Gas storage equipment

Abstract

The utility model discloses gas storage equipment which comprises a storage bottle body, a temperature early warning mechanism and a temperature adjusting and protecting mechanism. The temperature early warning mechanism comprises a heat conduction detection pipe, a pair of partition inner pipes are integrally formed in the heat conduction detection pipe, a plurality of low-temperature sensors are fixedly assembled between the partition inner pipes, the low-temperature sensors are fixedly assembled on the inner wall of the heat conduction detection pipe, and a buzzer is arranged on the outer side of the storage bottle body. The temperature adjusting and protecting mechanism comprises a liquid storage tank, a self-sucking pump is assembled above the liquid storage tank, a liquid pumping pipe is communicated between a liquid inlet of the self-sucking pump and the liquid storage tank, and a liquid outlet of the self-sucking pump is communicated with a liquid discharging pipe. According to the gas storage equipment disclosed by the utility model, through the arrangement of corresponding mechanisms, a temperature early warning protection function can be achieved on the disilane gas storage equipment, the situation that the temperature is too low in the disilane gas storage process of the gas storage equipment is reduced, and the use safety of the gas storage equipment is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of disilane gas storage, and particularly relates to a gas storage device. Background Art

[0002] A gas storage device is a device for compressing and storing gases, which is widely used in the storage process of various gases. Disilane is a chemical substance composed of silicon and hydrogen, and is one of the silane series compounds. Due to its unique physical and chemical properties, disilane has important applications in technologies such as solar cell production, molecular beam epitaxy, and ion implantation. Especially in the field of solar cell production, the deposition rate of disilane on amorphous silicon wafers is many times faster than that of silane. At the same time, disilane is also used in the manufacture of photosensitive drums and the epitaxy and diffusion processes in the semiconductor industry.

[0003] Since disilane is a non-corrosive and slightly toxic gas, it is stable to water and acids, and can spontaneously combust in air to form silicon oxide and water. Its boiling point is -14.3°C and its melting point is -132.5°C. Due to the instability of disilane, attention should be paid to safety during the storage and use of disilane.

[0004] The existing disilane gas is mainly stored in steel cylinders, but most of the existing disilane gas storage devices do not have a temperature warning and protection function, and cannot monitor and warn the temperature of the stored disilane gas in real time. When the temperature of the steel cylinder is lower than the boiling point of disilane, the disilane gas is easily affected by excessive temperature fluctuations and leaks, spontaneously combusts or explodes, resulting in poor safety of the gas storage device for storing disilane gas.

[0005] Therefore, in view of the above technical problems, it is necessary to provide a gas storage device.

[0006] The information disclosed in this background art section is only intended to enhance the overall understanding of the present utility model and should not be regarded as an admission or any form of suggestion that this information constitutes prior art already known to those of ordinary skill in the art. Summary of the Utility Model

[0007] The purpose of the present utility model is to provide a gas storage device, which can improve the safety of the gas storage device for storing disilane gas.

[0008] To achieve the above purpose, a specific embodiment of the present utility model provides a gas storage device, including: a storage cylinder, a temperature warning mechanism, and a temperature adjustment and protection mechanism.

[0009] The temperature warning mechanism is fixedly assembled inside the storage bottle body. The temperature warning mechanism includes a heat conduction detection tube, which is fixedly assembled inside the storage bottle body. A pair of partition inner tubes are integrally formed inside the heat conduction detection tube. The pair of partition inner tubes divide the heat conduction detection tube into a heat exchange inlet liquid flow channel and a heat exchange return liquid flow channel. A number of low-temperature sensors are fixedly assembled between the pair of partition inner tubes, and the low-temperature sensors are fixedly assembled on the inner wall of the heat conduction detection tube. A buzzer is arranged on the outer side of the storage bottle body, and the buzzer is arranged in cooperation with the low-temperature sensors.

