Heating pipe structure for heating plate
By designing a heating pipe structure including inner arc, middle arc and outer arc tube sections, combined with the heating section and cold section on the linear tube section, the problem of difficulty in achieving uniform wafer heating of the existing heating disk is solved, and the uniformity of the heating disk temperature and uniform heating of the wafer are achieved.
Patent Information
- Application Number
- CN202421750908.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-23
- Publication Date
- 2025-06-06
- Estimated Expiration
- 2034-07-23
AI Technical Summary
Existing heating disks are difficult to achieve uniform heating of wafers, which affects the film quality and yield of integrated circuit components.
A heating pipe structure is designed to achieve uniform distribution of the heating pipe and uniform temperature maintenance through concentric inner arc, middle arc and outer arc pipe sections, combined with the heating section and cold section on the linear pipe section.
With this structure, the density of the heating part can be effectively reduced, the uniformity of the temperature of the entire heating disk can be ensured, and uniform heating of the wafer can be achieved.
Smart Images
Figure CN222948473U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a heating tube structure for a heating plate. Background Art
[0002] The chemical deposition process is a very important part of the semiconductor thin film manufacturing process. The heating plate is a key device used to heat the wafer in the chemical deposition process. The heating plate is embedded with a heating tube, and a heating wire is set in the heating tube. The heating circuit makes the heating wire heat up and heats the wafer to a high temperature through the heating tube and the heating plate to accelerate the reaction. The heating plate maintains the temperature of the entire wafer. The uniformity of the wafer temperature determines the quality of the film and the yield rate of the integrated circuit component production. Therefore, it is necessary to design a heating tube structure that can evenly heat the entire wafer. Utility Model Content
[0003] The utility model provides a heating tube structure for a heating plate to meet the requirement of a wafer for uniform heating.
[0004] In order to achieve the above purpose, the technical solution of the utility model is:
[0005] A heating tube structure for a heating plate comprises an inner ring, a middle ring and an outer ring which are concentrically arranged and have successively increasing radii.
[0006] The inner ring is provided with a first notch to form an inner arc-shaped pipe section, and the symmetry plane of the inner arc-shaped pipe section along the vertical direction is a reference symmetry plane.
[0007] A second notch and a third notch are provided on the middle circle, which are opposite to each other. The second notch corresponds to the first notch. The second notch and the third notch divide the middle circle into two middle arc tube sections that are symmetrical about the reference symmetry plane. The end of the middle arc tube section facing the second notch is the first connecting end, and the end facing the third notch is the second connecting end.
[0008] A fourth notch and a fifth notch are provided on the outer ring, which are opposite to each other. The fourth notch corresponds to the second notch. The fourth notch and the fifth notch divide the outer ring into two outer arc-shaped tube sections symmetrical about the reference symmetry plane. The end of the outer arc-shaped tube section facing the fourth notch is the third connecting end, and the end facing the fifth notch is the fourth connecting end.
[0009] One end of the inner arc pipe segment is connected to the first connecting end of the adjacent middle arc pipe segment through the first transition pipe segment, the second connecting end is connected to the fourth connecting end of the adjacent outer arc pipe segment through the second transition pipe segment, and the third connecting end is connected to the straight pipe segment through the third transition pipe segment. The straight pipe segment passes through the first notch and the second notch and extends to the inner circle of the inner arc pipe segment.
[0010] The straight pipe section includes a heating section and a cold section in sequence, and the cold section is far away from the third transition pipe section.
[0011] Furthermore, a conducting wire is passed through the cold section, and heating wires are passed through the heating section, the third transition pipe section, the outer arc pipe section, the second transition pipe section, the middle arc pipe section, the first transition pipe section and the inner arc pipe section, and the conducting wires connect the heating wires.
[0012] Furthermore, the first transition pipe section, the second transition pipe section and the third transition pipe section are all arc-shaped.
[0013] Furthermore, the first transition pipe section is located in the area sandwiched by the straight pipe section and the outer arc-shaped pipe section.
[0014] Furthermore, the two straight pipe segments are parallel to each other and symmetrical about the reference symmetry plane.
[0015] Furthermore, the distance between the middle arc-shaped pipe segment and the inner arc-shaped pipe segment is greater than the radius of the inner arc-shaped pipe segment, and the distance between the outer arc-shaped pipe segment and the middle arc-shaped pipe segment is equal to the radius of the inner arc-shaped pipe segment.
