Rotary plate valve assembly and single crystal furnace

Abstract

The utility model relates to the technical field of single crystal manufacturing equipment, and provides a rotary plate valve assembly and a single crystal furnace, the rotary plate valve assembly comprises a valve body, a valve shaft and a valve core part, a valve cavity is constructed in the valve body, and a first channel and a second channel are oppositely arranged on the valve body. The valve shaft is movably arranged on the valve body and suitable for carrying out lifting motion and rotating motion, and a water supply flow channel and a water return flow channel are formed in the valve shaft. The valve element component is arranged in the valve cavity and connected with the valve shaft, and the valve element component is suitable for synchronously moving along with the valve shaft so that the first channel and the second channel can be communicated or blocked from being communicated; a flow channel component is arranged in the valve element component and communicated with the water supply flow channel and the water return flow channel. The runner component is arranged in the valve element component, even if a crystal bar suddenly falls off and hits the valve element component of the rotary plate valve, the valve element component slightly deforms, the structure of the runner component cannot be damaged, reliability is high, and risks such as water leakage of the runner component can be avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal manufacturing equipment, in particular to a rotary plate valve assembly and a single crystal furnace. Background Art

[0002] The rotary plate valve is mainly used in a single crystal furnace, which plays a role in isolating the main furnace chamber and the auxiliary furnace chamber in the single crystal furnace. It can complete the pneumatic lifting and rotation of the valve plate, and at the same time, the manual lifting and rotation functions can be selected and equipped.

[0003] When isolation is carried out, the valve plate of the rotary plate valve coincides with the throat of the main furnace chamber. At this time, the high temperature in the furnace will be directly transmitted to the valve plate of the rotary plate valve. To adapt to the high temperature environment of the single crystal furnace, a water cooling system is arranged on the valve plate to cool it down.

[0004] At present, both the water inlet pipeline and the water outlet pipeline of the water cooling system arranged on the valve plate adopt external metal braided pipes. When the crystal rod suddenly drops and hits the valve plate of the rotary plate valve, it is easy to cause the metal braided pipe to rupture, thereby causing water leakage. If the water leakage is relatively large, an explosion accident will occur. Summary of the Utility Model

[0005] The first aspect of the utility model provides a rotary plate valve assembly to solve the above technical defects in the prior art. The flow channel component is built into the valve core component, and the reliability is relatively high; even if the crystal rod suddenly drops and hits the valve core component of the rotary plate valve, causing the valve core component to be slightly deformed, the structure of the flow channel component will not be damaged, and the risk of water leakage from the flow channel component can be avoided.

[0006] The second aspect of the utility model provides a single crystal furnace.

[0007] The first aspect of the utility model provides a rotary plate valve assembly, including a valve body, a valve shaft and a valve core component.

[0008] The interior of the valve body is constructed with a valve cavity. The valve body is relatively provided with a first channel and a second channel, and both the first channel and the second channel are communicated with the valve cavity.

[0009] The valve shaft is movably arranged in the valve body and is suitable for lifting movement and rotary movement. A water supply flow channel and a water return flow channel are constructed in the valve shaft.

[0010] The valve core component is arranged in the valve cavity and is connected with the valve shaft. The valve core component is suitable for moving synchronously with the valve shaft to connect or block the first channel and the second channel; a flow channel component is constructed inside the valve core component, and the flow channel component is respectively communicated with the water supply flow channel and the water return flow channel.

[0011] According to the rotary plate valve assembly provided by the present utility model, the valve core component includes a valve plate component and a valve stem. The valve plate component is located in the valve cavity. One end of the valve stem is connected to the valve plate component, and the other end of the valve stem is connected to the valve shaft.

[0012] The flow channel component includes a first flow channel, a second flow channel, and a cooling flow channel. The cooling flow channel is arranged inside the valve plate component. Both the first flow channel and the second flow channel are arranged inside the valve stem. One end of the first flow channel is communicated with the cooling flow channel, the other end of the first flow channel is communicated with the water supply flow channel. One end of the second flow channel is communicated with the cooling flow channel, and the other end of the second flow channel is communicated with the water return flow channel.

[0013] According to the rotary plate valve assembly provided by the present utility model, a first sealing assembly is provided between the valve stem and the valve shaft; and / or, a second sealing assembly is provided between the valve stem and the valve plate component.

[0014] According to the rotary plate valve assembly provided by the present utility model, both the first sealing assembly and the second sealing assembly include a first sealing member and a second sealing member. The first sealing member is arranged at the connection between the valve stem and the valve shaft or the valve plate component for sealing the first flow channel; the second sealing member is arranged at the connection between the valve stem and the valve shaft or the valve plate component for sealing the second flow channel.

