Cavity structure and coating equipment

Abstract

The utility model relates to the field of photovoltaic technology, in particular to a cavity structure and coating equipment. The problem that in the prior art, a cavity of a traditional plate structure cannot well meet the production and use requirements of the cavity is solved. The cavity structure comprises a frame and a plurality of coaming assemblies. The frame comprises two end supports and a plurality of supporting pieces connected between the two end supports. A coaming assembly is arranged between every two adjacent supporting pieces, the edge, not connected with the supporting pieces, of each coaming assembly extends in the length direction of the supporting pieces and is connected to the two end supports, the coaming assemblies and the frame define a process cavity, and each coaming assembly comprises at least one layer of corrugated board. On the premise that the structural strength and stability are guaranteed, the weight of the cavity structure and the usage amount of raw materials are small, the production and use cost can be reduced, the requirements for large-scale production and use are met, and in addition, the light-weight cavity structure is convenient to carry and install.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic technology, and particularly to a cavity structure and a coating device. Background Art

[0002] Vacuum chambers are widely used in multiple fields due to their versatility, including but not limited to the semiconductor and photovoltaic industries, lithium battery component coating, electronics and energy technologies, aerospace engineering, biomedical science and technology, optical research, laboratory scientific research exploration, and the preparation and processing of traditional and high-tech materials. In these applications, the vacuum chamber can be used as a coating site for products such as photovoltaic cells, semiconductor wafers, and lithium battery metal materials.

[0003] However, traditional vacuum chambers are constructed based on solid plates and often face complex balance challenges between strength and weight. Although such designs can provide the necessary strength and stability, they are accompanied by a significant weight burden and high material costs, thereby reducing economic efficiency and posing obstacles to the high efficiency of large-scale production, the convenient handling and installation of the chamber. In contrast, plate chambers made of lightweight metal sheets effectively reduce the weight, but their strength performance often fails to fully meet the strict requirements in actual application scenarios.

[0004] It can be seen that the traditional plate-structured chambers cannot well meet the production and use requirements of the chambers. Summary of the Utility Model

[0005] In view of this, the embodiments of the present disclosure provide a cavity structure and a coating device, which solve the problem that the traditional plate-structured chambers in the related art cannot well meet the production and use requirements of the chambers.

[0006] In a first aspect, an embodiment of the present disclosure provides a cavity structure applied to a coating device, including: a frame, including two end brackets and a plurality of support members connected between the two end brackets; a plurality of panel assemblies, with each panel assembly disposed between every two adjacent support members, and the edge of each panel assembly not connected to the support member extends along the length direction of the support member and is connected to the two end brackets. The plurality of panel assemblies and the frame enclose a process chamber, and the panel assembly includes at least one corrugated board.

[0007] In some embodiments, the panel assembly further includes: at least one forming board, the forming board is located on one side of the corrugated board close to or away from the process chamber and is fixedly connected to the corrugated board. The edges of the forming board are respectively connected to the two end brackets and two adjacent support members, and the forming board is a straight plate structure.

[0008] In some embodiments, the number of the constituent plates in the same shroud assembly is one, and the constituent plate in the shroud assembly is located on the side of the corrugated plate close to the process chamber; alternatively, the number of the constituent plates is at least two, at least one of the constituent plates is located on the side of the corrugated plate close to the process chamber, and at least one of the constituent plates is located on the side of the corrugated plate away from the process chamber.

[0009] In some embodiments, the shroud assembly further includes: a filling layer located between the constituent plate and the corrugated plate.

[0010] In some embodiments, the material of the filling layer is one of cement, polyurethane, aerogel, glass beads, glass fiber, insulating ceramics, and heat insulating cotton.

[0011] In some embodiments, the support member includes: a first plate body connected between the two end brackets; a second plate body connected between the two end brackets, the second plate body is arranged crosswise with the first plate body, and one side edge of the second plate body is fixedly connected to one side edge of the first plate body; in two adjacent shroud assemblies, one of the shroud assemblies is fixedly connected to the side of the first plate body close to the process chamber, and the other shroud assembly is fixedly connected to the side of the second plate body close to the process chamber.

