Perovskite thin film heat treatment equipment

Abstract

The utility model discloses perovskite thin film heat treatment equipment which comprises a machine body and a vacuum furnace body, the vacuum furnace body is arranged in the machine body, a sealing groove is formed in the bottom of the inner wall of the machine body in an embedded and dug mode, a driving frame is fixedly connected to the top of the vacuum furnace body, and a furnace door is arranged in the driving frame. The occupied area of the whole equipment can be greatly reduced, the situation that the film bearing plate collides with the inner wall of the furnace door in the taking-out or putting-in process is avoided, the safety of the furnace door is improved, and workers do not need to be too close to the vacuum furnace to cause danger; a worker does not need to manually carry the perovskite thin film into the vacuum furnace or carry the perovskite thin film out of the vacuum furnace, so that the practicability and the safety are greatly improved, and the perovskite thin films at different positions can be taken by standing at the position of the front side of the extending feeding plate all the time; and the placement position of the perovskite thin film which extends out in the first time can be adjusted according to requirements, so that the safety is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of perovskite thin films, in particular to a perovskite thin film heat treatment device. Background Art

[0002] Perovskite films need to be heat treated to optimize their structure and performance. A vacuum furnace is usually used for heat treatment. The perovskite film sample is placed in a vacuum furnace and the appropriate temperature and time are set as needed. After the heat treatment, the sample is taken out and cooled. The perovskite film needs to be processed in a high temperature environment. By controlling the heating rate and ambient atmosphere, the desired degree of crystallization can be obtained, and its photoelectric performance can be further improved to ensure the uniformity and stability of the perovskite film.

[0003] In the prior art, application number 202323039682.0 discloses a perovskite film heat treatment device, including a vacuum furnace, an inner cavity of the vacuum furnace is fixedly connected with a bracket, the upper surface of the bracket is fixedly connected with a groove plate, the inner cavity of the groove plate is provided with a concave base, the upper surface of the concave base is fitted with a pressure plate, the lower surface of the pressure plate and the upper surface of the groove plate are gap-matched, and the inner cavity of the pressure plate is fixedly connected with a copper rod; the above-mentioned device is installed inside the vacuum furnace through the bracket, the groove plate, the concave base and the pressure plate are fixedly arranged, and the feeding and unloading operations require the staff to manually carry the bracket into the vacuum furnace or carry it out of the vacuum furnace, which greatly increases the risk.

[0004] Currently, no effective solution has been proposed for the problems in the related technologies. Utility Model Content

[0005] In view of the problems in the related technology, the utility model proposes a perovskite thin film heat treatment equipment to overcome the above technical problems existing in the existing related technology.

[0006] To this end, the specific technical solutions adopted by the utility model are as follows:

[0007] A perovskite film heat treatment equipment comprises a machine body and a vacuum furnace body, wherein the vacuum furnace body is arranged inside the machine body, a sealing groove is embedded in the bottom of the inner wall of the machine body, a driving frame is fixedly connected to the top of the vacuum furnace body, a furnace door is arranged inside the driving frame, the bottom side of the furnace door is movably connected to the inner wall of the sealing groove, an adjustment seat is fixedly connected to the left side of the inner wall of the furnace chamber of the vacuum furnace body, a feeding plate is connected to the right side of the adjustment seat, and a film carrying plate is connected to the top of the feeding plate.

[0008] Preferably, the driving frame comprises a Z-shaped support plate and a hydraulic cylinder, the middle portion of the top side of the Z-shaped support plate is fixedly connected to the hydraulic cylinder, and the Z-shaped support plate is fixedly connected to the top of the vacuum furnace body.

[0009] Preferably, an insulation layer is fixedly connected to the inner side of the furnace door, and the furnace door is sealed and fitted with the feed port of the vacuum furnace body through the insulation layer. Mounting holes are equidistantly dug on the top of the furnace door, and the depth of the mounting holes is equal to the height of the Z-shaped support plate.

