High-precision solvent feeding equipment

Abstract

The utility model discloses high-precision solvent dispensing equipment which comprises a solvent storage tank, a dispensing assembly is connected onto the solvent storage tank, a circulating pipeline connected with the solvent storage tank is arranged on the dispensing assembly, a solvent receiving device is arranged on the circulating pipeline, and the dispensing equipment is controlled by a PLC (programmable logic controller) control system. The high-precision solvent feeding equipment has the beneficial effects that the high-precision solvent feeding equipment in the technical scheme is ingenious in structural design, relatively high in practicability and stable in work and operation, and the feeding weight of the high-precision solvent feeding equipment is based on the feeding weight of the solvent storage tank and is not influenced by the reaction process in the reaction kettle; compared with feeding through a flow meter, backflow is carried out before feeding through the feeding mode of the technical scheme, it is ensured that the whole pipeline is filled with the solvent, the internal pressure of the pipeline is balanced, errors of the pipeline and the flow meter are eliminated, and the feeding accuracy is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor new material preparation and application, in particular to a high-precision solvent feeding device. Background Technique

[0002] In the semiconductor new material and fine chemical industries, quantitative feeding is an inevitable problem in the production process. The feeding accuracy will directly affect the production quality of products. For some products, the accuracy of solvent feeding will affect the chemical reaction process. Therefore, for this type of products, precise feeding needs to be strictly ensured to guarantee the quality and reliability of products.

[0003] At present, the more commonly used feeding methods in the workshop are weighing feeding and flowmeter feeding. Both methods are affected by many interference factors and it is difficult to achieve precise feeding. Weighing feeding is affected by the production process. For example, when the reaction kettle is under pressure or negative pressure, it will cause errors in the weighing module; flowmeter feeding will be affected by factors such as air in the pump, air in the pipeline, and pressure difference in the pipeline, and it is also difficult to ensure the feeding accuracy. Therefore, a high-precision solvent feeding device is designed. Content of the Utility Model

[0004] The purpose of the utility model is to solve the above problems and design a high-precision solvent feeding device.

[0005] To achieve the above purpose, the technical solution of the utility model is as follows: a high-precision solvent feeding device, including a solvent storage tank, a feeding assembly is connected to the solvent storage tank, a circulation pipeline connected to the solvent storage tank is arranged on the feeding assembly, a solvent receiving device is arranged on the circulation pipeline, and the feeding device is controlled by a PLC control system.

[0006] As a further description of this technical solution, a first weighing module is arranged at the bottom of the solvent storage tank. The feeding assembly includes a discharge valve arranged at the bottom of the solvent storage tank. The discharge valve is connected to a precision screw pump through a pipeline, and the discharge valve is connected to the PLC control system.

[0007] As a further description of this technical solution, the first weighing module is connected to the PLC control system, the precision screw pump is connected to the PLC control system. The first weighing module and the precision screw pump are linked through the PLC control system. A given emission volume is set in the PLC control system. The feeding volume is calculated by the first weighing module subtracting the weight. The rotation speed of the screw pump is controlled by the PLC control system. Most of the solvent is emitted at a high speed, and the final emission volume is precisely controlled at a low speed. After the emitted solvent reaches the specified weight, the screw pump is stopped by the PLC control, and at the same time all solenoid valves are closed.

[0008] As a further description of the technical solution, the precision screw pump is connected with a delivery valve, and a circulation pipeline is connected to the delivery valve.

[0009] As a further description of the technical solution, the circulation pipeline includes a material delivery pipeline connected to the delivery valve, and a reflux pipeline is arranged at one end of the material delivery pipeline far away from the delivery valve.

[0010] As a further description of the technical solution, a high-point cut-off valve is arranged at one end of the reflux pipeline far away from the material delivery pipeline. The high-point cut-off valve is connected with a reflux valve, the reflux valve is connected to the top of the solvent storage tank, and a pressure sensor is arranged on the material delivery pipeline.

[0011] As a further description of the technical solution, the delivery valve, the pressure sensor, the reflux pipeline, the high-point cut-off valve, and the reflux valve are all connected to the PLC control system.

[0012] As a further description of the technical solution, the solvent receiving device includes a plurality of material delivery branches arranged on the circulation pipeline. Each material delivery branch is connected with a reaction kettle. Each reaction kettle is provided with an independent in-kettle automatic flow control valve, and a second weighing module is arranged at the bottom of each reaction kettle.

