Portable grating diffraction efficiency testing device

Abstract

The utility model discloses a portable grating diffraction efficiency testing device, comprising a light source emission module used for emitting testing light with different wavelengths; the loading test module is used for loading a to-be-tested grating and adjusting the position of the to-be-tested grating to receive test light, and a polarization prism is arranged between the loading test module and the light source emission module to switch the polarization state of the test light; the beam splitter prism is arranged between the polarization prism and the test module and is used for carrying out beam splitting processing on the test light so as to disperse at least one sub-light path; the data processing module is used for collecting test data and generating grating diffraction efficiency; wherein the data processing module comprises a first detector; a second detector; provided is an optical power meter. According to the utility model, the whole test process is less in manual intervention, so that no personal error exists, the measurement accuracy is improved, the measurement adjustment process is more convenient, and the measurement efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical component processing, in particular to a portable grating diffraction efficiency testing device. Background Art

[0002] A grating, also known as a diffraction grating, is an optical element that uses the principle of multi-slit diffraction to disperse light (decompose it into a spectrum). The grating as a whole is a flat glass or metal sheet engraved with a large number of parallel, equally wide, and equally spaced slits. The number of slits is generally dozens to thousands per millimeter. Monochromatic parallel light passes through the diffraction of each slit of the grating and the interference between the slits, forming a pattern with relatively wide dark fringes and relatively thin bright fringes. These sharp, thin, and bright fringes are called spectral lines. The positions of the spectral lines vary with the wavelength; when polychromatic light passes through the grating, spectral lines of different wavelengths appear at different positions to form a spectrum.

[0003] Currently, the application scope of diffraction gratings is very wide. They are mostly used as the core components of spectroscopic instruments. With the development of science and technology, their applications are no longer limited to the field of spectroscopy and are also widely used in fields such as astronomy, metrology, optical communication, integrated optics, and atomic energy. As the applications of diffraction gratings become more extensive, the requirements and precision for their diffraction efficiency also increase.

[0004] Currently, in the manufacturing of optical components, there are generally two methods for testing the diffraction efficiency of gratings:

[0005] Method 1: "Line spectrum method", this method is a manual measurement method. It uses known standard spectral lines as experimental monochromatic light to measure the grating point by point, and these measurement values are finally connected into the corresponding diffraction efficiency curve; generally, the measurement results of this method are relatively accurate, but due to the small number of available standard spectral lines and the fact that measurement errors are easily generated during the manual measurement process itself, the diffraction efficiency of specific wavelengths that can be measured is also limited.

[0006] Method 2: "Continuous scanning method", this method belongs to an automatic measurement method. The entire measurement process is automatically completed in the instrument. After the measurement is completed, the instrument will draw the corresponding diffraction efficiency curve. It can avoid the errors caused by manual measurement, but improper combinations can cause a decrease in the intensity of the diffraction peak, asymmetry of the diffraction peak shape, or a shift of the peak position to one side in the scanning direction.

[0007] Therefore, a new method is needed to test the diffraction efficiency of gratings, reduce measurement errors, and improve measurement efficiency. Content of the Utility Model

[0008] In order to overcome the deficiencies of the prior art, the purpose of the utility model is to provide a portable grating diffraction efficiency testing device, which has the advantages of high measurement accuracy and high measurement efficiency.

[0009] The object of the present utility model is achieved by the following technical solutions:

[0010] According to an embodiment of the present disclosure, a portable grating diffraction efficiency testing device is provided, comprising:

[0011] A light source emission module for emitting test lights of different wavelengths;

[0012] A sample loading and testing module for loading a grating to be tested and adjusting the position of the grating to be tested to receive the test light. A polarization prism is provided between the sample loading and testing module and the light source emission module to switch the polarization state of the test light;

[0013] A beam splitting prism, arranged between the polarization prism and the testing module, for splitting the test light to disperse at least one sub-light path;

[0014] A data processing module for collecting test data and generating the grating diffraction efficiency;

[0015] Wherein, the data processing module comprises:

[0016] A first detector for receiving the sub-light path power for real-time monitoring as a change reference quantity of the test light;

[0017] A second detector for receiving the spectrum diffracted by the grating to be tested for measuring the grating diffraction efficiency; and,

[0018] An optical power meter, connected to the first detector and the second detector, for generating the grating color efficiency according to the measurement results.