[0016] Furthermore, the ratio of the radius of the inner arc-shaped pipe segment, the distance between the middle arc-shaped pipe segment and the inner arc-shaped pipe segment, and the distance between the outer arc-shaped pipe segment and the middle arc-shaped pipe segment is 14:19:14.
[0017] Furthermore, the first notch and the second notch both correspond to a first central angle, the third notch and the fifth notch both correspond to a second central angle, and the first central angle is greater than the second central angle.
[0018] Furthermore, a ratio of the first central angle to the second central angle is 40:11.
[0019] Furthermore, the distance between the two straight pipe sections is equal to the radius of the third transition pipe section.
[0020] Beneficial effects:
[0021] The present application discloses a heating tube structure for a heating plate, by arranging two symmetrical inner arc tube sections, two symmetrical middle arc tube sections and two symmetrical outer arc tube sections, and the inner arc tube sections, the middle arc tube sections and the outer arc tube sections are arranged concentrically, so that the heating tubes are evenly distributed in the heating plate; and by arranging heating sections and cold sections on the straight tube sections, the density of the heating part in the area from the fourth notch to the first notch is reduced, which is beneficial to maintaining a uniform temperature of the entire heating plate, and thus being able to evenly heat the entire wafer. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
[0023] Figure 1 This is a front view of a heating tube structure for a heating plate disclosed in the utility model;
[0024] Figure 2 A top view of a heating tube structure for a heating plate disclosed in the utility model;
[0025] Figure 3 This is a heat generation power simulation diagram of a heating tube structure for a heating plate disclosed in the utility model;
[0026] Figure 4 The utility model discloses a temperature test diagram of a heating test of a heating tube structure for a heating plate.
[0027] 231, inner arc pipe section;
[0028] 232, middle arc-shaped pipe section; 2321, first connecting end; 2322, second connecting end;
[0029] 233, outer arc-shaped pipe section; 2331, third connecting end; 2332, fourth connecting end;
[0030] 234, first transition pipe section; 235, second transition pipe section; 236, third transition pipe section; 237, straight pipe section; 2371, heating section; 2372, cooling section; 238, fourth transition pipe section; 239, vertical pipe section. DETAILED DESCRIPTION
[0031] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0032] A heating tube structure for a heating plate, combined with Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, it includes an inner ring, a middle ring and an outer ring which are concentrically arranged and have increasing radii in sequence. The inner ring, the middle ring and the outer ring are evenly distributed in the heating plate.
[0033] The inner ring is provided with a first notch to form an inner arc-shaped tube section 231 , and the symmetry plane of the inner arc-shaped tube section 231 along the vertical direction is a reference symmetry plane.
[0034] A second notch and a third notch are provided on the middle circle, which are opposite to each other. The second notch corresponds to the first notch. The second notch and the third notch divide the middle circle into two middle arc tube sections 232 which are symmetrical about the reference symmetry plane. The end of the middle arc tube section 232 facing the second notch is the first connection end 2321, and the end facing the third notch is the second connection end 2322.
[0035] A fourth notch and a fifth notch are provided on the outer ring, which are opposite to each other. The fourth notch corresponds to the second notch. The fourth notch and the fifth notch divide the outer ring into two outer arc-shaped tube segments 233 which are symmetrical about the reference symmetry plane. The end of the outer arc-shaped tube segment 233 facing the fourth notch is the third connecting end 2331, and the end facing the fifth notch is the fourth connecting end 2332.
[0036] One end of the inner arc-shaped pipe segment 231 is connected to the first connection end 2321 of the adjacent middle arc-shaped pipe segment 232 through the first transition pipe segment 234, the second connection end 2322 is connected to the fourth connection end 2332 of the adjacent outer arc-shaped pipe segment 233 through the second transition pipe segment 235, and the third connection end 2331 is connected to the straight pipe segment 237 through the third transition pipe segment 236. The straight pipe segment 237 passes through the first notch and the second notch and extends to the inner circle of the inner arc-shaped pipe segment 231; finally, the straight pipe segment 237 of the first section is realized. The first section 237, the third transition pipe section 236 of the first section, the outer arc pipe section 233 of the first section, the second transition pipe section 235 of the first section, the middle arc pipe section 232 of the first section, the first transition pipe section 234 of the first section, the inner arc pipe section 231, the first transition pipe section 234 of the second section, the middle arc pipe section 232 of the second section, the second transition pipe section 235 of the second section, the outer arc pipe section 233 of the second section, the third transition pipe section 236 of the second section and the straight pipe section 237 of the second section are connected in sequence.
