Distribution disc welding structure and distribution disc device
By designing a distribution plate welding structure including welding grooves and rotating bodies, the problem of high cost and complex operation in the prior art positioning tooling is solved, and the precise positioning and welding of the intake pipe and the distribution plate main body is realized, cost and working hours are reduced, and positioning accuracy and welding strength are improved.
Patent Information
- Application Number
- CN202421820782.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-06-03
- Estimated Expiration
- 2034-07-30
AI Technical Summary
In the prior art, the distribution disc device requires additional design of positioning tooling during welding connection, resulting in high costs, long operating hours, poor positioning accuracy, difficulty in disassembly and assembly, and difficult to design the welding program path.
A distribution plate welding structure is designed, including a distribution plate main body and an intake pipe. The distribution plate main body is provided with a welding groove and a positioning column. One end of the intake pipe is provided with a rotating body. The rotating body can be installed in the welding groove. Through the coordination of the positioning groove and the positioning column, the precise positioning and welding of the intake pipe and the distribution plate main body are realized.
Through this distribution plate welding structure, the welding process is simplified, the cost and operating time are reduced, the positioning accuracy and the strength of the welding connection are improved, the difficulty of using positioning tooling is avoided, and the welding program path design is simpler.
Smart Images
Figure CN222935502U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of distribution plates, in particular to a distribution plate welding structure and a distribution plate device. Background Art
[0002] A CVD device, namely a chemical vapor deposition device, is a device that uses gaseous chemical reactions to form a solid deposition layer on the surface of a solid. CVD devices are widely used in fields such as semiconductors and new energy photovoltaics for preparing high-purity and high-performance thin film coatings. A spraying distribution plate device is a device used in the CVD process, generally composed of an inlet pipe fitting and a distribution plate body. In a CVD device, the spraying distribution plate device is usually located at the top of the reaction chamber, and gas or chemical substances are sprayed into the reaction chamber through a plurality of small holes on the distribution plate body.
[0003] During the process of welding and connecting the inlet pipe fitting and the distribution plate body, there are requirements for the installation position and installation angle of the inlet pipe fitting relative to the distribution plate body. In the prior art, when connecting the inlet pipe fitting to the distribution plate body, a positioning tooling is additionally designed to position the inlet pipe fitting, but the use of the positioning tooling has high costs, long operation man-hours, poor positioning accuracy, difficult disassembly and assembly, and difficult design of the welding program path. Summary of the Utility Model
[0004] The purpose of the utility model is to provide a distribution plate welding structure and a distribution plate device to solve the problems of high costs, long operation man-hours, poor positioning accuracy, difficult disassembly and assembly, and difficult design of the welding program path in the prior art when using the positioning tooling.
[0005] To achieve the above object, the utility model adopts the following technical solutions:
[0006] On the one hand, the utility model provides a distribution plate welding structure, including:
[0007] A distribution plate main body, the distribution plate main body is provided with a welding groove, and a positioning column is arranged at the bottom of the welding groove;
[0008] An inlet pipe, one end of the inlet pipe is provided with a rotating body, the rotating body can be installed in the welding groove and abuts against the bottom of the welding groove; a positioning groove is opened in the rotating body, and the positioning column can be positioned in the positioning groove.
[0009] As an optional solution of the above distribution plate welding structure, a first channel is opened at the bottom of the welding groove, and a second channel is opened in the rotating body. When the positioning column is positioned in the positioning groove, the first channel communicates with the second channel.
[0010] As an alternative to the above-mentioned welding structure of the distribution plate, at least three positioning posts and at least three positioning grooves are provided. At least three of the positioning posts are respectively embedded in at least three of the positioning grooves, and at least three of the positioning posts are arranged around the first channel, and at least three of the positioning grooves are arranged around the second channel.
[0011] As an alternative to the above-mentioned welding structure of the distribution plate, at least three of the positioning posts form a right-angled triangle structure around the first channel, and at least three of the positioning grooves form a right-angled triangle structure around the second channel.
[0012] As an alternative to the above-mentioned welding structure of the distribution plate, the inner diameter of the first channel is equal to the inner diameter of the second channel.
[0013] As an alternative to the above-mentioned welding structure of the distribution plate, the first channel is located at the middle position of the welding groove, and the second channel is located at the middle position of the rotating body.
[0014] As an alternative to the above-mentioned welding structure of the distribution plate, the edge of the positioning groove is spaced from the rotating body.
[0015] As an alternative to the above-mentioned welding structure of the distribution plate, the cross-sectional area of the positioning groove gradually increases from the groove bottom to the groove opening.
