Detachable combined quartz ring

Abstract

The utility model discloses a detachable combined quartz ring, which relates to the technical field of quartz rings, and comprises a quartz ring body and a notch groove, the notch groove is arranged on one side surface of the quartz ring body, the outer side surface of the quartz ring body is provided with a splicing bulge, and the splicing bulge is provided with a plurality of splicing holes. An annular groove is formed in the inner wall of the quartz ring body, and a limiting ring is installed on the outer side surface of the quartz ring body. The two quartz ring bodies are mutually fixed through the splicing protrusions and the annular grooves, the limiting rings installed on the outer side surfaces of the two quartz ring bodies can coincide when the two quartz ring bodies rotate by 180 degrees, and therefore the two quartz rings can be mutually combined, and the defect that in the prior art, a quartz ring generally adopts a circular design is overcome; the defects that the quartz rings in the prior art do not have a combination function, and when the quartz rings need to be combined for use, a plurality of quartz rings can only be tightly attached to one another through clamping generally, so that the combination effect is poor are overcome.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz rings, in particular to a detachable combined quartz ring. Background Technique

[0002] Semiconductor quartz rings are important components widely used in the semiconductor manufacturing process, especially in wafer processing. They are usually made of high-purity quartz materials and have excellent chemical and thermal stability. The main function of the quartz ring is to serve as a support and fixing device for the wafer, ensuring the stability and accuracy of the wafer during the processing. Due to the stability of the quartz material at high temperatures and its good insulation performance, it can effectively prevent any displacement or deformation of the wafer during the processing, thus ensuring the high precision and high quality of the processing technology.

[0003] Quartz rings in the prior art are generally used in the semiconductor technology field. Generally, after the quartz ring is installed on the quartz boat, the wafer is carefully placed on the surface of the quartz ring. The design and position of the quartz ring ensure that the wafer can be evenly supported on it, preventing the wafer from shifting during the processing. However, due to the general circular design of the quartz rings in the prior art, the quartz rings in the prior art do not have the function of combination. When it is necessary to use the quartz rings in combination, generally, only by clamping can multiple quartz rings be closely attached to each other, resulting in a poor combination effect. Summary of the Utility Model

[0004] The utility model provides a detachable combined quartz ring, which has the advantage of combination, so as to solve the problem that due to the general circular design of the quartz rings in the prior art, the quartz rings in the prior art do not have the function of combination, and when it is necessary to use the quartz rings in combination, generally, only by clamping can multiple quartz rings be closely attached to each other, resulting in a poor combination effect.

[0005] To achieve the purpose of combination, the utility model provides the following technical scheme: a detachable combined quartz ring, including a quartz ring body and a notch groove, the notch groove is opened on one side surface of the quartz ring body, a splicing protrusion is installed on the outer surface of the quartz ring body, an annular groove is opened on the inner wall of the quartz ring body, a limiting ring is installed on the outer surface of the quartz ring body, and a support component is installed on the outer surface of the quartz ring body.

[0006] As a preferred technical scheme of the utility model, there are two limiting rings, and the two limiting rings are evenly distributed at equal intervals in an annular array on the outer surface of the quartz ring body, and the outer surface of the splicing protrusion is in movable contact with the inner wall of the annular groove.

[0007] As a preferred technical solution of the present utility model, the support assembly includes a quartz plate. A moving rod is installed on one side surface of the quartz plate. A clamping plate is installed on the outer surface of the moving rod. A moving hole is formed on one side surface of the clamping plate. A sleeve is installed on one side surface of the clamping plate. A placement groove is formed on one side surface of the clamping plate. One side surface of the clamping plate is in movable contact with one side surface of the quartz ring body.

[0008] As a preferred technical solution of the present utility model, there are two quartz plates. The four moving rods are distributed in a circular array on one side surface of the quartz plate. Each moving rod is fixedly connected between the two quartz plates. There are two clamping plates. Four moving holes are formed on one side surface of each clamping plate. The inner wall of the moving hole is slidably connected to the outer surface of the moving rod.

[0009] As a preferred technical solution of the present utility model, two placement grooves are correspondingly distributed on one side surface of each clamping plate. The inner wall of the placement groove is in movable contact with the outer surface of the limiting ring. One side surface of the contact plate is in movable contact with one side surface of the quartz ring body.

[0010] As a preferred technical solution of the present utility model, four sleeves are correspondingly distributed on one side surface of each clamping plate. The inner wall of the sleeve is slidably connected to the outer surface of the moving rod.