[0037] The first transition pipe section 234 heats the first notch and the second notch regions, and the second transition pipe section 235 heats the third notch and the fifth notch regions.
[0038] The straight pipe section 237 includes a heating section 2371 and a cooling section 2372 in sequence, and the cooling section 2372 is far away from the third transition pipe section 236. The setting of the cooling section 2372 reduces the density of the heating part in the area from the fourth notch to the first notch, thereby preventing the temperature in this area from being higher than other areas.
[0039] Figure 3 This is the simulation diagram of the heating power of the heating tube structure. The horizontal axis in the figure is X, and the vertical axis is Y. The units of the horizontal and vertical axes are millimeters (i.e. mm). The color on the left represents W / m 2 (i.e., the heating power per square meter). From the simulation diagram, it can be seen that the proportion of red and yellow in the entire circular area is relatively high, and the colors in the entire circular area tend to be symmetrically distributed along the X-axis and the Y-axis. Figure 4 This is the temperature test diagram of the heating test of the heating tube structure. The heating tube structure is installed in the heating plate and 9 test points are set on the surface of the heating plate. The temperature sensor is installed at the test point for measurement. The figure shows the test data when heated to 55°C. From the figure, the 9 data values are: 54.90°C, 54.90°C, 55.00°C, 55.20°C, 55.20°C, 55.30°C, 55.30°C, 55.50°C and 55.60°C, the highest temperature is 55.60°C, the lowest temperature is 54.90°C, the average temperature is 55.21°C, and the temperature variation range is 0.70°C. In actual use, the error range of the heating plate temperature is required to be ±2%. From the test data, it can be seen that the maximum error of the temperature of the heating plate installed with the heating tube structure is 1.09%, which meets the error requirement. Therefore, the heating tube structure can keep the temperature of the entire heating plate uniform, and then enable the heating plate to uniformly heat the entire wafer.
[0040] Preferably, a wire is inserted into the cold section 2372, and heating wires are inserted into the heating section 2371, the third transition pipe section 236, the outer arc-shaped pipe section 233, the second transition pipe section 235, the middle arc-shaped pipe section 232, the first transition pipe section 234 and the inner arc-shaped pipe section 231, and the wires are connected to the heating wires. The wires ensure power supply to the heating wires and prevent the cold section 2372 from heating up, and the heating wires heat the two heating sections 2371, the two third transition pipe sections 236, the two outer arc-shaped pipe sections 233, the two second transition pipe sections 235, the two middle arc-shaped pipe sections 232, the two first transition pipe sections 234 and the inner arc-shaped pipe section 231.
[0041] Specifically, the diameter of each pipe section is 8.5 mm, the heating wire is made of Cr20Ni80, and the total resistance of the heating wire is less than 16 ohms.
[0042] Specifically, the cold section 2372 is connected to the vertical section 239 through the fourth transition section 238. The vertical section 239 is along the vertical direction, and the vertical sections 239 corresponding to the two straight sections 237 are symmetrical about the reference symmetry plane. The vertical section 239 is arranged in the hollow shaft of the heating plate. The wires of the two cold sections 2372 are respectively connected to the positive and negative poles of the power supply. The positive wire enters the first cold section 2372 through the first fourth transition section 238 after passing through the first cold section 2372; the negative wire enters the second vertical section 239 through the second fourth transition section 238 after passing through the second cold section 2372. The arrangement of the vertical section 239 facilitates the routing of the wires from the hollow shaft of the heating plate, which is beneficial for connecting the wires to the external power supply.
[0043] Preferably, the first transition pipe section 234, the second transition pipe section 235, the third transition pipe section 236 and the fourth transition pipe section 238 are all arc-shaped, which is conducive to the smooth transition of the transition position and avoids the transition position being too densely packed, thereby generating a high temperature area. The arc shape is also conducive to the routing of the wire and the heating wire, avoiding the wire and the heating wire from having a sharp turning point.
[0044] Preferably, the first transition pipe section 234 is located in the area sandwiched by the straight pipe section 237 and the outer arc-shaped pipe section 233. The first transition pipe section 234 can heat the area sandwiched by the straight pipe section 237 and the outer arc-shaped pipe section 233 to ensure the temperature in the area far away from the outer arc-shaped pipe section 233, the third transition pipe section 236 and the heating section 2371.
