Cooling end cover and heating furnace with same
By designing the structure of the cooling tube and the heat conducting medium in the tail end cover of the heating furnace, the problem of cooling water stationary in the cooling interlayer in the prior art is solved, and the heat dissipation effect and heat transfer efficiency of the heating furnace are improved.
Patent Information
- Application Number
- CN202421501676.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-27
- Publication Date
- 2025-05-30
- Estimated Expiration
- 2034-06-27
AI Technical Summary
In the tail end cap structure of the existing heating furnace, the cooling water has no clear water channel in the cooling interlayer, resulting in most of the water being stationary and poor heat exchange effect.
A cooling end cap is designed, including a cover body, a cooling tube and a heat conducting medium. The cooling tube is installed in the accommodating cavity of the cover body, and the heat conducting medium is filled in the accommodating cavity to form a clear water channel and a heat transfer channel.
By setting up a cooling tube and filling the heat conducting medium, the heat dissipation effect of the cooling end cap is improved, the risk of accumulation and non-flow of the cooling medium is reduced, the heat transfer efficiency is enhanced, and the risk of uneven temperature is reduced.
Smart Images
Figure CN222925970U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of heating furnaces, and particularly to a cooling end cover and a heating furnace having the cooling end cover. Background Art
[0002] Semiconductor or photovoltaic materials are widely used in industries such as electronics and new energy. The processing of semiconductor or photovoltaic materials usually involves feeding sheet materials into a heating furnace and reacting them under certain temperature and pressure conditions. The above-mentioned heating furnace is sealed with end covers at its ends. Among them, to protect the sealing ring from being damaged by high temperature, a heat preservation and cooling system is generally provided at the tail end cover.
[0003] However, the structure of the tail end cover of the existing heating furnace often adopts a double-layer structure with a welded sandwich. After the cooling water enters the cooling sandwich of the tail end cover, the cross-sectional area becomes larger, and there is no clear water channel inside the tail end cover, resulting in most of the water in the sandwich being in a static state, and the heat exchange effect is poor. In addition, after a part of the cooling water is heated, it will accumulate at the top of the tail end cover, further reducing the heat exchange effect. Utility Model Content
[0004] In view of this, it is necessary to provide a cooling end cover to improve the technical problem of poor heat dissipation effect of the tail end cover in the existing heating furnace.
[0005] In the first aspect of this application, a cooling end cover is provided. The cooling end cover includes a cover body, a cooling pipe, and a heat-conducting medium. The cover body is provided with a receiving cavity, the cooling pipe is installed in the receiving cavity, and the heat-conducting medium is filled in the receiving cavity. For the above-mentioned cooling end cover, by setting the cooling pipe, the risk of accumulation and non-flow of the cooling medium can be reduced, so as to improve the heat dissipation effect of the cooling end cover. In addition, by filling the heat-conducting medium in the receiving cavity, the air in the receiving cavity can be reduced, so as to improve the heat transfer efficiency between the cover body and the cooling pipe. At the same time, the risk of uneven temperature caused by the accumulation of air in the cooling end cover is reduced.
[0006] In at least one embodiment, the heat-conducting medium is wrapped around the outer periphery of the cooling pipe.
[0007] In at least one embodiment, the cooling pipe has a water inlet end and a water outlet end arranged oppositely.
[0008] In at least one embodiment, the cooling pipe is arranged in a spiral shape in the receiving cavity.
[0009] In at least one embodiment, the flow rate of the cooling medium in the cooling pipe is 1 m / s - 2 m / s.
[0010] In at least one embodiment, the cooling pipe is a seamless stainless steel pipe.
[0011] In at least one embodiment, the heat-conducting medium is magnesium oxide powder.
[0012] In at least one embodiment, the cover body includes a first cover plate, a second cover plate, and a surrounding edge. The first cover plate and the second cover plate are oppositely disposed on both sides of the surrounding edge, and the first cover plate, the surrounding edge, and the second cover plate together form a receiving cavity.
