Pressure maintaining device for filtering tank of single crystal furnace

Abstract

The utility model relates to a pressure maintaining device for a filtering tank of a single crystal furnace, and belongs to the technical field of single crystal furnace equipment. The butterfly valve mainly comprises a valve body, a valve seat, a valve rod mounting cylinder, a valve rod, a butterfly plate, an adjusting disc, an adjusting handle, a pressing rod and a spring. The pressure maintaining device is additionally arranged at the position of a connecting pipeline of a filtering tank and a vacuum pump, when the vacuum pump breaks down and needs to be replaced, a worker holds the adjusting handle by hand, presses the pressing rod forcefully and rotates the adjusting handle and the pressing rod, then the valve rod and the dish plate are driven to rotate, the dish plate is closed, and the interior of the filtering tank is in a pressure maintaining state; operation potential safety hazards caused by the fact that a vacuum pump or a connecting pipeline needs to be replaced in the operation process of the single crystal furnace on site are effectively eradicated, so that the purposes of protecting safety of operators, reducing loss and improving productivity are achieved.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal furnace equipment, and particularly relates to a pressure maintaining device for a filtration tank of a single crystal furnace. Background Technique

[0002] During the production process of a single crystal furnace, a high vacuum environment needs to be maintained to ensure the quality and output of single crystals. The cooperation between the filtration tank and the vacuum pump is the key to maintaining this vacuum environment. The main function of the filtration tank is to filter out impurity particles in the gas discharged from the single crystal furnace, and the function of the vacuum pump is to evacuate the inner cavity of the single crystal furnace during crystal pulling to achieve the required vacuum environment.

[0003] The existing vacuum pump and filtration tank are connected through a connecting pipeline, but no independent pressure maintaining valve is designed at the connecting pipeline. When the vacuum pump connected to the filtration tank or the connecting pipeline fails and needs to be replaced, the filtration tank needs to be pressurized on site. During this process, a large amount of air will enter the tank body. After the oxides inside the tank body come into contact with the air, chemical reactions will occur, causing the oxides to burn. The burning process will directly damage the filter bag. When repairing or removing the connecting pipeline, because the inside of the tank body is in a burning or high-temperature state, flames or high-temperature gases will be ejected. If a large amount of air enters in a short time, it will cause the oxides in the filtration tank to explode and burn, generating gas explosions or open flames, resulting in equipment damage and personal injury, thus unable to guarantee the safety of operators and reducing the service life of the filter bag of the filtration tank. Summary of the Invention

[0004] In order to overcome the problem that the existing vacuum pump and filtration tank are connected through a connecting pipeline, but no independent pressure maintaining valve is designed at the connecting pipeline, which cannot guarantee the safety of operators and reduces the service life of the filter bag of the filtration tank, the utility model provides a pressure maintaining device for a filtration tank of a single crystal furnace; this pressure maintaining device is installed at the connecting pipeline between the filtration tank and the vacuum pump. When the vacuum pump fails and needs to be replaced, the operator holds the adjusting handle, presses the pressure rod forcefully, rotates the adjusting handle and the pressure rod, and then drives the valve rod and the disc to rotate, closes the disc to make the inside of the filtration tank in a pressure maintaining state, effectively eliminating the potential safety hazards during the operation caused by the need to replace the vacuum pump or the connecting pipeline during the operation of the single crystal furnace, so as to achieve the purpose of protecting the safety of operators, reducing losses and improving production capacity.

[0005] To achieve the above object, the utility model is realized through the following technical solutions: A pressure maintaining device for a single crystal furnace filter tank mainly includes a valve body, a valve seat, a valve rod installation cylinder, a valve rod, a disc plate, an adjusting disc, an adjusting handle, a pressure rod, and a spring. The valve seat is installed inside the valve body, the valve rod installation cylinder is installed at the top of the valve body, the valve rod passes through the valve rod installation cylinder, the top of the valve body and the valve seat and is rotatably installed on the valve body. The disc plate is installed on the valve rod and is located inside the valve seat. A connecting disc is provided at the top of the valve rod installation cylinder, and threaded holes are provided on the connecting disc. The adjusting disc is detachably installed on the threaded holes of the connecting disc through fastening bolts. The adjusting handle is installed at the top of the valve rod, the pressure rod is hinged on the adjusting handle, the top of the spring abuts against the adjusting handle, and the bottom end abuts against the pressure rod. A limiting through groove is provided on the adjusting disc, and the pressure rod is buckled in the limiting through groove.