[0019] To implement the above technical solutions, during the test, according to the test requirements, the light source module emits test lights of corresponding wavelengths. The grating to be tested is placed on the sample loading and testing module and adjusted to a suitable position and angle. After the polarization treatment by the polarization prism, the test light is adjusted to the required polarization state, that is, P light or S light is selected. Subsequently, the test light is split by the beam splitting prism to disperse at least one sub-light path, which is received by the first detector to realize the real-time monitoring of the test light. After the test light irradiates on the grating to be tested, the diffracted spectrum is received by the second detector for measurement, and finally, the optical power meter receives it for calculating the grating diffraction efficiency; the whole test process has less manual intervention, so there is no human error, the measurement accuracy is improved, and the measurement adjustment process is more convenient, improving the measurement efficiency.

[0020] In some exemplary embodiments, the light source emission module comprises:

[0021] A plurality of light source elements for emitting test lights of different wavelengths;

[0022] A light source switch connected to each of the light source components through an optical fiber jumper for controlling the switching and output of the test light; and,

[0023] A collimating output device connected to the light source switch for controlling the collimated output of the test light.

[0024] To implement the above technical solution, test lights of different wavelengths are emitted by different light source components and transmitted to the light source switch through optical fiber jumpers. The optical fiber jumpers can be selected according to the test lights of different wavelengths, which can reduce the power loss during transmission. After the light source switch converges the test lights of different wavelengths, it can select and switch the test light of the required wavelength for output according to needs. The collimating output device can reduce the light spot and collimate the output of the test light, making it easier to perform diffraction tests.

[0025] In some exemplary embodiments, the collimating output device is installed on a three-axis moving platform, and the three-axis moving platform is used to adjust the emission position of the test light.

[0026] To implement the above technical solution, the position of the collimating output device is adjusted by the three-axis moving platform, so that the test light can be accurately irradiated on the polarization prism according to the test requirements.

[0027] In some exemplary embodiments, the load test module includes: an electric turntable and a six-dimensional test platform provided on the rotating part of the electric turntable. The six-dimensional test platform is used to load the grating to be tested and adjust the position of the grating to be tested.

[0028] To implement the above technical solution, the deflection angle of the six-dimensional test platform is adjusted by the electric turntable, and the position of the grating to be tested is adjusted by the six-dimensional test platform, so as to meet the test requirements of different points and improve the accuracy of the measurement results in cooperation with the second detector.

[0029] In some exemplary embodiments, a tooling support body for loading the grating to be tested is provided on the six-dimensional test platform. The tooling support body is provided with a scale along the length direction of the grating to be tested and an insert along the height direction of the grating to be tested.

[0030] To implement the above technical solution, by setting the tooling support body, the grating to be tested is placed more stably, improving the stability of the test process. The scale provides a reference for adjusting the grating to be tested along the length direction, while the insert serves as a reference for adjusting the grating to be tested along the height direction.

[0031] In some exemplary embodiments, the polarization prism uses a Glan-Taylor prism.

[0032] In some exemplary embodiments, the wavelength range of the test light is selected to be 630nm - 1630nm.