[0013] In at least one embodiment, the first cover plate and the second cover plate are oppositely welded to both sides of the surrounding edge.
[0014] The second aspect of the present application provides a heating furnace. The heating furnace includes a furnace body and the above-mentioned cooling end cover. An opening is provided at an end of the furnace body, and the cooling end cover is disposed on the furnace body and closes an opening. Description of the Drawings
[0015] Figure 1 is a schematic internal structure diagram of the cooling end cover provided by an embodiment of the present application;
[0016] Figure 2 is Figure 1 a schematic structural diagram of the cooling end cover shown from another angle;
[0017] Figure 3 is Figure 2 a schematic cross-sectional view of the cooling end cover shown along line B-B;
[0018] Figure 4 is a structural block diagram of the heating furnace provided by an embodiment of the present application.
[0019] Description of the Main Component Symbols
[0020] Heating furnace 1
[0021] Cooling end cover 100
[0022] Cover body 110
[0023] First cover plate 111
[0024] Second cover plate 112
[0025] Surrounding edge 113
[0026] Cooling pipe 120
[0027] Water inlet end 121
[0028] Water outlet end 122
[0029] Heat-conducting medium 130
[0030] Furnace body 200
[0031] The following specific embodiments will further illustrate the present application in conjunction with the above drawings. Specific Embodiments
[0032] The following specific embodiments illustrate the implementation manners of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Although the description of the present application will be introduced in conjunction with preferred embodiments, this does not mean that the features of this application are limited to this implementation manner. On the contrary, the purpose of introducing the application in conjunction with the implementation manner is to cover other alternatives or modifications that may extend based on the claims of the present application. In order to provide a deep understanding of the present application, many specific details will be included in the following description. The present application can also be implemented without using these details. In addition, in order to avoid confusing or obscuring the key points of the present application, some specific details will be omitted in the description. It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other.
[0033] Hereinafter, if used, the terms "first", "second", etc. are only for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more of such features. In the description of the present application, unless otherwise specified, the meaning of "a plurality" is two or more. The orientation terms such as "upper", "lower", "left", "right", etc. are defined relative to the orientation of the components shown in the drawings. It should be understood that these directional terms are relative concepts, and they are used for relative description and clarification, and they may change accordingly with the change of the orientation of the components placed in the drawings.
[0034] In the present application, if used, unless otherwise clearly defined and limited, the term "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or integrated; it can be directly connected or indirectly connected through an intermediate medium. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.
[0035] When the following embodiments are described in detail in conjunction with the schematic diagrams, for the convenience of explanation, the diagrams showing the local structure of the device will be enlarged locally out of the general proportion, and the schematic diagrams are only examples and should not limit the scope of protection of the present application here.
[0036] To make the purpose, technical solution and advantages of the present application clearer, the implementation manners of the present application will be further described in detail below in conjunction with the drawings.
[0037] An embodiment of the present application provides a cooling end cover 100, which is installed on an external heating device, such as a high-temperature furnace, a semiconductor processing furnace, etc. It should be noted that a sealing ring (not shown in the figure) is usually provided between the cooling end cover 100 and the external heating device to ensure the airtightness of the reaction chamber in the external heating device.
[0038] As Figure 1 、 Figure 2 and Figure 3 shown, the cooling end cover 100 includes a cover body 110, a cooling pipe 120, and a heat-conducting medium 130. The cover body 110 is provided with a receiving cavity (not shown in the figure), and the cooling pipe 120 is installed in the receiving cavity. By providing the cooling pipe 120, the heat dissipation effect of the cooling end cover 100 can be improved, so that the temperature of the sealing ring is always kept within a safe range, thereby reducing the risk of melting and damage of the sealing ring.
[0039] It should be noted that the safe range refers to the temperature range in which the sealing ring does not melt and damage. For example, the melting point of a polyurethane rubber sealing ring is 120 °C, so the safe range is 0 °C to 120 °C; more specifically, the safe range of a fluororubber sealing ring is -60 °C to 300 °C.
