Crucible anti-sticking layer of single crystal furnace and single crystal furnace

Abstract

The utility model provides a crucible anti-sticking layer of a single crystal furnace and the single crystal furnace. The crucible anti-sticking layer is provided with an opening, the opening extends from the center of the crucible anti-sticking layer to the edge, and the crucible anti-sticking layer is overlapped and connected together at the two ends of the opening, so that the crucible anti-sticking layer forms an inner side with a concave structure and an outer side opposite to the inner side; the inner side is used for being adhered to the bottom of the outer side of the crucible, and the outer side is used for being adhered to the inner wall of a crucible support of the single crystal furnace; wherein the crucible anti-sticking layer has high temperature resistance and porosity. According to the crucible anti-sticking layer and the single crystal furnace, the effects that the crucible and the crucible support are prevented from being stuck together, and the crucible and the crucible support are convenient to clean and maintain are achieved.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic semiconductor manufacturing, and particularly to an anti-sticking layer for a crucible of a single crystal furnace and a single crystal furnace. Background Art

[0002] Semiconductors in the photovoltaic industry are manufactured using a single crystal furnace. The single crystal furnace includes a crucible ring, a crucible support, and a crucible. Among them, the crucible ring and the crucible support are important components in the single crystal furnace. The crucible is arranged on the crucible support to carry and fix the crucible, ensuring the stable operation of the crucible in the single crystal furnace.

[0003] The crucible is a container for loading and melting raw materials. In the single crystal furnace, it is mainly used to carry crystal materials. By heating the crucible, the crystal materials are melted, and then the single crystal rod is drawn through processes such as seeding, shoulder turning, equal diameter, and ending. During the operation of the single crystal furnace, the crucible ring and the crucible need to withstand high temperatures and corrosive environments. Therefore, their manufacturing technologies and use and maintenance are very important.

[0004] In the related art, the crucible and the crucible support are in direct contact. After long-term high-temperature operation, the crucible and the crucible support stick together, making it difficult to clean after the furnace is disassembled. Utility Model Content

[0005] This application provides an anti-sticking layer for a crucible of a single crystal furnace and a single crystal furnace, so as to achieve the effect of preventing the crucible and the crucible support from sticking together and facilitating the cleaning and maintenance of the crucible and the crucible support.

[0006] On the one hand, this application provides an anti-sticking layer for a crucible of a single crystal furnace. The anti-sticking layer is provided with an opening that extends from the center of the anti-sticking layer to the edge. The two ends of the opening on the anti-sticking layer are overlapped and connected together, so that the anti-sticking layer forms an inner side with a concave structure and an outer side opposite to the inner side. The inner side of the anti-sticking layer is used to be pasted to the outer bottom of the crucible, and the outer side of the anti-sticking layer is used to be pasted to the inner wall of the crucible support of the single crystal furnace; wherein, the anti-sticking layer has high temperature resistance and porosity.

[0007] In a possible implementation manner, the unfolded shape of the anti-sticking layer for the crucible is a sector.

[0008] In a possible implementation manner, a through hole is provided at the center of the anti-sticking layer for the crucible, and the opening extends from the through hole to the edge of the anti-sticking layer.

[0009] In a possible implementation manner, the opening extends from the center of the anti-sticking layer to the edge, and the opening angle is β;

[0010]

[0011] Wherein, R is the radius of the crucible, α is the angle between the inner wall of the crucible support and the horizontal direction, and the value range of r is 5 mm - 25 mm.

[0012] In a possible implementation, the anti-sticking layer of the crucible is provided with a plurality of the openings, and the plurality of openings are evenly distributed in the circumferential direction of the anti-sticking layer of the crucible, and the sum of the angles of all the openings is β.

[0013] In a possible implementation, the thickness of the anti-sticking layer of the crucible is 0.1 mm - 0.4 mm.

[0014] In a possible implementation, the anti-sticking layer of the crucible is made of graphite foil.

[0015] In a possible implementation, the anti-sticking layer of the crucible is square, and the anti-sticking layer of the crucible is provided with a plurality of the openings, and the plurality of openings are distributed at the four corners of the anti-sticking layer of the crucible.