[0015] According to the rotary plate valve assembly provided by the present utility model, both the first sealing assembly and the second sealing assembly further include a third sealing member. The third sealing member is arranged coplanarly with the first sealing member and the second sealing member, and the first sealing member and the second sealing member are located inside the third sealing member.

[0016] According to the rotary plate valve assembly provided by the present utility model, at least one of the valve stem, the valve shaft, and the valve plate component is provided with a sealing groove, and the first sealing member, the second sealing member, and the third sealing member are located in the corresponding sealing grooves.

[0017] According to the rotary plate valve assembly provided by the present utility model, it further includes a clamp. The clamp is sleeved on the valve shaft; the clamp includes a first clamp body and a second clamp body, and the first clamp body and the second clamp body are detachably connected; the valve stem is embedded on one of the first clamp body and the second clamp body, and the first sealing assembly is located between the valve shaft and the first clamp body or the second clamp body.

[0018] According to the rotary plate valve assembly provided by the present utility model, it further includes an adapter. The adapter is arranged between the valve stem and the valve plate component, and the second sealing assembly is located between the valve stem and the adapter.

[0019] According to the rotary plate valve assembly provided by the present utility model, the valve plate component includes a plate body and a cover body. The cover body is fixedly connected to the plate body, and a cooling flow channel is constructed between the cover body and the plate body; the valve stem is connected to the cover body.

[0020] According to the rotary plate valve assembly provided by the present utility model, a plurality of annular first partition strips, strip-shaped second partition strips and connecting blocks are provided on the plate body. The connecting block is arranged at the middle position of the plate body, and a liquid inlet notch and a liquid return notch are provided on the connecting block.

[0021] Taking the center of the plate body as the center of a circle, along the direction of the radius of the plate body, the plurality of first partition strips are arranged at equal intervals, and the cooling flow channel is constructed between two adjacent first partition strips; the second partition strip is arranged at the position of the diameter of the plate body, and the second partition strip is in plug-in fit with the first partition strip and the connecting block.

[0022] According to the rotary plate valve assembly provided by the present utility model, a plurality of plug welding holes are provided on the cover body. The positions of the plug welding holes correspond to the positions of the first partition strips, and the cover body is fixedly welded to the first partition strips through the plug welding holes.

[0023] The second aspect of the present utility model provides a single crystal furnace, which includes a furnace body and the rotary plate valve assembly according to any one of the above items. The rotary plate valve assembly is arranged in the inner cavity of the single crystal furnace and is adapted to isolate different chambers in the inner cavity of the single crystal furnace.

[0024] For the rotary plate valve assembly provided by the present utility model, by constructing a water supply flow channel and a water return flow channel in the valve shaft and constructing a flow channel component in the valve core component, the flow channel component is respectively communicated with the water supply flow channel and the water return flow channel. The cooling medium entering from the water supply flow channel is discharged from the water return flow channel after passing through the flow channel component, which can realize cooling the valve core component so that the valve core component is suitable for the high-temperature environment of the single crystal furnace. Since the flow channel component is arranged inside the valve core component, it is equivalent to the flow channel component being built-in the valve core component. Even if the crystal bar suddenly drops and hits the valve core component of the rotary plate valve, causing the valve core component to be slightly deformed, the structure of the flow channel component will not be damaged, and the reliability is relatively high, and risks such as water leakage of the flow channel component can be avoided.

[0025] For the single crystal furnace provided by the embodiment of the present utility model, because it includes the above-mentioned rotary plate valve assembly, it has all the above-mentioned advantages. Description of the Drawings

[0026] In order to more clearly illustrate the technical solutions in the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0027] Figure 1 It is a perspective view of the rotary plate valve assembly provided by the embodiment of the present utility model.

[0028] Figure 2 It is a top view of the rotary plate valve assembly provided by the embodiment of the present utility model.

[0029] Figure 3 It is a sectional view of the rotary plate valve assembly provided by the embodiment of the present utility model.

[0030] Figure 4 It is a connection schematic diagram of the valve core component and the valve shaft provided by the embodiment of the present utility model.

[0031] Figure 5 It is a structural schematic diagram of the valve shaft provided by the embodiment of the present utility model.

[0032] Figure 6 is Figure 5 A partial enlarged view of the shown valve shaft.

[0033] Figure 7 It is a top view of the valve plate component.

[0034] Figure 8 It is a connection schematic diagram of the valve plate component and the valve rod.

[0035] Figure 9 It is a partial connection sectional view of the valve plate component and the valve rod.

[0036] Figure 10 It is a partial structural schematic diagram of the valve plate component provided by the embodiment of the present utility model.

