Coating equipment
By separating multiple independent reaction chambers in the coating cavity and independently controlling the intake amount, the problem of degradation of coating uniformity caused by the difference in gas concentration distribution in the coating cavity is solved, and a more uniform gas distribution and coating effect is achieved.
Patent Information
- Application Number
- CN202422002302.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-16
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-08-16
AI Technical Summary
During the production process of solar cell, the difference in gas concentration distribution in the coating cavity leads to a decrease in coating uniformity, especially when the size of the coating cavity increases.
By setting a partition plate in the coating cavity, it is divided into multiple independent reaction chambers, and independently controlled air intake members are provided in each reaction chamber to achieve separate control of the air intake amount.
This design improves the uniformity of gas distribution in the coating cavity, thereby improving the coating uniformity of the coating equipment.
Smart Images
Figure CN222948467U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of battery cell processing, and in particular to a coating device. Background Art
[0002] In the production process of solar cells, coating equipment can be used to complete the coating (thin film deposition) process. At present, the coating equipment has a coating cavity, which contains components such as a quartz boat, a boat support, a paddle, and a heating element. Among them, during the coating process, the gas entering the coating cavity fills the entire coating cavity by diffusion, and then a high-frequency power supply is used to stimulate the gas activity and a plasma vapor deposition reaction occurs. The gas diffusion and distribution process is complicated, and it will diffuse in the coating cavity in the lateral and radial directions at the same time, resulting in differences in gas concentration distribution. With the development of technology, the size of the coating cavity is getting larger and larger to accommodate more sheet materials or larger-sized sheet materials, which leads to more and more obvious differences in gas concentration distribution in the coating cavity, which will eventually reduce the coating uniformity of the coating equipment. Utility Model Content
[0003] In view of the above, it is necessary to provide a coating device that can improve the uniformity of coating.
[0004] A first aspect of the present application provides a coating device, the coating device comprising:
[0005] A coating chamber, the coating chamber extending along a first direction; the coating chamber further comprises at least two air inlet members;
[0006] A push boat assembly, the push boat assembly includes a support paddle and at least one partition plate; the support paddle extends along a first direction, and when the push boat assembly is accommodated in a coating chamber, the support paddle extends to the outside of the coating chamber; the partition plate is passed through the support paddle and extends along a second direction; wherein the second direction is perpendicular to the first direction; the partition plate is used to separate the coating chamber into at least two reaction chambers; the reaction chambers are independent of each other and are used to perform coating operations; each air inlet corresponds to a reaction chamber and is accommodated in a corresponding reaction chamber; each air inlet is used to individually control the air intake volume in the corresponding reaction chamber.
[0007] In some embodiments, the coating chamber also includes at least one assembly; each assembly corresponds to a partition plate; the assembly is vertically arranged on the inner wall of the coating chamber along the second direction; the assembly is used to locate the position of the partition plate in the coating chamber and limit the movement distance of the partition plate in the first direction; and the assembly cooperates with the corresponding partition plate to hermetically separate two adjacent reaction chambers.
[0008] In some embodiments, the partition plate is detachably connected to the supporting paddle, and the partition plate and the corresponding assembly part are mutually clamped.
[0009] In some embodiments, the separator plates are in contact with corresponding mounting members.
[0010] In some embodiments, the coating chamber further includes an exhaust member, which is used to extract the gas in the reaction chamber to the outside of the reaction chamber; the exhaust member is disposed at the top of the coating chamber, and the air inlet member is disposed at the bottom of the coating chamber.
[0011] In some embodiments, each air inlet member includes a first air inlet pipe and a second air inlet pipe; the first air inlet pipe and the second air inlet pipe both extend along a first direction; in the first direction, the first air inlet pipes located in different reaction chambers are arranged in a straight line, and the second air inlet pipes located in different reaction chambers are arranged in a straight line.
[0012] In some embodiments, the first air inlet pipe and the second air inlet pipe are spray air inlet pipes.