[0040] In one embodiment, the heat-conducting medium 130 is filled in the receiving cavity. It can be understood that heat is conducted from the external device to the cover body 110, then conducted to the cooling pipe 120 through the heat-conducting medium 130, and then the heat is taken away by the flowing cooling medium.
[0041] By providing the heat-conducting medium 130, on the one hand, the air in the receiving cavity can be reduced to improve the heat transfer efficiency between the cover body 110 and the cooling pipe 120; on the other hand, the risk of uneven temperature caused by the accumulation of air in the receiving cavity of the cooling end cover 100 can be reduced, which is beneficial to improving the heat dissipation effect of the cooling end cover 100.
[0042] In summary, compared with the end cover with a double-layer structure welded interlayer in the prior art, on the one hand, the cooling end cover 100 in the present application can reduce the risk of accumulation and non-flow of the cooling medium by providing the cooling pipe 120, thereby improving the heat dissipation effect of the cooling end cover 100. On the other hand, the cooling end cover 100 in the present application can reduce the air in the receiving cavity by filling the heat-conducting medium 130 in the receiving cavity to improve the heat transfer efficiency between the cover body 110 and the cooling pipe 120, and at the same time, reduce the risk of uneven temperature caused by the accumulation of air in the receiving cavity of the cooling end cover 100.
[0043] In one embodiment, the heat-conducting medium 130 is wrapped around the outer periphery of the cooling pipe 120. Specifically, when observing along the orthographic projection direction of the cooling end cover 100, the heat-conducting medium 130 wraps part or all of the cooling pipe 120.
[0044] In one embodiment, the entire accommodation cavity is filled with a heat-conducting medium 130 to discharge the air in the accommodation cavity. Thus, not only can the risk of uneven temperature of the cooling end cap 100 caused by the accumulation of air in the accommodation cavity be reduced, but also the influence of air on the heat transfer efficiency can be reduced.
[0045] In one embodiment, the cooling pipe 120 has a water inlet end 121 and a water outlet end 122 which are oppositely arranged. Specifically, the water inlet end 121 of the cooling pipe 120 is connected to an external cooling device (not shown in the figure), and the water outlet end 122 of the cooling pipe 120 is connected to an external water tank (not shown in the figure). The cooling medium (usually water or other cooling liquid) in the external cooling device enters the cooling pipe 120 through the water inlet end 121 and is discharged to the external water tank from the water outlet end 122.
[0046] It should be noted that during the flow of the cooling medium, the cooling medium can take away the heat in the accommodation cavity. The continuous entry of the cooling medium can reduce the risk of the cooling medium not flowing or accumulating, which is beneficial to improving the heat dissipation effect of the cooling end cap 100.
[0047] In one embodiment, the water inlet end 121 and the water outlet end 122 of the cooling pipe 120 are connected to the same cooling system. The cooling medium flows in from the water inlet end 121, passes through the cooling pipe 120, and is discharged from the water outlet end 122. After the cooling medium is cooled down, it enters the cooling pipe 120 from the water inlet end 121 again, and so on in a cycle to achieve the recycling of the cooling medium.
[0048] In one embodiment, as Figure 1 and Figure 2 shown, the cooling pipe 120 is arranged in a spiral shape in the accommodation cavity. Specifically, the cooling pipe 120 is arranged in the accommodation cavity in a spiral shape or in the form of a spiral line, forming a structure similar to a spiral shape.
[0049] Through the spiral arrangement of the cooling pipe 120, not only is it beneficial to increase the contact area between the cooling pipe 120 and the heat-conducting medium 130, improve the heat transfer efficiency, but also it helps to reduce the gap between the cooling pipes 120, reduce the hindrance to heat transfer, make the heat more evenly distributed in the cooling end cap 100, and improve the heat dissipation effect of the cooling end cap 100.
[0050] In other embodiments, the cooling pipe 120 can also adopt other arrangement methods such as annular arrangement, and the present application does not limit this. Those skilled in the art can choose according to the actual situation.
