Mounting jig and mounting assembly for quartz clock cover of epitaxial equipment

Abstract

The utility model discloses an installation jig and an installation assembly of an epitaxial equipment quartz clock jar, the installation jig comprises a cross rod and two positioning feet symmetrically installed on the lower end face of the cross rod, each positioning foot is provided with a positioning face used for installing the quartz clock jar, the positioning faces on the two positioning feet are oppositely arranged and are parallel to each other, and the cross rod is provided with a positioning groove. The positioning surface is vertical to the cross rod lower end surface; an observation opening is formed in the middle of the upper end face of the transverse rod, an observation hole is formed in the middle of the transverse rod, and the observation opening and the observation hole are used for observing a positioning line on a flange. According to the utility model, the observation port and the observation window are arranged, a positioning line is observed and aligned during installation, and then the quartz clock cover is placed between the positioning feet, so that the installation position of the quartz clock cover is rapidly determined without measurement by a ruler, and the left and right positions of the quartz clock cover between the positioning feet are adjusted without repeated measurement; and the mounting efficiency and accuracy of the quartz bell jar are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor epitaxial equipment, in particular to an installation fixture and an installation component of a quartz bell cover of epitaxial equipment. Background Art

[0002] In the epitaxial production process, the production chamber of many epitaxial equipment is mainly composed of quartz bell jars. Figure 1 and Figure 2 As shown, the quartz bell jar 1 is located between the front flange 2 and the rear flange 3 of the equipment, and the three form a production chamber environment where gas can flow. The front bell jar opening 4 is aligned with the front flange opening 5, and a center scale line (i.e., positioning line) 6 is provided on the front flange 2. The relative position of the rear flange and the bell jar is similar to that of the front flange. If the installation deviation of the quartz bell jar is too large, it will easily cause the gas flow field in the cavity to be disordered, which will cause instability in the thickness uniformity and resistivity uniformity of the wafer; it will also cause serious silicon deposition on one side of the cavity, which will further affect the particle performance of the wafer. The above problems will shorten the equipment maintenance cycle, reduce production capacity and increase costs. In severe cases, it will cause the wafer to be scrapped.

[0003] During the installation of the quartz bell jar, there is a step to align the centers of the bell jar mouth and the flange mouth. In the past, a ruler was used to measure the distance from the flange center scale line (i.e., the positioning line) to the left and right sides of the bell jar. Because the contact surface of the bell jar mouth is often chamfered, and the chamfers are often not very regular, it is easy to cause large errors in the measurement data. At the same time, the positions of some flange center scale lines are not in obvious accessible positions, and even the relative height positions of the front and rear flange center scale lines are different, and the measurement process is likely to cause greater errors. In addition, the process of aligning the centers of the bell jar mouth and the flange mouth often requires adjusting the left and right positions of the quartz bell jar. In the past, when using a ruler to measure the distance from the flange center scale line to the left and right sides of the bell jar, each time the left and right positions of the quartz bell jar were adjusted, the distance on the left and right sides needed to be remeasured once. If the adjustments were repeated several times, the operation would be cumbersome and time-consuming.

[0004] Therefore, improving the accuracy and efficiency of quartz bell jar installation has become an urgent problem to be solved. Utility Model Content

[0005] Purpose of the invention: In view of the above shortcomings, the utility model provides an installation fixture and an installation assembly for a quartz bell jar of an epitaxial device.

[0006] Technical solution: To solve the above problems, the utility model adopts an installation fixture for a quartz bell jar of an epitaxial device, comprising a cross bar and two positioning feet symmetrically installed on the lower end face of the cross bar, the positioning feet are provided with positioning surfaces for installing the quartz bell jar, the positioning surfaces on the two positioning feet are arranged opposite to each other and parallel to each other, and the positioning surfaces are perpendicular to the lower end face of the cross bar; an observation port is provided in the middle part of the upper end face of the cross bar, and an observation hole is provided in the middle part of the cross bar, and the observation port and the observation hole are used to observe the positioning line on the flange.

[0007] Furthermore, the cross bar has a length of 300 mm to 450 mm, a width of 20 mm to 35 mm, and a thickness of 5 mm to 10 mm.

[0008] Furthermore, the distance between the positioning surfaces is 296 mm to 441 mm.

[0009] Furthermore, the cross section of the observation port is V-shaped.

[0010] Furthermore, the cross section of the observation hole is rhombus-shaped.

[0011] Furthermore, the positioning feet are located at both ends of the crossbar, and the outer side surfaces of the positioning feet are flush with the side surfaces of the crossbar.

[0012] The present invention also provides an installation assembly including the installation fixture, and also includes a quartz bell jar and a flange axially connected to the quartz bell jar, a positioning line is provided in the middle position of the flange, the installation end of the quartz bell jar is located between the two positioning surfaces of the installation fixture, and the positioning line coincides with the symmetric center line of the observation port and the symmetric center line of the observation hole.