[0012] In some embodiments, the support member further includes: a first conforming plate having a first side wall, a second side wall, and a third side wall, the first side wall and the second side wall are oppositely arranged, the third side wall is connected between the first side wall and the second side wall, the shape of the first side wall includes a corrugated shape, the second side wall and the third side wall are planar shapes, the second side wall is fixedly attached to the side of the first plate body close to the process chamber, and the third side wall is fixedly attached to the side of the second plate body close to the process chamber; a second conforming plate having a fourth side wall, a fifth side wall, and a sixth side wall, the fourth side wall and the fifth side wall are oppositely arranged, the sixth side wall is connected between the fourth side wall and the fifth side wall, the shape of the fourth side wall includes a corrugated shape, the fifth side wall is a planar shape, the fifth side wall is fixedly attached to the side of the second plate body close to the process chamber, the sixth side wall faces the first plate body and is spaced apart from the first plate body; in two adjacent shroud assemblies, the corrugated plate of the first shroud assembly is fixedly attached to the first side wall, and the first shroud assembly is respectively fixedly attached to the second plate body and the sixth side wall, the corrugated plate of the second shroud assembly is fixedly attached to the fourth side wall, and the second shroud assembly is fixedly attached to the side of the first shroud assembly away from the first conforming member.

[0013] In some embodiments, it further includes: at least one reinforcing member located between adjacent support members, one end of the reinforcing member is connected to one of the end brackets, the other end is connected to the other end bracket, and the reinforcing member is fixedly connected to the enclosure assembly.

[0014] In some embodiments, the end bracket includes: an end plate, one side of the end plate is perpendicularly and fixedly connected to the end of the support member; an inner brace, fixedly connected to the side of the end plate close to the support member and fixedly connected to the side of the support member close to the process chamber.

[0015] In some embodiments, the inner brace is of a square frame structure, and the corners of the inner brace are fixedly connected to the support member.

[0016] In a second aspect, an embodiment of the present disclosure provides a coating device, including: the cavity structure as described in the first aspect; a furnace door detachably connected to the frame of the cavity structure and configured to block the end opening of the process chamber of the cavity structure.

[0017] For a cavity structure and a coating device provided by an embodiment of the present disclosure, a plurality of enclosure assemblies are supported by a frame, and the enclosure assembly includes at least one layer of corrugated board. Since the corrugated board retains the advantage of the light weight of the metal sheet and has higher strength, therefore, on the premise of ensuring the structural strength and stability, the weight of the cavity structure and the amount of raw materials used can be small, which is beneficial to reducing the production and use costs, so as to meet the requirements of large-scale production and use. In addition, the lightweight cavity structure is also convenient for handling and installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 The figure shows an overall structural schematic diagram of a cavity structure provided by an embodiment of the present disclosure.

[0019] Figure 2 The figure shows a structural schematic diagram of an enclosure assembly in a cavity structure provided by an embodiment of the present disclosure.

[0020] Figure 3 The figure shows a structural schematic diagram of an enclosure assembly in a cavity structure provided by another embodiment of the present disclosure.

[0021] Figure 4 The figure shows a structural schematic diagram of an enclosure assembly in a cavity structure provided by another embodiment of the present disclosure.

[0022] Figure 5 The figure shows an exploded view of an enclosure assembly in a cavity structure provided by another embodiment of the present disclosure.

[0023] Figure 6The following is a schematic structural diagram of a surrounding plate assembly in a cavity structure provided by another embodiment of the present disclosure.

[0024] Figure 7 The following is an exploded view of a surrounding plate assembly in a cavity structure provided by another embodiment of the present disclosure.

[0025] Figure 8 The following is a schematic structural diagram of the installation of a first conforming part and a second conforming part in a cavity structure provided by an embodiment of the present disclosure.

[0026] Figure 9 The following is an exploded view showing the structures of the first conforming part and the second conforming part in a cavity structure provided by an embodiment of the present disclosure.

[0027] Figure 10 The following is a schematic structural diagram of the cooperation between an end bracket and a support member in a cavity structure provided by an embodiment of the present disclosure.

[0028] Figure 11 The following is a schematic structural diagram of a coating device provided by an embodiment of the present disclosure.

[0029] Reference numerals:

[0030] 10. Coating device; 11. Cavity structure; 12. Furnace door;

[0031] 100. Frame; 110. End bracket; 111. End plate; 112. Inner support member; 120. Support member; 121. First plate body; 122. Second plate body; 123. First conforming plate; 1231. First side wall; 1232. Second side wall; 1233. Third side wall; 124. Second conforming plate; 1241. Fourth side wall; 1242. Fifth side wall; 1243. Sixth side wall;

[0032] 200. Surrounding plate assembly; 210. Corrugated plate; 220. Constituting plate; 230. Filling layer;

[0033] 300. Reinforcing member. Detailed implementation manners

[0034] Next, the technical solutions in the embodiments of the present disclosure will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present disclosure without creative efforts shall fall within the protection scope of the present disclosure.