[0051] In one embodiment, the flow rate of the cooling medium in the cooling pipe 120 is 1 m / s - 2 m / s. In this way, not only can the risk of poor heat transfer effect and heat accumulation caused by too slow flow rate of the cooling medium be reduced, but also the risk of fluid turbulence and energy waste caused by too fast flow rate of the cooling medium can be reduced.
[0052] It should be noted that by controlling the flow rate of the cooling medium, the cooling medium can fully cover the inner surface of the cooling pipe 120, maximize the contact with the heat-conducting medium 130, ensure that heat is quickly transferred to the cooling medium, thereby improving the heat exchange efficiency. At the same time, problems caused by energy loss and flow instability are avoided.
[0053] In one embodiment, the cooling pipe 120 is a seamless stainless steel pipe. It should be noted that stainless steel materials have good corrosion resistance and high-temperature resistance, and can work stably in high-temperature environments and maintain a long service life. At the same time, the manufacturing process of seamless pipes ensures the smoothness and consistency inside the pipes, which is beneficial to the flow of the cooling medium and heat transfer, further improving the heat exchange efficiency.
[0054] In other embodiments, the cooling pipe 120 can also be other types of pipes, which are not limited in this application, and those skilled in the art can choose according to the actual situation.
[0055] In one embodiment, the heat-conducting medium 130 is magnesium oxide powder. It should be noted that magnesium oxide powder has good heat-conducting performance and high-temperature resistance characteristics, and the thermal conductivity of magnesium oxide powder is close to that of stainless steel and much greater than the thermal conductivities of air and water vapor.
[0056] It can be understood that the magnesium oxide powder is filled in the accommodating cavity of the cooling end cover 100 and is in close contact with the cooling pipe 120 to form a heat transfer channel. Due to the high thermal conductivity of the magnesium oxide powder, the magnesium oxide powder can quickly absorb the heat transferred from the cooling pipe 120 and quickly transfer it to the cooling medium, thereby improving the heat dissipation effect of the cooling end cover 100.
[0057] In other embodiments, the heat-conducting medium 130 can also be other media, which are not limited in this application, and those skilled in the art can choose according to the actual situation.
[0058] In one embodiment, as Figure 3 shown, the cover body 110 includes a first cover plate 111, a second cover plate 112 and a surrounding edge 113. The first cover plate 111 and the second cover plate 112 are oppositely arranged on both sides of the surrounding edge 113, and the first cover plate 111, the surrounding edge 113 and the second cover plate 112 together form the above-mentioned accommodating cavity.
[0059] Through the arrangement of the first cover plate 111, the second cover plate 112 and the surrounding edge 113, the structure of the cover body 110 is made more stable. At the same time, the cover body 110 protects the internal cooling pipe 120 and heat-conducting medium 130 from the influence of the external environment and improves the working stability of the cooling end cover 100.
[0060] In one embodiment, the peripheral edge 113 is provided with a first through hole (not shown in the figure) and a second through hole (not shown in the figure). The water inlet end 121 of the cooling pipe 120 passes through the first through hole and is connected to an external cooling device, and the water outlet end 122 of the cooling water pipe is connected to an external water tank.
[0061] In one embodiment, the first cover plate 111 and the second cover plate 112 are welded to opposite sides of the peripheral edge 113. In other words, the first cover plate 111, the peripheral edge 113, the second cover plate 112, and the peripheral edge 113 are connected by welding. It should be noted that the welding method can not only prevent loosening and falling off between components, but also improve the sealing performance of the cover body 110, ensuring that there are no problems such as air leakage or water leakage during the operation of the cooling end cover 100. Through welding fixation, the connection between the first cover plate 111, the second cover plate 112, and the peripheral edge 113 is more firm, further improving the stability of the cooling end cover 100.
[0062] In other embodiments, other fixed connection methods such as bonding can also be used between the first cover plate 111, the second cover plate 112, and the peripheral edge 113. The present application does not limit this, and those skilled in the art can choose according to the actual situation.