[0013] In some embodiments, an opening is provided at one end of the coating cavity; the push boat assembly also includes a furnace door; the support paddle includes a first end and a second end arranged opposite to each other; the furnace door is sleeved on the first end; the partition is located between the furnace door and the second end; when the push boat assembly is accommodated in the coating cavity, the furnace door covers the opening.
[0014] In some embodiments, the push boat assembly includes multiple partition plates; the coating cavity is divided into multiple reaction chambers; the spacing between any two adjacent partition plates is a first spacing, and the spacing between the partition plate adjacent to the end of the coating cavity and the corresponding end of the coating cavity is a first spacing.
[0015] In some embodiments, the push boat assembly includes multiple partition plates; the coating chamber is divided to form multiple reaction chambers; two partition plates located in the middle of the coating chamber are arranged at a first spacing, and the spacing between the partition plate adjacent to the end of the coating chamber and the corresponding end of the coating chamber is a second spacing; wherein the first spacing is greater than the second spacing, and the spacing between any other two partition plates is less than the first spacing and greater than the second spacing.
[0016] Through the coating equipment provided by the present application, a partition plate is used to divide the coating cavity into at least two reaction chambers, and an independently controlled air inlet component is arranged in each reaction chamber, so that the air intake amount in different reaction chambers can be individually controlled, thereby improving the uniformity of gas distribution in the coating cavity, and thereby improving the coating uniformity of the coating equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 A three-dimensional schematic diagram of the coating equipment provided in this application.
[0018] Figure 2 for Figure 1 Schematic diagram of the cross-section of the coating equipment along the II-II direction.
[0019] Figure 3 for Figure 1 A partially exploded schematic diagram of another angle of the coating chamber.
[0020] Figure 4 for Figure 1 FIG. 1 is a partially exploded schematic diagram of a push boat assembly and a bearing assembly of a first embodiment.
[0021] Figure 5 for Figure 1 FIG. 1 is a partially exploded schematic diagram of a push boat assembly and a supporting assembly according to a second embodiment of the present invention.
[0022] Main component symbols
[0023] 1. Coating equipment; 10. Coating chamber; 20. Push boat assembly; 11. Reaction chamber; 101. Opening; 13. Assembly; 14. Air inlet; 15. Exhaust; 141. First air inlet pipe; 142. Second air inlet pipe; 151. Exhaust pipe; 21. Support paddle; 211. First end; 212. Second end; 22. Furnace door; 23. Partition plate; 201. Accommodation area.
[0024] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION
[0025] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to another element or there may be a centrally arranged element at the same time. When an element is considered to be "set" to another element, it may be directly set on another element or there may be a centrally arranged element at the same time. In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or it may be indirectly connected through an intermediate medium, or it may be the internal connection of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present application can be understood according to the specific circumstances. The directional descriptions in this embodiment, such as "upper", "lower", "top", "bottom", etc., are all referenced to the direction of the product in the actual use scenario.
[0026] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.
[0027] In the production process of solar cells, coating equipment can be used to complete the coating (thin film deposition) process. At present, the coating equipment has a coating cavity, which contains quartz boats or graphite boats, boat supports, paddles, heating elements and other components. Among them, the gas entering the coating cavity during the coating process fills the entire coating cavity by diffusion, and then a high-frequency power supply is used to stimulate the gas activity and produce a plasma vapor deposition reaction. The process of gas diffusion and distribution is complicated, and it will diffuse in the coating cavity in the lateral and radial directions at the same time, resulting in differences in gas concentration distribution. With the development of technology, the size of the coating cavity is getting larger and larger to accommodate more sheet materials or larger-sized sheet materials, which leads to more and more obvious differences in gas concentration distribution in the coating cavity, which will eventually reduce the coating uniformity of the coating equipment.
[0028] To this end, an embodiment of the present application provides a coating device that can achieve the technical effect of improving the uniformity of coating.