[0010] Preferably, the fixed end of the hydraulic cylinder passes through the bottom side of the Z-shaped support plate, and the fixed end extends into the interior of the middle mounting hole, the movable end of the hydraulic cylinder is fixedly connected to the bottom side of the inner wall of the middle mounting hole, and the interior of the mounting holes on both sides are movably connected with a first guide rod, and the fixed end of the first guide rod passes through the top of the Z-shaped support plate.

[0011] Preferably, a rectangular groove is dug on the right side of the adjustment seat, a lead screw is connected to the rear side of the inner wall of the rectangular groove through a bearing, second guide rods are provided on both sides of the lead screw, and moving blocks are sleeved on the outer side of the lead screw and the second guide rod.

[0012] Preferably, the two ends of the second guide rod are fixedly connected to the two sides of the inner wall of the rectangular groove, the outer side of the moving block is fixedly connected to the left rear side of the feeding plate, a nut is provided inside the moving block through a ball bearing, and the ball bearing, nut and the lead screw are threadedly connected.

[0013] Preferably, an installation cavity is provided in the middle of the wall cavity of the feeding plate, a rotating tube is provided in the middle of the inner cavity of the installation cavity through a bearing, a worm gear is fixedly mounted on the outer side of the rotating tube, a worm is matched and connected to one side of the worm gear, and the top of the rotating tube is fixedly connected to the middle of the bottom side of the film supporting plate.

[0014] Preferably, the front sides of the adjustment seat and the feed plate are respectively provided with connecting hole grooves, and the front ends of the lead screw and the worm are respectively extended into the connecting hole grooves and are fixedly connected with an inner hexagonal tube.

[0015] The beneficial effects of the utility model are: it can greatly reduce the footprint of the overall equipment, avoid the situation where the film carrier plate collides with the inner wall of the furnace door during the process of taking out or putting in, improve the safety of the furnace door, do not need the staff to get too close to the vacuum furnace to cause danger, and do not need the staff to manually carry the perovskite film into or out of the vacuum furnace, the practicality and safety are greatly improved, the staff can always stand in the front side of the extended feeding plate to take the perovskite film at different positions, and the placement position of the perovskite film extended for the first time can be adjusted according to needs, and the safety is further improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the overall structure of a perovskite thin film heat treatment device according to an embodiment of the utility model;

[0018] Figure 2 This is a schematic diagram of the appearance structure of a drive frame of a perovskite thin film heat treatment device according to an embodiment of the utility model;

[0019] Figure 3 This is a schematic diagram of the internal structure of an adjustment seat of a perovskite film heat treatment device according to an embodiment of the utility model;

[0020] Figure 4 It is a schematic diagram of the cross-sectional structure of a feed plate of a perovskite film heat treatment device according to an embodiment of the utility model.

[0021] In the figure:

[0022] 1. Machine body; 2. Vacuum furnace body; 3. Sealing groove; 4. Driving frame; 5. Furnace door; 6. Adjusting seat; 7. Feeding plate; 8. Film bearing plate; 9. Z-type supporting plate; 10. Hydraulic cylinder; 11. Insulation layer; 12. Mounting hole; 13. First guide rod; 14. Rectangular groove; 15. Lead screw; 16. Moving block; 17. Mounting cavity; 18. Rotating tube; 19. Worm gear; 20. Worm; 21. Connecting hole groove; 22. Hexagonal tube; 23. Second guide rod. DETAILED DESCRIPTION

[0023] To further illustrate each embodiment, the present invention provides drawings, which are part of the disclosure of the present invention and are mainly used to illustrate the embodiments. They can be used in conjunction with the relevant descriptions in the specification to explain the operating principles of the embodiments. With reference to these contents, ordinary technicians in the field should be able to understand other possible implementation methods and advantages of the present invention. The components in the figures are not drawn to scale, and similar component symbols are generally used to represent similar components.

[0024] According to an embodiment of the utility model, a perovskite thin film heat treatment device is provided.