[0035] Next, in conjunction with Figures 1 to 10 the cavity structure 11 of this embodiment will be described.

[0036] AsFigures 1 to 5 As shown in the figure, the cavity structure 11 of this embodiment is applied to a coating device 10, including a frame 100 and a plurality of enclosing plate assemblies 200. The frame 100 includes two end brackets 110 and a plurality of support members 120 connected between the two end brackets 110. The edges of the enclosing plate assemblies 200 are respectively connected to the two end brackets 110 and two adjacent support members 120. Specifically, an enclosing plate assembly 200 is arranged between every two adjacent support members 120. A part of the edge of the enclosing plate assembly 200 is connected to the adjacent support member 120, and the edge of each enclosing plate assembly 200 that is not connected to the support member 120 extends along the length direction of the support member 120 and is connected to the two end brackets 110. For example, the enclosing plate assembly 200 is a rectangular plate-like structure, and the two side edges in its width direction are connected to the two adjacent support members 120, and the edges at both ends in the length direction are connected to the end brackets 110. The plurality of enclosing plate assemblies 200 and the frame 100 enclose a process chamber, and the enclosing plate assembly 200 includes at least one corrugated board 210.

[0037] In this embodiment, the frame 100 mainly plays a role in supporting and fixing the plurality of enclosing plate assemblies 200. The plurality of enclosing plate assemblies 200 are hermetically connected to the frame 100 to prevent air leakage at the connection position when a negative pressure is formed in the process chamber. The support members 120 in the frame 100 form the side edges of the cavity structure 11. Therefore, the number of support members 120 can be determined according to the number of side walls or side edges of the cavity structure 11. Figure 1 Taking a rectangle as an example, if the cavity structure 11 is rectangular, the number of support members 120 is 4, and correspondingly, the number of enclosing plate assemblies 200 is also 4. For the convenience of description, the cavity structure 11 is taken as an example of a rectangle for introduction below.

[0038] The material of the corrugated board 210 in this embodiment is a metal material, such as aluminum alloy, stainless steel, titanium alloy, etc., or a non-metal material such as ceramic, quartz, PI, polyurethane, epoxy resin, etc.

[0039] As Figure 2 shown, in an optional form, the enclosing plate assembly 200 includes only one corrugated board 210 or two or more corrugated boards 210 stacked. Two opposite side edges of the corrugated board 210 are respectively fixedly attached to the two end brackets 110, and the other two side edges are respectively fixedly attached to the corresponding support members 120. The adjacent enclosing plate assemblies 200 are perpendicular to each other and are connected and sealed through the support members 120. For the cavity structure 11 of this form, only the corrugated board 210 is used to form the enclosing plate assembly 200, which has a smaller weight, lower production and use costs, and better economy.

[0040] As Figure 3 and Figure 4As shown, in another optional form, the enclosure assembly 200 further includes at least one forming plate 220, which is a straight plate structure. The forming plate 220 is located on the side of the corrugated board 210 close to or away from the process chamber, and is fixedly connected to the corrugated board 210. The edges of the forming plate 220 are respectively connected to the two end brackets 110 and the two adjacent support members 120. In this form of the cavity structure 11, the forming plate 220 is combined with the corrugated board 210, which can further improve the structural strength, and the structure of the forming plate 220 is used to facilitate the sealing of the connection position with the support member 120, and it is also convenient to form a planar structure on the inner or outer side wall of the cavity structure 11 through the forming plate 220.

[0041] The material of the above-mentioned constituent plate 220 is a metal material, such as aluminum alloy, stainless steel, titanium alloy, etc., or a non-metal material such as ceramic, quartz, PI, polyurethane, epoxy resin, etc. The constituent plate 220 and the corrugated board 210 can be made of the same material or different materials, which is not specifically limited here.