[0016] On the other hand, an embodiment of the present application further provides a single crystal furnace, and the single crystal furnace includes:

[0017] A crucible;

[0018] A crucible support, and the crucible is located on the crucible support;

[0019] The anti-sticking layer of the crucible as described above, and the anti-sticking layer of the crucible is located between the crucible and the crucible support.

[0020] In a possible implementation, the area of the anti-sticking layer of the crucible is larger than the inner wall area of the crucible support.

[0021] The anti-sticking layer of the crucible and the single crystal furnace provided by the present application, by using a material with characteristics such as high temperature resistance and porosity, combined with the structure of the crucible, set the anti-sticking layer of the crucible. There are openings on the anti-sticking layer of the crucible, and the openings extend from the center of the anti-sticking layer of the crucible to the edge. The two ends of the opening on the anti-sticking layer of the crucible are overlapped and connected together, so that the anti-sticking layer of the crucible forms an inner concave structure on the inner side and an outer side opposite to the inner side. The inner side is used for pasting with the outer bottom of the crucible, and the outer side is used for pasting with the inner wall of the crucible support of the single crystal furnace. When the anti-sticking layer of the crucible is located between the crucible and the crucible support, it can be well attached to the crucible and the crucible support, thereby effectively isolating the crucible and the crucible support, avoiding the reaction caused by the direct contact between the crucible and the crucible support, avoiding the bonding of the crucible and the crucible support together, and at the same time avoiding the corrosion of the crucible support, which is convenient for the maintenance of the crucible and the crucible support. Description of the Drawings

[0022] To more clearly illustrate the technical solutions in the present application or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0023] Figure 1 Schematic diagram of the unfolded structure of an anti-sticking layer of a crucible provided by an embodiment of the present application;

[0024] Figure 2 Schematic diagram for comparing the three-dimensional structure and the unfolded structure of an anti-sticking layer of a crucible provided by an embodiment of the present application;

[0025] Figure 3 Schematic diagram of the calculation parameters of the opening angle of an anti-sticking layer of a crucible provided by an embodiment of the present application;

[0026] Figure 4 Schematic diagram of the connection between the crucible and the crucible support of a single crystal furnace provided by an embodiment of the present application.

[0027] Explanation of the reference numerals:

[0028] 10. Crucible; 20. Crucible support; 30. Anti-sticking layer of the crucible; 31. Opening; 32. Through hole.

[0029] Through the above-mentioned drawings, the clear embodiments of the present application have been shown, and there will be more detailed descriptions hereinafter. These drawings and the text description are not intended to limit the scope of the concept of the present application in any way, but to explain the concept of the present application to those skilled in the art by referring to specific embodiments. Detailed implementation manners

[0030] To make the objectives, technical solutions and advantages of the present application clearer, the following will clearly and completely describe the technical solutions in the present application with reference to the drawings in the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art without creative efforts based on the embodiments in the present application belong to the scope protected by the present application.

[0031] The terms "first", "second", "third", "fourth", etc. in the specification, claims and above-mentioned drawings of the present application are used to distinguish similar objects, and do not necessarily have to be used to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances. For example, without departing from the scope of this article, the first information can also be referred to as the second information, and similarly, the second information can also be referred to as the first information.

[0032] Depending on the context, as used herein, the term "if" can be interpreted as "when" or "while" or "in response to determining".

[0033] Furthermore, as used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise.

[0034] It should be further understood that the terms "comprising", "including" indicate the presence of the stated features, steps, operations, elements, components, items, kinds, and / or groups, but do not preclude the presence, occurrence or addition of one or more other features, steps, operations, elements, components, items, kinds, and / or groups.

[0035] The term "or" and "and / or" as used herein are to be construed in an inclusive sense, or to mean any one or any combination. Thus, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". An exception to this definition occurs only when the combination of elements, functions, steps or operations are mutually exclusive in some manner.

[0036] Semiconductors in the photovoltaic industry are manufactured using a single crystal furnace. The single crystal furnace includes a crucible support, a crucible carrier and a crucible. Among them, the crucible support and the crucible carrier are important components in the single crystal furnace. The crucible is arranged on the crucible carrier to support and fix the crucible, ensuring the stable operation of the crucible in the single crystal furnace.