[0025] Embodiment 1

[0026] like Figure 1-4As shown, a perovskite film heat treatment equipment according to an embodiment of the utility model includes a body 1 and a vacuum furnace body 2. The vacuum furnace body 2 is arranged inside the body 1. A sealing groove 3 is embedded and dug at the bottom of the inner wall of the body 1. A driving frame 4 is fixedly connected to the top of the vacuum furnace body 2. A furnace door 5 is arranged inside the driving frame 4. The bottom side of the furnace door 5 is movably connected to the inner wall of the sealing groove 3. An adjustment seat 6 is fixedly connected to the left side of the inner wall of the furnace chamber of the vacuum furnace body 2. A feeding plate 7 is connected to the right side of the adjusting seat 6. A film bearing plate 8 is connected to the top of the feeding plate 7. The driving frame 4 includes a Z-shaped support plate 9 and a hydraulic cylinder 10. The middle part of the top side of the Z-shaped support plate 9 is fixedly connected to the hydraulic cylinder 10. The Z-shaped support plate 9 is fixedly connected to the top of the vacuum furnace body 2. An insulation layer 11 is fixedly connected to the inner side of the furnace door 5. The furnace door 5 is sealed and fitted with the feed port of the vacuum furnace body 2 through the insulation layer 11. Mounting holes 12 are dug equidistantly on the top of the furnace door 5. The depth of the mounting holes 12 is the same as that of the Z-shaped support plate 9. The height of the Z-shaped support plate 9 is equal, the fixed end of the hydraulic cylinder 10 passes through the bottom side of the Z-shaped support plate 9, and the fixed end extends into the middle mounting hole 12, the movable end of the hydraulic cylinder 10 is fixedly connected to the bottom side of the inner wall of the middle mounting hole 12, and the mounting holes 12 on both sides are movably connected with a first guide rod 13, and the fixed ends of the first guide rod 13 pass through the top of the Z-shaped support plate 9. By starting the hydraulic cylinder 10, the movable end of the hydraulic cylinder 10 drives the furnace door 5 to move downward, so that the bottom of the furnace door 5 is embedded in the sealing groove 3 on the top side of the machine body 1 and is embedded and fixed. When taking or feeding materials, the furnace door 5 can be raised upward, and the mounting holes 12 on both sides of the top of the furnace door 5 can be moved outside the first guide rod 13, which can improve the stability of the opening and closing of the furnace door 5. Compared with the casement door for feeding and taking materials, the footprint of the overall equipment can be greatly reduced, and the film carrier plate 8 can be avoided from colliding with the inner wall of the furnace door 5 during the process of taking out or putting in, thereby improving the safety of the furnace door.

[0027] Embodiment 2

[0028] like Figure 1-4As shown, a perovskite film heat treatment device according to an embodiment of the utility model includes a body 1 and a vacuum furnace body 2. The vacuum furnace body 2 is arranged inside the body 1. A sealing groove 3 is embedded and dug at the bottom of the inner wall of the body 1. A driving frame 4 is fixedly connected to the top of the vacuum furnace body 2. A furnace door 5 is arranged inside the driving frame 4. The bottom side of the furnace door 5 is movably connected to the inner wall of the sealing groove 3. An adjustment seat 6 is fixedly connected to the left side of the inner wall of the furnace chamber of the vacuum furnace body 2. A feeding plate 7 is connected to the right side of the adjustment seat 6. A film bearing plate 8 is connected to the top of the feeding plate 7. A rectangular groove 14 is dug on the right side of the adjustment seat 6. A lead screw 15 is connected to the rear side of the inner wall of the rectangular groove 14 through a bearing. Second guide rods 23 are arranged on both sides of the lead screw 15. Moving blocks 16 are sleeved on the outer sides of the lead screw 15 and the second guide rod 23. The two ends of the second guide rod 23 are fixedly connected to the two sides of the inner wall of the rectangular groove 14, the outer side of the moving block 16 is fixedly connected to the left rear side of the feeding plate 7, and a nut is provided inside the moving block 16 through a ball bearing, and the ball bearing, the nut and the lead screw 15 are threadedly connected. When the perovskite film is placed on the film carrier plate 8 or the perovskite film in the film carrier plate 8 is taken out, the lead screw 15 can be rotated to make the lead screw 15 and the moving block 16 on the outer side of the second guide rod 23 drive the film carrier plate 8 to extend out of the vacuum furnace body 2 or push into the vacuum furnace body 2. There is no need for staff to get too close to the vacuum furnace in case of danger, and there is no need for staff to manually carry the perovskite film into the vacuum furnace or carry it out of the vacuum furnace, so the practicality and safety are greatly improved.

