Furnace tube gas inlet assembly and tubular PECVD equipment

Abstract

The utility model relates to the technical field of photovoltaic manufacturing, and provides a furnace tube air inlet assembly and tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. A furnace tube air inlet assembly comprises a connecting part, a flow dividing part and a guide pipe part. The connecting part is used for being connected with a furnace body. The shunting part is arranged on the connecting part, is used for conveying reaction gas and is provided with a gas inlet and a first gas outlet which are communicated with each other; the guide pipe component comprises an outer pipe and an inner pipe, the outer pipe is arranged outside the inner pipe, the inner pipe is communicated with the first air outlet, and the outer pipe is communicated with the cooling circulation component and used for cooling the inner pipe. According to the furnace tube gas inlet assembly, the defect that gas is easy to decompose in the process of conveying reaction gas such as silane by the furnace tube gas inlet assembly in the prior art is overcome, and the furnace tube gas inlet assembly can cool the reaction gas such as silane in the process of conveying the reaction gas so as to prevent the reaction gas from being decomposed.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic manufacturing, in particular to a furnace tube air inlet assembly and a tube type PECVD device. Background Art

[0002] In a tube type PECVD device, silane reaction gas is transported into the furnace through a furnace tube air inlet assembly, and then the silane reaction gas diffuses to a graphite boat and reacts with silicon wafers on the graphite boat. Generally, the temperature inside the furnace is 300°C - 500°C. And the silane reaction gas is easily decomposed in the high-temperature environment inside the tube type PECVD device. Therefore, in order to avoid the reaction gas being easily decomposed during transportation, it is necessary to design a furnace tube air inlet assembly and a tube type PECVD device. Summary of the Utility Model

[0003] The utility model provides a furnace tube air inlet assembly to solve the defect that the existing furnace tube air inlet assembly easily causes gas decomposition during the transportation of reaction gas, and to realize a furnace tube air inlet assembly that can cool the reaction gas during transportation to avoid its decomposition.

[0004] The utility model provides a furnace tube air inlet assembly, which includes a connecting component, a shunt component, and a conduit component. The connecting component is used to connect with the furnace body; the shunt component is arranged on the connecting component, and the shunt component is used to transport the reaction gas, and the shunt component has an air inlet and a first air outlet that are communicated with each other; the conduit component includes an outer tube and an inner tube, the outer tube is sleeved outside the inner tube, the inner tube is communicated with the first air outlet, and the outer tube is communicated with a cooling circulation component for cooling the inner tube.

[0005] According to the furnace tube air inlet assembly provided by the utility model, the shunt component further has a second air outlet, and the second air outlet is communicated with the inside of the furnace body.

[0006] According to the furnace tube air inlet assembly provided by the utility model, the cooling circulation component includes a cooling return pipe and a cooling supply pipe, the cooling return pipe is communicated with one end of the outer tube, and the cooling supply pipe is communicated with the other end of the outer tube.

[0007] According to the furnace tube air inlet assembly provided by the utility model, the inside of the connecting component has a first flow channel and a second flow channel; one end of the first flow channel is provided with a cooling medium inlet nozzle, and the other end is communicated with the cooling supply pipe; one end of the second flow channel is provided with a cooling medium outlet nozzle, and the other end is communicated with the cooling return pipe.

[0008] According to the furnace tube air inlet assembly provided by the utility model, the shunt component is provided with an air flow controller for controlling the gas flow rates of the first air outlet and the second air outlet.

[0009] According to a furnace tube air inlet assembly provided by the present utility model, the air flow controller includes a baffle, the baffle is detachably arranged on the flow splitting component through a limiting component, the baffle is used to block the first air outlet and the second air outlet, and the limiting component is used to adjust the blocking amount of the baffle to the first air outlet and the second air outlet.

[0010] According to a furnace tube air inlet assembly provided by the present utility model, an air flow channel is arranged inside the connecting component, one end of the air flow channel is communicated with the air inlet, and a gas introduction pipe is communicated and arranged at the other end.

[0011] According to a furnace tube air inlet assembly provided by the present utility model, multiple groups of the air inlets, the air flow channels and the gas introduction pipes are arranged in parallel.

[0012] According to a furnace tube air inlet assembly provided by the present utility model, the connecting component is of an annular structure, the flow splitting component is located on the inner wall of the connecting component, and the gas introduction pipe is located outside the connecting component.

