Film expanding clamp

Abstract

The utility model aims to provide a film expanding clamp. The film expanding clamp comprises a bottom plate, a fixing part and a wafer expanding ring, wherein the fixing part is arranged on the bottom plate, the wafer expanding ring is sleeved on the fixing part and comprises a wafer expanding ring inner ring and a wafer expanding ring outer ring, the wafer expanding ring inner ring is sleeved on the fixing part, the wafer expanding ring outer ring is sleeved on the wafer expanding ring inner ring, and the wafer expanding ring outer ring is sleeved on the wafer expanding ring outer ring. Wherein the outer diameter of the fixing part is slightly smaller than the inner diameter of the wafer expanding ring inner ring, the outer diameter of the wafer expanding ring inner ring is slightly smaller than the inner diameter of the wafer expanding ring outer ring, the thin film is fixed through friction force between the wafer expanding ring and the base, no additional buckle structure is needed for fixing the thin film, assembly is simple, and cost is low. In the film expanding process, the fixing mode of the buckle structure can cause high abrasion to the feeding pulling plate, the service life of the tool is short, and the fixing mode of the film expanding tool is even in stress face, small in abrasion degree, long in service life and high in installation accuracy.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, in particular to a film expanding fixture. Background Art

[0002] In the process of semiconductor device packaging production, chips need to be mounted, taken out from a wafer, and mounted on a corresponding substrate. However, in the chip mounting process, the scribed wafer needs to be expanded. However, some chip mounters do not provide the function of film expansion. Therefore, an external film expansion mechanism needs to be used to expand the wafer. Then, in order to assist the film expansion, the wafer is usually placed on a film and then put into the film expansion mechanism, and the chip is directionally extended by heating and pressurizing. In order to ensure that the pressurization process during film expansion does not affect the film, a film expanding fixture is usually used to fix the film. As Figure 1 shown, the existing film expanding fixture is provided with a plurality of buckles on the installation bottom surface to fix the loading draw plate, so as to ensure that the loading draw plate will not move due to strong tension during the film expansion process.

[0003] However, the existing fixing method of the buckle structure needs to install four buckles first and then lock the four buckles. The structure is complex, and such an installation method is very inefficient. Therefore, the existing film expansion process needs a new film expanding fixture to solve the above problems. Summary of the Utility Model

[0004] Based on this, the purpose of the utility model is to provide a film expanding fixture to solve the above problems. The film expanding fixture includes: a bottom plate, a fixing part, and an expanding ring;

[0005] Wherein the fixing part is arranged on the bottom plate, the expanding ring is sleeved on the fixing part, the expanding ring includes an inner ring of the expanding ring and an outer ring of the expanding ring. The inner ring of the expanding ring is sleeved on the fixing part, and the outer ring of the expanding ring is sleeved on the inner ring of the expanding ring. Wherein the outer diameter of the fixing part is slightly smaller than the inner diameter of the inner ring of the expanding ring, and the outer diameter of the inner ring of the expanding ring is slightly smaller than the inner diameter of the outer ring of the expanding ring.

[0006] Further, a limiting part is arranged on the fixing part on the side far away from the bottom plate, and the distance between the limiting part and the fixing part on the side far away from the bottom plate is equal to the height of the expanding ring.

[0007] Even if the expanding ring moves in the direction close to the bottom under pressure during the film expansion process, due to the existence of the limiting part, the expanding ring will abut against the limiting part, thereby generating a limiting effect on the expanding ring and preventing the expanding ring from sliding down and deforming the film.

[0008] Further, the sum of the transverse dimension of the limiting part and the outer diameter of the fixing part is greater than the outer diameter of the outer ring of the expanding ring.

[0009] The inner ring and the outer ring of the die expansion ring both receive the supporting force of the limiting part, ensuring the stability of the die expansion ring.

[0010] Further, the end of the fixing part on the side away from the bottom plate is a chamfer structure.

[0011] Setting the end of the fixing part as a chamfer structure reduces the frictional resistance during assembly, thereby reducing the wear rate between components and extending the service life of the die expansion ring.

[0012] Further, the value obtained by subtracting the outer diameter of the fixing part from the inner diameter of the inner ring of the die expansion ring is less than 0.5 mm.

[0013] Further, a gripper is also provided on the bottom plate.

[0014] Further, the lateral dimension of the limiting part is greater than 1 mm and less than 2 mm.