[0029] Figure 1 The present invention provides a three-dimensional schematic diagram of a coating device 1. The coating device 1 is used to deposit a thin film on the surface of a sheet material (not shown). The sheet material is a raw material for a solar cell, including but not limited to silicon wafers, silicon carbide wafers, etc. The process for depositing the thin film may be, but is not limited to, plasma enhanced chemical vapor deposition (PECVD). The coating device 1 includes at least one coating chamber 10, a push boat assembly 20, and at least two supporting assemblies 30 (such as Figure 4 shown).
[0030] The coating chamber 10 is used to provide a coating thermal field so that a thin film can be deposited on the surface of the sheet material in the coating chamber 10. The coating chamber 10 is also used to accommodate the push boat assembly 20. In at least one embodiment of the present application, the coating chamber 10 is roughly cylindrical and hollow inside. In other embodiments, the coating chamber 10 can also be other shapes, for example, the coating chamber 10 is a rectangular parallelepiped. In at least one embodiment of the present application, the coating chamber 10 can be made of quartz. The coating chamber 10 extends along the first direction X.
[0031] Please also read Figure 2, which is a schematic cross-sectional view of the coating device 1 along the II-II direction. The coating chamber 10 is further divided by the partition plate 23 in the push boat assembly 20 to form at least two reaction chambers 11. At least two reaction chambers 11 are independent of each other. That is, any two reaction chambers 11 are not connected to each other. By dividing the coating chamber 10 into a plurality of reaction chambers 11, the size of each reaction chamber 11 can be reduced, and the difference in gas concentration after the gas in the reaction chamber 11 diffuses in the lateral and radial directions can be reduced, thereby improving the coating uniformity of the coating device 1. Each reaction chamber 11 accommodates a supporting assembly 30, and is used to perform a coating operation to coat the sheet material on the supporting assembly 30 accommodated therein. In at least one embodiment of the present application, the sizes of the plurality of reaction chambers 11 may be the same or different; when the sizes of the plurality of reaction chambers 11 are different, the sizes of the plurality of reaction chambers may vary in a gradient.
[0032] Furthermore, in the first direction X, an opening 101 is provided on the front end of the coating chamber 10 . The opening 101 is used to allow the boat pusher assembly 20 to enter and move out of the coating chamber 10 .
[0033] Please also read Figure 3 , which is a partially exploded schematic diagram of the coating chamber 10 from another angle. The coating chamber 10 also includes at least one assembly part 13. The assembly part 13 is vertically arranged on the inner side wall of the coating chamber 10 along the second direction Y. The assembly part 13 is used to limit the moving distance of the push boat assembly 20 in the coating chamber 10. The assembly part 13 is also used to cooperate with the partition plate 23 in the push boat assembly 20 to airtightly separate two adjacent reaction chambers 11. In at least one embodiment of the present application, the assembly part 13 is an annular structure, and the assembly part 13 is vertically fixed on the side wall of the coating chamber 10. The assembly part 13 is located between the opposite front end and the end of the coating chamber 10.