[0063] The embodiment of the present application also provides a heating furnace 1, as Figure 4 shown. The heating furnace 1 includes a furnace body 200 and the above-mentioned cooling end cover 100. One end of the furnace body 200 is provided with an opening, and the cooling end cover 100 is arranged on the furnace body 200 and closes the opening. It should be noted that by providing the cooling pipe 120 with a water inlet end 121 and a water outlet end 122, the cooling end cover 100 can reduce the risk of accumulation and non-flow of the cooling medium, thereby improving the heat dissipation effect of the cooling end cover 100.
[0064] In addition, by filling the heat-conducting medium 130 in the accommodation cavity and contacting the outer wall of the cooling pipe 120, the cooling end cover 100 can reduce the air in the accommodation cavity, improve the heat transfer efficiency between the cover body 110 and the cooling pipe 120, and at the same time, reduce the risk of uneven temperature caused by the accumulation of air in the accommodation cavity of the cooling end cover 100.
[0065] Exemplarily, the manufacturing process of the cooling end cover 100 in the present application is as follows: First, the technician welds the first cover plate 111 to one side of the peripheral edge 113, and then arranges the cooling pipe 120 made of seamless steel in a spiral manner in the accommodation space surrounded by the first cover plate 111 and the peripheral edge 113.
[0066] Subsequently, the water inlet end 121 of the cooling pipe 120 is passed through the first through hole, and the water outlet end 122 of the cooling water pipe is passed through the second through hole. Then, the gap between the first cover plate 111, the surrounding edge 113 and the cooling pipe 120 is filled and compacted with magnesium oxide powder. Finally, the second cover plate 112 is welded to the other side of the surrounding edge 113, and the fabrication of the cooling end cover 100 is completed.
[0067] It should be noted that after the fabrication of the cooling end cover 100 is completed, the technical personnel need to conduct a water pressure test on the cooling end cover 100 to ensure its normal use. Additionally, during use, the cooling medium enters from the water inlet end 121 of the cooling pipe 120, flows through the cooling pipe 120 at a flow rate of 1 m / s - 2 m / s, and exits from the water outlet end 122 of the cooling pipe 120.
[0068] As described above, the above are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present application should be covered within the disclosure scope of the present application.
Claims
1. A cooling end cover, characterized in that: The cooling end cover comprises a cover body, a cooling pipe and a heat-conducting medium. The cover body is provided with a containing cavity. The cooling pipe is installed in the containing cavity. The heat-conducting medium is filled in the containing cavity.
2. The cooling end cover according to claim 1, characterized in that: The heat-conducting medium wraps the outer circumference of the cooling pipe.
3. The cooling end cover according to claim 1 or 2, characterized in that: The cooling pipe has a water outlet end and a water inlet end which are arranged opposite to each other.
4. The cooling end cover according to claim 1, characterized in that: The cooling pipe is spirally arranged in the accommodating cavity.
5. The cooling end cover according to claim 1, characterized in that: The flow rate of the cooling medium in the cooling pipe is 1m / s-2m / s.
6. The cooling end cover according to claim 1, characterized in that: The cooling pipe is a seamless stainless steel pipe.
7. The cooling end cover according to claim 1, characterized in that: The heat conducting medium is magnesium oxide powder.
8. The cooling end cover according to claim 1, characterized in that: The cover body includes a first cover plate, a second cover plate and a peripheral edge. The first cover plate and the second cover plate are arranged on two sides of the peripheral edge opposite to each other, and the first cover plate, the peripheral edge and the second cover plate jointly form the accommodating cavity.
9. The cooling end cover according to claim 8, characterized in that: The first cover plate and the second cover plate are welded to two sides of the surrounding edge opposite to each other.
10. A heating furnace, characterized in that: The heating furnace comprises a furnace body and a cooling end cover according to any one of claims 1 to 9, an opening is provided at an end of the furnace body, and the cooling end cover is provided on the furnace body and closes the opening.