Wafer positioning clamp

Abstract

The utility model relates to the field of clamps, in particular to a wafer positioning clamp. The clamping device is used for clamping materials and comprises a first clamping body, and one side of the first clamping body is movably connected with a second clamping body through a clamping device. The clamping device comprises a locking piece, the locking piece penetrates through the first clamping body and is connected with the second clamping body, and guiding pieces are arranged on the two sides of the locking piece in the relative movement direction of the first clamping body and the second clamping body. The ends, close to materials and perpendicular to the moving direction of the second clamping body, of the first clamping body and the second clamping body are configured to be clamping ends, the first clamping body and / or the second clamping body are / is provided with limiting parts at the clamping ends, and the limiting parts are used for being connected with the materials in a clamped mode. And the clamped material is placed in the clamping end at a preset angle under the action of the limiting part. According to the invention, the limiting member is arranged in the clamping end, and the limiting member abuts against the gap or the plane reserved on the wafer carrier, so that the wafer can be clamped at a preset angle.

Description

Technical Field

[0001] The utility model relates to the field of fixtures, in particular to a wafer positioning fixture. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. High-purity polycrystalline silicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single-crystal silicon. After grinding, polishing and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. In the production process of carbon-based chips, it is necessary to cover the surface of the wafer with a layer of orderly arranged carbon nanotube film, and then perform various other complex processing to finally make a chip that can be used in practice.

[0003] However, the prior art lacks a clamp for clamping the wafer during the thin film preparation process. Utility Model Content

[0004] The utility model aims to provide a wafer positioning fixture to solve the technical problem that the prior art lacks a fixture for clamping wafers in a thin film preparation process.

[0005] The technical solution of the utility model is: a wafer positioning fixture, used for clamping materials, comprising a first clamping body, one side of which is movably connected to a second clamping body through a clamping device;

[0006] The clamping device comprises a locking member, the locking member passes through the first clamping body and is connected to the second clamping body, and guide members are arranged on both sides of the locking member along the relative movement direction of the first clamping body and the second clamping body;

[0007] One end of the first clamping body and the second clamping body close to the material and perpendicular to the movement direction of the second clamping body is constructed as a clamping end, and the first clamping body and / or the second clamping body are provided with a limiting portion at the clamping end, and the limiting portion is used to clamp with the material. The clamped material is placed in the clamping end at a preset angle under the action of the limiting portion.

[0008] Preferably, the clamping end is configured as a groove on the first clamping body and as a pressure plate on the second clamping body, and the limiting portion is configured as a protrusion extending inwardly from the side wall of the groove or has a planar boss.

[0009] Preferably, the locking member includes a bolt passing through the first clamping body, and a nut corresponding to the bolt and arranged on the second clamping body; the guide member includes a guide column fixed to one end of the first clamping body facing the second clamping body, and a guide hole for the guide column to pass through is correspondingly opened on the second clamping body.

[0010] Preferably, the first clamping body is provided with a threaded hole, and the bolt is threadably matched with the first clamping body.

[0011] Preferably, the first clamping body is provided with a light hole, the bolt passes through the light hole and cooperates with the second clamping body, and the bolt has a step structure abutting against the end surface of the first clamping body;

[0012] Furthermore, an elastic member is connected between the first clamping body and the second clamping body, and the elastic member imparts elastic force to the first clamping body, and the direction of the elastic force is opposite to the direction of the force acting on the first clamping body by the step structure.

[0013] Preferably, the portion of the first clamping body away from the clamping end is arranged as a base, a through slot is provided on the base along the movement direction of the second clamping body, the through slot is opened on one side away from the clamping end, and a cover plate is detachably installed at the opening.

[0014] Preferably, the base is provided with a fixing hole corresponding to the through slot perpendicular to the length direction of the through slot, and a top screw is connected to the inner thread of the fixing hole.

[0015] Compared with the prior art, the advantages of the utility model are:

[0016] (1) In the present application, a limit member is provided in the clamping end, and the limit member abuts against a notch or a plane reserved on the wafer carrier, so that the wafer can be clamped at a preset angle.

[0017] (2) The present application uses a locking member having a bolt and a nut to drive the first clamping body and the second clamping body to perform clamping movement, which has a simple structure and is easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0019] Figure 1 This is a structural diagram of a wafer positioning fixture described in the utility model;

[0020] Figure 2 This is an exploded view of a wafer positioning fixture described in the utility model;

[0021] Figure 3 This is a structural diagram of the limiting part described in some embodiments of the utility model;

[0022] Figure 4 This is a structural diagram of the limiting part described in some embodiments of the utility model;

[0023] Wherein: 1. first clamping body, 11. base, 12. through groove, 13. cover plate, 14. fixing hole, 2. second clamping body, 3. locking member, 31. bolt, 32. nut, 4. guide member, 41. guide column, 42. guide hole, 5. clamping end, 51. limiting part. DETAILED DESCRIPTION

[0024] The following is a further detailed description of the present invention in conjunction with specific embodiments:

[0025] like Figure 1 and Figure 2 As shown, a wafer positioning fixture includes a first clamping body 1 and a second clamping body 2 connected by a clamping device. The second clamping body 2 is driven by the clamping device to clamp the first clamping body 1 to clamp the wafer.

[0026] The clamping device includes a locking member 3 that penetrates the first clamping body 1 and is connected to the second clamping body 2. The locking member 3 is used to drive the second clamping body 2 to perform a clamping action. Guide members 4 are provided on both sides of the locking member 3 to provide guidance for the second clamping body 2 during the clamping action.

