Carrier plate flatness detection equipment

Abstract

The utility model relates to carrier plate flatness detection equipment, which relates to the field of IC carrier plate detection and comprises a fixed frame, a moving device, a flatness detection device, an appearance detection device, a grabbing mechanism for classifying carrier plates and a recycling station for classifying and storing the carrier plates. When the device is used, the planeness of the carrier plate is detected and analyzed through an optical planeness measurement technology, and the carrier plate can be prevented from being damaged in the measurement process by adopting a non-contact measurement method of light irradiation; through the appearance detection device, appearance detection can be performed on the two surfaces of the carrier plate at a time, and the carrier plates are classified and stored in combination with the grabbing mechanism and the recovery station, so that the measurement precision is ensured, and meanwhile, the quality detection efficiency of the carrier plates can be improved.

Description

Technical Field

[0001] The utility model relates to the field of IC carrier board detection, in particular to a flatness detection device for a carrier board. Background Technique

[0002] An IC carrier board is a substrate used for packaging semiconductor IC chips and can play a role in protecting the chips. Since the IC carrier board has higher precision requirements, the quality of the IC carrier board usually needs to be detected before use.

[0003] Currently, the Chinese utility model patent with the publication number of CN220461414U and the publication date of February 9, 2024 discloses an online double-sided detection system for an IC carrier board. The system includes a loading bin, a front scanning platform, a loading transfer arm, a front detection module, a flipping transfer arm, a flipping module, a back scanning platform, a back detection module, a discharging transfer arm, an NG bin, an OK discharging module and a controller including an image processing unit installed on a system bench.

[0004] During use, the front detection module and the back detection module collect the double-sided optical images of the product to be detected, and the controller processes the collected optical images in real time to obtain the detection results of the corresponding product. The controller transfers the detected product to the NG bin or the OK discharging module for discharging through the discharging transfer arm according to the detection results, and can detect scratches, stains, hole pitches, etc. on the surface of the carrier board.

[0005] For the above technical solution, the surface abnormalities of the carrier board can be detected through the optical image acquisition module, but the flatness of the carrier board cannot be detected, and the problem of abnormal flatness of the carrier board cannot be identified. Content of the Utility Model

[0006] In order to solve the problem that the existing carrier board detection equipment lacks a detection link for the flatness of the carrier board, the utility model provides a flatness detection device for a carrier board.

[0007] The utility model provides a flatness detection device for a carrier board, adopting the following technical scheme:

[0008] A carrier board flatness detection device, comprising a fixed frame, a moving device and a flatness detection device. The moving device is installed below the fixed frame. The moving device includes a support part, a driving part and a conveying part. Two support parts are fixedly installed on the fixed frame. The driving part is fixedly installed on one of the support parts. The conveying part is rotatably installed between the two support parts. The conveying part is in transmission connection with the driving part. The flatness detection device is installed above the fixed frame. The flatness detection device includes a processing part, a transmitting part and a collecting part. The processing part is installed on the fixed frame. The processing part is arranged vertically above the conveying part. The transmitting part and the collecting part are arranged below the processing part. The transmitting part and the collecting part are arranged along the direction of the conveying part. The transmitting part and the collecting part face the direction of the conveying part.

[0009] By adopting such a technical solution, when in use, the carrier board is placed on the conveying part between the two support parts of the moving device. The driving part drives the conveying part to move along the direction of the moving device. The moving part drives the carrier board to move backward. When the carrier board moves below the flatness detection device, the transmitting part of the flatness detection device emits a light pattern with a specific phase difference. After the light pattern irradiates on the carrier board, the phase difference will change. The collecting part collects the light pattern on the carrier board whose phase has changed. The processing part decodes and calculates the phase of the collected image, so as to obtain the three-dimensional information of the surface of the carrier board. In this way, the carrier board on the moving device is detected and analyzed by the phase-shifting structured light technology, which improves the detection efficiency while ensuring the measurement accuracy.

[0010] Optionally, a grasping mechanism is further arranged on the fixed frame. The grasping mechanism includes a sliding rail part, a lifting part and a grasping part. The sliding rail part is fixedly installed on the fixed frame. The sliding rail part is arranged above the moving device. The lifting part is slidably installed on the sliding rail part. The grasping part is slidably installed on the lifting part. Multiple groups of suction cups are arranged at the bottom of the grasping part.