[0034] The coating chamber 10 also includes at least two air inlet members 14. Each air inlet member 14 corresponds to a reaction chamber 11 and is accommodated in the corresponding reaction chamber 11. Each air inlet member 14 is independently controlled to provide gas to the corresponding reaction chamber 11. By independently controlling the air inlet members 14, the air intake amount in each reaction chamber 11 can be adjusted individually, thereby improving the uniformity of gas distribution in the reaction chamber 11, and improving the coating uniformity of the coating device 1. The air intake amount in each reaction chamber 11 is related to the size of the reaction chamber 11. That is, the larger the size of the reaction chamber 11, the more gas the air inlet member 14 provides to the corresponding reaction chamber 11. In at least one embodiment of the present application, the air inlet member 14 includes a first air inlet pipe 141 and a second air inlet pipe 142 extending along a first direction X. Among them, the first air inlet pipe 141 and the second air inlet pipe 142 are both spray air inlet pipes. In at least one embodiment of the present application, the first air inlet pipes 141 located in different reaction chambers 11 are arranged in a straight line in the first direction X; the second air inlet pipes 142 located in different reaction chambers 11 are arranged in a straight line in the first direction X. In other embodiments, any two of the first air inlet pipes 141 and the second air inlet pipes 142 located in different reaction chambers 11 are arranged staggered with each other in the first direction X. That is, the first air inlet pipes 141 located in different reaction chambers 11 are arranged staggered in the first direction X, the second air inlet pipes 142 located in different reaction chambers 11 are arranged staggered in the first direction X, and the first air inlet pipes 141 and the second air inlet pipes 142 located in different reaction chambers 11 are arranged staggered in the first direction X. It can be understood that in other alternative embodiments, the arrangement of the first air inlet pipes 141 and the second air inlet pipes 142 can be adjusted according to needs.
[0035] The coating chamber 10 also includes an exhaust member 15. The exhaust member 15 passes through the coating chamber 10 and extends to the outside of the coating chamber 10. That is, the exhaust member 15 passes through all the reaction chambers 11. The exhaust member 15 extends along the first direction X. The exhaust member 15 is used to extract the gas in the reaction chamber 11 to the outside of the reaction chamber 11. In at least one embodiment of the present application, in the second direction Y, the exhaust member 15 is arranged at the top of the coating chamber 10, and the air inlet member 14 is arranged at the bottom of the coating chamber 10. That is, in the coating chamber 10, the exhaust member 15 and the air inlet member 14 are symmetrically arranged. In at least one embodiment of the present application, the exhaust member 15 includes two exhaust pipes 151. The two exhaust pipes 151 are parallel to each other and extend along the first direction X. In other embodiments, the exhaust member 15 may include a greater or lesser number of exhaust pipes 151. In the second direction Y, one of the exhaust pipes 151 is arranged in parallel with the first air inlet pipe 141 located in a different reaction chamber 11, and the other exhaust pipe 151 is arranged in parallel with the second air inlet pipe 142 located in a different reaction chamber 11. Through the above arrangement, the air inlet position and the exhaust position in the coating chamber 10 are arranged symmetrically, which can further improve the uniformity of gas distribution in the coating chamber 10.
[0036] Please also read Figure 4 , which is a partially exploded schematic diagram of the push boat assembly 20 and the bearing assembly 30 of the first embodiment. The push boat assembly 20 includes a support paddle 21, a furnace door 22 and at least one partition plate 23. The partition plate 23 is arranged perpendicular to the furnace door 22 and the support paddle 21, and the two are parallel to each other.
[0037] The support paddle 21 is used to support at least two bearing assemblies 30, and push the bearing assemblies 30 into the coating chamber 10 through the opening 101. The support paddle 21 extends along the first direction X. When the boat pusher assembly 20 is accommodated in the coating chamber 10, the support paddle 21 extends to the outside of the coating chamber 10. In at least one embodiment of the present application, when the coating furnace 100 is a soft landing process, the support paddle 21 moves out of the opening 101 to the outside of the coating chamber 10 after pushing the bearing assembly 30 into the coating chamber 10; when the coating furnace 100 is a paddle process, the support paddle 21 remains in the coating chamber 10 after pushing the bearing assembly 30 into the coating chamber 10, so as to continuously support the bearing assembly 30. The support paddle 21 includes a first end 211 and a second end 212 that are arranged opposite to each other.
[0038] The furnace door 22 is perpendicular to the support paddle 21 and is sleeved on the first end 211 of the support paddle 21. The furnace door 22 extends along the second direction Y. The furnace door 22 is used to cover the opening 101 when the push boat assembly 20 is pushed into the coating chamber 10, and to seal the front end of the coating chamber 10. In at least one embodiment of the present application, the furnace door 22 is generally a circular plate-shaped structure. The furnace door 22 further cooperates with the adjacent partition plate 23, the side wall of the coating chamber 10, and the assembly 13 to seal the corresponding reaction chamber 11.