[0013] Beneficial effect: Compared with the prior art, the significant advantage of the utility model is that by setting the observation port and the observation window, the positioning line is observed and aligned during installation, and then the quartz bell jar is placed between the positioning feet, so that the installation position of the quartz bell jar is quickly determined without measuring with a ruler, and the left and right positions of the quartz bell jar are adjusted between the positioning feet without repeated measurements, thereby improving the installation efficiency of the quartz bell jar; it can be used for positioning lines at different heights, and the scope of use is wider; and when the positioning line is aligned, the installation error of the quartz bell jar is small, thereby improving the installation accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the quartz structure and flange installation structure;

[0015] Figure 2 It is the AA section view of the quartz structure and flange mounting structure;

[0016] Figure 3 This is the front view of the installation fixture of the utility model;

[0017] Figure 4This is a cross-sectional view of the installation assembly of the utility model. DETAILED DESCRIPTION

[0018] Example 1

[0019] like Figure 3 As shown, a mounting fixture for a quartz bell jar of an epitaxial device in this embodiment includes a crossbar 7 and two positioning feet 8 symmetrically mounted on the lower end surface of the crossbar 7. The axis of the positioning feet 8 is perpendicular to the lower end surface of the crossbar 7, and the positioning feet 8 are located at both ends of the crossbar 7, and the outer side surface of the positioning feet 8 is flush with the side surface of the crossbar 7. The length of the crossbar 7 is 300mm to 450mm, the width is 20mm to 35mm, and the thickness is 5mm to 10mm; the length of the positioning feet 8 is about 10mm to 25mm. The inner side surface of the positioning feet 8 is a positioning surface 81 for mounting the quartz bell jar, and the two positioning surfaces 81 are parallel to each other, and the positioning surface 81 is perpendicular to the lower end surface of the crossbar 7. The distance between the two positioning surfaces 81 is about 1mm to 3mm larger than the width of the quartz bell jar 1, about 296mm to 441mm. An observation port 9 is provided in the middle of the upper end surface of the crossbar 7. The cross section of the observation port 9 is V-shaped. The observation port 9 is symmetrically arranged along the axis of the crossbar 7. The V-shaped angle is about 60° to 120° and the depth is about 3mm to 6mm. An observation hole 10 is provided in the middle of the crossbar 7. The cross section of the observation hole 10 is rhombus-shaped. The observation holes are symmetrically arranged along the axis of the crossbar 7. The two upper and lower opposite corners of the rhombus-shaped observation hole are about 60° to 120°, and the length of the diagonal connecting the upper and lower corners of the rhombus-shaped observation hole is about 6mm to 12mm.

[0020] Example 2

[0021] like Figure 4 As shown, a mounting assembly of a quartz bell jar for epitaxial equipment in the utility model comprises a mounting fixture, a quartz bell jar 1 and a flange 2 axially connected to the quartz bell jar. A positioning line 6 is provided in the middle of the flange 2. When installing the quartz bell jar, the mounting fixture is placed against the flange 2, and the positioning line 6 on the flange is observed and aligned through the observation port 9 and the observation hole 10. When the positioning line is at a higher position, the center line of the observation port 9 is aligned with the positioning line 6. When the positioning line is at a lower position, the symmetrical center line of the observation hole 10 is aligned with the positioning line 6. It can be used for positioning lines of different heights, thereby increasing the use range of the mounting fixture. After aligning the positioning line 6, the quartz bell jar 1 is placed between the two positioning surfaces 81, and the left and right positions of the quartz bell jar 1 are adjusted to a certain extent. Since the distance between the positioning surfaces is only about 1 mm to 3 mm larger than the width of the quartz bell jar, the installation error of the quartz bell jar is small and within the allowable range when the positioning lines are aligned. Compared with the existing installation method, the utility model is simple to operate and effectively improves the installation efficiency and accuracy of the quartz bell jar.

Claims

1. A mounting fixture for a quartz bell jar of an epitaxial device, characterized in that: The invention comprises a cross bar (7) and two positioning feet (8) symmetrically mounted on the lower end surface of the cross bar (7); the positioning feet (8) are provided with positioning surfaces (81) for mounting a quartz bell jar; the positioning surfaces (81) on the two positioning feet (8) are arranged opposite to each other and are parallel to each other; the positioning surfaces (81) are perpendicular to the lower end surface of the cross bar (7); an observation port (9) is provided in the middle of the upper end surface of the cross bar (7); an observation hole (10) is provided in the middle of the cross bar (7); the observation port (9) and the observation hole (10) are used to observe the positioning line on the flange.

2. The mounting fixture for the epitaxial equipment quartz bell jar according to claim 1, characterized in that: The cross bar (7) has a length of 300 mm to 450 mm, a width of 20 mm to 35 mm, and a thickness of 5 mm to 10 mm.

3. The mounting fixture for the quartz bell jar of the epitaxial equipment according to claim 2, characterized in that: The distance between the positioning surfaces is 296 mm to 441 mm.

4. The mounting fixture for the quartz bell jar of the epitaxial equipment according to claim 1, characterized in that: The cross section of the observation port (9) is V-shaped.

5. The mounting fixture for the quartz bell jar of the epitaxial equipment according to claim 1, characterized in that: The cross section of the observation hole (10) is rhombus-shaped.

6. The mounting fixture for the quartz bell jar of the epitaxial equipment according to claim 1, characterized in that: The positioning feet (8) are located at both ends of the crossbar (7), and the outer side surfaces of the positioning feet (8) are flush with the side surfaces of the crossbar (7).

7. A mounting assembly comprising the mounting fixture according to any one of claims 1 to 6, characterized in that: It also includes a quartz bell jar (1) and a flange (2) axially connected to the quartz bell jar, wherein a positioning line (6) is provided in the middle of the flange (2), the mounting end of the quartz bell jar (1) is located between two positioning surfaces (81) of the mounting fixture, and the positioning line (6) coincides with the symmetric center line of the observation port (9) or the symmetric center line of the observation hole (10).

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