[0011] By adopting such a technical solution, when the carrier board moves on the moving device, when the carrier board moves below the grasping mechanism, the lifting part is driven by a motor to move on the sliding rail part. After the lifting part moves to the vertical upper part of the carrier board, the motor drives the grasping part to move on the lifting part. When the grasping part moves to contact the carrier board on the carrier board, multiple groups of suction cups at the bottom of the grasping part start to work, suck the carrier board tightly and then rise with the grasping part, and move out of the moving device along the sliding rail part with the lifting part. In this way, the grasping mechanism can drive the carrier board to move through the cooperation of the sliding rail part, the lifting part, the grasping part and the suction cups. At the same time, grasping the carrier board through the suction cup structure can effectively fix the carrier board without scratching the surface of the carrier board, reducing the rejection rate of the carrier board.

[0012] Optionally, two code scanning mechanisms are further provided directly above the mobile device. The two code scanning mechanisms are fixedly installed on the fixed frame along the direction of the mobile device respectively, and the two code scanning mechanisms are respectively arranged upstream of the flatness detection device and the grasping mechanism along the moving direction of the mobile device.

[0013] By adopting this technical solution, before the carrier plate is subjected to flatness detection on the mobile device, the code scanning mechanism will identify and record the carrier plate. After the carrier plate passes through the flatness detection device, the flatness information of the carrier plate will be recorded. When the carrier plate moves backward, it will be identified again by the code scanning mechanism installed in front of the grasping mechanism. After the code scanning mechanism reads the information of the carrier plate, it will transmit the carrier plate information to the grasping mechanism, and the grasping mechanism will transport the carrier plate to the corresponding position according to the information of the carrier plate. In this way, the two code scanning mechanisms respectively identify and record the carrier plate, without waiting to scan the next carrier plate after one carrier plate is transported, and the carrier plates with different flatness can be transported to different positions according to the carrier plate information, which can not only improve the detection efficiency of the carrier plate, but also facilitate the classified storage of the carrier plate.

[0014] Optionally, a recycling station is further installed on the fixed frame. The recycling station is arranged on one side of the mobile device, and the recycling station is vertically below the slide rail part of the grasping mechanism.

[0015] By adopting this technical solution, when the carrier plate passes through the grasping mechanism, the grasping mechanism will distinguish carrier plates of different qualities according to the information of the carrier plate. The carrier plates that pass the quality inspection will continue to move backward with the mobile device, while the carrier plates that do not pass the quality inspection will be lifted by the suction cup of the grasping mechanism and placed on the recycling station. In this way, by setting a recycling station below the grasping mechanism, the carrier plates that do not pass the quality inspection can be recycled uniformly and stored centrally on the recycling station, which is convenient for subsequent repair or centralized treatment of the recycled carrier plates and can effectively reduce the scrap rate of the carrier plates.

[0016] Optionally, an appearance detection device is further provided on the fixed frame. The appearance detection device is arranged behind the flatness detection device along the direction of the mobile device. The appearance detection device includes a camera module and a shielding part. The camera module is installed on the fixed frame, the camera module is arranged directly above the mobile device, and the shielding part is arranged between the camera module and the mobile device.

[0017] By adopting this technical solution, an appearance detection device is installed between the flatness detection device and the grasping mechanism. When the carrier plate moves backward on the moving device, it will first pass through the flatness detection device, then through the appearance detection device, and after passing through the appearance detection device, it will pass through the code scanning mechanism. The code scanning mechanism will take pictures of the carrier plate and identify and compare the taken pictures, and then jointly store and record the identified results and the carrier plate information. In this way, the camera module can take pictures of the carrier plate, and the shielding part can shield the areas outside the carrier plate, enabling the camera module to only capture the carrier plate area, which is convenient for accurately identifying the carrier plate during subsequent picture processing. After identifying the flatness of the carrier plate, directly performing appearance detection on the carrier plate can effectively improve the efficiency of quality detection of the carrier plate.

[0018] Optionally, two groups of the appearance detection devices are provided, and the two groups of the appearance detection devices are respectively arranged above and below the moving device, and the camera modules of the two groups of the appearance detection devices are respectively oriented towards the moving device.

[0019] By adopting this technical solution, when the carrier plate passes through the appearance detection device, the camera modules respectively arranged above and below the moving device can take pictures of the upper and lower surfaces of the carrier plate simultaneously, and perform appearance detection on the two surfaces of the carrier plate at the same time. In this way, by respectively arranging the appearance detection devices above and below the carrier plate and performing appearance detection on the two surfaces of the carrier plate simultaneously, it can greatly save time and improve the detection efficiency.

