High-precision film thickness detector

Abstract

The utility model relates to the technical field of film thickness detection devices, and discloses a high-precision film thickness detector, which comprises a bottom frame, a servo motor I is fixedly mounted in the bottom frame, the servo motor I is connected with a shaft column through an output shaft, a supporting plate is fixedly mounted at the top end of the shaft column, a screw rod is rotatably connected in the bottom frame, and the screw rod is fixedly connected with the bottom frame through an output shaft. A second servo motor is fixedly installed on the bottom frame and connected with the lead screw through an output shaft, a moving block is connected to the lead screw in a threaded mode, a vertical rod is fixedly installed on the top of the moving block, the vertical rod is sleeved with a mounting plate, and a lock bolt is connected to the mounting plate in a threaded mode. And a reflection probe for the light splitting interference film thickness gauge is fixedly mounted on the mounting plate. According to the utility model, the sample does not need to be manually moved to adjust the point position, the use is more convenient, the film thickness at different point positions can be accurately positioned and detected, and the detection precision is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of film thickness detection devices, in particular to a high-precision film thickness detector. Background Art

[0002] The spectroscopic interference film thickness detector is an instrument that uses the principle of optical interference to perform non-contact, non-destructive, high-speed, and high-precision film thickness measurement. It uses optical interferometry, a method of determining optical film thickness using the reflectivity obtained by the optical system of a spectrophotometer. Specifically, when the light incident from above the target sample is reflected by the film surface (R1), and the light passing through the film is reflected at the interface between the substrate (metal) and the film (R2), the optical interference phenomenon caused by the phase shift caused by the resulting optical path difference is measured. By analyzing the obtained reflection spectrum and refractive index, the film thickness can be calculated. This technology is applicable to a variety of fields, including semiconductor manufacturing, medical fields, nanomaterial research, coatings industry, engineering and construction fields, and the automotive industry, where real-time and accurate measurement of the thickness of objects is required, with high accuracy and without contact with the object being measured.

[0003] When the existing spectroscopic interference film thickness detector is used to detect samples, the applicant found that when personnel detect the film thickness at different points of the sample, they need to manually move the sample, which is cumbersome to operate, and manual adjustment cannot accurately align the detection point with the reflection probe, thus affecting the actual detection accuracy. In order to solve the above problems, a high-precision film thickness detector is proposed. Utility Model Content

[0004] The purpose of the utility model is to provide a high-precision film thickness detector in order to solve the above-mentioned problems.

[0005] The technical solution adopted by the utility model is as follows: a high-precision film thickness detector, including a base frame, a servo motor 1 is fixedly installed inside the base frame, the servo motor 1 is connected to a shaft column through an output shaft, a supporting plate is fixedly installed on the top of the shaft column, a lead screw is rotatably connected inside the base frame, a servo motor 2 is fixedly installed on the base frame, the servo motor 2 is connected to the lead screw through an output shaft, a moving block is threadedly connected to the lead screw, a vertical rod is fixedly installed on the top of the moving block, a mounting plate is sleeved on the vertical rod, a locking bolt is threadedly connected to the mounting plate, and a reflection probe for a spectroscopic interferometer film thickness meter is fixedly installed on the mounting plate.

[0006] In a preferred embodiment, the reflection probe is connected to a mainframe of a spectroscopic interferometer film thickness meter via two branch optical fibers, and the mainframe of the spectroscopic interferometer film thickness meter is connected to a computer.

[0007] In a preferred embodiment, the servo motor 1 and the servo motor 2 are connected to a computer.

[0008] In a preferred embodiment, four positioning columns are fixedly connected to the top of the supporting plate.

[0009] In a preferred embodiment, a guide rod is slidably connected to the lower portion of the shift block, and the guide rod is fixedly mounted on the base frame.