[0037] The crucible is a container for loading and melting raw materials. In the single crystal furnace, it is mainly used to carry crystal materials. By heating the crucible, the crystal materials are melted, and then the pulling of a single crystal rod is completed through processes such as seeding, shoulder turning, equal diameter growth, and ending. During the operation of the single crystal furnace, the crucible support and the crucible need to withstand high temperatures and corrosive environments. Therefore, their manufacturing technologies and use and maintenance are very important.

[0038] In the related art, the crucible and the crucible carrier are in direct contact. After long-term high-temperature operation, the crucible and the crucible carrier adhere together, making it difficult to clean after the furnace is disassembled. In addition, the crucible carrier comes into contact with the crucible and is also prone to reacting with the crucible and corroding the crucible carrier.

[0039] Based on this, the embodiment of the present application provides an anti-adhesion layer for the crucible of a single crystal furnace. This crucible adhesion layer is arranged between the crucible and the crucible carrier, isolating the contact between the crucible and the crucible carrier at high temperatures, preventing the crucible and the crucible carrier from adhering during the process from high temperature to cooling, facilitating cleaning after the furnace is disassembled, and reducing the corrosion of the crucible carrier.

[0040] The technical solutions of the present application will be described in detail below with specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be repeated in some embodiments.

[0041] Figure 1 Schematic diagram of the unfolded structure of an anti - sticking layer for a crucible provided by an embodiment of the present application; Figure 2 Schematic comparison diagram of the three - dimensional structure and the unfolded structure of an anti - sticking layer for a crucible provided by an embodiment of the present application, as Figure 1 and Figure 2 shown. The crucible anti - sticking layer 30 is used between the crucible 10 and the crucible support 20 to prevent the crucible 10 and the crucible support 20 from sticking. In this embodiment, an opening 31 is provided on the crucible anti - sticking layer 30. The opening 31 extends from the center of the crucible anti - sticking layer 30 towards the edge. The two ends of the opening 31 of the crucible anti - sticking layer 30 are overlapped and connected together, so that the crucible anti - sticking layer 30 forms a three - dimensional body with an inner concave structure. The three - dimensional body includes an inner side and an outer side opposite to the inner side. Among them, the inner side is pasted to the outer bottom of the crucible 10, and the outer side is pasted to the inner wall of the crucible support 20 of the single - crystal furnace.

[0042] Since the outer bottom of the crucible 10 is frustum - shaped, the crucible support 20 is provided with a groove for supporting the outer bottom of the crucible 10, and the groove structure is the same as the outer bottom of the crucible 10. Based on the fact that the crucible anti - sticking layer 30 is located between the crucible 10 and the crucible support 20, in order to make the crucible anti - sticking layer 30 completely cover the contact area between the crucible 10 and the crucible support 20, the structure of the crucible anti - sticking layer 30 is set to be the same as the structure of the crucible support 20, such as a three - dimensional body with an inner concave structure. The outer bottom of the crucible 10 fits with the inner concave structure of the crucible anti - sticking layer 30, and the groove of the crucible support 20 fits with the outer side of the crucible anti - sticking layer 30, and the crucible anti - sticking layer 30 realizes the isolation between the crucible 10 and the crucible support 20.

[0043] Optionally, in the embodiment of the present application, the crucible anti - sticking layer 30 has high temperature resistance and porosity. Among them, high temperature resistance enables it to remain stable at high temperatures, which makes it not easy to stick to molten substances during high - temperature applications. Therefore, it effectively blocks the surface contact between the crucible 10 and the crucible support 20, avoiding adhesion between the crucible 10 and the crucible support 20 at high temperatures and being difficult to clean. Porosity helps to absorb and store gases, including oxygen, and can be used as a gas adsorption material for adsorbing and storing gases. Therefore, it can consume the oxygen in the quartz crucible 10 and thus reduce the corrosion of the crucible support 20.

[0044] As an example, the crucible anti - sticking layer 30 is made of graphite foil. The graphite foil is arranged between the crucible 10 and the crucible support 20, which can effectively block the surface contact between the crucible 10 and the crucible support 20. In this example, the crucible anti - sticking layer 30 is made of graphite foil. Optionally, the manufacturing process and method are as follows: Graphite oxide is shaken or stirred to disperse it in water to form a sol. The sol is evaporated and concentrated, and the graphite oxide precipitates into a foil at the bottom of the container;

[0045] The crucible support 20 is made of carbon composite material, mainly C, and the crucible 10 is a quartz crucible 10 with the main component being SiO2. When the crucible 10 is in direct contact with the crucible support 20, the following reactions occur: SiO2 + 3C forms SiC + 2CO; SiC + SiO2 forms SiO + CO. Therefore, when the crucible support 20 and the crucible 10 are in direct contact, the crucible support 20 is easily corroded. The main component of the graphite foil is also mainly C, which can consume the oxygen in the quartz crucible 10, thereby reducing the corrosion of the crucible support 20.

