, in particular to a graphite heater used in a polysilicon ingot furnace. Background Art
[0002] A polysilicon ingot furnace is a silicon remelting equipment that uses advanced polysilicon directional solidification technology to melt the silicon material at high temperature and then use a special process to directionally condense and crystallize it, ensuring heat sealing and temperature balance during the silicon ingot production process, thereby meeting the quality requirements of polysilicon for solar cell production. It has the characteristics of high precision, high reliability, and high degree of automation. Intelligent large-scale production equipment, however, in order to more accurately control the internal temperature of the furnace body, most of the existing polysilicon ingot furnaces use isostatically pressed high-purity graphite materials as their heaters. The industrial three-phase electricity is converted into low-voltage and high-current through a transformer and passed into the graphite heater, and then the Joule heat emitted by the graphite heater and the temperature control system are used to achieve precise temperature control.
[0003] However, during the continuous heating and cooling cycle of the graphite heater, thermal expansion and contraction will cause thermal stress inside it. After long-term use, the graphite heater will gradually bend and deform, and in severe cases, cracks and even breakage may occur, shortening the service life of the graphite heater. In addition, since most existing graphite heaters are integrally formed, when cracks and breakages occur locally in the graphite heater, the entire graphite heater needs to be replaced, increasing production costs. Therefore, those skilled in the art provide a graphite heater for a polysilicon ingot furnace to solve the problems raised in the above background technology. Utility Model Content
[0004] The utility model aims to provide a graphite heater for a polysilicon ingot furnace to solve the problems raised in the above background technology.
[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:
[0006] A graphite heater for a polysilicon ingot furnace comprises: a heater body, the heater body comprises two monolithic heaters which are symmetrically distributed, and the monolithic heater is composed of a hook-shaped section, an L-shaped connecting section, a U-shaped section A, a U-shaped section B, a U-shaped section C and a straight section, wherein an upper limit plate is arranged at one end of the hook-shaped section close to the U-shaped section B, at both ends of the U-shaped section A, and at both ends of the U-shaped section C, and a lower limit plate is arranged at one end of the L-shaped connecting section close to the U-shaped section A, at both ends of the U-shaped section B, and at both ends of the straight section corresponding to the upper limit plate, and the lower limit plate is snap-fitted and installed on the upper limit plate. The lower end surface of the upper limit plate, and the hook section, U-shaped section A, and U-shaped section C are all installed on the ends of the L-shaped connecting section, U-shaped section B, and the straight section through the cooperation and engagement of the upper limit plate and the lower limit plate, and the upper limit plates at both ends of the U-shaped section A are provided with long horizontal holes, and the top of the upper limit plates on the hook section and the U-shaped section C are provided with long vertical holes, and the inside of the long horizontal holes and the long vertical holes are both plugged with fastening bolts, and the fastening bolts pass through the long horizontal holes and the long vertical holes and are threadedly installed in the inside of the lower limit plate, and the end surface of the straight section is installed with a graphite electrode A for transmitting current to the heater.
[0007] Preferably, threaded holes are provided at positions corresponding to the end surface of the lower limit plate and the long horizontal holes and the long vertical holes, and the fastening bolts pass through the long horizontal holes and the long vertical holes and are threadedly installed inside the threaded holes, and the fastening bolts are made of carbon-carbon composite material.
[0008] Preferably, the long end direction of the long horizontal hole is the same as the long end direction of the U-shaped segment A, the long end direction of the long vertical hole is the same as the long end direction of the hook segment and the U-shaped segment C, and the long end diameter of the long horizontal hole and the long vertical hole is larger than the diameter of the fastening bolt screw.
[0009] Preferably, four through holes C distributed in a circumference are provided at the end surface of the straight segment corresponding to the graphite electrode A, and a limiting bolt C is inserted into the through hole C, and the limiting bolt C passes through the through hole C and is threadedly installed inside the graphite electrode A.