[0010] In a preferred embodiment, a sleeve hole is formed on the mounting plate, the vertical rod passes through the sleeve hole, a limiting convex strip is constructed on the inner wall of the sleeve hole, and a limiting slot adapted to be plugged with the limiting convex strip is provided on the outer wall of the vertical rod.

[0011] In a preferred embodiment, a U-shaped opening groove is provided on the supporting tray.

[0012] In a preferred embodiment, a threaded hole is formed on the mounting plate, the threaded hole is communicated with the sleeve hole, and the locking bolt is threadedly connected to the threaded hole.

[0013] In a preferred embodiment, a strip-shaped hole is formed on the top of the base frame, and the vertical rod passes through the strip-shaped hole.

[0014] In summary, due to the adoption of the above technical solution, the beneficial effects of the utility model are:

[0015] 1. In the utility model, the supporting plate on the shaft column is driven to rotate by servo motor 1, so as to adjust the detection position of the sample 360 ​​degrees. At the same time, the screw is driven to rotate by servo motor 2, and the screw drives the vertical rod of the shift block to move forward and backward, so as to adjust the front and rear position of the reflection probe, so as to automatically align the reflection probe with the detection point. The whole structure does not need to manually move the sample to adjust the point, so it is more convenient to use, and can accurately locate and detect the film thickness at different points, thereby improving the detection accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the internal structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the support frame assembly of the utility model;

[0018] Figure 3 This is a schematic diagram of the three-dimensional structure of the vertical rod in the utility model;

[0019] Figure 4 It is a schematic diagram showing the three-dimensional structure of the mounting plate in the utility model.

[0020] Markings in the figure: 1-base, 3-servo motor 1, 4-axis column, 5-support plate, 6-screw, 7-servo motor 2, 8-moving block, 9-vertical rod, 10-mounting plate, 11-locking bolt, 12-reflection probe, 13-spectroscopic interferometer film thickness meter host, 14-positioning column, 15-guide rod, 16-sleeve hole, 17-limiting convex strip, 18-limiting card slot, 19-U-shaped opening slot, 20-threaded hole, 21-bar hole. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution in the embodiments of the utility model will be clearly and completely described below in combination with the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] The following will be combined Figure 1-Figure 4 A high-precision film thickness detector according to an embodiment of the utility model is described in detail.

[0023] Example:

[0024] The present invention provides a high-precision film thickness detector, referring to Figures 1 to 4 As shown, it includes a base frame 1, a servo motor 1 3 is fixedly installed inside the base frame 1, the servo motor 1 3 is connected to a shaft column 4 through an output shaft, a supporting plate 5 is fixedly installed on the top of the shaft column 4, a screw rod 6 is rotatably connected inside the base frame 1, a servo motor 2 7 is fixedly installed on the base frame 1, the servo motor 2 7 is connected to the screw rod 6 through an output shaft, the servo motor 1 3 and the servo motor 2 7 are connected to a computer, a moving block 8 is threadedly connected to the screw rod 6, a vertical rod 9 is fixedly installed on the top of the moving block 8, a mounting plate 10 is sleeved on the vertical rod 9, a locking bolt 11 is threadedly connected to the mounting plate 10, and a reflection probe 12 for a spectroscopic interferometer film thickness instrument is fixedly installed on the mounting plate 10. This structure is used when the film thickness of the sample is detected. At this time, the personnel places the sample of standard size on the supporting plate 5, and then selects multiple points to be measured through the computer. Then the personnel control the servo motor 1 3 and the servo motor 2 7 to work together through the computer. The servo motor 1 3 is mainly used to drive the supporting plate 5 on the shaft column 4 to rotate, so as to adjust the detection position of the sample 360 ​​degrees. At the same time, the servo motor 2 7 is used to drive the screw rod 6 to rotate, and the screw rod 6 will drive the vertical rod 9 of the shift block 9 to move back and forth, so as to adjust the front and back position of the reflection probe 12, so as to automatically align the reflection probe 12 with the detection point. The whole structure does not need to manually move the sample to adjust the point, so it is more convenient to use, and can accurately locate and detect the film thickness at different points, thereby improving the detection accuracy.

