Silane gas loading and unloading arm and silane gas loading and unloading platform

Abstract

The utility model provides a silane gas loading and unloading arm and a silane gas loading and unloading platform, and relates to the field of silane gas filling. The silane gas loading and unloading arm and the silane gas loading and unloading platform comprise a supporting device and a gas loading and unloading device, wherein the supporting device comprises a horizontal section and a vertical section; the silane filling pipeline is arranged along the supporting device; wherein the silane filling pipeline comprises a filling opening, a gas inlet, a gas outlet and a gas outlet, and the filling opening is formed in one end of the silane filling pipeline; the first elastic spiral pipe part is spirally arranged on the outer side of the horizontal section in a sleeving mode and can stretch out and draw back along the horizontal section; the second elastic spiral pipe part is spirally arranged on the outer side of the vertical section in a sleeving mode and can stretch out and draw back along the vertical section; the silane filling device is simple in structure and convenient to adjust, and the safety risk in the silane filling process can be reduced.

Description

Technical Field

[0001] The utility model relates to the field of silane gas filling, in particular to a silane gas loading and unloading arm and a silane gas loading and unloading platform. Background Technique

[0002] Silane (SiH4), as an important silicon source material, is widely used in industries such as semiconductor microelectronics IC, photovoltaic solar cells PV, and liquid crystal displays LCD. In the early days, high-purity silane at home and abroad was filled and transported in Y cylinders. Later, as the downstream consumption increased, tube trailers (models such as 2.5 tons, 4.5 tons, 6 tons, etc.) were generally used for filling and transportation. Silane has a low boiling point (normal boiling point -112°C), and unlike natural gas and liquefied petroleum gas, even if there is a small amount of leakage in an open environment, it will not cause serious consequences. Silane gas will undergo explosive spontaneous combustion when it meets air, regardless of the amount, and its danger is much higher than that of natural gas and liquefied petroleum gas. During the filling process and unloading process of silane gas, it is necessary to strictly prevent contact with air and there should be no leakage. Therefore, there are strict requirements for the filling process and equipment of tube trailers.

[0003] At present, most enterprises use loading and unloading arms or a fixed bracket method for silane filling during the filling process. The pipeline is fixed on the loading and unloading arm, and the loading and unloading arm allows silane filling operators to adjust the handwheel to move the cross arm in the vertical and horizontal directions to match and connect with the CGA at the inlet and outlet of the tube trailer. However, for the loading and unloading arms in the prior art, the layout of the pipeline and the mechanical transmission device is relatively complex. On the one hand, it is inconvenient for the staff to operate and move on site; on the other hand, after starting the filling compressor, there will be large pulses and vibrations, and there are also relatively large safety risks; in addition, the processing and manufacturing of the loading and unloading arm are relatively complex and the manufacturing cost of the loading and unloading arm is also relatively high. Content of the Utility Model

[0004] The utility model provides a silane gas loading and unloading arm and a silane gas loading and unloading platform with a simple structure, convenient adjustment, and can reduce the safety risk during the silane filling process to solve the problems that the layout of the pipeline and the mechanical transmission device of the loading and unloading arm in the prior art is relatively complex, resulting in inconvenient operation and movement of the staff, and there are relatively large safety risks.

[0005] The technical solution adopted by the utility model is:

[0006] A silane gas loading and unloading arm, comprising:

[0007] A support device, including a horizontal section and a vertical section; and

[0008] A silane filling pipeline, arranged along the support device;

[0009] Wherein, the silane filling pipeline includes:

[0010] A filling port, provided at one end of the silane filling pipeline;

[0011] A first elastic spiral tube portion, spirally sleeved outside the horizontal section; and

[0012] A second elastic spiral tube portion, spirally sleeved outside the vertical section.

[0013] Further, the supporting device is a multi-section circular steel pipe.

[0014] Further, the horizontal section includes:

[0015] An inner support pipe, connected to the vertical section;

[0016] An outer support pipe, sleeved outside the inner support pipe; and

[0017] Two bearings, provided between the outer side wall of the inner support pipe and the inner side wall of the outer support pipe.