[0039] The partition plate 23 is perpendicular to the support paddle 21 and is sleeved on the support paddle 21. The partition plate 23 is located between the furnace door 22 and the second end 212. The partition plate 23 extends along the second direction Y. The second direction Y is perpendicular to the first direction X. The partition plate 23 is used to divide the support paddle 21 into at least two accommodating areas 201. The accommodating area 201 is used to accommodate the corresponding bearing assembly 30. In at least one embodiment of the present application, when the push boat assembly 20 includes a partition plate 23, an accommodating area 201 is formed between the partition plate 23 near the front end of the coating chamber 10 and the furnace door 22, and another accommodating area 201 is formed between the partition plate 23 near the rear end of the coating chamber 10 and the second end 212. The distance between the partition plate 23 and the furnace door 22 is equal to the distance between the partition plate 23 and the second end 212. In other embodiments, when the push boat assembly 20 includes two or more partitions 23, the spacing between any two adjacent partitions 23 is the first spacing, and the spacing between the partition 23 disposed adjacent to the end of the coating chamber 10 and the corresponding end of the coating chamber 10 is the first spacing. That is, the distance between the partition 23 disposed adjacent to the front end of the coating chamber where the furnace door 22 is disposed and the front end of the coating chamber 10 is the first spacing, and the distance between the partition 23 disposed adjacent to the end of the coating chamber 10 and the end of the coating chamber 10 is the first spacing. In at least one embodiment of the present application, when the furnace door 22 covers the opening 101, the second end 212 of the support paddle 21 may contact the bottom plate at the end of the coating chamber 10 or the sealing assembly (not shown) for sealing the end of the coating chamber 10, or may be spaced a certain distance from the bottom plate at the end of the coating chamber 10 or the sealing assembly (not shown) for sealing the end of the coating chamber 10. Specifically, when the second end 212 of the support paddle 21 can contact the bottom plate at the end of the coating chamber 10 or the sealing assembly for sealing the end of the coating chamber 10, the distance between the partition plate 23 disposed adjacent to the end of the coating chamber 10 and the end of the coating chamber 10 is equal to the distance between it and the second end 212. That is, the distance between the partition plate 23 adjacent to the second end 212 and the second end 212 is also the first spacing. When the second end 212 of the support paddle 21 can be spaced from the bottom plate at the end of the coating chamber 10 or the sealing assembly (not shown) for sealing the end of the coating chamber 10, the distance between the partition plate 23 disposed adjacent to the end of the coating chamber 10 and the end of the coating chamber 10 is greater than the distance between it and the second end 212. That is, the distance between the partition plate 23 disposed adjacent to the end of the coating chamber 10 and the second end 212 is less than the first spacing. Among them, an accommodating area 201 is formed between the partition plate 23 near the front end of the coating chamber 10 and the furnace door 22, an accommodating area 201 is formed between the partition plate 23 near the end of the coating chamber 10 and the second end 212, and an accommodating area 201 is formed between any two adjacent partition plates 23.It can be understood that the spacing between the partitions 23 can also be changed in an arithmetic progression, so that the size of the reaction chamber 11 changes gradually. For example, the two partitions 23 located in the middle of the coating chamber 10 are arranged at a first spacing, and the partition 23 near the end of the coating chamber 10 and the furnace door 22 or the end of the coating chamber 10 are arranged at a second spacing. Among them, the first spacing is greater than the second spacing, and the spacing between any two other partitions 23 is less than the first spacing and greater than the second spacing, and decreases from the middle of the coating chamber 10 to the end of the coating chamber 10. That is, the size of the reaction chamber 11 decreases from the middle of the coating chamber 10 to the two ends. In other alternative embodiments, the first spacing is less than the second spacing, and the spacing between any two other partitions 23 is greater than the first spacing and less than the second spacing, and decreases from the end of the coating chamber 10 to the middle of the coating chamber 10. That is, the size of the reaction chamber 11 increases from the middle of the coating chamber 10 to the two ends.