[0015] In the present utility model, the film containing the wafer that has been scribed is clamped between the inner diameter of the inner ring of the die expansion ring and the outer diameter of the die expansion ring, forming a mother-daughter ring structure. At this time, the film is in a taut state. The combined die expansion ring is sleeved on the fixing part to complete the assembly of the die expansion fixture. The bottom plate is placed inside the die expansion mechanism, and then the die expansion process can be started. This design relies on the frictional force between the die expansion ring and the base to fix the film, without the need for an additional snap structure for fixation. The assembly is simple. Moreover, during the die expansion process, the fixation method of the snap structure causes high wear to the loading and unloading draw plate, and the service life of the tooling is short. The fixation method of the present utility model has a uniform stress surface, small wear degree, long service life, high installation accuracy, and through the unique design of the fixing part, it ensures the stability of the position of the die expansion ring during the die expansion process, further improving the installation accuracy and the stability of the tooling during the installation process.

[0016] For better understanding and implementation, the present utility model will be described in detail below with reference to the accompanying drawings. Description of the Drawings

[0017] Figure 1 is a structural diagram of an existing die expansion fixture;

[0018] Figure 2 is a top view of a die expansion fixture provided by the present utility model;

[0019] Figure 3 is an exploded view of a die expansion fixture provided by the present utility model;

[0020] Figure 4 is a cross-sectional view of a die expansion fixture in another embodiment;

[0021] Figure 5 is Figure 4 a partial enlarged view of the cross-sectional view shown.

[0022] Reference numerals

[0023] 1: Base plate; 11: Gripper; 2: Fixed part; 3: Die expander ring; 31: Inner ring of die expander ring; 32: Outer ring of die expander ring.

[0024] Next, the technical solutions of the present invention will be clearly and completely described in conjunction with the accompanying drawings of the embodiments of the present application. Detailed implementation manners

[0025] The following are specific embodiments of the present invention and, in conjunction with the accompanying drawings, further describe the technical solutions of the present invention, but the present invention is not limited to these embodiments.

[0026] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0027] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time.

[0028] Please refer to Figure 2 and Figure 3 , Figure 2 is a top view of a film expanding fixture provided by the present invention, Figure 3 is an exploded view of a film expanding fixture provided by the present invention. Among them, the film expanding fixture includes: a base plate 1, a fixed part 2, and a die expander ring 3;

[0029] wherein the fixed part 2 is provided on the base plate 1, and the die expander ring 3 is sleeved on the fixed part 2,

[0030] the die expander ring 3 includes an inner ring 31 of the die expander ring and an outer ring 32 of the die expander ring. The inner ring 31 of the die expander ring is sleeved on the fixed part 2, and the outer ring 32 of the die expander ring is sleeved on the inner ring 31 of the die expander ring. Wherein, the outer diameter of the fixed part 2 is slightly smaller than the inner diameter of the inner ring 31 of the die expander ring, and the outer diameter of the inner ring 31 of the die expander ring is slightly smaller than the inner diameter of the outer ring 32 of the die expander ring.

[0031] Through the above settings, the film with the wafer that has been completed scribing can be clamped between the inner diameter of the expansion ring 31 and the outer diameter of the expansion ring 3 to form a mother-daughter ring structure. At this time, the film is in a tense state. The assembled expansion ring 3 is sleeved on the fixing part 2 to complete the assembly of the film expansion fixture. The bottom plate 1 is placed inside the film expansion mechanism, and then the film expansion process can be started. This design relies on the friction between the expansion ring 3 and the base to fix the film, without the need for an additional buckle structure for fixation. The assembly is simple. Moreover, the fixation method of the buckle structure will cause relatively high wear on the loading and unloading draw plate during the film expansion process, and the service life of the tooling is short. The fixation method of the present utility model has a uniform stress surface and a small degree of wear. Preferably, the value obtained by subtracting the outer diameter value of the fixing part 2 from the inner diameter value of the expansion ring 31 is less than 0.5 mm. When the tolerance is within 0.5 mm, it ensures the tight connection between the expansion ring 3 and the fixing part 2.

[0032] The bottom plate 1 is further provided with a gripper 11, and the gripper 11 is used to provide a stress part.

[0033] After the film expansion is completed, the entire bottom plate 1 is grabbed by the machine gripper 11 and transported to the film pasting mechanism. In order to enable the film expansion fixture to be stressed better, an additional gripper 11 is loaded on the bottom plate 1 to facilitate the implementation of automation.

[0034] Please refer to Figure 4 , in another preferred embodiment, a limiting part is provided on the fixing part 2 on the side away from the bottom plate 1, and the distance between the limiting part and the fixing part 2 on the side away from the bottom plate 1 is slightly greater than the height of the expansion ring 3.