[0033] In summary, compared with the prior art, the utility model has the following beneficial effects:

[0034] In an embodiment of the utility model, a portable grating diffraction efficiency testing device is provided, including: a light source emission module for emitting test lights of different wavelengths; a carrier testing module for loading a grating to be tested and adjusting the position of the grating to be tested to receive the test light, wherein a polarization prism is arranged between the carrier testing module and the light source emission module to switch the polarization state of the test light; a beam splitting prism arranged between the polarization prism and the testing module for splitting the test light to disperse at least one sub-light path; a data processing module for collecting test data and generating the grating diffraction efficiency; wherein the data processing module includes: a first detector for receiving the power of the sub-light path for real-time monitoring as a change reference quantity of the test light; a second detector for receiving the spectrum diffracted by the grating to be tested for measuring the grating diffraction efficiency; and a optical power meter connected to the first detector and the second detector for generating the grating color efficiency according to the measurement result. During the test, according to the test requirements, the light source module emits the test light of the corresponding wavelength, the grating to be tested is placed on the carrier testing module and adjusted to a proper position and angle, the test light is adjusted to the required polarization state after polarization processing by the polarization prism, that is, P light or S light is selected, then the test light is split by the beam splitting prism to disperse at least one sub-light path, the sub-light path is received by the first detector for real-time monitoring of the test light, after the test light irradiates on the grating to be tested, the spectrum formed by diffraction of the grating to be tested is received by the second detector for measurement, and finally the optical power meter receives it for calculation of the grating diffraction efficiency; there is less manual intervention in the whole test process, so there is no human error, the measurement accuracy is improved, and the measurement adjustment process is more convenient, and the measurement efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic structural diagram of an embodiment of the utility model.

[0036] Figure 2 It is a schematic connection structure diagram of a tooling body and a grating to be tested in an embodiment of the utility model.

[0037] The corresponding component names represented by the numbers and letters in the figure:

[0038] 1. First light source component; 2. Second light source component; 3. Third light source component; 4. Fiber optic jumper; 5. Light source switch; 6. Collimating output device; 7. Three-axis moving platform; 8. Polarization prism; 9. Beam splitting prism; 10. First detector; 11. Six-axis testing platform; 12. Electric turntable; 13. Second detector; 14. Optical power meter; 15. Turntable controller; 16. Control terminal; A1. Insert bar; A2. Scale ruler. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0039] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0040] As Figure 1 and Figure 2 shown, the embodiment of the present utility model provides a portable grating diffraction efficiency test device, including: a light source emission module for emitting test lights of different wavelengths; a sample stage test module for loading a grating to be tested and adjusting the position of the grating to be tested to receive the test lights, and a polarization prism 8 is provided between the sample stage test module and the light source emission module to switch the polarization state of the test lights; a beam splitting prism 9 provided between the polarization prism 8 and the test module for splitting the test lights to disperse at least one sub-light path; a data processing module for collecting test data and generating the grating diffraction efficiency.

[0041] Specifically, the light source emission module includes: a plurality of light source components for emitting test lights of different wavelengths; a light source switch 5 connected to each light source component through an optical fiber jumper 4 for controlling the switching and output of the test lights; and a collimating output device 6 connected to the light source switch 5 for controlling the collimated output of the test lights. The wavelength range of the test lights is selected to be 630 nm to 1630 nm, and the light source components for emitting test lights of corresponding wavelengths can be selected and set according to actual test needs. In this embodiment, taking the setting of three light source components as an example, that is, a first light source component 1, a second light source component 2, and a third light source component 3 are set. The three light source components are respectively connected to the power switch through optical fiber jumpers 4 of corresponding wavelengths, and the collimating output device 6 is connected to the output end of the power switch.

[0042] Multiple segments of light sources are formed by different light source components to emit test lights of different wavelengths, which are transmitted to the light source switch 5 through the optical fiber jumper 4. The optical fiber jumper 4 can be selected according to the test lights of different wavelengths, which can reduce the power loss during the transmission process. After the light source switch 5 converges the test lights of different wavelengths, it can select and switch the output of the test lights of the required wavelength according to needs. Switching the light sources of different wavelengths is more convenient, optimizing the operation time. The collimating output device 6 can reduce the light spot size and collimate the output of the test lights, making it easier to perform diffraction tests.