[0010] The temperature regulation and protection mechanism is assembled on the outer side of the storage bottle body. The temperature regulation and protection mechanism includes a liquid storage tank, which is fixedly assembled on one side of the storage bottle body. A self-priming pump is assembled above the liquid storage tank. A liquid extraction pipe is connected between the liquid inlet of the self-priming pump and the liquid storage tank. The liquid outlet of the self-priming pump is connected with a liquid discharge pipe, and the liquid discharge pipe is communicated with the heat exchange inlet liquid flow channel.

[0011] In one or more embodiments of the present utility model, the heat exchange inlet liquid flow channel and the heat exchange return liquid flow channel are communicated to form a U-shaped heat exchange flow channel. It is convenient to adjust the temperature of the storage bottle body by means of the heat exchange fluid flowing in the U-shaped heat exchange flow channel, thereby reducing the situation that the temperature of the storage bottle body is too low during gas storage.

[0012] In one or more embodiments of the present utility model, a clamping member is sleeved on the outer side of the liquid storage tank, and the clamping member is clamped and assembled on the outer side of the storage bottle body. The clamping member is used to assemble and connect the liquid storage tank and the storage bottle body. A tank cover is fixedly connected above the liquid storage tank, and the liquid storage tank and the tank cover cooperate to form a closed liquid storage cavity. The heat exchange fluid is stored in a closed manner through the closed liquid storage cavity.

[0013] In one or more embodiments of the present utility model, the liquid storage tank is filled with a heat exchange fluid.

[0014] The temperature of the storage bottle body is adjusted by controlling the heat exchange fluid to flow in the U-shaped heat exchange flow channel. The end of the liquid extraction pipe far from the self-priming pump is located below the liquid level of the heat exchange fluid. So that the liquid extraction pipe can extract and boost the heat exchange fluid stored in the liquid storage tank for transportation.

[0015] In one or more embodiments of the present utility model, one end of the heat conduction detection tube located outside the storage bottle body is fixedly connected with a heat insulation diversion tube, and the buzzer is sleeved on the outer side of the tank cover. The heat insulation diversion tube is used to connect and conduct the guiding tube and the return tube and transport the fluid.

[0016] In one or more embodiments of the utility model, a pair of thermal insulation baffles are integrally formed in the thermal insulation guide pipe. The thermal insulation guide pipe is separated by a pair of thermal insulation baffles, and at the same time, the guide pipe and the return pipe can be assembled and limited and the liquid can be guided by the cooperation between the pair of thermal insulation baffles and the thermal insulation guide pipe. The pair of thermal insulation baffles separate the thermal insulation guide pipe into a delivery channel and a drainage channel. The heat exchange fluid is transported to the heat exchange inlet channel through the delivery channel, and the low-temperature heat exchange fluid after heat exchange in the heat exchange return channel is discharged through the drainage channel.

[0017] In one or more embodiments of the utility model, the delivery channel is connected to the heat exchange inlet channel, the discharge channel is connected to the heat exchange return channel, and the end of the thermal insulation guide tube away from the thermal conductivity detection tube is fixedly connected to a plugging assembly. The guide tube and the return tube are assembled and limited by the plugging assembly.

[0018] In one or more embodiments of the utility model, a guide pipe is connected between the drainage pipe and the delivery channel. The guide pipe serves to connect the sealing assembly with the delivery channel, so as to facilitate the delivery of heat exchange fluid into the delivery channel through the guide pipe. A return pipe is arranged on one side of the guide pipe, one end of which is connected to the drainage channel, and the other end of which is connected to the liquid storage tank. The return pipe serves to connect the drainage channel with the liquid storage tank, so as to facilitate the low-temperature heat exchange fluid after heat exchange in the drainage channel to flow back to the liquid storage tank along the return pipe.

[0019] In one or more embodiments of the utility model, one end of the return pipe located in the liquid storage tank is connected to a distribution pipe. The distribution pipe serves to connect the return pipe with a plurality of distribution nozzles, and the low-temperature heat exchange fluid transported by the return pipe is distributed through the distribution pipe.