[0016] As an alternative to the above-mentioned welding structure of the distribution plate, the head of the positioning post is inclined with a guiding surface.
[0017] On the other hand, the present utility model provides a distribution plate device, including the above-mentioned welding structure of the distribution plate.
[0018] The beneficial effects of the present utility model are as follows:
[0019] The welding structure of the distribution plate includes a distribution plate main body and an air inlet pipe. The distribution plate main body is provided with a welding groove, and a positioning post is provided at the groove bottom of the welding groove. One end of the air inlet pipe is provided with a rotating body, and the rotating body can be installed in the welding groove and abuts against the groove bottom of the welding groove. Thus, through the setting of the welding groove, it is convenient to weld between the air inlet pipe and the distribution plate main body, convenient for the design of the welding program path, and reduces costs and operation man-hours. Among them, the rotating body is provided with a positioning groove, and the positioning post can be positioned in the positioning groove. Thus, through the cooperation of the positioning post and the positioning groove, the air inlet pipe can be directly positioned with the distribution plate main body, realizing precise and efficient connection, and the assembly before welding is simple, the welding process is simplified, and there is no need to additionally design a positioning tooling to position the air inlet pipe parts. Furthermore, the problems of high cost, long operation man-hours, poor positioning accuracy, difficult disassembly and assembly, and difficult design of the welding program path caused by using the positioning tooling are avoided. Description of the Drawings
[0020] Figure 1 A cross-sectional view of the welding structure of the distribution plate provided by the embodiment of the present utility model;
[0021] Figure 2 is Figure 1 a partial enlarged view of the position A in
[0022] In the figure:
[0023] 1. Distribution plate main body; 11. Welding groove; 111. Positioning post; 112. First channel; 2. Air inlet pipe; 21. Rotating body; 211. Positioning groove; 212. Second channel. Specific implementation manners
[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.
[0025] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "under" the second feature includes the first feature being directly below and obliquely below the second feature, or simply indicating that the first feature has a lower horizontal height than the second feature.
[0026] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.
[0027] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.
[0028] As Figure 1 and Figure 2 shown, this embodiment provides a welding structure for a distribution plate, which is used to realize the welding of the intake pipe 2 and the distribution plate body 1.
[0029] The distribution plate welding structure includes a distribution plate body 1 and an intake pipe 2. The distribution plate body 1 is provided with a welding groove 11, and a positioning post 111 is provided at the bottom of the welding groove 11. One end of the intake pipe 2 is provided with a rotating body 21, and the rotating body 21 can be installed in the welding groove 11 and abut against the bottom of the welding groove 11. Thus, through the setting of the welding groove 11, the welding between the intake pipe 2 and the distribution plate body 1 can be facilitated, the design of the welding program path can be facilitated, and the cost and operation man-hours can be reduced.
[0030] Among them, the rotating body 21 is provided with a positioning groove 211, and the positioning post 111 can be positioned in the positioning groove 211. Thus, through the cooperation of the positioning post 111 and the positioning groove 211, the intake pipe 2 can be directly positioned with the distribution plate body 1, realizing accurate and efficient connection. Moreover, the assembly before welding is simple, the welding process is simplified, and there is no need to additionally design a positioning tooling to position the intake pipe 2, thereby avoiding the problems of high cost of using the positioning tooling, long operation man-hours, poor positioning accuracy, difficult disassembly and assembly, and difficult design of the welding program path. Optionally, the head of the positioning post 111 is inclined with a guiding surface, so that the insertion of the positioning post 111 at the opening of the positioning groove 211 can be guided through the guiding surface, thereby reducing the difficulty of inserting the positioning post 111 into the positioning groove 211.
[0031] Further, a first passage 112 is formed at the bottom of the welding groove 11, and a second passage 212 is formed in the rotating body 21. When the positioning post 111 is positioned in the positioning groove 211, the first passage 112 communicates with the second passage 212. By positioning the positioning post 111 and the positioning groove 211, it is ensured that the first passage 112 and the second passage 212 can communicate, thereby realizing the gas flow between the intake pipe 2 and the distribution plate body 1. Specifically, at least three positioning posts 111 and at least three positioning grooves 211 are provided. At least three positioning posts 111 are respectively embedded in at least three positioning grooves 211 in a one-to-one correspondence, and at least three positioning posts 111 are arranged around the first passage 112, and at least three positioning grooves 211 are arranged around the second passage 212. Thus, through the one-to-one positioning of the three positioning posts 111 and the three positioning grooves 211, the positioning accuracy can be further enhanced, and the connection strength between the two can be enhanced, preventing the intake pipe 2 from being deflected relative to the distribution plate body 1. Optionally, at least three positioning posts 111 form a right triangle structure around the first passage 112, and at least three positioning grooves 211 form a right triangle structure around the second passage 212, so as to have an anti-fooling effect on the installation of the intake pipe 2 on the distribution plate, ensuring that the orientation of the end of the intake pipe 2 away from the rotating body 21 meets the requirements.