[0013] The beneficial effects are as follows. The high-precision solvent delivery equipment of the technical solution has a clever structural design, strong practicability, and stable operation. For this high-precision solvent delivery equipment, the feeding weight is based on the weight of the solvent sent out from the solvent storage tank and is not affected by the reaction process in the reaction kettle. Compared with the feeding method using a flow meter, the feeding method of this technical solution conducts reflux before feeding to ensure that the solvent fills the entire pipeline, balances the internal pressure of the pipeline, eliminates the errors of the pipeline and the flow meter, and ensures the accuracy of material delivery. Description of the Drawings

[0014] Figure 1 is the overall structural schematic diagram of the present utility model;

[0015] Figure 2 is the structural schematic diagram of the material delivery assembly of the present utility model;

[0016] Figure 3 is the structural schematic diagram of the circulation pipeline of the present utility model;

[0017] Figure 4 is the structural schematic diagram of the solvent receiving device of the present utility model.

[0018] In the figure, 1 is a solvent storage tank; 2 is a material feeding assembly; 3 is a circulation pipeline; 4 is a solvent receiving device; 5 is a PLC control system; 6 is a first weighing module; 7 is a discharge valve; 8 is a precision screw pump; 9 is a conveying valve; 10 is a material feeding pipeline; 11 is a reflux pipeline; 12 is a high-point cut-off valve; 13 is a reflux valve; 14 is a pressure sensor; 15 is a material feeding branch; 16 is a reaction kettle; 17 is an automatic flow control valve for feeding into the kettle; 18 is a second weighing module. Detailed implementation mode

[0019] The present utility model will be specifically described below with reference to the accompanying drawings. As Figures 1-4 shown, a high-precision solvent feeding device includes a solvent storage tank 1 for storing solvents. The bottom of the solvent storage tank 1 is provided with a first weighing module 6. The feeding device is controlled by a PLC control system 5. The weight of the solvent storage tank 1 is read in real time through the first weighing module 6. The range of the first weighing module 6 is 1000 kg, the accuracy class is C3, the verification scale interval is 0.2 kg, and the actual scale interval is 0.02 kg.

[0020] The bottom of the solvent storage tank 1 is provided with a first weighing module 6. The bottom of the solvent storage tank 1 is connected to a discharge valve 7. The discharge valve 7 is connected to a precision screw pump 8 through a pipeline, and the discharge valve 7 is connected to the PLC control system 5.

[0021] The first weighing module 6 is connected to the PLC control system 5, and the precision screw pump 8 is connected to the PLC control system 5. The first weighing module 6 and the precision screw pump 8 are linked through the PLC control system 5. A given discharge amount is set in the PLC control system 5. The feeding amount is calculated by the first weighing module 6 by weighing reduction. The rotation speed of the screw pump is controlled by the PLC control system 5. Most of the solvent is discharged at a high speed, and the final discharge amount is accurately controlled at a very low speed. After the discharged solvent reaches the specified weight, the screw pump is stopped by PLC control, and at the same time, all solenoid valves are closed.

[0022] The precision screw pump 8 is connected to a conveying valve 9, and the conveying valve 9 is connected to a circulation pipeline 3. The solvent is conveyed from the solvent storage tank 1 to the material feeding pipeline 10 by the rotation of the precision screw pump 8. The circulation pipeline 3 can make the solvent circulate in the pipeline to eliminate the interference of air bubbles in the pipeline. The high-speed frequency of the precision screw pump 8 is 40 Hz, the medium-speed frequency is 20 Hz, the low-speed frequency is 15 Hz, and the very-low-speed frequency is 5 Hz. The weight at the high-speed to medium-speed conversion of the precision screw pump 8 is 8 kg, the weight at the medium-speed to low-speed conversion is 3 kg, and the weight at the low-speed to very-low-speed conversion is 1 kg.

[0023] A material delivery assembly 2 is connected to the solvent storage tank 1. The material delivery assembly 2 will be introduced in detail below. The material delivery assembly 2 includes a discharge valve 7 provided at the bottom of the solvent storage tank 1. The discharge valve 7 is connected to a precision screw pump 8 through a pipeline, and the discharge valve 7 is connected to a PLC control system 5.

[0024] A circulation pipeline 3 connected to the solvent storage tank 1 is provided on the material delivery assembly 2. The circulation pipeline 3 will be introduced in detail below. The circulation pipeline 3 includes a material delivery pipeline 10 connected to a delivery valve 9. A reflux pipeline 11 is provided at one end of the material delivery pipeline 10 away from the delivery valve 9.

[0025] A high-point cut-off valve 12 is provided at one end of the reflux pipeline 11 away from the material delivery pipeline 10. The high-point cut-off valve 12 is connected to a reflux valve 13. The reflux valve 13 is connected to the top of the solvent storage tank 1. A pressure sensor 14 is provided on the material delivery pipeline 10. The delivery valve 9, the pressure sensor 14, the reflux pipeline 11, the high-point cut-off valve 12, and the reflux valve 13 are all connected to the PLC control system 5. The PLC control system 5 calculates the remaining weight of the unissued solvent by the weight-loss method and controls the screw pump speed through this weight, realizing the emission of most of the solvent at a high speed and accurately controlling the weight at a micro speed.