[0043] The collimator 6 is installed on the three-axis moving platform 7. The three-axis moving platform 7 is used to adjust the emission position of the test light. Specifically, the output end of the collimator 6 is fixed to the three-axis moving platform 7 by means of a buckle or the like. The three-axis moving platform 7 adopts an existing three-axis servo platform. By adjusting the position of the collimator 6 through the three-axis moving platform 7, the test light can be accurately irradiated on the polarization prism 8 according to the test requirements.

[0044] The polarization prism 8 can be relatively fixedly arranged with the three-axis moving platform 7 through a base. After the test light is output from the collimator 6, it is irradiated on the polarization prism 8. The polarization prism 8 switches the polarization state of the test light, that is, switches to P light or S light. The polarization prism 8 can adopt, for example, a Glan-Taylor prism.

[0045] The beam splitter prism 9 usually has high transmittance and low reflectance, and can effectively split the incident light beam into two beams according to a predetermined ratio while keeping the polarization state and other optical characteristics of the light beam unchanged. After the test light emitted from the polarization prism 8 is processed by the beam splitter prism 9, it is divided into two beams of light. One beam remains in the original direction unchanged and is used to irradiate the grating under test as the test light, and the other beam forms a sub-light path after being reflected by the beam splitter prism 9 as the reference light.

[0046] The data processing module includes: a first detector 10, which is used to receive the power of the sub-light path for real-time monitoring as a change reference quantity of the test light; a second detector 13, which is used to receive the spectrum diffracted by the grating under test for measuring the grating diffraction efficiency; and a power meter 14, which is connected to the first detector 10 and the second detector 13 and is used to generate the grating color efficiency according to the measurement results. The first detector 10, the second detector 13, and the power meter 14 can all adopt existing test instruments. The angles of the installation positions of the first detector 10 and the second detector 13 need to be adjusted according to the actual test requirements.

[0047] The load test module includes: an electric turntable 12 and a six-axis test platform 11 arranged on the rotating part of the electric turntable 12. The six-axis test platform 11 is used to load the grating under test and adjust the position of the grating under test. The electric turntable 12 is connected with a turntable controller 15. The turntable controller 15 can be used to control the rotation angle of the electric turntable 12. The turntable controller 15 is connected to the control terminal 16. The control parameters of the turntable controller 15 can be set through the control terminal 16. The control terminal 16 can adopt, for example, a PC. The six-axis test platform 11 can adopt an existing structure. By adjusting the deflection angle of the six-axis test platform 11 through the electric turntable 12 and adjusting the position of the grating under test by the six-axis test platform 11, the test requirements of different positions can be met, and the measurement accuracy of the second detector 13 can be improved.

[0048] Further, a tooling support body for loading the grating to be tested is also provided on the six-dimensional test platform 11. A scale ruler A2 is provided along the length direction of the grating to be tested on the tooling support body, and an insert bar A1 is provided along the height direction of the grating to be tested. The tooling support body can be, for example, an optical flat plate, enabling the grating to be tested to be placed stably. As Figure 2 shown, a number of test points A3 are preset on the grating to be tested. The test light is irradiated on the grating to be tested along the A4 direction. The thickness of the insert bar A1 can be set as required, for example, set to 1 mm. By setting the tooling support body, the grating to be tested is placed more stably, improving the stability of the test process. The scale ruler A2 provides a reference for adjusting the grating to be tested along the length direction, while the insert bar A1 serves as a reference for adjusting the grating to be tested along the height direction. By using the scale insert bar method, the test points can be quickly found, improving the work efficiency.