[0018] Further, the two bearings are respectively provided at positions close to both ends of the outer support pipe.

[0019] A silane gas loading and unloading platform, comprising:

[0020] A platform body, including a support structure and a tabletop above the support structure, and a parking space is provided on one side outside the platform body; and

[0021] The silane gas loading and unloading arm as described above, wherein the horizontal section of the supporting device and the first elastic spiral tube portion are provided below the tabletop; the vertical section of the supporting device and the second elastic spiral tube portion are movably penetrated through the tabletop; and the filling port is provided above the tabletop.

[0022] Further, the tabletop includes:

[0023] A steel beam skeleton, connected to the supporting device; and

[0024] A grating plate, laid between the steel beam skeletons.

[0025] Further, the horizontal section is connected to the lower surface of the tabletop through at least two fixing members.

[0026] Further, it further includes a filling panel, and the filling panel is provided on the upper surface of the tabletop.

[0027] Further, it further includes an explosion-proof wall, and the explosion-proof wall is provided on the side of the platform body opposite to the parking space.

[0028] Further, an inclined ladder is provided on the side of the platform body.

[0029] The beneficial effects of the present utility model are as follows:

[0030] 1. By providing the first elastic spiral pipe portion and the second elastic spiral pipe portion, and relying on the support and guiding functions of the support device, the silane gas loading and unloading arm of the present utility model realizes simple and rapid silane filling docking, simplifies the number of on-site equipment and the complexity of the layout, improves the convenience of operation and movement of the staff, and solves the problem that the layout of the pipeline and mechanical transmission device of the loading and unloading arm in the prior art is relatively complex, resulting in inconvenient operation and movement of the staff;

[0031] 2. During the use of the silane gas loading and unloading arm of the present utility model, the elasticity of the first elastic spiral pipe portion and the second elastic spiral pipe portion can also be relied on to reduce the stress between the connecting parts, adapt to the pulse and vibration generated after starting the filling compressor, avoid the damage of the silane filling pipeline due to accumulated stress fatigue, and solve the problem that there are relatively large safety risks in the pipeline and mechanical transmission device of the loading and unloading arm in the prior art;

[0032] 3. By providing the support structure and the table top, and cooperating with the structure of the silane gas loading and unloading arm, the silane gas loading and unloading platform of the present utility model separates the personnel walkway from the silane filling pipeline, and solves the problem that when there are multiple groups of silane filling pipelines and other structures, the lines are relatively complex, affecting the movement and operation of on-site staff. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0034] Figure 1 It is a schematic structural diagram of the loading and unloading arm according to the first embodiment of the present utility model;

[0035] Figure 2 It is a schematic structural diagram of the loading and unloading arm according to the second embodiment of the present utility model;

[0036] Figure 3 It is a schematic diagram of the active state of the loading and unloading arm according to the second embodiment of the present utility model;

[0037] Figure 4 It is a side view of the loading and unloading platform according to the embodiment of the present utility model;

[0038] Figure 5 It is a top view of the loading and unloading platform according to the embodiment of the present utility model.

[0039] Reference numerals: 100 - support device, 120 - horizontal section, 122 - inner support pipe, 123 - bearing, 124 - outer support pipe, 140 - vertical section;

[0040] 200 - silane filling pipeline, 220 - first elastic spiral pipe section, 240 - second elastic spiral pipe section, 260 - filling port;

[0041] 300 - platform body, 320 - support structure, 340 - tabletop, 342 - steel beam skeleton, 344 - grating plate, 346 - fixing member, 360 - inclined ladder;

[0042] 400 - filling panel;

[0043] 500 - explosion - proof wall. Detailed implementation mode

[0044] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0045] The following disclosure provides many different embodiments or examples for implementing different structures of the present utility model. To simplify the disclosure of the present utility model, components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present utility model.