[0042] The corrugated board 210 and the constituent board 220 in this embodiment are both thin boards. For example, the thickness of the corrugated board 210 is 0.1 mm to 4 mm, and the thickness of the constituent board 220 is 0.1 mm to 4 mm, so as to ensure the requirements of light weight and low cost. The corrugated board 210 and the support member 120, and / or the constituent board 220 and the support member 120, and / or the corrugated board 210 and the constituent board 220 can be connected and fixed by bonding or welding, and a seal is formed. Preferably, the corrugated board 210 and the support member 120, and / or the constituent board 220 and the support member 120, and / or the corrugated board 210 and the constituent board 220 are all connected and fixed by welding.

[0043] The present embodiment does not specifically limit the number of corrugated boards 210 and constituent boards 220 in the enclosure assembly 200. Optionally, the number of corrugated boards 210 and the number of constituent boards 220 in the same enclosure assembly 200 are one and one or two, respectively. Figure 3 As shown, the number of the constituent plate 220 in the same enclosure assembly 200 is one, and the constituent plate 220 in the enclosure assembly 200 is located on the side of the corrugated board 210 close to the process chamber. The corrugated board 210, as an outer layer structure, has good strength and stability and can resist erosion and damage from the external environment, and the constituent plate 220 is an inner layer structure. Figure 4 and Figure 5 As shown, there are at least two constituent plates 220, wherein at least one constituent plate 220 is located on the side of the corrugated board 210 close to the process chamber, and at least one constituent plate 220 is located on the side of the corrugated board 210 away from the process chamber. The corrugated board 210 serves as a middle layer to support and strengthen.

[0044] likeFigure 6 and Figure 7 As shown in Figure 7 , in some embodiments of the present disclosure, the enclosure assembly 200 further includes a filling layer 230, and the filling layer 230 is located between the forming plate 220 and the corrugated plate 210. Specifically, the corrugated plate 210 and the forming plate 220 in the enclosure assembly 200 are fixedly attached to each other to form a plurality of cavities between the corrugated plate 210 and the forming plate 220, and the filling layer 230 is filled in the cavities.

[0045] The material of the filling layer 230 is one of cement, polyurethane, aerogel, glass beads, glass fiber, insulating ceramics, and heat-insulating cotton. By means of the filling layer 230, the structural strength and the heat-insulating and heat-preserving performance of the enclosure assembly 200 can be ensured. Moreover, the filling layer 230 has the advantage of being lightweight, which can prevent the enclosure assembly 200 from being too heavy.

[0046] Combined with Figure 1 and Figure 9 , in some embodiments of the present disclosure, the support member 120 includes a first plate body 121 and a second plate body 122. The extending directions of the first plate body 121 and the second plate body 122 are the same as the extending direction of the support member 120, and both the first plate body 121 and the second plate body 122 are connected between two end brackets 110. The second plate body 122 is disposed crosswise to the first plate body 121, and one side edge of the second plate body 122 is fixedly connected to one side edge of the first plate body 121. Among two adjacent enclosure assemblies 200, one enclosure assembly 200 is fixedly connected to the side of the first plate body 121 close to the process chamber, and the other enclosure assembly 200 is fixedly connected to the side of the second plate body 122 close to the process chamber.

[0047] In the above embodiments, the first plate body 121 and the second plate body 122 of the support member 120 are disposed at an angle, which can enable the support member 120 to have better bending resistance. By connecting the first plate body 121 and the second plate body 122 to two adjacent enclosure assemblies 200, it is beneficial to reduce the installation difficulty of the enclosure assembly 200 and improve the sealing performance of the connection position between the support member 120 and the enclosure assembly 200. When the cavity structure 11 is a rectangular cavity, the first plate body 121 and the second plate body 122 are perpendicular to each other, so that the support member 120 forms a long strip structure with an L-shaped cross section, and common angle steel can be used as the support member 120, further reducing the production and use costs.