[0040] The partition plate 23 is also used to divide the coating chamber 10 into at least two reaction chambers 11. In at least one embodiment of the present application, when the push boat assembly 20 includes a partition plate 23, the partition plate 23 divides the coating chamber 10 into two reaction chambers 11. In other embodiments, when the push boat assembly 20 includes two or more partition plates 23, the partition plate 23 divides the coating chamber 10 into multiple reaction chambers 11. In at least one embodiment of the present application, when the multiple partition plates 23 are arranged at equal intervals, the sizes of the multiple reaction chambers 11 are the same. In other alternative embodiments, when the spacing between the multiple partition plates 23 changes in an arithmetic progression, the sizes of the multiple reaction chambers 11 change in a gradient.
[0041] The partition plate 23 is also used to cooperate with the assembly part 13 to seal and separate two adjacent reaction chambers 11. When the coating furnace body 100 adopts a soft landing process, the partition plate 23 and the support paddle 21 are detachably connected, and the partition plate 23 and the corresponding assembly part 13 are mutually locked. In at least one embodiment of the present application, the surface of the assembly part 13 opposite to the partition plate 23 is inwardly recessed to form an annular groove, and an annular hook is correspondingly provided on the partition plate 23. When the assembly part 13 contacts the partition plate 23, the hook on the partition plate 23 and the annular groove of the assembly part 13 are mutually engaged; or, a plurality of grooves are provided on the surface of the assembly part 13 opposite to the partition plate 23, and the plurality of grooves can be arranged at equal intervals, and a plurality of hooks corresponding to the plurality of grooves are correspondingly provided on the partition plate 23, and when the assembly part 13 contacts the partition plate 23, each hook is mutually engaged with the corresponding groove; or, a plurality of hooks are provided on the surface of the assembly part 13 opposite to the partition plate 23, and the plurality of hooks are arranged at equal intervals, and a plurality of grooves are formed on the surface of the partition plate 23 opposite to the assembly part 23, and when the assembly part 13 contacts the partition plate 23, each hook is mutually engaged with the corresponding groove. The shape, position and number of the hooks and the grooves are not limited. In other embodiments, the structure of the partition plates being locked to each other is not limited to the above-mentioned hook and slot matching form, and may also be a way of two hooks being locked to each other, or a threaded locking method, or a way of a protrusion and a through hole being locked to each other, etc., which are not listed here one by one. In the locking method of the protrusion and the through hole matching each other, the through hole is L-shaped, and after the protrusion is inserted into the through hole, it further moves in two directions perpendicular to each other in the through hole to achieve mutual locking. The assembly part 13 positions the position of the partition plate 23 in the coating chamber 10, and limits the moving distance of the partition plate 23 in the first direction X. When the coating furnace body 100 adopts the paddle process, the edge of the partition plate 23 close to the side wall of the coating chamber 10 contacts the corresponding assembly part 13. The assembly part 13 limits the moving distance of the partition plate 23 in the first direction X.
[0042] Each bearing assembly 30 is disposed on the supporting paddle 21 and placed in a corresponding accommodation area 201 on the supporting paddle 21. The bearing assembly 30 is used to bear sheet materials. In at least one embodiment of the present application, the bearing assembly 30 is a graphite boat. Figure 4 As shown, the coating device 1 includes two bearing assemblies 30. One bearing assembly 30 is located between the furnace door 22 and the partition plate 23, and the other bearing assembly 30 is located between the partition plate 23 and the second end 212. Figure 5 As shown, the coating device 1 includes three bearing assemblies 30. One bearing assembly 30 is located between the furnace door 22 and the partition plate 23 near the furnace door 22, one bearing assembly 30 is located between two adjacent partition plates 23, and one bearing assembly 30 is located between the partition plate 23 near the second end 212 and the second end 212.