[0006] The adjusting disc is provided with limiting protrusions.

[0007] The valve body is in a circular ring shape, and connecting threaded holes are uniformly provided on the valve body.

[0008] A sealing ring is installed on the valve seat.

[0009] The beneficial effects of the utility model:

[0010] This pressure maintaining device is installed at the connection pipeline between the filter tank and the vacuum pump. When the vacuum pump fails and needs to be replaced, the staff holds the adjusting handle, presses the pressure rod forcefully, rotates the adjusting handle and the pressure rod, and then drives the valve rod and the disc plate to rotate, closing the disc plate to make the inside of the filter tank in a pressure maintaining state, effectively eliminating the potential safety hazards in the operation caused by the need to replace the vacuum pump or the connection pipeline during the operation of the single crystal furnace, so as to achieve the purpose of protecting the safety of the operators, reducing losses and improving production capacity. Brief Description of the Drawings

[0011] Figure 1 is an isometric schematic diagram of the utility model.

[0012] Figure 2 is a three-dimensional schematic Figure 1 .

[0013] Figure 3 is a three-dimensional schematic Figure 2 .

[0014] Figure 4 is a partial cross-sectional schematic diagram of the utility model.

[0015] Figure 5 is the working principle diagram of the utility model. Specific Embodiments

[0016] In order to make the objectives, technical solutions and beneficial effects of the present utility model clearer, the following will, in conjunction with the accompanying drawings, provide a detailed description of the preferred embodiments of the present utility model to facilitate understanding by those skilled in the art.

[0017] The present utility model discloses a pressure maintaining device for a single crystal furnace filter tank. The pressure maintaining device for a single crystal furnace filter tank mainly includes a valve body 1, a valve seat 2, a valve rod mounting cylinder 3, a valve rod 4, a disc plate 5, an adjusting disc 6, an adjusting handle 7, a pressure rod 8, and a spring 9. The valve seat 2 is installed inside the valve body 1, the valve rod mounting cylinder 3 is installed at the top of the valve body 1, the valve rod 4 passes through the valve rod mounting cylinder 3, the top of the valve body 1 and the valve seat 2 and is rotatably installed on the valve body 1. The disc plate 5 is installed on the valve rod 4 and is located inside the valve seat 2. A connecting plate 31 is provided at the top of the valve rod mounting cylinder 3, and a threaded hole 311 is opened on the connecting plate 31. The adjusting disc 6 is detachably installed in the threaded hole 311 of the connecting plate 31 through a fastening bolt. The adjusting handle 7 is installed at the top of the valve rod 4, the pressure rod 8 is hinged on the adjusting handle 7, the top of the spring 9 abuts against the adjusting handle 7, and the bottom end abuts against the pressure rod 8. A limiting through groove 61 is opened on the adjusting disc 6, and the pressure rod 8 is buckled in the limiting through groove 61.

[0018] When the vacuum pump fails and needs to be replaced, the staff holds the adjusting handle 7, presses the pressure rod 8 forcefully, rotates the adjusting handle 7 and the pressure rod 8, thereby driving the valve rod 3 and the disc plate 5 to rotate. When the adjusting handle 7 abuts against the limiting convex block 62, the staff releases the pressure rod 8, and the pressure rod 8 resets under the action of the spring 9, so that the pressure rod 8 is clamped in the limiting through groove 61, and the disc plate 5 closes to keep the inside of the filter tank in a pressure maintaining state, effectively eliminating the potential safety hazards in the operation caused by the need to replace the vacuum pump or connect the pipeline during the operation of the single crystal furnace, so as to achieve the purpose of protecting the safety of the operators, reducing losses and improving production capacity.