[0046] The embodiments of the utility model will be described in detail below with reference to the drawings.

[0047] Embodiment 1

[0048] Please refer to Figure 1 , this embodiment provides a silane gas loading and unloading arm for filling silane gas. The silane gas loading and unloading arm has a simple structure, is convenient to adjust, and can reduce the safety risks during the silane filling process. The silane gas loading and unloading arm mainly includes: a support device 100, a silane filling pipeline 200, etc.

[0049] The support device 100 is used to lay out the route of the silane filling pipeline 200 and provide a supporting force for the relatively slender silane filling pipeline 200. As Figure 1As shown in the figure, the support device 100 of this embodiment is a multi-section steel structure support member, and the support device 100 includes a horizontal section 120 and a vertical section 140 for arranging the adjustable part of the silane filling pipeline 200.

[0050] The silane filling pipeline 200 is a pipeline arranged along the support device 100. One end thereof inputs silane gas from the silane filling panel, and the other end has a filling port 260 for docking with the silane storage device to output silane gas. The dockable silane storage device includes a tube-type container on the silane transport vehicle. And the silane filling pipeline 200 at least further has a first elastic spiral tube portion 220 and a second elastic spiral tube portion 240, both of which are in a spiral shape and have elasticity, and can be telescoped and elastically swung. Among them, the first elastic spiral tube portion 220 is spirally sleeved outside the horizontal section 120, and can be telescoped along the horizontal section 120 and elastically swung; the second elastic spiral tube portion 240 is spirally sleeved outside the vertical section 140, and is located between the filling port 260 and the first elastic spiral tube portion 220, and can be telescoped along the vertical section 140 and elastically swung. In this embodiment, according to the needs of the on-site environment, the filling port 260 is arranged above the vertical section 140, and the two are connected by a straight pipe; the horizontal section 120 is arranged below the vertical section 140, and the two are connected by an elbow. During use, since the first elastic spiral tube portion 220 can be telescoped along the horizontal section 120, the second elastic spiral tube portion 240 and the filling port 260 can reciprocate in the horizontal direction to adjust the horizontal distance between the filling port 260 and the inlet / outlet CGA (not shown in the figure) of the tube-type container; at the same time, since the second elastic spiral tube portion 240 can be telescoped along the vertical section 140, the filling port 260 can reciprocate in the vertical direction to adjust the vertical height difference between the filling port 260 and the inlet / outlet CGA of the tube-type container.

[0051] A specific working mode of this embodiment is as follows: After the silane transport vehicle reaches the filling position, the staff manually adjusts the first elastic spiral tube portion 220 and the second elastic spiral tube portion 240 to align the filling port 260 with the inlet / outlet CGA of the tube-type container in the first horizontal direction and the vertical direction, and in the second horizontal direction perpendicular to the first horizontal direction, rely on the forward and backward movement of the vehicle to align; after alignment, dock the filling port 260 and the inlet / outlet CGA; then start to check the sealing performance through the silane filling pipeline 200, and complete steps such as pressure equalization and filling.

[0052] In this embodiment, the silane gas loading and unloading arm is provided with a first elastic spiral pipe portion 220 and a second elastic spiral pipe portion 240. Relying on the support and guiding functions of the support device 100, simple and fast silane filling docking is achieved, the number of on-site devices and the complexity of the layout are simplified, the convenience of operation and movement of the staff is improved, and the problem that the layout of the loading and unloading arm pipeline and the mechanical transmission device in the prior art is relatively complex, resulting in inconvenient operation and movement of the staff is solved.

[0053] At the same time, during the use of the silane gas loading and unloading arm in this embodiment, it can also rely on the elasticity of the first elastic spiral pipe portion 220 and the second elastic spiral pipe portion 240 to effectively reduce the pulse and vibration caused by the filling compressor during filling, and can also reduce the horizontal stress and vertical stress generated during the filling process, thereby avoiding the stress fatigue damage of the silane filling pipeline 200 and solving the problem that there are relatively large safety risks in the loading and unloading arm pipeline and the mechanical transmission device in the prior art.