[0025] It should be noted that: according to the precise control characteristics of the servo motor, the computer can control the servo motor 1 3 through a program, thereby controlling the shift block 8 to stop at any position of the screw rod 6. Similarly, the computer controls the operation of the servo motor 2 7 through a program, thereby accurately controlling the rotation angle of the support plate 5, thereby realizing accurate shift detection. The specific control electrical components and control procedures of the entire servo motor are all prior art, the principles have been disclosed, and this application does not improve the servo control components and procedures, so they will not be introduced in detail here.

[0026] refer to Figures 1 to 4 As shown, the reflection probe 12 is connected to the spectroscopic interference film thickness meter host 13 through two branch optical fibers, and the spectroscopic interference film thickness meter host 13 is connected to the computer. This structure of the reflection probe 12, the two branch optical fibers and the spectroscopic interference film thickness meter host 13 constitute a spectroscopic interference film measuring instrument. The spectroscopic interference film thickness meter host 13 is equipped with a light source and a spectrometer. The light is mainly emitted by the light source of the spectroscopic interference film thickness meter host 13. The light passes through the optical fiber and the reflection probe and shines on the sample surface. The reflected light beams generated between the reference surface and the sample surface interfere with each other to form specific interference light. The interference light is reflected by the reflection probe 12 to the spectrometer of the spectroscopic interference film thickness meter host 13, and then the computer analyzes the reflection spectrum signals of these interference lights to measure the film thickness on the sample surface.

[0027] It should be noted that the spectroscopic interferometer film measuring instrument composed of the above-mentioned reflection probe 12 and the spectroscopic interferometer film thickness meter host 13 is an existing device, the specific model is: SF-3 / 300, the specific device structure and the subsequent interference light analysis system have been disclosed, and this application does not improve the above-mentioned device structure and the subsequent interference light analysis system, so no further introduction is given here.

[0028] refer to Figures 1 to 4 As shown, four positioning posts 14 are fixedly connected to the top of the supporting plate 5. This structure uses the positioning posts 14 to position and support the standard sample, thereby facilitating positioning detection and ensuring the stability of the position of the sample when it rotates.

[0029] refer to Figures 1 to 4 As shown, the lower part of the moving block 8 is slidably connected with a guide rod 15, and the guide rod 15 is fixedly installed on the base frame 1. This structure uses the guide rod 15 to guide the movement of the moving block 8.

[0030] refer to Figures 1 to 4 As shown, a sleeve hole 16 is opened on the mounting plate 10, and the vertical rod 9 passes through the sleeve hole 16. The inner wall of the sleeve hole 16 is constructed with a limiting convex strip 17, and the outer wall of the vertical rod 9 is provided with a limiting groove 18 that is adapted to be plugged with the limiting convex strip 17. In this structure, the mounting plate 10 is sleeved with the vertical rod 9 through the sleeve hole 16, and the relative installation position of the mounting plate 10 and the vertical rod 9 can be positioned by using the limiting convex strip 17 and the limiting groove 18.

[0031] refer to Figures 1 to 4 As shown, a U-shaped opening groove 19 is provided on the supporting plate 5. This structure utilizes the U-shaped opening groove 19 to facilitate personnel to take and place samples.

[0032] refer to Figures 1 to 4 As shown, a threaded hole 20 is opened on the mounting plate 10 , the threaded hole 20 is communicated with the sleeve hole 16 , and the locking bolt 11 is threadedly connected with the threaded hole 20 . In this structure, the mounting plate 10 is connected to the locking bolt 11 via the threaded hole 20 .

[0033] refer to Figures 1 to 4 As shown, a strip hole 21 is opened on the top of the base frame 1, and the vertical rod 9 passes through the strip hole 21. This structure utilizes the strip hole 21 to facilitate the vertical rod 9 to pass through the top of the base frame 1, while providing movement space for the vertical rod 9.