[0037] Figure 11 It is a top view of the valve plate component provided by the embodiment of the present utility model.

[0038] Reference numerals:

[0039] 10, valve body; 11, valve cavity; 12, first channel; 13, second channel;

[0040] 20, valve shaft; 21, water supply flow channel; 22, water return flow channel; 23, first sealing groove; 24, second sealing groove; 25, fifth sealing groove;

[0041] 30. Spool component; 31. Valve plate component; 311. Plate body; 312. Cover body; 3121. Plug weld hole; 313. First partition strip; 314. Second partition strip; 315. Connecting block; 3151. Liquid inlet notch; 3152. Liquid return notch; 32. Valve stem; 33. Flow channel component; 331. First flow channel; 332. Second flow channel; 333. Cooling flow channel;

[0042] 40. First sealing assembly; 50. Second sealing assembly;

[0043] 60. Clamp; 61. First clamp body; 62. Second clamp body;

[0044] 70. Adapter; 71. Third sealing groove; 72. Fourth sealing groove; 73. Sixth sealing groove. Detailed implementation mode

[0045] To make the objectives, technical solutions and advantages of the present utility model clearer, the technical solutions in the present utility model will be clearly and completely described below with reference to the accompanying drawings in the present utility model. Apparently, the described embodiments are some but not all of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0046] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0047] In the embodiments of the present application, unless otherwise clearly specified and limited, the first feature being "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is at a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is at a lower horizontal height than the second feature.

[0048] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the embodiments of this application. In this specification, the schematic descriptions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0049] Single-crystalline silicon is an important material for solar photovoltaic power generation. The single-crystal furnace is a device that melts polycrystalline materials such as polysilicon with a graphite heater in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals by the Czochralski method. As an important component for isolating the main and auxiliary furnace chambers, the rotary plate valve assembly not only provides a passage for the single crystal to enter the auxiliary furnace chamber but also maintains the local pressure and temperature of the main and auxiliary furnace chambers. Therefore, it is very necessary to provide a reliable cooling system for the rotary plate valve assembly.

[0050] Figure 1 It is a perspective view of the rotary plate valve assembly provided by an embodiment of the present utility model. Figure 2 It is a top view of the rotary plate valve assembly provided by an embodiment of the present utility model. Figure 3 It is a sectional view of the rotary plate valve assembly provided by an embodiment of the present utility model.

[0051] Refer to Figures 1 to 3 An embodiment of the present utility model provides a rotary plate valve assembly, which includes a valve body 10, a valve shaft 20, and a valve core component 30.

[0052] The valve body 10, as the main part of the rotary plate valve assembly, is mainly used to carry the valve shaft 20 and the valve core component 30. The valve body 10 is composed of a cylindrical structure with a hollow structure and a rectangular frame-like structure with a hollow structure. The hollow structures of the cylindrical structure and the rectangular frame are connected to form a valve cavity 11.

[0053] A top flange is provided at the top of the cylindrical structure, and a first channel 12 is opened on the top flange. The first channel 12 is communicated with the valve cavity 11. A bottom flange is provided at the bottom of the cylindrical structure, and a second channel 13 is opened on the bottom flange. The second channel 13 is communicated with the valve cavity 11.

[0054] The rectangular frame has a top cover plate and a bottom cover plate. Arc-shaped notches are provided on the sides of the top cover plate and the bottom cover plate facing the cylindrical structure. The shape of the arc-shaped notches is adapted to the outer edge shapes of the top flange and the bottom flange. The top cover plate is connected to the top flange, and the bottom cover plate is connected to the bottom flange.

[0055] After the valve body 10 is assembled, mounting holes and threaded holes are formed in the rectangular frame of the valve body 10, and the valve shaft 20 is arranged in the mounting holes. The valve shaft 20 can move up and down and rotate relative to the valve body 10. A driving component for driving the valve shaft 20 to move up and down or swing can be installed in the threaded holes.

[0056] The valve core component 30 is arranged in the valve cavity 11. The valve core component 30 is connected to the valve shaft 20 and can move up and down and rotate under the drive of the valve shaft 20, so that the first channel 12 and the second channel 13 are communicated, or the communication between the first channel 12 and the second channel 13 is blocked. That is, by opening the second channel 13 of the bottom flange, the first channel 12 and the second channel 13 are communicated. By closing the second channel 13 of the bottom flange, the communication between the first channel 12 and the second channel 13 is blocked.

[0057] Specifically, during the use of the rotary plate valve assembly, the vacuum ball valve of the vacuum pump is opened to extract the vacuum of the main furnace chamber. Utilizing the pressure difference inside and outside the main furnace chamber, the valve shaft 20 is driven by the driving component to move, and the entire valve cavity 11 is opened or closed (that is, the second channel 13 of the bottom flange is opened or closed), improving the ability of the rotary plate valve assembly to control the pressure and temperature of the main and auxiliary furnace chambers.