[0049] Before the test, first turn on the light source component, the light source switch 5, and the optical power meter 14 in sequence, and let the device run for about 30 minutes for preheating. Subsequently, adjust the test light and polarization state of the required wavelength, adjust the six-dimensional test platform 11 to an appropriate height, and then use the beam splitting prism 9 for optical path calibration to make the six-dimensional test platform 11 consistent with the optical path. After calibrating the optical path, place the first detector 10 and the second detector 13 at the corresponding positions, and adjust the height, angle, and left-right direction of the first detector 10 and the second detector 13 to make the energy received by the optical power meter 14 reach the maximum, and then perform calibration and zeroing to monitor and measure the subsequent grating diffraction efficiency.

[0050] During the test, according to the test requirements, the test light of the corresponding wavelength is emitted by the light source module, the grating to be tested is placed on the load test module, and adjusted to the appropriate position and angle. The test light is polarized by the polarization prism 8 and adjusted to the required polarization state, that is, select P light or S light. Subsequently, it is split by the beam splitting prism 9 and at least one sub-optical path is dispersed. This sub-optical path is received by the first detector 10 for real-time monitoring of the test light. After the test light is irradiated on the grating to be tested, it is diffracted by the grating to be tested to form a spectrum, which is received by the second detector 13 for measurement. Finally, it is received by the optical power meter 14 for calculation of the grating diffraction efficiency. By measuring each predetermined test site in a scale insert bar manner, the uniformity of the test results is better; there is less manual intervention in the whole test process, so there is no human error, improving the measurement accuracy, and the measurement adjustment process is more convenient, improving the measurement efficiency.

[0051] The above embodiments only illustrate several implementation manners of the present utility model. The description thereof is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can be made. These are all equivalent modifications and evolutions made to the above embodiments based on the substantial technology of the present utility model, and all of these fall within the protection scope of the present utility model.

Claims

1. A portable grating diffraction efficiency test device, characterized in that: include: A light source emission module, used for emitting test light of different wavelengths; The object-carrying test module is used to load the grating to be tested and adjust the position of the grating to be tested to receive the test light. A polarizing prism is provided between the object-carrying test module and the light source emission module to switch the polarization state of the test light. A beam splitter prism, disposed between the polarizing prism and the test module, for performing beam splitting processing on the test light to disperse at least one sub-light path; A data processing module, used for collecting test data and generating grating diffraction efficiency; Wherein, the data processing module includes: A first detector is used to receive the power of the sub-optical path for real-time monitoring as a reference for changes in the test light; A second detector is used to receive the spectrum after diffraction by the grating to be measured to measure the grating diffraction efficiency; and The optical power meter is connected to the first detector and the second detector and is used to generate the grating color efficiency according to the measurement result.

2. The portable grating diffraction efficiency testing device according to claim 1, characterized in that: The light source emission module comprises: A plurality of light source components for emitting test lights of different wavelengths; A light source switch connected to each of the light source components via an optical fiber jumper, used to control the switching and output of the test light; and The collimated output device connected to the light source switch is used to control the collimated output of the test light.

3. The portable grating diffraction efficiency testing device according to claim 2, characterized in that: The collimation output device is installed on a three-axis moving platform, and the three-axis moving platform is used to adjust the emission position of the test light.

4. The portable grating diffraction efficiency testing device according to claim 2 or 3, characterized in that: The object-carrying test module comprises: an electric turntable and a six-dimensional test platform arranged on the rotating part of the electric turntable, wherein the six-dimensional test platform is used for loading the grating to be tested and adjusting the position of the grating to be tested.

5. The portable grating diffraction efficiency testing device according to claim 4, characterized in that: The six-dimensional test platform is provided with a tool support body for loading the grating to be measured, and the tool support body is provided with a scale along the length direction of the grating to be measured and an insert along the height direction of the grating to be measured.

6. The portable grating diffraction efficiency testing device according to claim 1, characterized in that: The polarizing prism is a Glan-Taylor prism.

7. The portable grating diffraction efficiency testing device according to claim 1, characterized in that: The wavelength range of the test light is selected to be 630nm to 1630nm.

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