[0020] In one or more embodiments of the utility model, a plurality of evenly distributed flow distribution nozzles are fixedly connected to the lower part of the flow distribution pipe, and the low-temperature heat exchange fluid is distributed by the plurality of flow distribution nozzles.

[0021] Compared with the prior art, the gas storage device disclosed in the utility model can provide temperature warning protection for the disilane gas storage device through the setting of corresponding mechanisms, thereby reducing the risk of low temperature during the storage process of the disilane gas in the gas storage device and improving the safety of the gas storage device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the accompanying drawings required in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments recorded in the present invention. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can be obtained based on these drawings.

[0023] Figure 1 Stereogram of a gas storage device in an embodiment of the present invention;

[0024] Figure 2 Another perspective stereogram of a gas storage device in an embodiment of the present invention;

[0025] Figure 3 First side view cross-sectional view of a gas storage device in an embodiment of the present invention;

[0026] Figure 4 For Figure 3 Schematic diagram of the structure at A in

[0027] Figure 5 Top view cross-sectional view of a gas storage device in an embodiment of the present invention;

[0028] Figure 6 Rear view cross-sectional view of a gas storage device in an embodiment of the present invention;

[0029] Figure 7 For Figure 6 Schematic diagram of the structure at B in

[0030] Figure 8 Second side view cross-sectional view of a gas storage device in an embodiment of the present invention;

[0031] Figure 9 For Figure 8 Schematic diagram of the structure at C in

[0032] Figure 10 For Figure 8 Schematic diagram of the structure at D in

[0033] Main reference numeral description:

[0034] 1-storage bottle body, 2-temperature warning mechanism, 201-thermal conductivity detection tube, 202-partitioning inner tube, 203-heat exchange inlet flow channel, 204-heat exchange return flow channel, 205-low temperature sensor, 206-buzzer, 3-temperature adjustment protection mechanism, 301-liquid storage tank, 302-self-priming pump, 303-liquid suction pipe, 304-liquid discharge pipe, 305-clamping part, 306-tank cover, 307-thermal insulation guide pipe, 308-thermal insulation partition, 309-delivery flow channel, 310-liquid discharge flow channel, 311-blocking assembly, 312-guide pipe, 313-reflux pipe, 314-flow distribution pipe, 315-flow distribution nozzle. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0036] like Figures 1 to 10 As shown, a gas storage device in one embodiment of the utility model includes: a storage bottle body 1, a temperature warning mechanism 2, and a temperature adjustment protection mechanism 3.

[0037] like Figures 3 to 5 As shown, the temperature warning mechanism 2 is fixedly assembled in the storage bottle body 1, and the temperature warning mechanism 2 includes a thermal conductive detection tube 201, and the thermal conductive detection tube 201 is fixedly assembled in the storage bottle body 1. The low temperature sensor 205 is assembled and limited by the thermal conductive detection tube 201, so that the low temperature sensor 205 can detect the temperature of the storage bottle body 1. At the same time, the temperature of the storage bottle body 1 can be adjusted by the low temperature sensor 205 guiding the heat exchange fluid.

[0038] like Figures 3 to 5 As shown, a pair of partition inner tubes 202 are integrally formed in the thermal conductive detection tube 201. The pair of partition inner tubes 202 form a heat exchange liquid inlet flow channel 203 and a heat exchange liquid return flow channel 204. At the same time, the pair of partition inner tubes 202 and the thermal conductive detection tube 201 can cooperate with each other to form a closed temperature sensing cavity for the low temperature sensor 205.

[0039] like Figures 3 to 5 As shown, a pair of partition inner tubes 202 partition the thermal conductive detection tube 201 into a heat exchange liquid inlet channel 203 and a heat exchange liquid return channel 204. The heat exchange fluid is transported through the heat exchange liquid inlet channel 203 and the heat exchange liquid return channel 204 is led out.