[0020] Optionally, three support rods are also slidably arranged on the processing part. One end of the support rod is slidably installed on the processing part, and the other end of the support rod is fixedly connected to the fixed frame. The three support rods are respectively arranged at three positions of the processing part.

[0021] By adopting this technical solution, three support rods are arranged at three positions of the processing part of the flatness detection device. The height and direction of the processing part can be adjusted by respectively adjusting the positions of the three positions of the processing part on the three support rods. In this way, the relative positions of the transmitting part and the receiving part on the processing part can be set by adjusting the direction of the processing part, so that the processing part can perform scanning processing on the carrier plate face to face.

[0022] Optionally, a leveling mechanism is also arranged on the fixed frame. The leveling mechanism is arranged in front of the flatness detection device. The leveling mechanism includes an adjusting part and a flat plate part. The adjusting part is installed on the fixed frame. The adjusting part is arranged between the two supporting parts. The flat plate part is hinged to the top of the adjusting part.

[0023] By adopting such a technical solution, a leveling mechanism is installed between the supporting parts. The flat plate part of the leveling mechanism can adjust the angle on the adjusting part. When the carrier plate moves above the leveling mechanism, the moving end of the adjusting part of the leveling mechanism will rise to lift the carrier plate, so that the carrier plate and the flat surface part are on the same horizontal plane. In this way, the carrier plate on the moving device can be adjusted to be on the same plane through the adjusting part and the flat plate part of the leveling mechanism, which is convenient for the subsequent flatness detection device to scan the carrier plates on the unified plane and improves the detection accuracy of the carrier plates.

[0024] Optionally, a positioning mechanism is further provided on the fixed frame. The positioning mechanism is arranged vertically below the flatness detection device. The positioning mechanism includes a fixing part and a positioning part. The fixing part is installed between the two supporting parts along the direction perpendicular to the moving device, and the positioning part is slidably installed on the fixing part.

[0025] By adopting such a technical solution, when the carrier plate moves on the moving device and reaches vertically below the flatness detection device, the positioning part of the positioning mechanism will slide upward along the fixing part and fix the carrier plate by blocking the end of the moving direction of the carrier plate, so that the flatness detection device can scan and detect the carrier plate. In this way, when scanning the carrier plate, the carrier plate can be fixed at a specific position, enabling the flatness detection device to better detect the carrier plate.

[0026] Optionally, screw rod sleeves are further provided on the two supporting parts of the moving device, and an adjusting screw rod is further arranged between the two supporting parts. The adjusting screw rod is cooperatively arranged with the two screw rod sleeves.

[0027] By adopting such a technical solution, a screw rod is cooperatively installed between the two supporting parts of the moving device. By rotating the screw rod, one of the supporting parts can cooperate with the screw rod and move along the axial direction of the screw rod, thereby adjusting the distance between the two supporting parts and further adjusting the width of the moving device. In this way, the width of the moving device can be adjusted through the cooperation of the screw rod, enabling the moving device to adapt to carrier plates of different sizes and models, and expanding the applicable range of the flatness detection device.

[0028] In summary, the present utility model includes at least one of the following beneficial technical effects:

[0029] 1. By installing a flatness detection device on the moving device, the flatness detection device can perform optical scanning on the carrier plate and detect and analyze the flatness of the carrier plate through optical flatness measurement technology. While ensuring the measurement accuracy, the non-contact measurement method of irradiating with light can avoid damaging the carrier plate during the measurement process.

[0030] 2. By installing two appearance detection devices above and below the mobile device simultaneously, the upper and lower surfaces of the carrier board can be detected for appearance at the same time. The appearance of the two surfaces of the carrier board can be detected at one time, shortening the time used for appearance detection and improving the detection efficiency.

[0031] 3. By setting a code scanning mechanism and a grasping mechanism on the mobile device, and setting a recycling station on one side of the mobile device, the grasping mechanism can effectively grasp and move the carrier board, and the sucking grasping method will not scratch the surface. Combining the actions of the code scanning mechanism and the grasping mechanism, the carrier board can be placed in different areas of the recycling station according to the flatness result, improving the detection and classification efficiency.