[0010] Preferably, the heater body also includes a two-hole connecting plate and a graphite electrode B, which are arranged at the splicing position of the two monolithic heaters, and an arc-shaped groove is provided on the side of the two-hole connecting plate close to the graphite electrode B, and the two-hole connecting plate is clamped on one side of the graphite electrode B through the arc-shaped groove, and a plurality of through holes A are provided at the ends of the two hook-shaped sections close to each other, and the two-hole connecting plate and the graphite electrode B cover the top of the through holes A, and limiting bolts A are inserted into the interiors of the plurality of through holes A, and the plurality of limiting bolts A pass through the through holes A and are threadedly installed in the two-hole connecting plate and the interiors of the graphite electrode B respectively.
[0011] Preferably, the heater body also includes a six-hole connecting plate, which is arranged at the position where the two L-shaped connecting sections are spliced, and the two ends of the six-hole connecting plate are respectively located above the two L-shaped connecting sections, and the ends of the two L-shaped connecting sections close to each other are each provided with a through hole B, and a limiting bolt B is inserted into the inside of the through hole B. The limiting bolt B passes through the through hole B and is threadedly installed inside the six-hole connecting plate.
[0012] Preferably, the materials of the limiting bolt A, the limiting bolt B and the limiting bolt C are all carbon-carbon composite materials.
[0013] Compared with the prior art, the advantages of the utility model are:
[0014] A monolithic heater is assembled by arranging a hook-shaped segment, an L-shaped connecting segment, a U-shaped segment A, a U-shaped segment B, a U-shaped segment C and a straight segment. When cracks and fractures occur locally in the graphite heater, the individual segments on the monolithic heater can be individually removed and replaced, thereby avoiding the need to replace the entire graphite heater, reducing resource waste, reducing costs, and allowing the fastening bolts to be dislocated and moved in the long horizontal holes and the long vertical holes, thereby reducing the thermal stress inside the graphite heater, reducing the deformation of the graphite heater, and extending the service life of the graphite heater, which is highly practical. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a three-dimensional schematic diagram of a graphite heater according to an embodiment of the utility model;
[0016] Figure 2 It is a schematic diagram of the disassembly of two monolithic heaters according to an embodiment of the utility model;
[0017] Figure 3 It is a schematic diagram of the disassembly of a single-chip heater according to an embodiment of the utility model;
[0018] Figure 4 It is a schematic diagram of the back structure of a graphite heater according to an embodiment of the utility model;
[0019] Figure 5 It is a three-dimensional schematic diagram of a two-hole connecting plate according to an embodiment of the utility model;
[0020] Figure 6 It is a three-dimensional schematic diagram of a graphite heater of a polysilicon ingot furnace in the prior art.
[0021] In the figure: 1. heater body; 2. single-piece heater; 21. hook-shaped section; 211. limit bolt A; 212. through hole A; 22. L-shaped connecting section; 221. limit bolt B; 222. through hole B; 23. U-shaped section A; 24. U-shaped section B; 25. U-shaped section C; 26. straight section; 261. limit bolt C; 262. through hole C; 27. upper limit plate; 271. long horizontal hole; 272. long vertical hole; 28. lower limit plate; 281. threaded hole; 29. fastening bolt; 3. graphite electrode A; 4. six-hole connecting plate; 5. two-hole connecting plate; 51. arc groove; 6. graphite electrode B. DETAILED DESCRIPTION
[0022] In the description of the present utility model, it should be understood that the terms "center", "lateral", "up", "down", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more. In addition, the term "including" and any variation thereof are intended to cover non-exclusive inclusions.