[0040] Specifically, the heat exchange liquid inlet channel 203 communicates with the heat exchange liquid return channel 204 to form a U-shaped heat exchange channel. It is convenient to adjust the temperature of the storage bottle body 1 by means of the heat exchange fluid flowing in the U-shaped heat exchange channel, thereby reducing the situation that the temperature of the storage bottle body 1 is too low during gas storage.

[0041] As Figures 3 to 6 shown, a number of low-temperature sensors 205 are fixedly assembled between a pair of separated inner tubes 202. The low-temperature sensors 205 are fixedly assembled on the inner wall of the heat conduction detection tube 201. A buzzer 206 is arranged on the outer side of the storage bottle body 1, and the buzzer 206 is arranged in cooperation with the low-temperature sensors 205.

[0042] Among them, a controller and a DC power supply are fixedly assembled on the outer side of the storage bottle body 1. The low-temperature sensors 205, the buzzer 206, the controller and the DC power supply are all electrically connected.

[0043] It should be noted that the low-temperature sensors 205, the buzzer 206, the controller and the DC power supply are all commercially available and can be directly purchased for use.

[0044] As Figures 1 to 2 shown, the temperature adjustment and protection mechanism 3 is assembled on the outer side of the storage bottle body 1. The temperature adjustment and protection mechanism 3 includes a liquid storage tank 301, and the liquid storage tank 301 is fixedly assembled on one side of the storage bottle body 1. The liquid storage tank 301 stores and receives the heat exchange fluid.

[0045] As Figures 1 to 2 shown, a clamping member 305 is sleeved on the outer side of the liquid storage tank 301, and the clamping member 305 is snap-fitted on the outer side of the storage bottle body 1. The liquid storage tank 301 and the storage bottle body 1 are assembled and connected through the clamping member 305.

[0046] As Figures 1 to 2 shown, a tank cover 306 is fixedly connected above the liquid storage tank 301, and the liquid storage tank 301 and the tank cover 306 cooperate to form a closed liquid storage cavity. The heat exchange fluid is stored in a closed manner through the closed liquid storage cavity.

[0047] Specifically, the liquid storage tank 301 is filled with a heat exchange fluid. The temperature of the storage bottle body 1 is adjusted by controlling the heat exchange fluid to flow in the U-shaped heat exchange channel.

[0048] As Figures 6 to 10 shown, a self-priming pump 302 is assembled above the liquid storage tank 301. The operation of the self-priming pump 302 is controlled to extract and boost the heat exchange fluid stored in the liquid storage tank 301.

[0049] As Figures 8 to 10As shown, a liquid suction pipe 303 is connected between the liquid inlet of the self-priming pump 302 and the liquid storage tank 301. The heat exchange fluid stored in the liquid storage tank 301 is extracted through the liquid suction pipe 303.

[0050] Among them, one end of the liquid suction pipe 303 away from the self-priming pump 302 is located below the liquid level of the heat exchange fluid. So that the liquid suction pipe 303 can extract and boost the transportation of the heat exchange fluid stored in the liquid storage tank 301.

[0051] As Figures 6 to 10 shown, a liquid discharge pipe 304 is connected to the liquid outlet of the self-priming pump 302, and the liquid discharge pipe 304 is communicated with the heat exchange liquid inlet flow channel 203. The heat exchange fluid extracted by the self-priming pump 302 is boosted and transported through the liquid discharge pipe 304.

[0052] As Figures 6 to 10 shown, one end of the heat conduction detection pipe 201 located outside the storage bottle body 1 is fixedly connected with a heat insulation diversion pipe 307, and the buzzer 206 is sleeved on the outside of the tank cover 306. The guiding pipe 312 and the return pipe 313 are connected and communicated and the fluid is transported through the heat insulation diversion pipe 307.