[0032] 4. By installing a leveling mechanism and a positioning mechanism on the mobile device in cooperation, the positioning mechanism and the leveling mechanism can ensure that the carrier board is in an accurate position and a flat state during scanning, enhancing the accuracy and reliability of the scanning result and reducing the error caused by the position deviation of the carrier board. Description of the Drawings

[0033] Figure 1 is the overall structural schematic diagram of the embodiment of the present utility model;

[0034] Figure 2 is the installation schematic diagram of the mobile device and the flatness detection device of the embodiment of the present utility model;

[0035] Figure 3 is the overall structural schematic diagram of the mobile device of the embodiment of the present utility model;

[0036] Figure 4 is the first perspective schematic diagram of the mobile device of the embodiment of the present utility model;

[0037] Figure 5 is the second perspective schematic diagram of the mobile device of the embodiment of the present utility model;

[0038] Figure 6 is the installation position schematic diagram of the flatness detection device of the embodiment of the present utility model;

[0039] Figure 7 is another perspective schematic diagram of the flatness detection device of the embodiment of the present utility model;

[0040] Figure 8 is the installation position schematic diagram of the appearance detection device of the embodiment of the present utility model;

[0041] Figure 9 is the enlarged structural schematic diagram of the appearance detection device of the embodiment of the present utility model;

[0042] Figure 10 is the installation position schematic diagram of the grasping mechanism of the embodiment of the present utility model;

[0043] Figure 11 is a schematic enlarged structure diagram of the grasping mechanism according to an embodiment of the present utility model;

[0044] Figure 12 is a schematic installation position diagram of the code scanning mechanism according to an embodiment of the present utility model;

[0045] Figure 13 is a schematic enlarged structure diagram of the code scanning mechanism according to an embodiment of the present utility model;

[0046] Figure 14 is a schematic installation position diagram of the recycling station according to an embodiment of the present utility model;

[0047] Figure 15 is a schematic enlarged structure diagram of the recycling station according to an embodiment of the present utility model;

[0048] Figure 16 is a schematic installation position diagram of the leveling mechanism according to an embodiment of the present utility model;

[0049] Figure 17 is a schematic enlarged structure diagram of the leveling mechanism according to an embodiment of the present utility model;

[0050] Figure 18 is a schematic installation position diagram of the positioning structure according to an embodiment of the present utility model;

[0051] Figure 19 is a schematic enlarged structure diagram of the positioning structure according to an embodiment of the present utility model.

[0052] Description of reference numerals: 1, fixed frame; 2, moving device; 201, support part; 202, driving part; 203, conveying part; 204, lead screw; 205, lead screw sleeve; 3, flatness detection device; 301, processing part; 302, transmitting part; 303, collecting part; 304, support rod; 4, grasping mechanism; 401, slide rail part; 402, lifting part; 403, grasping part; 404, suction cup; 5, code scanning mechanism; 6, recycling station; 7, appearance detection device; 701, camera module; 702, shielding part; 8, leveling mechanism; 801, adjusting part; 802, flat plate part; 9, positioning mechanism; 901, fixing part; 902, positioning part. Detailed implementation manners

[0053] The following is a further detailed description of the present utility model in conjunction with Figures 1 to 19 to the present utility model.

[0054] An embodiment of the present utility model discloses a carrier board flatness detection device. Refer to Figure 1, A carrier board flatness detection device, comprising a fixed frame 1, a moving device 2 for transferring the carrier board to move backward, a flatness detection device 3 for detecting the flatness of the carrier board, a grasping mechanism 4 for classifying the carrier board, a code scanning mechanism 5 for identifying the carrier board information, a recycling station 6 for storing the carrier boards with unqualified quality inspection, an appearance detection device 7 for detecting the appearance of the carrier board, a leveling mechanism 8 for adjusting the horizontal position of the carrier board, and a positioning mechanism 9 for fixing the carrier board at a specific position. The moving device 2 is fixedly installed below the fixed frame 1. The flatness detection device 3 is fixedly installed on the fixed frame 1 and is arranged vertically above the moving device 2. The grasping mechanism 4 is installed on the fixed frame 1 and is arranged on one side of the flatness detection device 3 along the direction of the moving device 2. There are two code scanning mechanisms 5, and the two code scanning mechanisms 5 are respectively arranged on the same side of the flatness detection device 3 and the grasping mechanism 4. The recycling station 6 is fixed on the fixed frame 1 and is arranged on the side of the moving device 2. The two appearance detection devices 7 are respectively fixed vertically above and vertically below the moving device 2, and the two appearance detection devices 7 are correspondingly arranged between the flatness detection device 3 and the grasping mechanism 4. The leveling mechanism 8 is arranged in the middle of the moving device 2 at a position vertically below the flatness detection device 3. The positioning mechanism 9 is arranged on one side of the leveling mechanism 8 along the direction of the moving device 2.