[0032] Further, the inner diameter of the first passage 112 is equal to the inner diameter of the second passage 212, so that the gas flow between the intake pipe 2 and the distribution plate body 1 is not affected by the change of the pipe inner diameter. In this way, when the inner diameter of the first passage 112 is not equal to the inner diameter of the second passage 212, the gas flowing into the first passage 112 from the second passage 212 will not have a speed change. Optionally, the first passage 112 is located at the middle position of the welding groove 11, and the second passage 212 is located at the middle position of the rotating body 21, so as to facilitate the position design of the positioning post 111 and the positioning groove 211 and reduce the production difficulty of the intake pipe 2 and the distribution plate body 1.
[0033] Further, the edge of the positioning groove 211 is spaced from the rotating body 21, so that there is a spaced space between the rotating body 21 and the edge of the positioning groove 211, and the welding connection between the intake pipe 2 and the distribution plate body 1 can be facilitated through this spaced space. Optionally, the cross-sectional area of the positioning groove 211 gradually increases from the bottom to the opening, so that the edge of the positioning groove 211 is inclined, further facilitating the welding connection between the intake pipe 2 and the distribution plate body 1.
[0034] This embodiment also provides a distribution plate device, including the above-mentioned distribution plate welding structure. By using the above-mentioned distribution plate welding structure, the production process flow of the distribution plate device can be simplified, without a positioning tooling, with short working hours, high positioning accuracy, no disassembly and assembly work, and a simple welding program path design.
[0035] Obviously, the above embodiments of the present utility model are merely examples for clearly illustrating the present utility model, rather than limitations on the implementation manners of the present utility model. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation manners here. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the claims of the present utility model.
Claims
1. A distribution plate welding structure, characterized in that: include: A distribution plate body (1), wherein the distribution plate body (1) is provided with a welding groove (11), and a positioning column (111) is provided at the bottom of the welding groove (11); An air intake pipe (2), wherein a rotating body (21) is provided at one end of the air intake pipe (2), and the rotating body (21) can be installed in the welding groove (11) and abut against the bottom of the welding groove (11); the rotating body (21) is provided with a positioning groove (211), and the positioning column (111) can be positioned in the positioning groove (211).
2. The distribution plate welding structure according to claim 1, characterized in that: The bottom of the welding groove (11) is provided with a first channel (112), and the rotating body (21) is provided with a second channel (212); when the positioning column (111) is positioned in the positioning groove (211), the first channel (112) is connected to the second channel (212).
3. The distribution plate welding structure according to claim 2, characterized in that: At least three of the positioning posts (111) and the positioning grooves (211) are provided, and at least three of the positioning posts (111) are embedded in at least three of the positioning grooves (211) in a one-to-one correspondence, and at least three of the positioning posts (111) are provided around the first channel (112), and at least three of the positioning grooves (211) are provided around the second channel (212).
4. The distribution plate welding structure according to claim 3, characterized in that: At least three of the positioning columns (111) surround the first channel (112) to form a right-angled triangle structure, and at least three of the positioning grooves (211) surround the second channel (212) to form a right-angled triangle structure.
5. The distribution plate welding structure according to claim 2, characterized in that: The inner diameter of the first channel (112) is equal to the inner diameter of the second channel (212).
6. The distribution plate welding structure according to claim 2, characterized in that: The first channel (112) is located at a middle position of the welding groove (11), and the second channel (212) is located at a middle position of the rotating body (21).
7. The distribution plate welding structure according to claim 1, characterized in that: The groove edge of the positioning groove (211) is arranged at a distance from the rotating body (21).
8. The distribution plate welding structure according to claim 7, characterized in that: The cross-sectional area of the positioning groove (211) is gradually increased from the groove bottom to the groove opening.
9. The distribution plate welding structure according to any one of claims 1 to 8, characterized in that: The head of the positioning column (111) is provided with a guide surface at an angle.
10. A distribution plate device, characterized in that: It comprises the distribution plate welding structure as claimed in any one of claims 1 to 9.