[0043] The above-mentioned coating equipment 1 utilizes a partition plate 23 to divide the coating cavity 10 into at least two reaction chambers 11, and an independently controlled air inlet 14 is arranged in each reaction chamber 11, so as to realize the separate control of the air intake amount in different reaction chambers 11, thereby improving the uniformity of the gas distribution in the coating cavity 10, and further improving the coating uniformity of the coating equipment 1.
[0044] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the preferred embodiments, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.
Claims
1. A coating device, characterized in that: The coating equipment comprises: A coating chamber, the coating chamber extending along a first direction; the coating chamber comprising at least two air inlet members; A push boat assembly, the push boat assembly includes a support paddle and at least one partition plate; the support paddle extends along the first direction; when the push boat assembly is accommodated in the coating chamber, the support paddle extends to the outside of the coating chamber; the partition plate is passed through the support paddle and extends along the second direction; wherein the second direction is perpendicular to the first direction; the partition plate is used to separate the coating chamber into at least two reaction chambers; the reaction chambers are independent of each other and are used to perform coating operations; each of the air inlet components corresponds to one of the reaction chambers and is accommodated in the corresponding reaction chamber; each of the air inlet components is used to individually control the air intake amount in the corresponding reaction chamber.
2. The coating device according to claim 1, characterized in that: The coating chamber also includes at least one assembly part; each of the assembly parts corresponds to one of the partition plates; the assembly parts are vertically arranged on the inner wall of the coating chamber along the second direction; the assembly parts are used to locate the position of the partition plate in the coating chamber and limit the moving distance of the partition plate in the first direction; and the assembly parts cooperate with the corresponding partition plates to hermetically separate two adjacent reaction chambers.
3. The coating device according to claim 2, characterized in that: The partition plate is detachably connected to the supporting paddle, and the partition plate and the corresponding assembly part are mutually clamped.
4. The coating device according to claim 2, characterized in that: The partition plates are in contact with the corresponding assembly members.
5. The coating device according to claim 1, characterized in that: The coating chamber further comprises an exhaust member, which is used to extract the gas in the reaction chamber to the outside of the reaction chamber; the exhaust member is arranged at the top of the coating chamber, and the air inlet member is arranged at the bottom of the coating chamber.
6. The coating device according to claim 1, characterized in that: Each of the air intake components includes a first air intake pipe and a second air intake pipe; the first air intake pipe and the second air intake pipe both extend along the first direction; in the first direction, the first air intake pipes located in different reaction chambers are arranged in a straight line, and the second air intake pipes located in different reaction chambers are arranged in a straight line.
7. The coating device according to claim 6, characterized in that: The first air inlet pipe and the second air inlet pipe are spray air inlet pipes.
8. The coating device according to claim 1, characterized in that: An opening is provided at one end of the coating cavity; the push boat assembly also includes a furnace door; the support paddle includes a first end and a second end that are oppositely arranged; the furnace door is sleeved on the first end; the partition is located between the furnace door and the second end; when the push boat assembly is accommodated in the coating cavity, the furnace door covers the opening.
9. The coating device according to claim 8, characterized in that: The push boat assembly includes a plurality of partition plates; the coating cavity is divided into a plurality of reaction chambers; the spacing between any two adjacent partition plates is a first spacing, and the spacing between the partition plate adjacent to the end of the coating cavity and the corresponding end of the coating cavity is a first spacing.
10. The coating device according to claim 8, characterized in that: The push boat assembly includes a plurality of partition plates; the coating chamber is divided into a plurality of reaction chambers; two partition plates located in the middle of the coating chamber are arranged at a first spacing, and the spacing between the partition plate adjacent to the end of the coating chamber and the corresponding end of the coating chamber is a second spacing; wherein the first spacing is greater than the second spacing, and the spacing between any other two partition plates is less than the first spacing and greater than the second spacing.