[0053] As Figures 6 to 10 shown, a pair of heat insulation partition plates 308 are integrally formed in the heat insulation diversion pipe 307. The heat insulation diversion pipe 307 is separated by a pair of heat insulation partition plates 308. At the same time, the guiding pipe 312 and the return pipe 313 can be assembled and limited and the liquid can be guided through the mutual cooperation of the pair of heat insulation partition plates 308 and the heat insulation diversion pipe 307.

[0054] As Figures 6 to 10 shown, a pair of heat insulation partition plates 308 divide the heat insulation diversion pipe 307 into a transportation flow channel 309 and a liquid discharge flow channel 310. The heat exchange fluid is transported into the heat exchange liquid inlet flow channel 203 through the transportation flow channel 309, and the low-temperature heat exchange fluid after heat exchange in the heat exchange liquid return flow channel 204 is discharged through the liquid discharge flow channel 310.

[0055] Specifically, the transportation flow channel 309 is communicated with the heat exchange liquid inlet flow channel 203, the liquid discharge flow channel 310 is communicated with the heat exchange liquid return flow channel 204, and one end of the heat insulation diversion pipe 307 away from the heat conduction detection pipe 201 is fixedly connected with a plugging fitting 311. The guiding pipe 312 and the return pipe 313 are assembled and limited through the plugging fitting 311.

[0056] As Figures 6 to 10 shown, a guiding pipe 312 is connected between the liquid discharge pipe 304 and the transportation flow channel 309. The guiding pipe 312 plays a role in connecting the plugging fitting 311 and the transportation flow channel 309, and is convenient for transporting the heat exchange fluid into the transportation flow channel 309 through the guiding pipe 312.

[0057] As Figures 6 to 10As shown, a return pipe 313 is arranged on one side of the guide pipe 312, one end of the return pipe 313 is connected to the drainage channel 310, and the other end of the return pipe 313 is connected to the liquid storage tank 301. The return pipe 313 serves to connect the drainage channel 310 and the liquid storage tank 301, so that the low-temperature heat exchange fluid after heat exchange in the drainage channel 310 can flow back to the liquid storage tank 301 along the return pipe 313.

[0058] like Figures 6 to 10 As shown, one end of the return pipe 313 located in the liquid storage tank 301 is connected to a distribution pipe 314. The distribution pipe 314 serves to connect the return pipe 313 with a plurality of distribution nozzles 315, and the low-temperature heat exchange fluid transported by the return pipe 313 is distributed through the distribution pipe 314.

[0059] like Figures 6 to 10 As shown, a plurality of evenly distributed flow distribution nozzles 315 are fixedly connected to the lower part of the flow distribution pipe 314. The low temperature heat exchange fluid is distributed by the plurality of flow distribution nozzles 315 to be led out.

[0060] During specific use, the disilane gas can be compressed and stored in the storage bottle 1. During the use of the storage bottle 1, the temperature inside the storage bottle 1 can be monitored in real time by a number of low-temperature sensors 205. When the temperature inside the storage bottle 1 is lower than the boiling point of the disilane gas, the buzzer 206 can emit a buzzing sound to give a temperature warning to the storage bottle 1.

[0061] When the storage bottle 1 has a temperature warning, the heat exchange fluid in the liquid storage tank 301 can be extracted by controlling the operation of the self-priming pump 302, and after being pressurized by the self-priming pump 302, it is transported to the delivery channel 309 along the discharge pipe 304 and the guide pipe 312, and the heat exchange fluid enters the storage bottle 1 along the heat exchange inlet channel 203 and the heat exchange return channel 204 to adjust the temperature of the storage bottle 1. In addition, the heat exchange fluid that has completed the heat exchange flows back to the liquid storage tank 301 along the discharge channel 310 and the return pipe 313, and can be heat exchanged with the low-temperature heat exchange fluid by diverting the flow through a plurality of flow distribution nozzles 315, thereby improving the effect of the heat exchange fluid on the temperature adjustment of the storage bottle 1.