[0058] Among them, the internal structure of the valve core component 30 has a flow channel component 33. The flow channel component 33 respectively supplies a water flow channel 21 and a return water flow channel 22. The cooling medium entering from the water flow channel 21 is discharged from the return water flow channel 22 after passing through the flow channel component 33, which is used to cool the valve core component 30 so that the valve core component 30 is suitable for the high-temperature environment of the single crystal furnace and has high reliability.

[0059] It can be understood that for the rotary plate valve assembly provided by the embodiment of the present invention, by constructing a water supply flow channel 21 and a return water flow channel 22 in the valve shaft 20 and constructing a flow channel component 33 in the valve core component 30, the flow channel component 33 is respectively communicated with the water supply flow channel 21 and the return water flow channel 22. The cooling medium entering from the water supply flow channel 21 is discharged from the return water flow channel 22 after passing through the flow channel component 33, which can realize cooling the valve core component 30 so that the valve core component 30 is suitable for the high-temperature environment of the single crystal furnace. Since the flow channel component 33 is arranged inside the valve core component 30, which is equivalent to the flow channel component 33 being built-in in the valve core component 30, even if the crystal bar suddenly falls and hits the valve core component 30 of the rotary plate valve, causing the valve core component 30 to be slightly deformed, the structure of the flow channel component 33 will not be damaged, and the reliability is high, which can avoid risks such as water leakage of the flow channel component 33.

[0060] Compared with the prior art that uses an external metal braided pipe as the water inlet pipeline and the water return pipeline, the rotary plate valve assembly provided by the embodiment of the present invention has higher reliability and safety.

[0061] Figure 4 It is a schematic connection diagram of the valve core component 30 and the valve shaft 20 provided by an embodiment of the present utility model.

[0062] Continue to refer to Figure 3 and simultaneously refer to Figure 4 In some embodiments of the present utility model, the valve core component 30 includes a valve plate component 31 and a valve stem 32. The valve plate component 31 is located in the valve cavity 11. One end of the valve stem 32 is connected to the valve plate component 31, and the other end of the valve stem 32 is connected to the valve shaft 20. The valve shaft 20 can drive the valve stem 32 to move, and the valve stem 32 drives the valve plate component 31 to move.

[0063] The flow channel component 33 includes a first flow channel 331, a second flow channel 332, and a cooling flow channel 333. The cooling flow channel 333 is arranged inside the valve plate component 31. The first flow channel 331 and the second flow channel 332 are arranged inside the valve stem 32 along the length direction of the valve stem 32, and elbows are arranged at the ends of the valve stem 32. Therefore, the first flow channel 331 and the second flow channel 332 are both provided with bending parts at the positions where the elbows are located for commutation. One end of the first flow channel 331 is communicated with the cooling flow channel 333, and the other end of the first flow channel 331 is communicated with the water supply flow channel 21. One end of the second flow channel 332 is communicated with the cooling flow channel 333, and the other end of the second flow channel 332 is communicated with the water return flow channel 22.

[0064] Equivalently, the valve core component 30 is composed of an independent valve plate component 31 and a valve stem 32. A cooling flow channel 333 is arranged inside the valve plate component 31 to cool the valve plate component 31. The first flow channel 331 and the second flow channel 332 are constructed inside the valve stem 32 component, so that the water supply flow channel 21 is communicated with the cooling flow channel 333 through the first flow channel 331, and the water return flow channel 22 is communicated with the cooling flow channel 333 through the second flow channel 332. By constructing the first flow channel 331 and the second flow channel 332 inside the valve stem 32 to replace the externally arranged metal braided pipe in the prior art, the structural strength of the first flow channel 331 and the second flow channel 332 can be improved, and damage to the first flow channel 331 and the second flow channel 332 to cause water leakage accidents can be avoided.

[0065] In some embodiments of the present utility model, the valve core component 30 can also be integrally formed by the valve plate component 31 and the valve stem 32, that is, the valve core component 30 is a whole structure. The first flow channel 331 and the second flow channel 332 are arranged inside the valve core component 30, and at the same time, the cooling flow channel 333 is also arranged. For example, the valve core component 30 is composed of two symmetrically arranged halves. A first groove, a second groove, and a part of the cooling flow channel (not shown in the figure) are constructed inside each half of the valve core component 30. When the two halves of the valve core component 30 are hermetically fitted, the two first grooves form the first flow channel 331, the two second grooves form the second flow channel 332, and the part of the cooling flow channel forms the complete cooling flow channel 333.