[0046] Optionally, the graphite foil can fill the corrosion pits existing on the surface of the crucible support 20, prevent the deposition atmosphere and impurities from entering and further corroding the crucible 10, and extend the service life of the crucible support 20; at the same time, it can avoid the problem that the crucible 10 and the crucible support 20 are directly in contact and adhered, making it difficult to clean.

[0047] In the embodiment of the present application, the shape of the crucible anti-sticking layer 30 changes according to the shape of the crucible 10 or the crucible support 20.

[0048] As an example, if the outer bottom of the crucible 10 is frustum-shaped, the raw material of the crucible anti-sticking layer 30 is a circular sheet structure. After an opening 31 is formed in the circular sheet structure, a fan-shaped structure is formed. Then, the two ends of the opening 31 of the fan-shaped structure are overlapped and connected together to form a crucible anti-sticking layer 30 with an inner concave inner side and an outer side corresponding to the inner side. In this way, the outer bottom of the crucible 10 is embedded in the inner side and fits with the inner side, while the inside of the crucible support 20 fits with the outer side.

[0049] The outer bottom of the crucible 10 is frustum-shaped, and the crucible anti-sticking layer 30 fits along the outer bottom of the crucible 10. If the sheet-shaped crucible anti-sticking layer 30 is directly pasted on the outer bottom of the crucible 10, it will cause partial lamination or wrinkling of the crucible anti-sticking layer 30. When there is partial lamination or wrinkling, it will affect its use performance and the stability of the crucible 10 on the crucible support 20. Therefore, in the embodiment of the present application, an opening 31 is formed in the sheet-shaped crucible anti-sticking layer 30 to form a fan-shaped structure; and a through hole 32 is provided at the center of the crucible anti-sticking layer 30, and the opening 31 extends from the through hole 32 to the edge of the crucible anti-sticking layer 30. In this way, when the two ends of the opening 31 of the fan-shaped structure are connected together, a frustum structure (i.e., the crucible anti-sticking layer 30) adapted to the outer bottom of the crucible 10 can be formed. When this crucible 10 bonding layer is located between the crucible 10 and the crucible support 20, it can ensure the uniformity of the fitting position and will not show the phenomenon of delamination or wrinkling.

[0050] Optionally, the radius r of the through hole 32 ranges from 5 mm to 25 mm. The crucible anti-sticking layer 30 is located between the crucible 10 and the crucible support 20, and this through hole 32 can be filled to achieve the isolation of the crucible 10 and the crucible support 20, and at the same time, it can also avoid the stacking or wrinkling of the crucible anti-sticking layer 30 at the through hole 32.

[0051] After the anti-sticking layer 30 of the crucible is overlapped and connected together at both ends of the opening 31, it can fit the crucible 10 and the crucible support 20, and fit with the crucible 10 and the crucible support 20 to reduce lamination or wrinkles, depending on the opening angle of the opening 31. Therefore, the rationality of setting the opening angle of the opening 31 can improve the isolation effect of the anti-sticking layer 30 of the crucible.

[0052] As an example, as Figure 3 shown, the opening 31 of the anti-sticking layer 30 of the crucible extends from the center of the anti-sticking layer 30 of the crucible to the edge, and the opening angle of the opening 31 is β, where β is calculated by the following formula:

[0053]

[0054] where, R is the radius of the crucible 10, α is the angle between the inner wall of the crucible support 20 and the horizontal direction, and r is the radius of the through hole 32, and the value range of r is 5 mm - 25 mm.