[0054] Embodiment 2

[0055] In the above embodiment, in the second horizontal direction perpendicular to the first horizontal direction, the filling port 260 of the silane gas loading and unloading arm needs to rely on the forward and backward movement of the vehicle to align with the inlet and outlet CGA. In order to save the time of the docking process and improve the docking accuracy on the basis of the first embodiment, the second embodiment is specifically introduced below.

[0056] Please refer to Figure 2 and Figure 3 , in the second embodiment, the support device 100 is a relatively thick multi-segment circular steel pipe. Among them, the horizontal section 120 includes an inner support pipe 122 and an outer support pipe 124. The inner support pipe 122 is connected to the vertical section 140. The outer support pipe 124 is sleeved outside the inner support pipe 122, and at least two bearings 123 are arranged between the outer side wall of the inner support pipe 122 and the inner side wall of the outer support pipe 124. By arranging two bearings 123, the inner support pipe 122 and the vertical section 140 can rotate relative to the outer support pipe 124, and the first elastic spiral pipe portion 220 can also be twisted. Therefore, as shown in the motion state of Figure 3 , the vertical section 140 will also drive the second elastic spiral pipe portion 240 and the filling port 260 to rotate together, so that the filling port 260 can also reciprocate and move for adjustment in the second horizontal direction perpendicular to the first horizontal direction, so that it is no longer necessary to rely on the forward and backward movement of the vehicle to align with the inlet and outlet CGA, which can reduce the time of the docking process and improve the docking accuracy.

[0057] Meanwhile, in this embodiment, since the first elastic spiral tube portion 220 is sleeved outside the side wall of the outer support tube 124, and the outer support tube 124 is circular and has a relatively large diameter, the up-and-down movement space of the first elastic spiral tube portion 220 is reduced, and the collision between the first elastic spiral tube portion 220 and the horizontal section 120 can also be alleviated.

[0058] Preferably, the two bearings 123 can be respectively arranged at positions close to both ends of the outer support tube 124 to improve the structural stability between the inner and outer tubes.

[0059] Embodiment 3

[0060] In the above embodiments, when there are multiple sets of silane filling pipelines 200 and other structures of the silane loading and unloading arm, the lines will be relatively complex. To avoid the complex lines from affecting the movement and operation of on-site workers on the basis of the above embodiments, the third embodiment is specifically introduced below.

[0061] Please refer to Figures 4 - 5 , in the third embodiment, a silane gas loading and unloading platform is provided, which is mainly used for filling silane. The silane gas loading and unloading platform has a simple structure, is convenient to adjust, and is convenient for workers to move and operate. The silane loading and unloading arm mainly includes a platform body 300 and the silane loading and unloading arm in the above embodiment, etc.

[0062] As Figure 4 , Figure 5 shown in, the platform body 300 is used to separate the personnel walkway and the silane filling pipeline 200. The platform body 300 includes a support structure 320 and a tabletop 340 arranged above the support structure 320. The upper part of the tabletop 340 is used as the personnel walkway, and the silane filling pipeline 200 and the support device 100 are arranged below, so as to facilitate the movement and operation of workers. In this embodiment, the support structure 320 is multiple support steel beams; the tabletop 340 is a rectangular platform, which has a steel beam skeleton 342 and a grating plate 344. Among them, the steel beam skeleton 342 is connected to the support device 100; the grating plate 344 (only part of which is shown in the figure) is laid between the steel beam skeletons 342 to facilitate workers to observe the silane filling pipeline 200 of the loading and unloading arm below during operation. And, a parking space is arranged on one side outside the platform body 300 for parking silane transport vehicles.