[0011] Compared with the prior art, the present utility model provides a detachable combined quartz ring, which has the following beneficial effects:

[0012] For this detachable combined quartz ring, the two quartz ring bodies are fixed to each other through the splicing protrusions and the annular grooves. When rotated 180 degrees, the limiting rings installed on the outer surfaces of the two quartz ring bodies will coincide at this time, so as to realize the mutual combination of the two quartz rings, thus making up for the defect that the quartz rings in the prior art generally adopt a circular design, resulting in the quartz rings in the prior art not having the function of combination. When it is necessary to use the quartz rings in combination, generally only by clamping can multiple quartz rings be closely attached to each other, resulting in a poor combination effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a schematic diagram of the external structure of the present utility model;

[0014] Figure 2 is a schematic diagram of the external structure of the present utility model from another angle;

[0015] Figure 3 is a schematic diagram of the structure of the quartz ring body of the present utility model;

[0016] Figure 4 is a schematic diagram of the structure of the quartz ring body of the present utility model from another angle;

[0017] Figure 5 This is a schematic diagram of the clamping plate structure of the present utility model;

[0018] Figure 6 It is provided by the present utility model Figure 3 An enlarged schematic diagram of the structure of part A in

[0019] In the figure: 1. Quartz ring body; 2. Notch groove; 3. Splicing protrusion; 4. Annular groove; 5. Limiting ring; 6. Quartz plate; 7. Moving rod; 8. Clamping plate; 9. Moving hole; 10. Sleeve; 11. Placing groove. Specific embodiments

[0020] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the protection scope of the present utility model. Embodiment 1

[0021] Please refer to Figures 1 - 6 , the present utility model discloses a detachable combined quartz ring, including a quartz ring body 1 and a notch groove 2. The notch groove 2 is opened on one side surface of the quartz ring body 1. A splicing protrusion 3 is installed on the outer side surface of the quartz ring body 1. An annular groove 4 is opened on the inner wall of the quartz ring body 1. A limiting ring 5 is installed on the outer side surface of the quartz ring body 1. A support assembly is installed on the outer side surface of the quartz ring body 1.

[0022] There are two limiting rings 5, and the two limiting rings 5 are evenly distributed at equal intervals in an annular array on the outer side surface of the quartz ring body 1. The outer side surface of the splicing protrusion 3 is in movable contact with the inner wall of the annular groove 4.

[0023] The support assembly includes a quartz plate 6. A moving rod 7 is installed on one side surface of the quartz plate 6. A clamping plate 8 is installed on the outer side surface of the moving rod 7. A moving hole 9 is opened on one side surface of the clamping plate 8. A sleeve 10 is installed on one side surface of the clamping plate 8. A placing groove 11 is opened on one side surface of the clamping plate 8. The one side surface of the clamping plate 8 is in movable contact with the one side surface of the quartz ring body 1. Place the combined quartz ring body 1 between the four moving rods 7. At this time, push the clamping plate 8 installed on the outer side surface of the moving rod 7 to move. Because the moving hole 9 and the sleeve 10 are provided on one side surface of the clamping plate 8, when the clamping plate 8 moves, the moving hole 9 and the sleeve 10 will provide a stable moving force for the clamping plate 8.

[0024] There are two quartz plates 6, and four moving rods 7 are distributed in an annular array on one side surface of the quartz plate 6. Each moving rod 7 is fixedly connected between the two quartz plates 6. There are two clamping plates 8. Four moving holes 9 are formed on one side surface of each clamping plate 8. The inner wall of the moving hole 9 is slidably connected to the outer surface of the moving rod 7. When the clamping plate 8 moves along the moving rod 7, one side surface of the clamping plate 8 will contact one side surface of the quartz ring body 1. When both clamping plates 8 contact the quartz plate 6, the clamping of the quartz plate 6 is achieved.

[0025] Two placement grooves 11 are correspondingly distributed on one side surface of each clamping plate 8. The inner wall of the placement groove 11 is in movable contact with the outer surface of the limiting ring 5. One side surface of the contact plate is in movable contact with one side surface of the quartz ring body 1. A placement groove 11 is formed on one side surface of the clamping plate 8. When the clamping plate 8 contacts the quartz plate 6, the inner wall of the placement groove 11 will contact the outer surface of the limiting ring 5, so as to further limit the position and angle of the quartz ring through the placement groove 11.