[0023] Combination Figure 1-Figure 6As shown, the heater body 1 includes two monolithic heaters 2 which are symmetrically distributed, and the monolithic heater 2 is composed of a hook-shaped segment 21, an L-shaped connecting segment 22, a U-shaped segment A23, a U-shaped segment B24, a U-shaped segment C25 and a straight segment 26. An upper limit plate 27 is provided at one end of the hook-shaped segment 21 close to the U-shaped segment B24, at both ends of the U-shaped segment A23 and at both ends of the U-shaped segment C25. A lower limit plate 28 is provided at a position corresponding to the upper limit plate 27 at one end of the L-shaped connecting segment 22 close to the U-shaped segment A23, at both ends of the U-shaped segment B24 and at both ends of the straight segment 26. The lower limit plate 28 is mounted on the lower end surface of the upper limit plate 27, and the hook-shaped segment 21, the U-shaped segment A23 and the U-shaped segment B24 are connected to the U-shaped segment C25. Segment A23 and U-shaped segment C25 are both installed at the ends of the L-shaped connecting segment 22, the U-shaped segment B24, and the straight segment 26 through the cooperation and engagement of the upper limit plate 27 and the lower limit plate 28, and a long horizontal hole 271 is opened on the upper limit plate 27 located at both ends of the U-shaped segment A23, and a long vertical hole 272 is opened on the top of the upper limit plate 27 located on the hook segment 21 and the U-shaped segment C25. Fastening bolts 29 are inserted into the long horizontal holes 271 and the long vertical holes 272. The fastening bolts 29 pass through the long horizontal holes 271 and the long vertical holes 272 and are threadedly installed in the lower limit plate 28, and the end face of the straight segment 26 is installed with a graphite electrode A3 for transmitting heater current.
[0024] In one embodiment, when assembling the monolithic heater 2, the graphite electrode A3 can be first covered on the through hole C262 on the straight segment 26, and the limiting bolt C261 inserted in the through hole C262 is screwed to fix the limiting bolt C261 inside the graphite electrode A3 to complete the installation of the graphite electrode A3, and then the upper limit plate 27 and the lower limit plate 28 are matched to sequentially engage the hook segment 21, the L-shaped connecting segment 22, the U-shaped segment A23, the U-shaped segment B24, the U-shaped segment C25 and the straight segment 26, so that the lower limit plate 28 is attached to the lower end surface of the upper limit plate 27, and then the upper limit plate 27 and the lower limit plate 28 are matched to each other. The fastening bolt 29 is inserted into the inside of the long horizontal hole 271 and the long vertical hole 272, and the fastening bolt 29 is screwed to install the fastening bolt 29 in the threaded hole 281 inside the lower limit plate 28, thereby realizing the fixation between the hook-shaped segment 21, the L-shaped connecting segment 22, the U-shaped segment A23, the U-shaped segment B24, the U-shaped segment C25 and the straight segment 26, thereby completing the assembly of the single-chip heater 2. When cracks and fractures occur locally in the graphite heater, the damaged segments can be removed separately for replacement, thereby avoiding the need to replace the entire graphite heater, reducing resource waste and reducing costs.
[0025] In one embodiment, since the long end diameters of the long horizontal holes 271 and the long vertical holes 272 are larger than the diameter of the screw of the fastening bolt 29, when the graphite heater is in the stage of thermal expansion and contraction, the hook section 21, the L-shaped connecting section 22, the U-shaped section A23, the U-shaped section B24, the U-shaped section C25 and the straight section 26 are subjected to mutual forces, so that the fastening bolt 29 can be dislocated and moved in the long horizontal holes 271 and the long vertical holes 272, thereby reducing the thermal stress inside the graphite heater, reducing the deformation of the graphite heater, extending the service life of the graphite heater, and having strong practicality.
[0026] In one embodiment, when assembling the graphite heater, two monolithic heaters 2 can be spliced first, and then the graphite electrode B6 and the two-hole connecting plate 5 are sequentially covered on the through hole A212 on the hook-shaped section 21, and the limiting bolt A211 inserted in the through hole A212 is screwed, and the limiting bolt A211 is sequentially fixed in the inside of the graphite electrode B6 and the two-hole connecting plate 5, completing the installation of the graphite electrode B6 and the connection of the two monolithic heaters 2. Finally, the six-hole connecting plate 4 is covered on the L-shaped connecting section 22. The through hole B222 is assembled on the two-hole connecting plate 5, and the limiting bolt B221 inserted in the through hole B222 is screwed to fix the limiting bolt B221 in sequence inside the six-hole connecting plate 4, thereby completing the assembly of the graphite heater, strengthening the stability of the connection between the two single-chip heaters 2, and ensuring the strength of the graphite heater. In addition, since an arc-shaped groove 51 is provided on one side of the two-hole connecting plate 5, the two-hole connecting plate 5 is engaged with one side of the graphite electrode B6 through the arc-shaped groove 51, and will not interfere with the graphite electrode B6, so it is highly practical.