[0045] Preferably, the two straight pipe sections 237 are parallel to each other and symmetrical about the reference symmetry plane, so that the two heating sections 2371 uniformly heat the area therebetween.
[0046] Specifically, the cold section 2372 passes through the first notch and the second notch to avoid the area where the heating section 2371 is close to the first transition pipe section 234 and has a higher temperature.
[0047] Preferably, the distance between the middle arc tube section 232 and the inner arc tube section 231 is greater than the radius of the inner arc tube section 231, and the distance between the outer arc tube section 233 and the middle arc tube section 232 is equal to the radius of the inner arc tube section 231. Since the peripheral area of the heating plate is more prone to heat loss, the heating plate is prone to uneven temperature with hot inside and cold outside. The distance between the outer arc tube section 233 and the middle arc tube section 232 is smaller than the distance between the middle arc tube section 232 and the inner arc tube section 231, which can offset the influence of heat loss in the peripheral area of the heating plate, and ensure that the temperature of the area between the outer arc tube section 233 and the middle arc tube section 232 and the area between the middle arc tube section 232 and the inner arc tube section 231 remains uniform. Since the inner circle area of the inner arc tube segment 231 is heated by the inner arc tube segment 231, the radius of the inner arc tube segment 231 is smaller than the distance between the middle arc tube segment 232 and the inner arc tube segment 231, which can ensure that the temperature of the inner circle area of the inner arc tube segment 231 and the area between the middle arc tube segment 232 and the inner arc tube segment 231 remains uniform. Figure 3 As shown, the red part at the edge of the circular area is distributed more than the red part at the center of the circular area, reflecting that the heating power of the outer arc tube segment 233 and the middle arc tube segment 232 at the edge of the circular area is slightly higher, which can offset the heat loss in the peripheral area of the heating plate during continuous heating and insulation.
[0048] Preferably, combined Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the ratio of the radius of the inner arc tube segment 231, the distance between the middle arc tube segment 232 and the inner arc tube segment 231, and the distance between the outer arc tube segment 233 and the middle arc tube segment 232 is 14:19:14, so that the temperature of each area of the heating plate remains uniform.
[0049] Specifically, the radius of the inner arc-shaped pipe segment 231 is 35 mm, the radius of the middle arc-shaped pipe segment 232 is 82.5 mm, and the radius of the outer arc-shaped pipe segment 233 is 117.5 mm.
[0050] Preferably, the first notch and the second notch both correspond to the first central angle, the third notch and the fifth notch both correspond to the second central angle, and the first central angle is greater than the second central angle, so that the area at the first notch and the second notch is convenient for setting two cold sections 2372, and ensuring that the second transition pipe section 235 uniformly heats the area at the third notch and the fifth notch.
[0051] Preferably, the ratio of the first central angle to the second central angle is 40:11, so that the areas at the third notch and the fifth notch can be evenly heated; at the same time, the first notch and the second notch can meet both the setting of the cold section 2372 and the uniform heating of the areas at the first notch and the second notch.
[0052] Specifically, the first center angle is 120°, and the second center angle is 33°. The first transition pipe section 234 and the second transition pipe section 235 are both semicircular arcs, the radius of the first transition pipe section 234 is 23.75 mm, and the radius of the second transition pipe section 235 is 17.5 mm, ensuring that the two ends of the first transition pipe section 234 are tangent to the inner arc pipe section 231 and the middle arc pipe section 232 respectively, and the two ends of the second transition pipe section 235 are tangent to the outer arc pipe section 233 and the middle arc pipe section 232 respectively. The corresponding central angle of the third transition pipe section 236 is an obtuse angle, and the radius of the third transition pipe section 236 is 18mm; the distance between the center of curvature of the third transition pipe section 236 and the reference symmetry plane is 27mm, and the distance between the center of curvature of the third transition pipe section 236 and the reference plane perpendicular to the reference symmetry plane and passing through the center of curvature of the inner arc pipe section 231 is 95.767mm, and the third transition pipe section 236 is tangent to the straight pipe section 237; the center of curvature of the third connecting end 2331 and the third transition pipe section 236 on the same side of the reference symmetry plane is located on the same straight line as the center of curvature of the inner arc pipe section 231. The corresponding central angle of the fourth transition pipe section 238 is a right angle, and the radius of the fourth transition pipe section 238 is 9.75mm. The two ends of the fourth transition pipe section 238 are tangent to the straight pipe section 237 and the vertical pipe section 239 respectively.