[0029] Embodiment 3

[0030] like Figure 1-4As shown, a perovskite film heat treatment equipment according to an embodiment of the utility model includes a body 1 and a vacuum furnace body 2. The vacuum furnace body 2 is arranged inside the body 1. A sealing groove 3 is embedded and dug at the bottom of the inner wall of the body 1. A driving frame 4 is fixedly connected to the top of the vacuum furnace body 2. A furnace door 5 is arranged inside the driving frame 4. The bottom side of the furnace door 5 is movably connected to the inner wall of the sealing groove 3. An adjustment seat 6 is fixedly connected to the left side of the inner wall of the furnace chamber of the vacuum furnace body 2. A feeding plate 7 is connected to the right side of the adjusting seat 6. A film bearing plate 8 is connected to the top of the feeding plate 7. An installation cavity 17 is provided in the middle of the wall cavity of the feeding plate 7. A rotating tube 18 is provided in the middle of the inner cavity of the installation cavity 17 through a bearing. A worm gear 19 is fixedly sleeved on the outer side of the rotating tube 18. A worm 20 is matched and connected to one side of the worm gear 19. The top of the rotating tube 18 is fixedly connected to the middle of the bottom side of the film bearing plate 8 , a connecting hole groove 21 is respectively dug on the front side of the adjustment seat 6 and the front side of the feeding plate 7, the front end of the lead screw 15 and the front end of the worm 20 are respectively extended into the connecting hole groove 21, and are fixedly connected with an inner hexagonal tube 22, and a hexagonal wrench can be used to extend into the inner hexagonal tube 22 inside the connecting hole groove 21 for engagement, and the hexagonal wrench can be rotated to drive the lead screw 15 or the worm 20 to rotate, and the rotation of the worm 20 can engage and drive the worm wheel 19 to rotate, and the worm wheel 19 drives the rotating tube 18 to rotate, so that the film carrying plate 8 at the top of the rotating tube 18 can be axially rotated. When taking materials, the staff can always stand in the front side of the extended feeding plate 7 to take the perovskite films at different positions, and can adjust the placement position of the perovskite film extended for the first time according to needs, and the safety is further improved.

[0031] In summary, with the aid of the above technical solution of the utility model, when the device is in use, by starting the hydraulic cylinder 10, the movable end of the hydraulic cylinder 10 drives the furnace door 5 to move downward, so that the bottom of the furnace door 5 is embedded in the sealing groove 3 on the top side of the body 1 and is fixed, and when taking out or feeding materials, the furnace door 5 can be raised upward, and when the perovskite film is placed on the film carrier plate 8 or the perovskite film in the film carrier plate 8 is taken out, the lead screw 15 can be rotated to make the lead screw 15 and the moving block 16 on the outer side of the second guide rod 23 drive the film carrier plate 8 to extend out of the outside of the vacuum furnace body 2 or push into the vacuum furnace body 2. Inside, a hexagonal wrench can be used to extend into the inner hexagonal tube 22 inside the connecting hole groove 21 for engagement. By rotating the hexagonal wrench, the lead screw 15 or the worm 20 can be driven to rotate. The rotation of the worm 20 can engage and drive the worm gear 19 to rotate. The worm gear 19 drives the rotating tube 18 to rotate, and the film carrier plate 8 at the top of the rotating tube 18 can be rotated axially. When taking materials, the staff can always stand in front of the extended feeding plate 7 to take the perovskite films at different positions, and can adjust the placement position of the perovskite film extended for the first time according to needs.