[0027] The locking member 3 includes a bolt 31 that passes through the first clamping body 1. One end of the bolt 31 is provided with a step structure, which abuts against the top of the first clamping body 1 after the bolt 31 passes through the first clamping body 1. A nut 32 that matches the bolt 31 is installed on the side of the second clamping body 2 away from the first clamping body 1. By rotating the bolt 31, the second clamping body 2 has a tendency to move toward the first clamping body 1.

[0028] The guide member 4 includes a guide column 41 fixed on the first clamping body 1, and a guide hole 42 for the guide column 41 to pass through is opened on the corresponding second clamping body 2, so that the first clamping body 1 and the second clamping body 2 provide guidance when performing a clamping action.

[0029] In this embodiment, the hole on the first clamping body 1 through which the bolt 31 passes is set as a blank hole, which is only for the bolt 31 to pass through. A spring is connected between the first clamping body 1 and the second clamping body 2, and part of the spring is sleeved on the guide column 41. The spring applies a force to the second clamping body 2 to move away from the first clamping body 1.

[0030] The first clamping body 1 and the second clamping body 2 are configured as a clamping end 5 at one end of the side close to the clamped wafer and perpendicular to the movement direction of the second clamping body 2. In this embodiment, the clamping end 5 on the first clamping body 1 is configured as a groove, and the clamping end 5 on the second clamping body 2 is configured as a pressure plate. Figure 3 As shown, the clamping end 5 of the first clamping body 1 is also provided with a limiting portion 51, which is set as a protrusion in the middle of the side wall of the groove, and the protrusion is engaged with the notch reserved on the carrier carrying the wafer, so that the wafer can be clamped at a preset angle. When there is no notch reserved on the wafer carrier of other specifications, in other embodiments of the present application, such as Figure 4 As shown, the limiting portion 51 can also be configured as a boss with a vertical plane in the groove, and the boss abuts against the wafer through the plane.

[0031] The part of the first clamping body 1 away from the clamping end 5 is set as a base 11, and a through slot 12 is opened on the base 11 along the movement direction of the second clamping body 2. The through slot 12 is opened on one side away from the clamping end 5, and the first clamping body 1 is clamped on the external base through the opening, and a cover plate 13 is detachably installed at the opening by screws. A fixing hole 14 is opened on the side wall of the base 11 perpendicular to the through slot 12, and a top screw is connected to the internal thread of the fixing hole 14 to adjust the relative position of the first clamping body 1 and the external base.

[0032] In other embodiments of the present application, the hole on the first clamping body 1 that matches the thread is set as a threaded hole, and no spring is set between the first clamping body 1 and the second clamping body 2. The clamping movement of the first clamping body 1 and the second clamping body 2 is achieved through the bolt holes thereon that respectively match the same bolt 31.

[0033] When using:

[0034] The cover plate 13 of the base 11 of the first clamping body 1 is removed, and after the through slot 12 is clamped to the external base, the cover plate 13 is reconnected to the first clamping body 1 .

[0035] The bolt 31 is rotated clockwise or counterclockwise to move the second clamping body 2 away from the first clamping body 1 , and to place the wafer into the opened clamping end 5 .

[0036] The position of the wafer carrier is adjusted until the notch or plane on the carrier abuts against the limiting portion 51 in the clamping end 5 .

[0037] The bolts 31 are tightened in the opposite direction so that the second clamping body 2 is close to the first clamping body 1, thereby clamping the wafer.

[0038] The above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with this technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model.

Claims

1. A wafer positioning fixture for clamping materials, characterized in that: It comprises a first clamping body, one side of which is movably connected to a second clamping body via a clamping device; The clamping device comprises a locking member, the locking member passes through the first clamping body and is connected to the second clamping body, and guide members are arranged on both sides of the locking member along the relative movement direction of the first clamping body and the second clamping body; One end of the first clamping body and the second clamping body close to the material and perpendicular to the movement direction of the second clamping body is constructed as a clamping end, and the first clamping body and / or the second clamping body are provided with a limiting portion at the clamping end, and the limiting portion is used to clamp with the material. The clamped material is placed in the clamping end at a preset angle under the action of the limiting portion.

2. A wafer positioning fixture according to claim 1, characterized in that: The clamping end is configured as a groove on the first clamping body and as a pressure plate on the second clamping body. The limiting portion is configured as a protrusion extending inwardly from the side wall of the groove or has a planar boss.

3. A wafer positioning fixture according to claim 2, characterized in that: The locking member includes a bolt passing through the first clamping body, and a nut corresponding to the bolt and arranged on the second clamping body; the guide member includes a guide column fixed to one end of the first clamping body facing the second clamping body, and a guide hole for the guide column to pass through is correspondingly opened on the second clamping body.

4. The wafer positioning fixture according to claim 3, characterized in that: The first clamping body is provided with a threaded hole, and the bolt is threadably matched with the first clamping body.

5. The wafer positioning fixture according to claim 3, characterized in that: The first clamping body is provided with a light hole, the bolt passes through the light hole and cooperates with the second clamping body, and the bolt has a step structure abutting against the end surface of the first clamping body; Furthermore, an elastic member is connected between the first clamping body and the second clamping body, and the elastic member imparts elastic force to the first clamping body, and the direction of the elastic force is opposite to the direction of the force acting on the first clamping body by the step structure.

6. The wafer positioning fixture according to claim 1, characterized in that: The portion of the first clamping body away from the clamping end is set as a base, and a through slot is opened on the base along the movement direction of the second clamping body. The through slot is opened on one side away from the clamping end, and a cover plate is detachably installed at the opening.

7. The wafer positioning fixture according to claim 6, characterized in that: The base is provided with a fixing hole corresponding to the through slot perpendicular to the length direction of the through slot, and a top screw is connected to the inner thread of the fixing hole.

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