[0013] The present utility model also provides a tube type PECVD device, which includes the furnace tube air inlet assembly described in any one of the above embodiments and a furnace body, and the furnace tube air inlet assembly is arranged on the furnace body.

[0014] The present utility model provides a furnace tube air inlet assembly. By connecting the outer tube with the cooling circulation component, the cooling liquid (such as water, oil or other media) flowing in the cooling circulation component will take away the heat on the outer tube, thereby reducing the temperature of the inner tube and its surrounding environment. Furthermore, the risk of decomposition of the silane reaction gas due to high temperature during transportation in the inner tube is effectively reduced, and the purity and reaction efficiency of the reaction gas are improved.

[0015] Since the tube type PECVD device provided by the present utility model includes the above-mentioned furnace tube air inlet assembly, it also has the beneficial effects of the above-mentioned furnace tube air inlet assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained according to these drawings without creative efforts.

[0017] Figure 1 It is a schematic structural diagram of the furnace tube air inlet assembly provided by the present utility model in the first direction.

[0018] Figure 2It is a schematic structural diagram of the furnace tube air inlet assembly provided by the present utility model in the second direction.

[0019] Figure 3 It is a partial structural schematic diagram of the furnace tube air inlet assembly provided by the present utility model.

[0020] Figure 4 It is a cross-sectional view of the furnace tube air inlet assembly provided by the present utility model.

[0021] Figure 5 It is a partial cross-sectional view of the furnace tube air inlet assembly provided by the present utility model.

[0022] Figure 6 It is a schematic structural diagram of the tube type PECVD equipment provided by the present utility model.

[0023] Reference numerals: 100: connecting component; 110: cooling medium inlet nozzle; 120: cooling medium outlet nozzle; 130: air flow channel; 200: shunt component; 210: gas inlet pipe; 220: second air outlet; 230: air flow controller; 231: baffle; 232: limiting member; 233: limiting groove; 240: air inlet; 300: conduit component; 310: outer tube; 320: inner tube; 330: cooling return pipe; 340: cooling supply pipe; 400: furnace body. Detailed implementation manners

[0024] The following further describes in detail the implementation manners of the present utility model in conjunction with the drawings and embodiments. The following embodiments are used to illustrate the present utility model, but cannot be used to limit the scope of the present utility model.

[0025] In the description of the embodiments of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0026] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and defined, the terms "connected" and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0027] In the embodiments of the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may mean that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0028] In the description of this specification, the descriptions with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of the present utility model. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0029] The following Figures 1 - 6 describes the embodiments of the present utility model. Among them, Figure 1 illustrates a schematic structural diagram of the first direction of the furnace tube intake assembly provided by the embodiment of the present utility model. Figure 2 illustrates a schematic structural diagram of the second direction of the furnace tube intake assembly provided by the embodiment of the present utility model. Figure 3 illustrates a partial structural diagram of the furnace tube intake assembly provided by the embodiment of the present utility model. Figure 4 illustrates a cross-sectional view of the furnace tube intake assembly provided by the embodiment of the present utility model.

[0030] Refer to Figures 1 to 4, a furnace tube air inlet assembly provided by the present utility model includes a connection component 100, a flow splitting component 200, and a conduit component 300. The connection component 100 is used to connect with the furnace body; the flow splitting component 200 is arranged on the connection component 100, and the flow splitting component 200 is used to transport reaction gas. The flow splitting component 200 has an air inlet 240 and a first air outlet that are communicated with each other; the conduit component 300 includes an outer tube 310 and an inner tube 320. The outer tube 310 is sleeved outside the inner tube 320. The inner tube 320 is communicated with the first air outlet, and the outer tube 310 is communicated with a cooling circulation component for cooling the inner tube 320. It should be noted that the air inlet 240 is connected to an external gas supply system, and the silane reaction gas enters the flow splitting component 200 through the air inlet 240 of the furnace tube air inlet assembly. Inside the flow splitting component 200, the reaction gas is evenly distributed into each channel or pore. Since the first air outlet is connected to the inner tube 320 of the conduit component 300, finally the gas can smoothly enter the inner tube 320. The inner tube 320 transports the reaction gas into the furnace.