[0055] That is, the opening angle is determined by the radius of the crucible 10, the angle between the inner wall of the crucible support 20 and the horizontal direction, and the radius of the central through hole 32. According to the designed thermal field required for use, calculate the opening angle β of the anti-sticking layer 30 of the crucible, and then open the sheet graphite foil according to this opening angle to obtain a sector graphite foil. Overlap and connect the two ends of the opening of the sector graphite foil together, then a frustum structure is formed, that is, the final anti-sticking layer 30 of the crucible. Paste the anti-sticking layer 30 of the crucible between the crucible 10 and the crucible support 20, then the isolation between the crucible 10 and the crucible support 20 is realized.

[0056] In the embodiment of the present application, by using a material with characteristics such as high temperature resistance and porosity, combined with the structure of the crucible 10, the anti-sticking layer 30 of the crucible is set. There is an opening 31 on the anti-sticking layer 30 of the crucible, and the opening 31 extends from the center of the anti-sticking layer 30 of the crucible to the edge. The anti-sticking layer 30 of the crucible is overlapped and connected together at both ends of the opening 31, so that the anti-sticking layer 30 of the crucible forms an inner side with an inner concave structure and an outer side opposite to the inner side. The inner side is used to paste with the outer bottom of the crucible 10, and the outer side is used to paste with the inner wall of the crucible support 20 of the single crystal furnace. When the anti-sticking layer 30 of the crucible is located between the crucible 10 and the crucible support 20, it can fit well with the crucible 10 and the crucible support 20, thereby effectively isolating the crucible 10 and the crucible support 20, preventing the crucible 10 and the crucible support 20 from directly contacting and reacting, preventing the crucible 10 and the crucible support 20 from being bonded together, and at the same time preventing the crucible support 20 from being corroded, which is convenient for the maintenance of the crucible 10 and the crucible support 20.

[0057] The above is an example of setting an opening 31 on the anti-sticking layer 30 of the crucible. In actual applications, multiple openings 31 can also be set on the anti-sticking layer 30 of the crucible. The multiple openings 31 are evenly distributed in the circumferential direction of the anti-sticking layer 30 of the crucible, and the sum of the angles of all the openings is β. In this example, the two ends of each opening 31 are overlapped and connected together to form the above-mentioned frustum structure, which can also be pasted between the crucible 10 and the crucible support 20, and reduce the wrinkles and laminations. Compared with the example of setting one opening 31, this example can be adapted to crucibles 10 of different shapes and reduce the wrinkles and laminations.

[0058] Alternatively, as an example, if the outer bottom of the crucible 10 is square, the sheet-shaped anti-sticking layer 30 of the crucible is square. In this example, the sheet-shaped anti-sticking layer 30 has openings 31 in four directions, and then the two ends of each opening 31 are connected to form a three-dimensional square structure, and then it covers between the crucible support 20 and the crucible 10 from four angles to form an isolation.

[0059] And by opening 31 from four angles, lamination or wrinkling will not occur at the corners to adapt to the structure of the crucible 10.

[0060] If the thickness of the anti-sticking layer 30 of the crucible is too thin, its strength is low and it is easy to be damaged. If it is too thick, its flexibility decreases and it cannot completely fit the surface of the crucible support 20 or the surface of the crucible 10. Based on this, the thickness selection range of the anti-sticking layer 30 of the crucible is: 0.1 mm to 0.4 mm. In a preferred embodiment, the thickness selection range of the anti-sticking layer 30 of the crucible is 0.2 mm.

[0061] Figure 4 This is a schematic connection diagram of the crucible and the crucible support of the single crystal furnace provided by an embodiment of the present application. As Figure 4 shown, the embodiment of the present application also provides a single crystal furnace, which includes:

[0062] A crucible 10;

[0063] A crucible support 20, and the crucible 10 is located on the crucible support 20;

[0064] An anti-sticking layer 30 of the crucible, and the anti-sticking layer 30 of the crucible is located between the crucible 10 and the crucible support 20.

[0065] The anti-sticking layer 30 of the crucible is sheet-shaped. An opening 31 is provided on the anti-sticking layer 30 of the crucible. The opening 31 extends from the center of the anti-sticking layer 30 of the crucible to the edge. The two ends of the anti-sticking layer 30 of the crucible at the opening 31 are overlapped and connected together, so that the anti-sticking layer 30 of the crucible forms a three-dimensional body with an inner concave structure. The three-dimensional body includes an inner side and an outer side opposite to the inner side. Among them, the inner side is pasted to the outer bottom of the crucible 10, and the outer side is pasted to the inner wall of the crucible support 20 of the single crystal furnace.