[0026] A solvent receiving device 4 is provided on the circulation pipeline 3. The solvent receiving device 4 will be introduced in detail below. The solvent receiving device 4 includes a plurality of material delivery branches 15 provided on the circulation pipeline 3. Each material delivery branch 15 is connected to a reaction kettle 16. Each reaction kettle 16 is provided with an independent in-kettle automatic control flow valve 17. A second weighing module 18 is provided at the bottom of each reaction kettle 16. The measuring range of the second weighing module 18 is 500 kg, the accuracy class is C3, the verification scale interval is 0.1 kg, and the actual scale interval is 0.01 kg.

[0027] The specific structure of the present utility model has been described in detail above. The working principle of the present utility model will be described below: The solvent in the circulation pipeline 3 is sent out from the solvent storage tank 1, powered by the precision screw pump 8, and successively passes through the discharge valve 7, the conveying valve 9, the feeding pipeline 10, the pressure sensor 14, the return pipeline 11, the high-point cut-off valve 12 and the return valve 13 to return to the solvent storage tank 1, realizing the solvent circulation. Before each feeding, it is controlled by the PLC control system 5. First, the solvent is circulated for 30 seconds to eliminate the influence of air bubbles in the pipeline on the feeding accuracy. After the PLC control system 5 receives the feeding signal from the reaction kettle 16, it starts the precision screw pump 8, and at the same time opens the discharge valve 7, the conveying valve 9, the pressure sensor 1434, and the high-point cut-off valve 12 for reflux. After the reflux time arrives, the in-kettle automatic flow control valve 17 connected to the reaction kettle 16 is opened. The solvent enters the feeding branch 15 from the circulation pipeline 3 and then enters the reaction kettle 16 through the in-kettle automatic flow control valve 17. After the feeding is completed, the second weighing module 18 calculates the weight increase of the reaction kettle 16 before and after the solvent feeding and compares it with the weight reduction of the solvent storage tank 1, so as to realize accurate feeding.

[0028] The high-precision solvent feeding equipment of this technical solution has a clever structural design, strong practicability, and stable operation. For this high-precision solvent feeding equipment, the feeding weight is based on the weight sent out from the solvent storage tank 1 and is not affected by the reaction process in the reaction kettle 16. Compared with the feeding method using a flow meter, the feeding method of this technical solution performs reflux before feeding to ensure that the solvent fills the entire pipeline, balances the internal pressure of the pipeline, eliminates the errors of the pipeline and the flow meter, and ensures the feeding accuracy.

[0029] The above technical solution only reflects the preferred technical solution of the technical solution of the present utility model. Some changes that may be made to some parts by those skilled in the art of this technology all reflect the principle of the present utility model and fall within the protection scope of the present utility model.

Claims

1. A high-precision solvent dispensing device, characterized in that: The invention comprises a solvent storage tank (1), the solvent storage tank (1) is connected to a material dispensing assembly (2), the material dispensing assembly (2) is provided with a circulation pipeline (3) connected to the solvent storage tank (1), the circulation pipeline (3) is provided with a solvent receiving device (4), and the material dispensing equipment is controlled by a PLC control system (5); A first weighing module (6) is arranged at the bottom of the solvent storage tank (1), and the material dispensing component (2) comprises a discharge valve (7) arranged at the bottom of the solvent storage tank (1), and the discharge valve (7) is connected to a precision screw pump (8) through a pipeline, and the discharge valve (7) is connected to a PLC control system (5); The first weighing module (6) is connected to the PLC control system (5), the precision screw pump (8) is connected to the PLC control system (5), and the first weighing module (6) and the precision screw pump (8) are linked via the PLC control system (5); The precision screw pump (8) is connected to a delivery valve (9), and the delivery valve (9) is connected to a circulation pipeline (3); The circulation pipeline (3) comprises a material delivery pipeline (10) connected to the delivery valve (9), and a return pipeline (11) is provided at one end of the material delivery pipeline (10) away from the delivery valve (9); A high-point stop valve (12) is provided at one end of the reflux pipeline (11) away from the material delivery pipeline (10), the high-point stop valve (12) is connected to a reflux valve (13), the reflux valve (13) is connected to the top of the solvent storage tank (1), and a pressure sensor (14) is provided on the material delivery pipeline (10); The delivery valve (9), the pressure sensor (14), the return pipeline (11), the high-point stop valve (12), and the return valve (13) are all connected to the PLC control system (5).

2. A high-precision solvent dispensing device according to claim 1, characterized in that: The solvent receiving device (4) comprises a plurality of material discharging branches (15) arranged on the circulation pipeline (3), each of the material discharging branches (15) is connected to a reaction kettle (16), each reaction kettle (16) is provided with an independent automatic flow control valve (17) for entering the kettle, and a second weighing module (18) is provided at the bottom of each reaction kettle (16).

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