[0048] Combined with Figure 8 and Figure 9In some embodiments of the present disclosure, the support member 120 further includes a first conformal plate 123 and a second conformal plate 124, and the extension direction of the first conformal plate 123 and the second conformal plate 124 is the same as the extension direction of the support member 120. The first conformal plate 123 has a first side wall 1231, a second side wall 1232 and a third side wall 1233, wherein the first side wall 1231 is arranged opposite to the second side wall 1232, and the third side wall 1233 is connected between the first side wall 1231 and the second side wall 1232. The shape of the first side wall 1231 includes a corrugated shape, the second side wall 1232 and the third side wall 1233 are planar shapes, the second side wall 1232 is fixedly attached to the side of the first plate body 121 close to the process chamber, and the third side wall 1233 is fixedly attached to the side of the second plate body 122 close to the process chamber. The second conformal plate 124 has a fourth side wall 1241, a fifth side wall 1242 and a sixth side wall 1243. The fourth side wall 1241 is arranged opposite to the fifth side wall 1242, and the sixth side wall 1243 is connected between the fourth side wall 1241 and the fifth side wall 1242. The shape of the fourth side wall 1241 includes a corrugated shape, the fifth side wall 1242 is a plane shape, the fifth side wall 1242 is fixedly attached to a side of the second plate body 122 close to the process chamber, and the sixth side wall 1243 faces the first plate body 121 and is spaced apart from the first plate body 121. In two adjacent enclosure assemblies 200, the corrugated board 210 of the first enclosure assembly 200 is fitted and fixed to the first side wall 1231, and the first enclosure assembly 200 is respectively fitted and fixed to the second plate body 122 and the sixth side wall 1243, the corrugated board 210 of the second enclosure assembly 200 is fitted and fixed to the fourth side wall 1241, and the second enclosure assembly 200 is fitted and fixed to the side of the first enclosure assembly 200 facing away from the first follower.

[0049] This embodiment is applicable to two types of cavity structures 11, in which the enclosure assembly 200 includes only the corrugated board 210, or the enclosure assembly 200 includes the corrugated board 210 and the forming board 220 and the corrugated board 210 is located on the side of the forming board 220 away from the process chamber.

[0050] In order to make the first enclosure assembly 200 fit better with the sixth side wall 1243, when the first enclosure assembly 200 only includes the corrugated board 210, both sides of the first enclosure assembly 200 are corrugated, and the shape of the sixth side wall 1243 is preferably corrugated; when the first enclosure assembly 200 includes the corrugated board 210 and the constituent board 220 and the corrugated board 210 is located on the side of the constituent board 220 away from the process chamber, the side of the first enclosure assembly 200 close to the sixth side wall 1243 is flat, and the shape of the sixth side wall 1243 is preferably flat.

[0051] Exemplarily, the first conforming plate 123 and the second conforming plate 124 are connected to the support member 120, the enclosure assembly 200, and / or between the first conforming plate 123 and the second conforming plate 124 by welding or bonding.

[0052] In this embodiment, by using the first conforming plate 123 and the second conforming plate 124, the corrugated shape of the corrugated board 210 can be better adapted. The first conforming plate 123, the second conforming plate 124, the support member 120, and the enclosure assembly 200 can be closely attached and fixed to each other, and there are no gaps between them. In addition, the length of the weld or bond seam is increased, thereby increasing the connection strength and connection tightness between the support member 120 and two adjacent enclosure assemblies 200.

[0053] The materials of the first conforming plate 123 and the second conforming plate 124 can be metal materials, such as aluminum alloy, stainless steel, titanium alloy, etc., or non-metal materials such as ceramics, quartz, PI, polyurethane, epoxy resin, etc. Preferably, the first conforming plate 123, the second conforming plate 124, the support member 120, and the enclosure assembly 200 are made of the same material.

[0054] Combined Figure 1 In some embodiments of the present disclosure, the cavity structure 11 further includes at least one reinforcing member 300. The reinforcing member 300 is located between adjacent support members 120. One end of the reinforcing member 300 is connected to one of the end brackets 110, and the other end is connected to the other end bracket 110. The reinforcing member 300 is fixedly connected to the enclosure assembly 200.

[0055] The reinforcing member 300 adopts a rod-shaped or tubular structure. The cross-sectional shape of the reinforcing member 300 includes a circle, a rectangle, an L shape, a triangle, a polygon, an irregular shape, etc. The extending direction of the reinforcing member 300 is the same as that of the support member 120. The reinforcing member 300 can be made of metal materials, such as aluminum alloy, stainless steel, titanium alloy, etc., or non-metal materials such as ceramics, quartz, PI, polyurethane, epoxy resin, etc. Preferably, the reinforcing member 300 and the support member 120 are made of the same material. The reinforcing member 300 can be fixedly connected to the end bracket 110 and the enclosure assembly 200 by welding or bonding. The reinforcing member 300 can support the part of the enclosure assembly 200 located between adjacent support members 120, further improving the structural stability of the cavity structure 11.