[0026] Four sleeves 10 are correspondingly distributed on one side surface of each clamping plate 8. The inner wall of the sleeve 10 is slidably connected to the outer surface of the moving rod 7.

[0027] The working principle and usage process of the present utility model: When the combined quartz ring needs to be used, hold the two quartz ring bodies 1 at this time, and make the splicing protrusion 3 installed on one side surface of one quartz ring body 1 align with the notch groove 2 formed on one side surface of the other quartz ring body 1. When the alignment is completed, push one quartz ring body 1 into the inner wall of the other quartz ring body 1 at this time. When the two quartz ring bodies 1 contact each other, rotate one quartz ring body 1 by 180 degrees at this time. When the quartz ring body 1 is rotated, the splicing protrusion 3 installed on its outer surface will rotate and move. At this time, the splicing protrusion 3 will rotate and enter into the annular groove 4 formed on the inner wall of the other quartz ring body 1, so that the two quartz ring bodies 1 are fixed to each other through the splicing protrusion 3 and the annular groove 4. When rotated by 180 degrees, the limiting rings 5 installed on the outer surfaces of the two quartz ring bodies 1 will coincide at this time, thus realizing the mutual combination of the two quartz rings.

[0028] When the combination of the two quartz rings is completed, the combined quartz ring body 1 is placed between the four moving rods 7. At this time, the clamping plates 8 installed on the outer surface of the moving rods 7 are pushed to move. Since the moving holes 9 and the sleeves 10 are provided on one side surface of the clamping plates 8, when the clamping plates 8 move, the moving holes 9 and the sleeves 10 will provide a stable moving force for the clamping plates 8, enabling the clamping plates 8 to move smoothly along the moving rods 7. When the clamping plates 8 move along the moving rods 7, one side surface of the clamping plates 8 will come into contact with one side surface of the quartz ring body 1. When both clamping plates 8 come into contact with the quartz plate 6, the clamping of the quartz plate 6 is achieved. A placement groove 11 is formed on one side surface of the clamping plate 8. When the clamping plate 8 comes into contact with the quartz plate 6, the inner wall of the placement groove 11 will come into contact with the outer surface of the limiting ring 5, thereby further limiting the position and angle of the quartz ring through the placement groove 11.

Claims

1. A detachable assembled quartz ring, comprising a quartz ring body (1) and a notch groove (2), wherein the notch groove (2) is provided on one side surface of the quartz ring body (1), characterized in that: The outer surface of the quartz ring body (1) is provided with a splicing protrusion (3), the inner wall of the quartz ring body (1) is provided with an annular groove (4), the outer surface of the quartz ring body (1) is provided with a limit ring (5), and the outer surface of the quartz ring body (1) is provided with a supporting assembly.

2. A detachable combined quartz ring according to claim 1, characterized in that: There are two limit rings (5), which are distributed equidistantly on the outer surface of the quartz ring body (1) in an annular array, and the outer surface of the splicing protrusion (3) is in active contact with the inner wall of the annular groove (4).

3. The detachable combined quartz ring according to claim 1, characterized in that: The support assembly comprises a quartz plate (6), a moving rod (7) is mounted on one side surface of the quartz plate (6), a clamping plate (8) is mounted on the outer side surface of the moving rod (7), a moving hole (9) is opened on one side surface of the clamping plate (8), a sleeve (10) is mounted on one side surface of the clamping plate (8), a placement groove (11) is opened on one side surface of the clamping plate (8), and one side surface of the clamping plate (8) is in movable contact with one side surface of the quartz ring body (1).

4. The detachable combined quartz ring according to claim 3, characterized in that: There are two quartz plates (6), four movable rods (7) are distributed in a circular array on one side surface of the quartz plate (6), each movable rod (7) is fixedly connected between the two quartz plates (6), and there are two clamping plates (8), one side surface of each clamping plate (8) is provided with four movable holes (9), and the inner wall of the movable hole (9) is slidably connected to the outer surface of the movable rod (7).

5. The detachable combined quartz ring according to claim 3, characterized in that: One side surface of each clamping plate (8) is correspondingly provided with two placement grooves (11), the inner wall of the placement groove (11) is in movable contact with the outer side surface of the limiting ring (5), and one side surface of the clamping plate is in movable contact with one side surface of the quartz ring body (1).

6. The detachable combined quartz ring according to claim 3, characterized in that: Four sleeves (10) are correspondingly distributed on one side surface of each clamping plate (8), and the inner wall of the sleeve (10) is slidably connected to the outer surface of the moving rod (7).

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