[0031] In the above structure, the outer tube 310 is connected to the cooling circulation component, and the coolant (such as water, oil or other media) flowing in the cooling circulation component takes away the heat on the outer tube 310, thereby reducing the temperature of the inner tube 320 and its surrounding environment. This cooling method effectively reduces the risk of decomposition of the silane reaction gas due to high temperature during transportation in the inner tube 320, and improves the purity and reaction efficiency of the reaction gas. The design of the flow splitting component 200 ensures that the reaction gas can be evenly distributed into the inner tube 320 after entering from the air inlet 240, and then diffuses to the graphite boat through the inner tube 320, so that the silicon wafer surface can uniformly receive the reaction gas, improving the uniformity and consistency of the product.

[0032] In some possible embodiments, since the present utility model needs to work in a high-temperature environment, the connection component 100 and the flow splitting component 200 can be made of stainless steel (such as 316L) or superalloy to withstand high temperature and corrosive environment. The connection component 100 can specifically be a flange. The flange connection form can be more convenient for quick connection and disassembly with the furnace body 400. In addition, a sealing gasket can be arranged inside the connection component 100 to enhance the sealing performance and prevent gas leakage in the furnace.

[0033] Further, the channels inside the flow splitting component 200 can be designed to be streamlined or diffusive to reduce the gas flow resistance and improve the distribution uniformity. Multiple flow channels or orifice plates can also be arranged inside it to achieve more refined gas distribution. The outer tube 310 and the inner tube 320 are cylindrical or customized according to specific requirements, but it is necessary to ensure the effective coating of the inner tube 320. The materials of the outer tube 310 and the inner tube 320 can be made of materials with high temperature resistance and good heat conduction performance, such as copper alloy or aluminum alloy (anti-corrosion treatment needs to be considered). In order to reduce the resistance of gas flow and the flow of the cooling medium, the inner wall and the outer wall of the inner tube 320 can be set to be smooth.

[0034] Furthermore, the cooling circulation component can adopt pipeline materials with corrosion resistance and high temperature resistance, such as stainless steel or special alloys. In order to improve the cooling efficiency, it can also be designed as a double-loop or multi-loop; and inlet and outlet valves and flow meters are arranged on the cooling circulation component, so that the cooling flow can be monitored and adjusted. The cooling circulation component and the outer tube 310 can be connected through joints or sleeves to ensure that the coolant can flow smoothly without leakage.

[0035] Refer to Figure 1 , in some embodiments of the present invention, the flow splitting component 200 further has a second air outlet 220, and the second air outlet 220 is communicated with the inside of the furnace body 400.

[0036] Specifically, the connecting component 100 is connected to the furnace mouth of the furnace body 400 by bolts, and the conduit component 300 extends into the furnace body 400. Also, since the flow splitting component 200 is arranged on the connecting component 100, setting a second air outlet 220 on the flow splitting component 200 enables the present invention to have two air outlet positions. One air outlet position is the second air outlet 220, that is, the gas can be released at the furnace mouth. The other air outlet position is the end of the conduit component 300 away from the connecting component 100, that is, the gas is released in the furnace. Such a setting can enable the reaction gas to be more widely distributed in the furnace, reducing the situation of too high or too low local concentration, thereby improving the uniformity of the reaction gas. And the uniform distribution of the reaction gas helps to improve the reaction efficiency, making the reaction on the silicon wafer more consistent and rapid, thereby improving the quality and output of the product. It should be noted that when designing the second air outlet 220, the opening direction of the second air outlet 220 needs to be set towards the inside of the furnace body 400 so that the reaction gas can directly flow into the furnace body 400.

[0037] Refer to Figure 1 , in some embodiments of the present invention, the cooling circulation component includes a cooling return pipe 330 and a cooling supply pipe 340. The cooling return pipe 330 is communicated with one end of the outer tube 310, and the cooling supply pipe 340 is communicated with the other end of the outer tube 310.

[0038] Specifically, the cooling liquid supply pipe 340 is arranged at one end of the outer pipe 310 close to the shunt component 200, while the cooling liquid return pipe 330 is arranged at one end of the outer pipe 310 far from the shunt component 200. With such an arrangement, when introducing a cooling medium into the interior of the outer pipe 310, it can be directly introduced from the cooling liquid supply pipe 340. Then, the cooling liquid will flow from one end of the outer pipe 310 to the other end, filling the entire outer pipe 310. During the process of the cooling liquid flowing from one end of the outer pipe 310 to the other end, the inner pipe 320 is cooled. When the cooling liquid is cooled, it then flows out through the cooling liquid return pipe 330 and enters the cooler for heat exchange and further cooling, thus preparing for the next cooling step.