[0056] Optionally, the number of the reinforcing members 300 is multiple. Among them, at least one reinforcing member 300 is correspondingly arranged for each enclosure assembly 200. By using multiple reinforcing members 300 to support multiple enclosure assemblies 200 respectively, each enclosure assembly 200 can have good structural strength and prevent deformation when it bears external air pressure.

[0057] Combined Figure 10 In some embodiments of the present disclosure, the end bracket 110 includes an end plate 111 and an inner support member 112. The end plate 111 is of an annular structure, and an end opening of the process cavity is formed on its inner side. One side of the end plate 111 is perpendicularly fixed to the end of the support member 120. The inner support member 112 is fixedly connected to the side of the end plate 111 close to the support member 120 and is also fixedly connected to the side of the support member 120 close to the process cavity.

[0058] Optionally, the inner support member 112 is of a square frame structure. One side of the inner support member 112 is fixedly attached to the end bracket 110, and the corners of the inner support member 112 overlap and are fixed to the support member 120. The connection position between the inner support member 112 and the support member 120 is located on the outer side of the inner support member 112.

[0059] In this embodiment, the support member 120 can be supported by the inner support member 112, making the connection structure between the support member 120 and the end bracket 110 more stable, and effectively preventing cracking at the connection position between the support member 120 and the end bracket 110.

[0060] Optionally, the end of the enclosure assembly 200 is fixedly connected to the inner support member 112, and the inner support member 112 supports the enclosure assembly 200, further enhancing the stability and sealing performance of the cavity structure 11.

[0061] The inner cavity of the cavity structure 11 in this embodiment can be used for heat treatment processes of products such as silicon wafers, for example, for annealing, oxidation, boron diffusion, and phosphorus diffusion, etc., and can also be used for coating processes of products such as silicon wafers, for example, applied to LPCVD (Low Pressure Chemical Vapor Deposition), PECVD (Plasma Enhanced Chemical Vapor Deposition), and ALD (Atomic Layer Deposition), etc.

[0062] Optionally, the cavity structure 11 of this embodiment is provided with a heating component and / or a gas pipeline. Among them, the heating component includes heating wires, which are arranged on the inner or outer side of the cavity structure 11 and are fixedly connected to the frame 100 and / or the enclosure assembly 200 by welding or clamping, etc., to meet the heat treatment requirements in the product processing process; at least part of the gas pipeline is located in the process cavity of the cavity structure 11, and air holes are provided in the process cavity for realizing the supply or discharge of gas in the process cavity.

[0063] Combined Figure 11, embodiments of the present disclosure further provide a coating device 10, including the above-mentioned cavity structure 11, and further including a furnace door 12, which is detachably connected to the frame 100 of the cavity structure 11 and is configured to block the end opening of the process cavity of the cavity structure 11.

[0064] The furnace door 12 and the frame 100 of the cavity structure 11 can be detachably connected by means such as snap connection or hinge connection, etc., and no specific limitation is made here. By moving or rotating the furnace door 12, the end opening of the process cavity can be opened and closed.

[0065] The phrases "an embodiment" and "embodiments" mentioned in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but not necessarily every embodiment includes such specific features, structures, or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. Moreover, when combining specific features, structures, or characteristics with an embodiment, implementing such features, structures, or characteristics in combination with other embodiments, whether explicitly or implicitly described, is within the knowledge scope of those skilled in the art.

[0066] It should be understood that the terms "on", "above", and "over" in the present disclosure should be interpreted in the broadest manner, so that "on" not only means "directly on something", but also includes the meaning of "on something" with intermediate features or layers therebetween, and "above" or "over" not only includes the meaning of "above" or "over something", but also can include the meaning of "above" or "over something" with no intermediate features or layers therebetween (i.e., directly on something).

[0067] In addition, for the convenience of description, spatial relative terms can be used in the text, such as "below", "beneath", "under", "above", "over", etc., to describe the relationship of one component or feature relative to other components or features as shown in the figure. Spatial relative terms are intended to include different orientations of components in use or operation other than the orientation shown in the drawings. The device can have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive words used in the text can be interpreted accordingly.

[0068] It should be noted that in this article, the term "comprising", "including", or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article, or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article, or device. Without more limitations, the element defined by the statement "including one..." does not exclude the existence of additional identical elements in the process, method, article, or device including the said element.

[0069] The above are only the preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent replacements, etc. made within the spirit and principles of the present disclosure shall be included within the protection scope of the present disclosure.