[0066] Figure 5 It is a schematic structural diagram of the valve shaft 20 provided by an embodiment of the present utility model. Figure 6 It is Figure 5 a partially enlarged view of the shown valve shaft 20. Figure 7 It is a top view of the valve plate component 31. Figure 8 It is a schematic connection diagram of the valve plate component 31 and the valve rod 32. Figure 9 It is a partial connection cross-sectional view of the valve plate component 31 and the valve rod 32.

[0067] Referring to Figures 5 to 9 , in some embodiments of the present utility model, a first sealing assembly 40 is provided between the valve rod 32 and the valve shaft 20, which can improve the sealing performance between the valve rod 32 and the valve shaft 20 to avoid liquid leakage at the connection between the valve rod 32 and the valve shaft 20. Moreover, a second sealing assembly 50 is provided between the valve rod 32 and the valve plate component 31, which can improve the sealing performance between the valve rod 32 and the valve plate component 31 to avoid liquid leakage at the connection between the valve rod 32 and the valve plate component 31.

[0068] In addition, a first sealing assembly 40 can be provided between the valve rod 32 and the valve shaft 20 for sealing, and mechanical cooperation can be adopted between the valve rod 32 and the valve plate component 31 to achieve sealing, such as connecting the valve rod 32 and the valve plate component 31 by interference fit or threaded connection, etc.

[0069] In addition, a second sealing assembly 50 can also be provided between the valve rod 32 and the valve plate component 31 for sealing, and mechanical cooperation can be adopted between the valve rod 32 and the valve shaft 20 to achieve sealing, such as connecting the valve rod 32 and the valve shaft 20 by interference fit or threaded connection, etc.

[0070] Continuing to refer to Figures 5 to 9 , the first sealing assembly 40 and the second sealing assembly 50 have the same structure. Both the first sealing assembly 40 and the second sealing assembly 50 include a first sealing member and a second sealing member. The first sealing member is disposed at the connection between the valve rod 32 and the valve shaft 20 or the valve plate component 31 for sealing the first flow channel 331; the second sealing member is disposed at the connection between the valve rod 32 and the valve shaft 20 or the valve plate component 31 for sealing the second flow channel 332.

[0071] Among them, both the first sealing member and the second sealing member can be sealing rings made of rubber material or other components that can be deformed under extrusion to achieve sealing.

[0072] When the first seal is arranged between the valve stem 32 and the valve shaft 20, a first seal groove 23 can be formed on the surface of at least one of the valve stem 32 and the valve shaft 20, that is, the first seal groove 23 can be arranged on the surface of the valve stem 32 or the valve shaft 20, or the first seal groove 23 can be arranged on the surfaces of both the valve stem 32 and the valve shaft 20 at the same time. So that the first seal is embedded in the first seal groove 23 to facilitate the sealed connection between the valve stem 32 and the valve shaft 20 and prevent the first seal from coming off or slipping.

[0073] When the second seal is arranged between the valve stem 32 and the valve shaft 20, a second seal groove 24 can be formed on the surface of at least one of the valve stem 32 and the valve shaft 20, that is, the second seal groove 24 can be arranged on the surface of the valve stem 32 or the valve shaft 20, or the second seal groove 24 can be arranged on the surfaces of both the valve stem 32 and the valve shaft 20 at the same time. So that the first seal is embedded in the second seal groove 24 to facilitate the sealed connection between the valve stem 32 and the valve shaft 20 and prevent the first seal from coming off or slipping.

[0074] Wherein, the arrangement manners of the first seal and the second seal between the valve stem 32 and the valve plate component 31 are the same as those of the first seal and the second seal between the valve stem 32 and the valve shaft 20 described above.

[0075] That is, when the first seal is arranged between the valve stem 32 and the valve plate component 31, a third seal groove 71 can be formed on the surface of at least one of the valve stem 32 and the valve plate component 31 so that the first seal is embedded in the third seal groove 71 to facilitate the sealed connection between the valve stem 32 and the valve plate component 31 and prevent the second seal from coming off or slipping. When the second seal is arranged between the valve stem 32 and the valve plate component 31, a fourth seal groove 72 can be formed on the surface of at least one of the valve stem 32 and the valve plate component 31 so that the second seal is embedded in the fourth seal groove 72 to facilitate the sealed connection between the valve stem 32 and the valve plate component 31 and prevent the second seal from coming off or slipping.