[0027] The working principle of the utility model is as follows: when using the graphite heater, the graphite electrode A3 can be first covered on the through hole C262 on the straight segment 26, and the limit bolt C261 inserted in the through hole C262 is screwed to fix the limit bolt C261 inside the graphite electrode A3 to complete the installation of the graphite electrode A3, and then the upper limit plate 27 and the lower limit plate 28 are matched to sequentially engage the hook segment 21, the L-shaped connecting segment 22, the U-shaped segment A23, the U-shaped segment B24, the U-shaped segment C25 and the straight segment 26, so that the lower limit plate 28 is attached to the lower end surface of the upper limit plate 27, and then the fastening is sequentially engaged. The bolt 29 is inserted into the inside of the long horizontal hole 271 and the long vertical hole 272, and the fastening bolt 29 is screwed to install the fastening bolt 29 in the threaded hole 281 inside the lower limit plate 28, so as to achieve the fixation between the hook-shaped segment 21, the L-shaped connecting segment 22, the U-shaped segment A23, the U-shaped segment B24, the U-shaped segment C25 and the straight segment 26, and complete the assembly of the single-chip heater 2. Then, the two single-chip heaters 2 are spliced together, so that the hook-shaped segments 21 and the L-shaped connecting segments 22 on the two single-chip heaters 2 fit each other, and then the graphite electrode B6 and the two-hole connecting plate 5 are covered on the through hole A212 on the hook-shaped segment 21 in turn. , and screw the limiting bolt A211 inserted in the through hole A212, and fix the limiting bolt A211 in turn inside the graphite electrode B6 and the two-hole connecting plate 5, completing the installation of the graphite electrode B6 and the connection of the two monolithic heaters 2. Finally, cover the six-hole connecting plate 4 on the through hole B222 on the L-shaped connecting section 22, and screw the limiting bolt B221 inserted in the through hole B222, and fix the limiting bolt B221 in turn inside the six-hole connecting plate 4, thereby strengthening the stability of the connection between the two monolithic heaters 2 and completing the assembly of the graphite heater. When cracks and breakages occur in the parts, the damaged segments are removed separately for replacement, avoiding the need to replace the entire graphite heater, reducing resource waste and reducing costs. In addition, when the graphite heater is in the stage of thermal expansion and contraction, the hook segment 21, L-shaped connecting segment 22, U-shaped segment A23, U-shaped segment B24, U-shaped segment C25 and straight segment 26 are subjected to mutual forces, and the fastening bolts 29 can also be dislocated and moved in the long horizontal hole 271 and the long vertical hole 272, thereby reducing the thermal stress inside the graphite heater, reducing the deformation of the graphite heater, and extending the service life of the graphite heater, which is highly practical.
[0028] What is described above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent substitutions or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A graphite heater for a polycrystalline silicon ingot furnace, comprising: A heater body (1), characterized in that the heater body (1) comprises two symmetrically distributed monolithic heaters (2), and the monolithic heater (2) is composed of a hook-shaped section (21), an L-shaped connecting section (22), a U-shaped section A (23), a U-shaped section B (24), a U-shaped section C (25) and a straight section (26), wherein an upper limit plate (27) is provided at one end of the hook-shaped section (21) close to the U-shaped section B (24), at both ends of the U-shaped section A (23), and at both ends of the U-shaped section C (25), and a lower limit plate (28) is provided at a position corresponding to the upper limit plate (27) at one end of the L-shaped connecting section (22) close to the U-shaped section A (23), at both ends of the U-shaped section B (24), and at both ends of the straight section (26), and the lower limit plate (28) is snap-fitted and installed on the lower end surface of the upper limit plate (27), and the hook-shaped The upper limit plate (27) at both ends of the U-shaped segment A (23) is provided with a long horizontal hole (271), and the upper limit plate (27) at both ends of the U-shaped segment A (23) is provided with a long horizontal hole (271) at both ends of the hook segment (21) and the U-shaped segment C (25). A long vertical hole (272) is provided at the top of the upper limit plate (27), and fastening bolts (29) are inserted into the inside of the long horizontal hole (271) and the long vertical hole (272). The fastening bolts (29) pass through the long horizontal hole (271) and the long vertical hole (272) and are threadedly installed inside the lower limit plate (28), and a graphite electrode A (3) for transmitting heater current is installed on the end surface of the straight segment (26).