[0066] As an example, in order to ensure that the crucible anti-sticking layer 30 completely covers the contact area between the crucible support 20 and the crucible 10, the area of ​​the crucible anti-sticking layer 30 is larger than the inner wall area of ​​the crucible support 20. Exemplarily, the rigid anti-sticking layer structure is made of a graphite foil sheet having an unfolded area larger than the unfolded area of ​​the crucible support 20, so that the area of ​​the crucible anti-sticking layer 30 is larger than the inner wall area of ​​the crucible support 20.

[0067] The single crystal furnace provided in this embodiment adopts the crucible anti-sticking layer 30 provided in the above embodiment, which is pasted between the crucible 10 and the crucible support 20. Its implementation principle and technical effects are similar to those of the above embodiment, and will not be described in detail in this embodiment.

[0068] In addition, in the embodiment of the present application, the crucible anti-sticking layer 30 is convenient to install and disassemble on the single crystal furnace, and can effectively isolate the crucible 10 and the crucible support 20 to prevent the crucible support 10 from sticking to the crucible 20 during the process of high temperature to cooling, and can fill the gap between the crucible 10 and the crucible support 20 to prevent the deposition atmosphere in the furnace from penetrating into the gap and corroding the crucible 10, thereby increasing the operating time of the crucible 10.

[0069] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the above embodiments, a person of ordinary skill in the art should understand that the technical solutions described in the above embodiments can still be modified, or some or all of the technical features can be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A crucible anti-sticking layer for a single crystal furnace, characterized in that: The crucible anti-sticking layer is provided with an opening, and the opening extends from the center to the edge of the crucible anti-sticking layer, and the crucible anti-sticking layer is overlapped and connected together at both ends of the opening, so that the crucible anti-sticking layer forms an inner side with a concave structure and an outer side opposite to the inner side, the inner side of the crucible anti-sticking layer is used to stick to the outer bottom of the crucible, and the outer side of the crucible anti-sticking layer is used to stick to the inner wall of the crucible holder of the single crystal furnace; wherein, the crucible anti-sticking layer has high temperature resistance and porosity.

2. The anti-sticking layer of the crucible of the single crystal furnace according to claim 1, characterized in that: The unfolded shape of the crucible anti-sticking layer is fan-shaped.

3. The anti-sticking layer of the crucible of the single crystal furnace according to claim 2, characterized in that: A through hole is provided at the center of the crucible anti-sticking layer, and the opening extends from the through hole to the edge of the crucible anti-sticking layer.

4. The anti-sticking layer of the crucible of the single crystal furnace according to claim 3, characterized in that: The opening extends from the center to the edge of the crucible anti-sticking layer, and the opening angle is β; Wherein, R is the radius of the crucible, α is the angle between the inner wall of the crucible holder and the horizontal direction, r is the radius of the through hole, and the value range of r is 5 mm-25 mm.

5. The anti-sticking layer of the crucible of the single crystal furnace according to claim 4, characterized in that: The crucible anti-sticking layer is provided with a plurality of openings, and the plurality of openings are evenly distributed in the circumference of the crucible anti-sticking layer, and the sum of all the opening angles is β.

6. The anti-sticking layer of the crucible of the single crystal furnace according to claim 1, characterized in that: The thickness of the crucible anti-sticking layer is 0.1 mm to 0.4 mm.

7. The anti-sticking layer of the crucible of the single crystal furnace according to claim 1, characterized in that: The anti-sticking layer of the crucible is made of graphite foil.

8. The anti-sticking layer of the crucible of the single crystal furnace according to claim 1, characterized in that: The crucible anti-sticking layer is square in shape, and is provided with a plurality of openings, which are distributed at four corners of the crucible anti-sticking layer.

9. A single crystal furnace, characterized in that: The single crystal furnace comprises: Crucible; A crucible support, on which the crucible is located; The crucible anti-sticking layer according to any one of claims 1 to 8, wherein the crucible anti-sticking layer is located between the crucible and the crucible holder.

10. The single crystal furnace according to claim 9, characterized in that: The area of ​​the crucible anti-sticking layer is larger than the inner wall area of ​​the crucible holder.

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