[0039] Refer to Figure 1 , in some embodiments of the present utility model, the interior of the connection component 100 has a first flow channel and a second flow channel; one end of the first flow channel is provided with a cooling medium inlet nozzle 110, and the other end is communicated with the cooling liquid supply pipe 340; one end of the second flow channel is provided with a cooling medium outlet nozzle 120, and the other end is communicated with the cooling liquid return pipe 330.

[0040] In the above structure, by directly circulating the cooling medium inside the connection component 100, the path length of heat transfer from the inner pipe 320 to the connection component 100 and then to the cooling circulation component can be reduced, thereby improving the cooling efficiency. This helps to more effectively control the temperature of the inner pipe 320 and reduce the decomposition risk of the silane reaction gas in the inner pipe 320. Secondly, integrating the cooling flow channels inside the connection component 100 reduces the additional cooling pipes and connectors, making the structure of the entire furnace tube gas inlet assembly more compact and concise. This not only reduces the manufacturing cost but also improves the reliability and maintainability of the system.

[0041] In some possible embodiments, a tapered transition section can be provided at the connection between the shunt component 200 and the conduit component 300 to smoothly transition the air flow, reduce eddy currents and turbulence, and lower the energy loss. At the same time, adjustable flow valves can be installed on the cooling liquid return pipe 330 and the cooling liquid supply pipe 340 to adjust the flow rate and velocity of the cooling medium as needed to achieve more precise temperature control. Secondly, temperature monitoring points can also be set at key positions of the inner pipe 320 and the outer pipe 310, and the temperature changes are monitored in real time through temperature sensors and the data is fed back to the control system to timely adjust the cooling parameters. Then, control elements such as temperature sensors and flow valves are integrated with the intelligent control system to achieve automatic control and remote monitoring. Through preset process parameters and algorithms, parameters such as the flow rate of the cooling medium, temperature, and the flow rate of the reaction gas are automatically adjusted to ensure the stability and consistency of the process.

[0042] Refer to Figure 1, in some embodiments of the present utility model, the flow splitting component 200 is provided with an air flow controller 230, and the air flow controller 230 is used to control the gas flow rates of the first air outlet and the second air outlet 220. Specifically, the air flow controller 230 can be a micro electric valve, and the gas flow rates of the first air outlet and the second air outlet 220 are adjusted by adjusting the opening size of the micro regulating valve.

[0043] Referring to Figure 1 , in some embodiments of the present utility model, the air flow controller 230 includes a baffle 231. The baffle 231 is detachably arranged on the flow splitting component 200 through a limiting member 232. The baffle 231 is used to block the first air outlet and the second air outlet 220, and the limiting member 232 is used to adjust the blocking amount of the baffle 231 on the first air outlet and the second air outlet 220.

[0044] Specifically, the baffle 231 is in a plate-like structure, and its width is greater than the diameters of the first air outlet and the second air outlet 220. The limiting member 232 can specifically be a bolt, and threaded holes are provided on the flow splitting component 200. The limiting member 232 is fixed on the flow splitting component 200 by connecting with the threaded holes. At the same time, a limiting groove 233 is also provided on the baffle 231, and the limiting groove 233 is arranged along the length direction of the baffle 231, so as to provide space for the position adjustment of the baffle 231. The limiting member 232 passes through the limiting groove 233 and is threadedly connected with the threaded holes on the flow splitting component 200. When it is necessary to reduce the air output of the first air outlet and the second air outlet 220, the limiting member 232 can be disassembled first, and then the position of the baffle 231 is adjusted so that the limiting member 232 blocks a partial area of the first air outlet and the second air outlet 220, and then the baffle 231 is fixed through the limiting member 232. When it is necessary to increase the air output of the first air outlet and the second air outlet 220, the coverage rate of the baffle 231 on the first air outlet and the second air outlet 220 can be reduced.

[0045] Figure 5 Illustrates a partial cross-sectional view of the furnace tube air inlet assembly provided by the embodiments of the present utility model. Referring to Figure 5 , in some embodiments of the present utility model, an air flow channel 130 is provided inside the connecting component 100. One end of the air flow channel 130 is communicated with the air inlet 240, and the other end is communicated with a gas introduction pipe 210.