2. A graphite heater for a polycrystalline silicon ingot casting furnace according to claim 1, characterized in that: The end surface of the lower limit plate (28) is provided with threaded holes (281) at positions corresponding to the long horizontal holes (271) and the long vertical holes (272); the fastening bolts (29) penetrate the long horizontal holes (271) and the long vertical holes (272) and are threadedly installed inside the threaded holes (281); and the fastening bolts (29) are made of a carbon-carbon composite material.
3. The graphite heater for a polycrystalline silicon ingot casting furnace according to claim 1, characterized in that: The long end direction of the long horizontal hole (271) is the same as the long end direction of the U-shaped segment A (23), the long end direction of the long vertical hole (272) is the same as the long end direction of the hook segment (21) and the U-shaped segment C (25), and the long end diameters of the long horizontal holes (271) and the long vertical holes (272) are larger than the diameter of the screw of the fastening bolt (29).
4. The graphite heater for a polycrystalline silicon ingot casting furnace according to claim 1, characterized in that: Four through holes C (262) distributed in a circumference are provided at positions on the end surface of the straight segment (26) corresponding to the graphite electrode A (3), and a limiting bolt C (261) is inserted into the interior of the through hole C (262). The limiting bolt C (261) passes through the through hole C (262) and is threadedly installed inside the graphite electrode A (3).
5. The graphite heater for a polycrystalline silicon ingot casting furnace according to claim 4, characterized in that: The heater body (1) further comprises a two-hole connecting plate (5) and a graphite electrode B (6), wherein the two-hole connecting plate (5) and the graphite electrode B (6) are arranged at the joint position of the two monolithic heaters (2), and an arc-shaped groove (51) is provided on a side of the two-hole connecting plate (5) close to the graphite electrode B (6), and the two-hole connecting plate (5) is engaged with one side of the graphite electrode B (6) through the arc-shaped groove (51), and a plurality of through holes A (212) are provided at the ends of the two hook-shaped sections (21) close to each other, and the two-hole connecting plate (5) and the graphite electrode B (6) cover the top of the through holes A (212), and a plurality of limit bolts A (211) are inserted into the interior of the through holes A (212), and the plurality of limit bolts A (211) pass through the through holes A (212) and are respectively threadedly installed in the interior of the two-hole connecting plate (5) and the graphite electrode B (6).
6. The graphite heater for a polycrystalline silicon ingot casting furnace according to claim 5, characterized in that: The heater body (1) further comprises a six-hole connecting plate (4), wherein the six-hole connecting plate (4) is arranged at the position where the two L-shaped connecting sections (22) are spliced, and the two ends of the six-hole connecting plate (4) are respectively located above the two L-shaped connecting sections (22), and the ends of the two L-shaped connecting sections (22) close to each other are each provided with a through hole B (222), and a limiting bolt B (221) is inserted into the interior of the through hole B (222), and the limiting bolt B (221) passes through the through hole B (222) and is threadedly mounted inside the six-hole connecting plate (4).
7. The graphite heater for a polycrystalline silicon ingot casting furnace according to claim 6, characterized in that: The materials of the limiting bolt A (211), the limiting bolt B (221) and the limiting bolt C (261) are all carbon-carbon composite materials.