[0019] As Figure 1 、 Figure 2 shown, a limiting convex block 62 is provided on the adjusting disc 6; it is convenient for the staff to adjust the disc plate 5. When the adjusting handle 7 abuts against the limiting convex block 62, the device is in a fully open or fully closed state.

[0020] As Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 shown, the valve body 1 is in a circular ring shape, and connecting threaded holes 11 are uniformly provided on the valve body 1; the provision of the connecting threaded holes 11 facilitates the connection of the device to the filter tank.

[0021] As Figure 1 、 Figure 2 、 Figure 3 shown, a sealing ring 10 is installed on the valve seat 2; the main function of the sealing ring 10 is to prevent gas leakage.

[0022] Working process:

[0023] As Figure 5 shown, this pressure maintaining device is installed through the connecting threaded hole 11 at the connecting pipeline between the filtering tank and the vacuum pump. Under normal working conditions, the disc 5 is in an open state. The operator can hold the adjusting handle 7 and the pressure rod 8 and rotate them to buckle the pressure rod 8 in different limiting through grooves 61 to achieve the adjustment of gas flow. When the vacuum pump fails and needs to be replaced, the operator holds the adjusting handle 7, presses the pressure rod 8 forcefully, rotates the adjusting handle 7 and the pressure rod 8, and then drives the valve rod 3 and the disc 5 to rotate. When the adjusting handle 7 abuts against the limiting convex block 62, the operator releases the pressure rod 8. The pressure rod 8 resets under the action of the spring 9, so that the pressure rod 8 is clamped in the limiting through groove 61, and the disc 5 closes to keep the filtering tank in a pressure maintaining state. The sealing ring 10 prevents gas leakage, effectively eliminating the potential safety hazards in the operation caused by the need to replace the vacuum pump or the connecting pipeline during the operation of the single crystal furnace, so as to achieve the purpose of protecting the safety of the operators, reducing losses and improving production capacity.

[0024] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in form and details without departing from the scope defined by the claims of the present invention.

Claims

1. A single crystal furnace filter tank pressure maintaining device, characterized in that: The single crystal furnace filter tank pressure maintaining device comprises a valve body (1), a valve seat (2), a valve stem mounting cylinder (3), a valve stem (4), a disc plate (5), an adjusting disk (6), an adjusting handle (7), a pressure rod (8), and a spring (9). The valve seat (2) is mounted inside the valve body (1), the valve stem mounting cylinder (3) is mounted on the top of the valve body (1), the valve stem (4) passes through the valve stem mounting cylinder (3), the top of the valve body (1) and the valve seat (2) and is rotatably mounted on the valve body (1), and the disc plate (5) is mounted on the valve stem (4) and is located inside the valve seat (2). A connecting plate (31) is provided at the top end of the valve stem mounting tube (3), a threaded hole (311) is provided on the connecting plate (31), an adjusting plate (6) is detachably mounted on the threaded hole (311) of the connecting plate (31) by means of a fastening bolt, an adjusting handle (7) is mounted on the top end of the valve stem (4), a pressure rod (8) is hinged on the adjusting handle (7), a top end of the spring (9) abuts against the adjusting handle (7), a bottom end abuts against the pressure rod (8), a limiting slot (61) is provided on the adjusting plate (6), and the pressure rod (8) is buckled in the limiting slot (61).

2. A single crystal furnace filter tank pressure maintaining device according to claim 1, characterized in that: A limiting protrusion (62) is provided on the adjustment disk (6).

3. A single crystal furnace filter tank pressure maintaining device as claimed in claim 1 or 2, characterized in that: The valve body (1) is in the shape of a circular ring, and connecting threaded holes (11) are evenly arranged on the valve body (1).

4. A single crystal furnace filter tank pressure maintaining device as claimed in claim 1 or 2, characterized in that: A sealing ring (10) is installed on the valve seat (2).

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