[0046] It is connected to an external air supply device through the gas introduction pipe 210, and then the gas passes through the gas introduction pipe 210, the air flow channel 130 and the inside of the flow splitting component 200 in sequence. In order to avoid air leakage, sealing rings can be provided at the connection between the air flow channel 130 and the flow splitting component 200, and at the connection between the gas introduction pipe 210 and the air flow channel 130.

[0047] Referring to Figure 5, in some embodiments of the present utility model, multiple groups of air inlets 240, air flow channels 130, and gas introduction pipes 210 are arranged in parallel. Specifically, two groups can be set. Such a setting can increase the gas input efficiency. At the same time, with redundant setting, when one group fails, the other group can still work to ensure the smooth progress of the work.

[0048] Referring to Figure 5 , in some embodiments of the present utility model, the connecting component 100 is in a ring structure. The flow splitting component 200 is located on the inner wall of the connecting component 100, and the gas introduction pipe 210 is located outside the connecting component 100. With such a setting, it can be realized that the furnace body 400 can be ventilated outside the furnace body 400, which greatly facilitates the gas supply.

[0049] Figure 6 Illustrates the structural schematic diagram of the tube-type PECVD equipment provided by the embodiments of the present utility model. Referring to Figure 6 , the present utility model also provides a tube-type PECVD equipment, including a furnace tube air inlet assembly and a furnace body 400 as described in any one of the above embodiments. The furnace tube air inlet assembly is arranged on the furnace body 400. Specifically, the connecting component 100 is detachably arranged at the opening of the furnace body 400 through bolts, and the conduit component 300 extends into the furnace body 400. It should be noted that during specific use, the internal temperature of the tube-type PECVD equipment can be adjusted to 400 °C.

[0050] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model, rather than to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A furnace tube air intake assembly, characterized in that: include: A connecting component, used for connecting with the furnace body; A flow dividing component, provided on the connecting component, the flow dividing component is used to convey the reaction gas, and the flow dividing component has an air inlet and a first air outlet that are interconnected; The conduit component comprises an outer tube and an inner tube, wherein the outer tube is sleeved on the outside of the inner tube, the inner tube is communicated with the first air outlet, and the outer tube is communicated with a cooling circulation component for cooling the inner tube.

2. The furnace tube air intake assembly according to claim 1, characterized in that: The diverter component also has a second gas outlet, and the second gas outlet is communicated with the interior of the furnace body.

3. The furnace tube air intake assembly according to claim 2, characterized in that: The cooling circulation component includes a cooling return pipe and a cooling liquid supply pipe. The cooling return pipe is communicated with one end of the outer pipe, and the cooling liquid supply pipe is communicated with the other end of the outer pipe.

4. The furnace tube air intake assembly according to claim 3, characterized in that: The connecting component has a first flow channel and a second flow channel inside; One end of the first flow channel is provided with a cooling medium inlet nozzle, and the other end is connected to the cooling liquid supply pipe; One end of the second flow channel is provided with a cooling medium outflow nozzle, and the other end is communicated with the cooling reflux pipe.

5. The furnace tube air inlet assembly according to claim 2, 3 or 4, characterized in that: The flow dividing component is provided with an air flow controller, and the air flow controller is used to control the gas flow of the first air outlet and the second air outlet.

6. The furnace tube air inlet assembly according to claim 5, characterized in that: The airflow controller includes a baffle, which is detachably mounted on the diversion component through a limiting member, and is used to block the first air outlet and the second air outlet. The limiting member is used to adjust the amount of blocking of the first air outlet and the second air outlet by the baffle.

7. The furnace tube air inlet assembly according to claim 6, characterized in that: An air flow channel is provided inside the connecting component, one end of the air flow channel is communicated with the air inlet, and the other end of the air flow channel is communicated with a gas introduction pipe.

8. The furnace tube air intake assembly according to claim 7, characterized in that: The air inlet, the air flow channel and the gas introduction pipe are arranged in multiple groups in parallel.

9. The furnace tube air inlet assembly according to claim 8, characterized in that: The connecting component is an annular structure, the diverter component is located on the inner wall of the connecting component, and the gas introduction pipe is located outside the connecting component.

10. A tubular PECVD device, characterized in that: It comprises the furnace tube air intake assembly as described in any one of claims 1 to 9 and the furnace body, wherein the furnace tube air intake assembly is arranged on the furnace body.

Images