[0063] In this embodiment, the horizontal section 120 of the support device 100 of the silane gas loading and unloading arm and the first elastic spiral pipe section 220 are arranged below the tabletop 340 to avoid the personnel walkway. At the same time, the vertical section 140 of the support device 100 and the second elastic spiral pipe section 240 are movably penetrated through the tabletop 340, and the filling port 260 is arranged above the tabletop 340 to facilitate the adjustment of the vertical height of the filling port 260. In addition, the horizontal section 120 and the lower surface of the tabletop 340 are connected by two fixing members 346 to improve the stability of the support device 100. In this embodiment, the fixing member 346 is an I-beam. And, since the tabletop 340 separates the silane filling pipeline 200 below, multiple groups of silane gas loading and unloading arms can be arranged in this embodiment to cooperate with multiple parking spaces without affecting the operation and movement of the staff.

[0064] In this embodiment, the silane gas loading and unloading platform separates the personnel walkway and the silane filling pipeline 200 by arranging the support structure 320 and the tabletop 340 and cooperating with the structure of the silane gas loading and unloading arm, solving the problem that when there are multiple groups of silane filling pipelines 200 and other structures, the lines are relatively complex, affecting the movement and operation of the on-site staff.

[0065] At the same time, the silane gas loading and unloading platform of this embodiment further includes a filling panel 400, and the filling panel 400 is a parameter adjustment and control device of the silane gas filling system. The filling panel 400 is arranged on the upper surface of the tabletop 340, which can facilitate the staff to directly set the parameters of the filling process on the platform.

[0066] The silane gas loading and unloading platform of this embodiment further includes an explosion-proof wall 500. The explosion-proof wall 500 is arranged on the side of the platform body 300 opposite to the parking space outside the platform body 300 to separate the loading and unloading platform and the transportation pipeline of the silane gas and prevent the accident from expanding in case of leakage.

[0067] In addition, a plurality of inclined ladders 360 are arranged on the side surface of the platform body 300 of this embodiment to facilitate the staff to get on and off the platform body 300.

[0068] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. A silane gas loading and unloading arm, characterized in that: include: A supporting device, comprising a horizontal section and a vertical section; and A silane filling pipeline is arranged along the supporting device; Wherein, the silane filling pipeline comprises: A filling port, arranged at one end of the silane filling pipeline; A first elastic spiral tube portion, spirally sleeved on the outside of the horizontal section; and The second elastic spiral tube portion is spirally sleeved on the outside of the vertical section.

2. The silane gas loading and unloading arm according to claim 1, characterized in that: The supporting device is a plurality of sections of circular steel pipes.

3. The silane gas loading and unloading arm according to claim 2, characterized in that: The horizontal section includes: an inner support tube connected to the vertical section; An outer support tube, sleeved outside the inner support tube; and Two bearings are arranged between the outer side of the side wall of the inner support tube and the inner side of the side wall of the outer support tube.

4. The silane gas loading and unloading arm according to claim 3, characterized in that: The two bearings are respectively arranged at positions close to two ends of the outer support tube.

5. A silane gas loading and unloading platform, characterized in that: Include: The platform body comprises a supporting structure and a table top above the supporting structure, and a parking space is arranged on the outer side of the platform body; and According to any one of claims 1 to 4, the silane gas loading and unloading arm, the horizontal section of the supporting device and the first elastic spiral tube portion are arranged below the table top; the vertical section of the supporting device and the second elastic spiral tube portion are movably passed through the table top; the filling port is arranged above the table top.

6. The silane gas loading and unloading platform according to claim 5, characterized in that: The table top comprises: A steel beam framework connected to the support device; and The grating plates are laid between the steel beam frames.

7. The silane gas loading and unloading platform according to claim 5, characterized in that: The horizontal section is connected to the lower surface of the table top via at least two fixing members.

8. The silane gas loading and unloading platform according to claim 5, characterized in that: Also included is a filling panel, which is disposed on the upper surface of the table top.

9. The silane gas loading and unloading platform according to claim 5, characterized in that: It also includes an explosion-proof wall, which is arranged on the side of the platform body opposite to the parking space.

10. The silane gas loading and unloading platform according to claim 5, characterized in that: An inclined ladder is arranged on the side of the platform body.

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