[0055] Refer to Figures 1 to 5 , The moving device 2 includes two support parts 201, a driving part 202, a conveying part 203, a lead screw 204, and a lead screw sleeve 205. Among them, the two support parts 201 are two relatively arranged support plates. One of the support plates is fixed on the fixed frame 1, and the other support plate is provided with the lead screw sleeve 205. The lead screw 204 is installed in the lead screw sleeve 205. One end of the lead screw 204 is connected to the output shaft of the motor, and the motor is fixed thereon. Among them, the driving part 202 is respectively arranged outside the two support plates. The driving part 202 is a servo motor installed outside the support plate. The conveying part 203 is composed of a pulley group and a belt. The pulley group and the belt are respectively installed inside the support plate. One of the pulleys in the pulley group is connected to the output shaft of the servo motor on the same side support plate. Before use, first adjust the motor connected to the lead screw 204 to adjust the distance between the two support parts 201 of the moving device 2 to match the size of the carrier board. Then place the carrier board on the belt of the conveying part 203 and start the servo motor to drive the carrier board to move between the support plates. In this way, the width of the moving device 2 can be adjusted by the cooperation of the lead screw 204, so that the moving device 2 can adapt to different sizes of carrier boards, expanding the applicable range of this flatness detection device.

[0056] Refer to Figures 1 to 7, the flatness detection device 3 includes a processing unit 301, a transmitting unit 302, a collecting unit 303, and three support rods 304. One end of each of the three support rods 304 is respectively fixed on the fixed frame 1, and three sliders are respectively installed at the other ends of the three support rods 304. The three orientations of the processing unit 301 are respectively fixed on the three sliders. The transmitting unit 302 and the collecting unit 303 are arranged below the processing unit 301. Among them, the transmitting unit 302 emits light with a specific phase difference. After the light irradiates on the carrier plate and is modulated by the object surface, the collecting unit 303 collects the pattern after the carrier plate modulates the light, and the processing unit 301 decodes and calculates the phase thereof, so as to obtain the accurate three-dimensional information of the object surface. The phase-shifting structured light technology has extremely high precision and can detect height changes at the nanometer level, ensuring the quality of the carrier plate detection. At the same time, the non-contact measurement method of using light irradiation can avoid damaging the carrier plate during the measurement process.

[0057] Refer to Figures 1 to 9 , the appearance detection device 7 includes a camera module 701 and a shielding part 702. There are two groups of appearance detection devices 7. The camera module 701 of one group of appearance detection devices 7 is arranged vertically above the mobile device 2 and is fixedly installed on the fixed frame 1. The shielding part 702 is arranged between the camera module 701 and the mobile device 2 and is fixedly installed on the fixed frame 1 by bolts. The shielding part 702 is a flat plate structure with a through hole in the middle, and the through hole, the camera module 701, and the carrier plate are in the same vertical direction. The camera module 701 of the other group of appearance detection devices 7 is arranged vertically below the mobile device 2 and is fixedly installed on the fixed frame 1. The shielding part 702 is arranged between the camera module 701 and the mobile device 2 and is fixedly installed on the fixed frame 1 by bolts. The shielding part 702 is also a flat plate structure with a through hole in the middle, and the through hole, the camera module 701, and the carrier plate are in the same vertical direction. After the carrier plate completes the flatness detection by the flatness detection device 3, it will pass through the appearance detection device 7. The appearance detection device 7 will take pictures of the carrier plate through the shielding part 702 in both the upper and lower directions of the mobile device 2. After the shooting is completed, the taken pictures will be compared with the reference pictures for similarity. When the similarity reaches the set value, it proves that the appearance of the carrier plate meets the standard, otherwise it proves that the carrier plate does not meet the standard. Then, the appearance information of the photographed carrier plate will be recorded. The shielding part 702 can shield the areas other than the carrier plate, so that the camera module 701 can only photograph the carrier plate area, improving the recognition speed during appearance detection. For the appearance detection devices 7 above and below the carrier plate, simultaneously performing appearance detection on the two surfaces of the carrier plate can greatly save time and improve the detection efficiency.