[0076] Equivalently, there are two water channels inside the valve shaft 20, one represents the water inlet and the other represents the water return. A plane is machined on the valve shaft 20, and the outlets of the two water channels extend radially along the valve shaft 20 and protrude from this plane. Two seal grooves are machined on the outer sides of these two outlets to accommodate O-ring seals for sealing. Similarly, there are two water channels inside the valve stem 32, one represents the water inlet and the other represents the water return. These two water channels both turn 90° to extend from the side wall of the valve stem 32 to change the direction of the water channels. Similarly, a plane is machined on the side wall of the valve stem 32 near the end, and a seal groove can be arranged on the plane of the valve stem 32.

[0077] Continue to refer to Figures 5 to 9, both the first sealing assembly 40 and the second sealing assembly 50 further include a third seal, the third seal is arranged coplanarly with the first seal and the second seal, and the first seal and the second seal are located inside the third seal. By providing the third seal, the sealing performance between the valve stem 32 and the valve plate component 31 is further improved, and the sealing performance between the valve stem 32 and the valve shaft 20 is further improved.

[0078] Wherein, the shapes of the first seal and the second seal can both be annular, and the shape of the third seal is rectangular. That is, the first seal and the second seal are located within the area restricted by the third seal. By providing the third seal, a dual protection effect is achieved, preventing liquid leakage from occurring at the positions where the first seal or the second seal is located, and thus directly leaking outside the valve stem 32, the valve shaft 20, or the valve plate component 31. In other words, the sealing surfaces of the internal water channels of the rotary plate valve assembly all adopt a dual-guarantee sealing structure, with good sealing performance and high safety factor.

[0079] When the third seal is arranged between the valve stem 32 and the valve shaft 20, a fifth seal groove 25 can be formed on the surface of at least one of the valve stem 32 and the valve shaft 20. The fifth seal groove 25 is located outside the first seal groove 23 and the second seal groove 24 and is used to enclose the first seal groove 23 and the second seal groove 24 inside it. The third seal can be embedded in the fifth seal groove 25.

[0080] When the third seal is arranged between the valve stem 32 and the valve plate component 31, a sixth seal groove 73 can be formed on the surface of at least one of the valve stem 32 and the valve plate component 31 so that the third seal is embedded in the sixth seal groove 73. Among them, the sixth seal groove 73 is located outside the third seal groove 71 and the fourth seal groove 72 and is used to enclose the third seal groove 71 and the fourth seal groove 72 inside it.

[0081] For example, the valve stem 32 and the valve plate component 31 are fixed together by four screws. The positions of the water inlets and outlets of the valve plate component 31 correspond to those of the water inlets and outlets of the valve stem 32 one by one. There are three seal grooves on the installation surface of the valve stem 32 and the valve plate component 31. Two of the seal grooves are circular seal grooves, and one seal groove is a rectangular seal groove. The circular seal grooves are used to seal the water inlets and outlets, and the rectangular seal groove plays a dual-protection role to prevent the sealing performance of the seals in the circular seal grooves of the water inlets and outlets from failing and causing liquid leakage.

[0082] Continue to refer to Figures 2 to 4 , in some embodiments of the present invention, the rotary plate valve assembly further includes a clamp 60. The clamp 60 is sleeved on the valve shaft 20, and the valve stem 32 is connected to the valve shaft 20 through the clamp 60. The clamp 60 includes a first clamp body 61 and a second clamp body 62, and the first clamp body 61 and the second clamp body 62 are detachably connected together through structures such as bolts.

[0083] The valve stem 32 is embedded in one of the first hoop body 61 and the second hoop body 62. For example, an embedding groove is provided on the second hoop body 62, and the valve stem 32 is embedded in the embedding groove. Then, four bolts are used to connect the second hoop body 62 and the first hoop body 61 to form a clamp 60, and the clamp 60 is located at the positions of the sealing grooves on the valve shaft 20. The first sealing assembly 40 is located between the valve shaft 20 and the first hoop body 61 or the second hoop body 62.

[0084] Equivalently, the valve stem 32 and the valve shaft 20 are fixed by the cooperation of the clamp 60 and four screws; three sealing grooves are provided on the butt joint surface of the valve stem 32 and the valve shaft 20, two of which are circular sealing grooves and one is a rectangular sealing groove. The circular sealing grooves are used to seal the water inlet and outlet, and the rectangular sealing groove plays a dual protection role to prevent the sealing performance of the seal in the circular sealing groove of the water inlet and outlet from failing and causing liquid leakage.

[0085] Continue to refer to Figure 3 、 Figure 4 、 Figures 7 to 9 In some embodiments of the present invention, the rotary plate valve assembly further includes an adapter 70, the adapter 70 is arranged between the valve stem 32 and the valve plate component 31, and the second sealing assembly 50 is located between the valve stem 32 and the adapter 70.