[0035] Since the relative fixation between the die expansion ring 3 and the fixing part 2 of the present utility model is achieved by relying on friction, although the die expansion ring 3 is fixed on the fixing part 2 under normal temperature and pressure, during the film expansion process, there are influences of air pressure and temperature. When there is a downward pressure perpendicular to the bottom surface acting on the film, the sum of this pressure and the gravity of the die expansion ring 3 is greater than the friction force. At this time, the die expansion ring 3 will slide down, and a force is generated between the film and the fixing part 2. At this time, the film extends upward along the direction perpendicular to the bottom surface, so the direction of wafer extension will change. In the case of severe film deformation, the wafer after dicing will fall off the film. To prevent this risk, a limiting part is introduced. The distance between the limiting part and the fixing part 2 on the side far from the bottom plate 1 is slightly greater than the height of the die expansion ring 3. At this time, even if the die expansion ring 3 is subjected to pressure and moves towards the bottom direction, due to the existence of the limiting part, the die expansion ring 3 will abut against the limiting part, thereby generating a limiting effect on the die expansion ring 3 to prevent the die expansion ring 3 from sliding down and deforming the film. In addition, considering that the die expansion ring 3 is divided into an inner ring and an outer ring, in order to prevent the die expansion ring 31 from being in a suspended state when it abuts against the limiting part, the lateral dimension of the limiting part is further designed so that the sum of the lateral dimension of the limiting part and the outer diameter of the fixing part 2 is greater than the outer diameter of the die expansion ring 32. At this time, both the inner ring and the outer ring of the die expansion ring 3 receive the supporting force of the limiting part, ensuring the stability of the die expansion ring 3.

[0036] Please refer to Figure 5 , in another embodiment, the end of the fixing part 2 on the side far from the bottom plate 1 is a chamfer structure.

[0037] Since the installation process still uses press fitting, considering the assembly precision between the die expansion ring 3 and the fixing part 2, press fitting will cause device wear. At this time, the end of the fixing part 2 is set as a chamfer structure, so that the frictional resistance during assembly is reduced, thereby reducing the wear speed between devices and prolonging the service life of the die expansion ring 3.

[0038] In a specific use process, first, the film with diced wafers is tensioned and installed between the die expansion ring 31 and the die expansion ring 32 to obtain the die expansion ring 3 loaded with wafers. It is quickly assembled onto the fixing part 2 by pressing. At this time, due to the existence of friction force, the die expansion ring 3 is fixed on the fixing part 2. Subsequently, the entire bottom plate 1 is placed into the film expansion mechanism, and film expansion is completed in a specific environment. And due to the limiting effect of the limiting part on the die expansion ring 3, the position state of the die expansion ring 3 is stable, and the stability and accuracy of film expansion can be guaranteed. Subsequently, the bottom plate 1 is dragged away from the film expansion mechanism by a machine to start the preparation for the next film expansion.

[0039] The above-described embodiments merely represent several implementation manners of the present utility model. The description thereof is relatively specific and detailed, but it should not be construed as a limitation to the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all fall within the protection scope of the present utility model.

Claims

1. A film expansion fixture, characterized in that: include: Base plate, fixing part, and wafer expansion ring; The fixing part is arranged on the bottom plate, and the crystal expansion ring is sleeved on the fixing part. The crystal expansion ring includes an inner ring and an outer ring, the inner ring of the crystal expansion ring is sleeved on the fixed part, and the outer ring of the crystal expansion ring is sleeved on the inner ring of the crystal expansion ring, wherein the outer diameter of the fixed part is smaller than the inner diameter of the inner ring of the crystal expansion ring, and the inner ring of the crystal expansion ring and the fixed part are fixed by friction, and the outer diameter of the inner ring of the crystal expansion ring is smaller than the inner diameter of the outer ring of the crystal expansion ring.

2. A film expansion fixture according to claim 1, characterized in that: A limiting portion is provided on the fixing portion away from the bottom plate, and a distance between the limiting portion and the fixing portion away from the bottom plate is equal to a height of the crystal expansion ring.

3. A film expansion fixture according to claim 2, characterized in that: The sum of the transverse dimension of the limiting portion and the outer diameter of the fixing portion is greater than the outer diameter of the outer ring of the crystal expansion ring.

4. A film expansion fixture according to claim 3, characterized in that: The end of the fixing portion away from the bottom plate is a chamfered structure.

5. A film expansion fixture according to any one of claims 1 to 4, characterized in that: The value obtained by subtracting the outer diameter of the fixing portion from the inner diameter of the inner ring of the wafer expansion ring is less than 0.5 mm.

6. A film expansion fixture according to claim 5, characterized in that: The bottom plate is also provided with a gripper.

7. The film expansion fixture according to claim 3, characterized in that: The transverse dimension of the limiting portion is greater than 1 mm and less than 2 mm.

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