[0062] For those skilled in the art, it is obvious that the present utility model is not limited to the details of the above-described exemplary embodiments, and the present utility model can be implemented in other specific forms without departing from the spirit or basic characteristics of the present utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be embraced within the present utility model. Any reference signs in the claims should not be construed as limiting the claims involved.

[0063] In addition, it should be understood that although this specification is described in terms of embodiments, not every embodiment only contains an independent technical solution. This narrative manner of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A gas storage device, characterized in that: include: Storage bottles; A temperature warning mechanism is fixedly mounted in the storage bottle body, the temperature warning mechanism comprises a heat conductive detection tube, the heat conductive detection tube is fixedly mounted in the storage bottle body, a pair of partition inner tubes are integrally formed in the heat conductive detection tube, the pair of partition inner tubes divide the heat conductive detection tube into a heat exchange inlet flow channel and a heat exchange return flow channel, a plurality of low temperature sensors are fixedly mounted between the pair of partition inner tubes, the low temperature sensors are fixedly mounted on the inner wall of the heat conductive detection tube, a buzzer is arranged on the outer side of the storage bottle body, and the buzzer is arranged in coordination with the low temperature sensor; A temperature regulating and protecting mechanism is mounted on the outside of the storage bottle body, and the temperature regulating and protecting mechanism includes a liquid storage tank, and the liquid storage tank is fixedly mounted on one side of the storage bottle body. A self-priming pump is mounted above the liquid storage tank, and a liquid suction pipe is connected between the liquid inlet of the self-priming pump and the liquid storage tank, and a liquid discharge pipe is connected to the liquid outlet of the self-priming pump, and the liquid discharge pipe is connected to the heat exchange liquid inlet channel.

2. A gas storage device according to claim 1, characterized in that: The heat exchange liquid inlet flow channel is connected with the heat exchange liquid return flow channel to form a U-shaped heat exchange flow channel.

3. A gas storage device according to claim 1, characterized in that: The outer side of the liquid storage tank is sleeved with a clamping piece, and the clamping piece is snap-fitted and assembled on the outer side of the storage bottle body. A tank cover is fixedly connected to the top of the liquid storage tank, and the liquid storage tank and the tank cover cooperate to form a closed liquid storage cavity.

4. A gas storage device according to claim 3, characterized in that: The liquid storage tank is filled with heat exchange fluid, and one end of the liquid extraction pipe away from the self-priming pump is located below the liquid surface of the heat exchange fluid.

5. A gas storage device according to claim 1, characterized in that: The end of the heat conductive detection tube outside the storage bottle body is fixedly connected with a temperature insulating flow guide tube, and the buzzer is sleeved on the outside of the tank cover.

6. A gas storage device according to claim 5, characterized in that: A pair of thermal insulation baffles are integrally formed in the thermal insulation guide pipe, and the pair of thermal insulation baffles divide the thermal insulation guide pipe into a conveying flow channel and a drainage flow channel.

7. A gas storage device according to claim 6, characterized in that: The delivery channel is connected with the heat exchange liquid inlet channel, the discharge channel is connected with the heat exchange liquid return channel, and one end of the temperature-insulating flow guide tube away from the thermal conductive detection tube is fixedly connected with a plugging assembly.

8. A gas storage device according to claim 7, characterized in that: A guide pipe is connected between the liquid discharge pipe and the delivery channel, a return pipe is arranged on one side of the guide pipe, one end of the return pipe is connected to the liquid discharge channel, and the other end of the return pipe is connected to the liquid storage tank.

9. A gas storage device according to claim 8, characterized in that: One end of the reflux pipe located in the liquid storage tank is connected with a flow distribution pipe.

10. A gas storage device according to claim 9, characterized in that: A plurality of evenly distributed flow distribution nozzles are fixedly connected to the lower portion of the flow distribution pipe.

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