[0086] Equivalently, the valve stem 32 and the valve plate component 31 are indirectly connected through the adapter 70, and the adapter 70 can be integrally formed with the valve plate component 31. The adapter 70 is located at the central position of the valve plate component 31 and is welded and fixed to the following cover body 312 of the valve plate component 31. The adapter 70 is also provided with water inlets and outlets, which need to be arranged in one-to-one correspondence with the positions of the water inlets and outlets on the cover body 312 and the valve stem 32.

[0087] Figure 10 It is a partial structural schematic diagram of the valve plate component 31 provided by the embodiment of the present invention. Figure 11 It is a top view of the valve plate component 31 provided by the embodiment of the present invention.

[0088] Refer to Figure 4 and at the same time refer to Figure 10 and Figure 11 In some embodiments of the present invention, the valve plate component 31 includes a plate body 311 and a cover body 312, the cover body 312 is fixedly connected to the plate body 311, and a cooling flow channel 333 is constructed between the cover body 312 and the plate body 311; the valve stem 32 is connected to the cover body 312, that is, an inlet and an outlet are provided on the cover body 312, the first flow channel 331 in the valve stem 32 is communicated with the cooling flow channel 333 through the inlet, and the second flow channel 332 in the valve stem 32 is communicated with the cooling flow channel 333 through the outlet.

[0089] Continue to refer to Figure 10 and Figure 11 In some embodiments of the present utility model, a plurality of annular first partition strips 313, strip-shaped second partition strips 314 and connecting blocks 315 are provided on the plate body 311. The connecting block 315 is provided at the middle position of the plate body 311, and a liquid inlet notch 3151 and a liquid return notch 3152 are provided on the connecting block 315; the cover body 312 is used to seal the cooling flow channel 333.

[0090] The first partition strip 313 is a circular ring structure with a notch. The radius of each first partition strip 313 is different. Each first partition strip 313 is centered on the center of the connecting block 315 and is equidistantly arranged in the circumferential direction of the plate body 311. A cooling flow channel 333 is formed between two adjacent first partition strips 313.

[0091] The second partition strip 314 is a long strip-shaped structure. There are two second partition strips 314. The two second partition strips 314 are located on both sides of the connecting block 315, and the two second partition strips 314 are located on the diameter of the plate body 311. The second partition strip 314 is clamped on the first partition strip 313, and the cooling flow channel 333 is divided into a liquid inlet area and a liquid return area by the second partition strip 314. The liquid inlet notch 3151 is located in the liquid inlet area, and the liquid return notch 3152 is located in the liquid return area.

[0092] Equivalently, the cooling medium is introduced from the middle position of the plate body 311 to perform cooling in a radial manner from the middle position to the outside, and the cooling medium first cools one half of the body and then cools the other half of the plate body 311.

[0093] Since the shapes of the plurality of first partition strips 313 provided on the plate body 311 are the same, only the radii are different, and the spacing of the annular cooling flow channels 333 formed by two adjacent first partition strips 313 remains consistent. The cooling flow channel 333 can be directly turned out by a lathe, which can effectively shorten the processing time of the machine plate body 311 and effectively save the processing cost. A small part is cut off at both ends of the central axis of each circular ring-shaped first partition strip 313 for welding the second partition strip 314, so as to limit the water outlet circulation system through the cooperation of the first partition strip 313 and the second partition strip 314. The liquid inlet notch 3151 and the liquid return notch 3152 of the connecting block 315 are both provided in the central area of the plate body 311, which can improve the situation that the temperature in the central area is higher than that in the edge area.

[0094] Continue to refer to Figure 4 and Figure 7 In some embodiments of the present utility model, a plurality of plug welding holes 3121 are provided on the cover body 312. The positions of the plug welding holes 3121 correspond to the positions of the first partition strips 313, and the cover body 312 is fixedly welded to the first partition strips 313 through the plug welding holes 3121.

[0095] The plug weld holes 3121 can be arranged in an array along the circumferential direction of the cover body 312. Multiple plug weld holes 3121 are provided in each column. The cover body 312 and the plate body 311 are fixed together by welding. A full weld is made in a circle at the circumferential position. The plug weld holes 3121 are used to enhance the rigidity and strength of the cover plate, prevent the cover plate from deforming due to excessive water pressure inside the water tank, and thus cause problems such as water leakage between the internal water tanks.

[0096] The present utility model also provides a single crystal furnace, which includes a furnace body and the above-mentioned rotary plate valve assembly. The rotary plate valve assembly is arranged in the inner cavity of the single crystal furnace and is adapted to isolate different chambers in the inner cavity of the single crystal furnace. Since the single crystal furnace includes the rotary plate valve assembly, the single crystal furnace has all the advantages of the rotary plate valve assembly.