[0053] Preferably, the distance between the two straight pipe sections 237 is equal to the radius of the third transition pipe section 236, so that the heating section 2371, the third transition pipe section 236 and the end of the outer arc-shaped pipe section 233 can achieve uniform heating of the area at the fourth notch.
[0054] Specifically, the distance between the end of the cold section 2372 away from the heating section 2371 and the reference surface is 7 mm, and the length of the cold section 2372 is 70 mm.
[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.
Claims
1. A heating tube structure for a heating plate, characterized in that: It includes an inner ring, a middle ring and an outer ring which are concentrically arranged and have increasing radii in sequence; The inner ring is provided with a first notch to form an inner arc-shaped pipe section (231), and the symmetry plane of the inner arc-shaped pipe section (231) along the vertical direction is a reference symmetry plane; The middle ring is provided with a second notch and a third notch which are located opposite to each other, the second notch corresponds to the first notch, the second notch and the third notch divide the middle ring into two middle arc-shaped tube segments (232) which are symmetrical about the reference symmetry plane, the end of the middle arc-shaped tube segment (232) facing the second notch is a first connection end (2321), and the end facing the third notch is a second connection end (2322); The outer ring is provided with a fourth notch and a fifth notch which are opposite to each other, the fourth notch corresponds to the second notch, the fourth notch and the fifth notch divide the outer ring into two outer arc-shaped tube segments (233) which are symmetrical about the reference symmetry plane, the end of the outer arc-shaped tube segment (233) facing the fourth notch is a third connecting end (2331), and the end facing the fifth notch is a fourth connecting end (2332); One end of the inner arc-shaped pipe segment (231) is connected to the first connection end (2321) of the adjacent middle arc-shaped pipe segment (232) through a first transition pipe segment (234); the second connection end (2322) is connected to the fourth connection end (2332) of the adjacent outer arc-shaped pipe segment (233) through a second transition pipe segment (235); the third connection end (2331) is connected to a straight pipe segment (237) through a third transition pipe segment (236); the straight pipe segment (237) passes through the first notch and the second notch and then extends to the inner circle of the inner arc-shaped pipe segment (231); The straight pipe section (237) includes a heating section (2371) and a cooling section (2372) in sequence, and the cooling section (2372) is far away from the third transition pipe section (236).
2. A heating tube structure for a heating plate according to claim 1, characterized in that: A conductive wire is passed through the cold section (2372), and heating wires are passed through the heating section (2371), the third transition pipe section (236), the outer arc-shaped pipe section (233), the second transition pipe section (235), the middle arc-shaped pipe section (232), the first transition pipe section (234) and the inner arc-shaped pipe section (231), and the conductive wire connects the heating wires.
3. A heating tube structure for a heating plate according to claim 1, characterized in that: The first transition pipe section (234), the second transition pipe section (235) and the third transition pipe section (236) are all arc-shaped.
4. A heating tube structure for a heating plate according to claim 3, characterized in that: The first transition pipe section (234) is located in the area sandwiched between the straight pipe section (237) and the outer arc-shaped pipe section (233).
5. A heating tube structure for a heating plate according to claim 4, characterized in that: The two straight pipe sections (237) are parallel to each other and symmetrical about the reference symmetry plane.
6. A heating tube structure for a heating plate according to claim 3, characterized in that: The distance between the middle arc-shaped pipe segment (232) and the inner arc-shaped pipe segment (231) is greater than the radius of the inner arc-shaped pipe segment (231), and the distance between the outer arc-shaped pipe segment (233) and the middle arc-shaped pipe segment (232) is equal to the radius of the inner arc-shaped pipe segment (231).
7. A heating tube structure for a heating plate according to claim 6, characterized in that: The ratio of the radius of the inner arc-shaped pipe segment (231), the distance between the middle arc-shaped pipe segment (232) and the inner arc-shaped pipe segment (231), and the distance between the outer arc-shaped pipe segment (233) and the middle arc-shaped pipe segment (232) is 14:19:
14.
8. A heating tube structure for a heating plate according to claim 3, characterized in that: The first notch and the second notch both correspond to a first central angle, the third notch and the fifth notch both correspond to a second central angle, and the first central angle is greater than the second central angle.
9. A heating tube structure for a heating plate according to claim 8, characterized in that: The ratio of the first central angle to the second central angle is 40:
11.
10. A heating tube structure for a heating plate according to claim 3, characterized in that: The distance between the two straight pipe sections (237) is equal to the radius of the third transition pipe section (236).