[0032] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A perovskite thin film heat treatment device, comprising a machine body (1) and a vacuum furnace body (2), characterized in that: The vacuum furnace body (2) is arranged inside the machine body (1), a sealing groove (3) is embedded and dug at the bottom of the inner wall of the machine body (1), a driving frame (4) is fixedly connected to the top of the vacuum furnace body (2), a furnace door (5) is arranged inside the driving frame (4), the bottom side of the furnace door (5) is movably connected to the inner wall of the sealing groove (3), an adjustment seat (6) is fixedly connected to the left side of the inner wall of the furnace chamber of the vacuum furnace body (2), a feeding plate (7) is connected to the right side of the adjustment seat (6), and a film supporting plate (8) is connected to the top of the feeding plate (7).

2. A perovskite thin film heat treatment device according to claim 1, characterized in that: The driving frame (4) comprises a Z-shaped support plate (9) and a hydraulic cylinder (10); the middle portion of the top side of the Z-shaped support plate (9) is fixedly connected to the hydraulic cylinder (10); and the Z-shaped support plate (9) is fixedly connected to the top of the vacuum furnace body (2).

3. A perovskite thin film heat treatment device according to claim 2, characterized in that: A heat-insulating layer (11) is fixedly connected to the inner side of the furnace door (5), and the furnace door (5) is sealed and fitted with the feed port of the vacuum furnace body (2) through the heat-insulating layer (11). Mounting holes (12) are dug at equal intervals on the top of the furnace door (5), and the depth of the mounting holes (12) is equal to the height of the Z-shaped support plate (9).

4. A perovskite thin film heat treatment device according to claim 3, characterized in that: The fixed end of the hydraulic cylinder (10) passes through the bottom side of the Z-shaped support plate (9), and the fixed end extends into the interior of the middle mounting hole (12); the movable end of the hydraulic cylinder (10) is fixedly connected to the bottom side of the inner wall of the middle mounting hole (12); the interior of the mounting holes (12) on both sides are movably connected with a first guide rod (13); the fixed end of the first guide rod (13) passes through the top of the Z-shaped support plate (9).

5. A perovskite thin film heat treatment device according to claim 4, characterized in that: A rectangular groove (14) is excavated on the right side of the adjustment seat (6); a lead screw (15) is connected to the rear side of the inner wall of the rectangular groove (14) via a bearing; second guide rods (23) are provided on both sides of the lead screw (15); and a moving block (16) is sleeved on the outer sides of the lead screw (15) and the second guide rod (23).

6. The perovskite thin film heat treatment equipment according to claim 5, characterized in that: The two ends of the second guide rod (23) are fixedly connected to the two sides of the inner wall of the rectangular groove (14); the outer side of the moving block (16) is fixedly connected to the left rear side of the feeding plate (7); a nut is provided inside the moving block (16) via a ball bearing, and the ball bearing, the nut and the lead screw (15) are threadedly connected in a matching manner.

7. The perovskite thin film heat treatment equipment according to claim 6, characterized in that: A mounting cavity (17) is provided in the middle of the wall cavity of the feeding plate (7); a rotating tube (18) is provided in the middle of the inner cavity of the mounting cavity (17) through a bearing; a worm gear (19) is sleeved and fixed on the outer side of the rotating tube (18); a worm (20) is matched and connected to one side of the worm gear (19); and the top end of the rotating tube (18) is fixedly connected to the middle of the bottom side of the film carrier plate (8).

8. The perovskite thin film heat treatment equipment according to claim 7, characterized in that: The front sides of the adjustment seat (6) and the feeding plate (7) are respectively provided with connecting holes (21), and the front ends of the lead screw (15) and the worm (20) extend into the connecting holes (21) and are fixedly connected with an inner hexagonal tube (22).

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