[0097] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model and are not intended to limit them; although the present utility model has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present utility model.

Claims

1. A rotary vane valve assembly, characterized in that: include: A valve body, wherein a valve cavity is formed inside the valve body, and a first channel and a second channel are disposed on the valve body opposite to each other, wherein the first channel and the second channel are both connected to the valve cavity; A valve shaft is movably arranged on the valve body and is suitable for lifting and rotating movements, wherein a water supply channel and a water return channel are constructed in the valve shaft; A valve core component is arranged in the valve cavity and connected to the valve shaft. The valve core component is suitable for moving synchronously with the valve shaft to connect the first channel and the second channel or block the connection between the first channel and the second channel; a flow channel component is structured inside the valve core component, and the flow channel component is connected to the water supply channel and the return channel respectively.

2. The rotary vane valve assembly according to claim 1, characterized in that: The valve core component comprises a valve plate component and a valve stem, the valve plate component is located in the valve cavity, one end of the valve stem is connected to the valve plate component, and the other end of the valve stem is connected to the valve shaft; The flow channel component includes a first flow channel, a second flow channel and a cooling flow channel, the cooling flow channel is arranged inside the valve plate component, the first flow channel and the second flow channel are both arranged inside the valve stem, one end of the first flow channel is connected to the cooling flow channel, the other end of the first flow channel is connected to the water supply flow channel, one end of the second flow channel is connected to the cooling flow channel, and the other end of the second flow channel is connected to the return water flow channel.

3. The rotary vane valve assembly according to claim 2, characterized in that: A first sealing assembly is provided between the valve stem and the valve shaft; and / or, A second sealing assembly is provided between the valve stem and the valve plate component.

4. The rotary vane valve assembly according to claim 3, characterized in that: The first sealing assembly and the second sealing assembly both include a first seal and a second seal. The first seal is disposed at the connection between the valve stem and the valve shaft or the valve plate component to seal the first flow channel. The second seal is disposed at the connection between the valve stem and the valve shaft or the valve plate component to seal the second flow channel.

5. The rotary vane valve assembly according to claim 4, characterized in that: The first sealing component and the second sealing component each further include a third sealing component, wherein the third sealing component is arranged coplanar with the first sealing component and the second sealing component, and the first sealing component and the second sealing component are located on an inner side of the third sealing component.

6. The rotary vane valve assembly according to claim 5, characterized in that: A sealing groove is provided on at least one of the valve stem, the valve shaft and the valve plate component, and the first sealing member, the second sealing member and the third sealing member are located in the corresponding sealing groove.

7. The rotary vane valve assembly according to claim 3, characterized in that: It also includes a clamp, which is sleeved on the valve shaft; The clamp includes a first clamp body and a second clamp body, and the first clamp body and the second clamp body are detachably connected; the valve stem is embedded in one of the first clamp body and the second clamp body, and the first sealing assembly is located between the valve shaft and the first clamp body or the second clamp body.

8. The rotary vane valve assembly according to claim 3, characterized in that: It also includes a transition piece, which is arranged between the valve stem and the valve plate component, and the second sealing assembly is located between the valve stem and the transition piece.

9. The rotary vane valve assembly according to any one of claims 2 to 8, characterized in that: The valve plate component comprises a plate body and a cover body, wherein the cover body is fixedly connected to the plate body, and the cooling channel is constructed between the cover body and the plate body; and the valve stem is connected to the cover body.

10. The rotary vane valve assembly according to claim 9, characterized in that: The plate body is provided with a plurality of annular first dividing strips, strip-shaped second dividing strips and a connecting block, the connecting block is arranged in the middle of the plate body, and the connecting block is provided with a liquid inlet notch and a liquid return notch; Taking the center of the plate body as the center of the circle, a plurality of the first dividing strips are arranged at equal intervals along the direction of the radius of the plate body, and the cooling channel is constructed between two adjacent first dividing strips; The second dividing strip is arranged at a position where the diameter of the plate body is located, and the second dividing strip is plug-fitted with the first dividing strip and the connecting block.

11. The rotary vane valve assembly according to claim 10, characterized in that: The cover body is provided with a plurality of plug welding holes, the positions of the plug welding holes correspond to the positions of the first partition strips, and the cover body is welded and fixed to the first partition strips through the plug welding holes.

12. A single crystal furnace, characterized in that: It comprises a furnace body and a rotary plate valve assembly as claimed in any one of claims 1 to 11, wherein the rotary plate valve assembly is arranged in the inner cavity of the single crystal furnace and is suitable for isolating the inner cavity of the single crystal furnace into different chambers.

Images