Claims

1. A cavity structure, characterized in that: Applied to coating equipment, including: A frame including two end brackets and a plurality of support members connected between the two end brackets; A plurality of enclosure assemblies are provided between each two adjacent support members, and an edge of each enclosure assembly that is not connected to the support member extends along the length direction of the support member and is connected to the two end brackets. The plurality of enclosure assemblies and the frame form a process cavity, and the enclosure assembly includes at least one layer of corrugated board.

2. The cavity structure according to claim 1, characterized in that: The enclosure assembly further comprises: At least one constituent plate, the constituent plate is located on a side of the corrugated plate close to or away from the process chamber and is fixedly connected to the corrugated plate, the edges of the constituent plate are respectively connected to the two end brackets and the two adjacent support members, and the constituent plate is a straight plate structure.

3. The cavity structure according to claim 2, characterized in that: The number of the constituent plates in the same enclosure assembly is one, and the constituent plates in the enclosure assembly are located on a side of the corrugated board close to the process chamber; Alternatively, the number of the constituent plates is at least two, wherein at least one of the constituent plates is located on a side of the corrugated board close to the process chamber, and at least one of the constituent plates is located on a side of the corrugated board away from the process chamber.

4. The cavity structure according to claim 2 or 3, characterized in that: The enclosure assembly further comprises: A filling layer is located between the constituent board and the corrugated board.

5. The cavity structure according to claim 4, characterized in that: The material of the filling layer is one of cement, polyurethane, aerogel, glass beads, glass fiber, thermal insulation ceramics and thermal insulation cotton.

6. The cavity structure according to any one of claims 1 to 3, characterized in that: The support member comprises: A first plate body connected between the two end brackets; A second plate body, connected between the two end brackets, the second plate body and the first plate body are arranged crosswise, and one side of the second plate body is fixedly connected to one side of the first plate body; Among the two adjacent enclosure assemblies, one of the enclosure assemblies is fixedly connected to a side of the first plate body close to the process chamber, and the other enclosure assembly is fixedly connected to a side of the second plate body close to the process chamber.

7. The cavity structure according to claim 6, characterized in that: The support member also includes: A first conformable plate, wherein the first conformable plate comprises a first side wall, a second side wall and a third side wall, wherein the first side wall is arranged opposite to the second side wall, and the third side wall is connected between the first side wall and the second side wall, wherein the shape of the first side wall comprises a corrugated shape, and the second side wall and the third side wall are planar shapes, wherein the second side wall is fitted and fixed to a side of the first plate body close to the process chamber, and the third side wall is fitted and fixed to a side of the second plate body close to the process chamber; a second conformable plate, the second conformable plate having a fourth side wall, a fifth side wall and a sixth side wall, the fourth side wall being arranged opposite to the fifth side wall, the sixth side wall being connected between the fourth side wall and the fifth side wall, the fourth side wall having a corrugated shape, the fifth side wall being a plane shape, the fifth side wall being fitted and fixed to a side of the second plate body close to the process chamber, and the sixth side wall facing the first plate body and spaced apart from the first plate body; In two adjacent enclosure assemblies, the corrugated board of the first enclosure assembly is fitted and fixed to the first side wall, and the first enclosure assembly is fitted and fixed to the second plate body and the sixth side wall, the corrugated board of the second enclosure assembly is fitted and fixed to the fourth side wall, and the second enclosure assembly is fitted and fixed to the side of the first enclosure assembly facing away from the first conformable plate.

8. The cavity structure according to any one of claims 1 to 3, characterized in that: Also includes: At least one reinforcement member, wherein the reinforcement member is located between adjacent support members, one end of the reinforcement member is connected to one of the end brackets, and the other end of the reinforcement member is connected to the other end bracket, and the reinforcement member is fixedly connected to the enclosure assembly.

9. The cavity structure according to any one of claims 1 to 3, characterized in that: The end bracket comprises: an end plate, one side of which is vertically fixed to the end of the support member; The inner support member is fixedly connected to a side of the end plate close to the support member, and is also fixedly connected to a side of the support member close to the process chamber.

10. The cavity structure according to claim 9, characterized in that: The inner support member is a square frame structure, and the corners of the inner support member are fixedly connected to the support member.

11. A coating device, characterized in that: include: The cavity structure according to any one of claims 1 to 10; The furnace door is detachably connected to the frame of the cavity structure and is configured to block the end opening of the process cavity of the cavity structure.

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