[0034] The implementation principle of a high-precision film thickness detector in an embodiment of the present application is as follows: when the film thickness of a sample is detected, the personnel places the sample of standard size on the supporting plate 5, and then selects multiple points to be measured through a computer. Then the personnel control the servo motor 1 3 and the servo motor 2 7 to work together through the computer, mainly through the servo motor 1 3 to drive the supporting plate 5 on the shaft column 4 to rotate, thereby adjusting the detection position of the sample 360 ​​degrees, and at the same time, the servo motor 2 7 is used to drive the screw rod 6 to rotate, and the screw rod 6 will drive the vertical rod 9 of the shift block 9 to move back and forth, thereby adjusting the front and back position of the reflection probe 12, so that the reflection probe 12 is automatically aligned with the detection point, and then the light emitted by the light source of the main frame 13 of the spectroscopic interference film thickness meter is irradiated onto the sample surface through the optical fiber and the reflection probe, and the reflected light beams generated between the reference surface and the sample surface interfere with each other to form specific interference light, and the interference light is reflected by the reflection probe 12 to the spectrometer of the main frame 13 of the spectroscopic interference film thickness meter, and then the computer analyzes the reflection spectrum signals of these interference lights to determine the film thickness on the sample surface.

[0035] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A high-precision film thickness detector, comprising a base frame (1), characterized in that: A servo motor 1 (3) is fixedly installed inside the base frame (1), and the servo motor 1 (3) is connected to a shaft column (4) via an output shaft. A supporting plate (5) is fixedly installed on the top of the shaft column (4). A screw rod (6) is rotatably connected inside the base frame (1). A servo motor 2 (7) is fixedly installed on the base frame (1), and the servo motor 2 (7) is connected to the screw rod (6) via an output shaft. A moving block (8) is threadedly connected to the screw rod (6), and a vertical rod (9) is fixedly installed on the top of the moving block (8). A mounting plate (10) is sleeved on the vertical rod (9), and a locking bolt (11) is threadedly connected to the mounting plate (10). A reflection probe (12) for a spectroscopic interferometer film thickness meter is fixedly installed on the mounting plate (10).

2. A high-precision film thickness detector as claimed in claim 1, characterized in that: The reflection probe (12) is connected to a spectroscopic interference film thickness meter host (13) via two branch optical fibers, and the spectroscopic interference film thickness meter host (13) is connected to a computer.

3. A high-precision film thickness detector as claimed in claim 1, characterized in that: The servo motor 1 (3) and the servo motor 2 (7) are connected to a computer.

4. A high-precision film thickness detector as claimed in claim 1, characterized in that: Four positioning columns (14) are fixedly connected to the top of the supporting plate (5).

5. A high-precision film thickness detector as claimed in claim 1, characterized in that: The lower part of the shift block (8) is slidably connected to a guide rod (15), and the guide rod (15) is fixedly mounted on the base frame (1).

6. A high-precision film thickness detector as claimed in claim 1, characterized in that: The mounting plate (10) is provided with a sleeve hole (16), the vertical rod (9) passes through the sleeve hole (16), the inner wall of the sleeve hole (16) is structured with a limit convex strip (17), and the outer wall of the vertical rod (9) is provided with a limit slot (18) adapted to be plugged with the limit convex strip (17).

7. A high-precision film thickness detector as claimed in claim 1, characterized in that: The supporting plate (5) is provided with a U-shaped opening groove (19).

8. A high-precision film thickness detector as claimed in claim 6, characterized in that: The mounting plate (10) is provided with a threaded hole (20), the threaded hole (20) is communicated with the sleeve hole (16), and the locking bolt (11) is threadedly connected with the threaded hole (20).

9. A high-precision film thickness detector as claimed in claim 1, characterized in that: A strip-shaped hole (21) is provided on the top of the base frame (1), and the vertical rod (9) passes through the strip-shaped hole (21).

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