[0058] Refer to Figures 1 to 11, the grasping mechanism 4 includes a slide rail part 401, a lifting part 402, a grasping part 403 and suction cups 404. The slide rail part 401 includes a driving motor, a linear lead screw 204 and a slider. The linear lead screw 204 is fixed on the fixed frame 1, the driving motor is installed at one end of the linear lead screw 204, the linear lead screw 204 is connected to the output shaft of the driving motor, and the slider is slidably installed on the linear lead screw 204. When the motor drives the lead screw 204 to rotate, the slider can move horizontally on the linear lead screw 204. The lifting part 402 includes a driving motor, a linear lead screw 204 and a slider. The linear lead screw 204 is fixed on the slider of the slide rail part 401, the driving motor is installed at one end of the linear lead screw 204, the linear lead screw 204 is connected to the output shaft of the driving motor, and the slider is slidably installed on the linear lead screw 204. When the motor drives the lead screw 204 to rotate, the slider can move vertically on the linear lead screw 204. The grasping part 403 is a platform installed on the slider of the lifting part 402, and the suction cups 404 are arranged in a matrix below the grasping part 403. In use, the slider of the slide rail part 401 moves to directly above the carrier plate under the action of the driving motor, and then the slider of the lifting part 402 moves downward under the action of the driving device, so that the suction cups 404 below the grasping part 403 are closely attached to the upper surface of the carrier plate. The suction cups 404 suck and hold the carrier plate under the action of an external cylinder. Subsequently, the lifting part 402 drives the carrier plate to rise, and the slide rail part 401 moves horizontally to take the carrier plate away from the area of the moving device 2. The carrier plates with different qualities can be moved to different positions through the grasping mechanism 4, which is convenient for classifying the carrier plates. At the same time, using the suction cups 404 to fix the carrier plate can avoid scratching the carrier plate.

[0059] Refer to Figures 1 to 13 , the code scanning mechanism 5 includes a connecting arm and a code scanning lens. One end of the connecting arm is fixed on the fixed frame 1, and the code scanning lens is fixed on the other end of the connecting arm. There are two code scanning mechanisms 5, and the two scanning mechanisms are respectively arranged on the same side of the moving device 2 and the grasping mechanism 4. When the carrier plate moves on the moving device 2, the information of the carrier plate is first identified and recorded by the first code scanning lens. Subsequently, the flatness and appearance of the carrier plate are detected. When the flatness and appearance are detected, the detection information of the carrier plate will be recorded together with the carrier plate information. Then the carrier plate will pass through the second code scanning lens, which identifies the current carrier plate and reads the flatness and appearance detection information of the carrier plate, and then transmits the information to the grasping mechanism 4. The grasping mechanism 4 will move the carrier plate to different places according to the flatness information and appearance detection information of the carrier plate, which is convenient for classifying the carrier plates.

[0060] Refer to Figures 1 to 15, the recycling station 6 includes a first recycling area and a second recycling area. The first recycling area and the second recycling area are respectively composed of two platforms fixedly installed on the fixed frame 1. Among them, the first recycling area is used to place the carrier plates with unqualified flatness, and the second recycling area is used to place the carrier plates with unqualified appearance. When the flatness of the carrier plate is unqualified, it needs to be recycled uniformly. The carrier plates with qualified flatness but unqualified appearance will be repaired uniformly. During use, the grasping mechanism 4 sucks up the carrier plates with unqualified flatness through the suction cup 404 according to the information transmitted by the code scanning mechanism 5, and moves to directly above the first recycling area. Then the suction cup 404 releases to place the carrier plate in the first recycling area; sucks up the carrier plates with unqualified appearance through the suction cup 404, moves to directly above the second recycling area, and then the suction cup 404 releases to place the carrier plate in the second recycling area. The carrier plates that pass both the flatness and appearance inspections will continue to move backward on the moving device 2, completing the classification of the carrier plates in sequence, facilitating the subsequent centralized repair or centralized treatment of the recycled carrier plates, and effectively reducing the scrap rate of the carrier plates.

[0061] Refer to Figures 1 to 17 , the leveling mechanism 8 includes an adjusting part 801 and a flat plate part 802. The adjusting part 801 is a cylinder connected to an external air source. The cylinder body is fixedly installed on the fixed frame 1 and is arranged vertically below the flatness detection device 3, and the cylinder body is arranged vertically between the two supporting parts 201 of the moving device 2. A hinge is installed at the end of the cylinder piston rod, and the flat plate part 802 is installed at the other end of the hinge. Before use, first adjust the hinge between the flat plate part 802 and the adjusting part 801 to make the flat plate part 802 face the flatness detection device 3 directly. When the carrier plate moves on the moving device 2 and moves to directly below the flatness detection device 3, the cylinder of the adjusting part 801 works, and the piston rod rises to push the flat plate part 802 to lift the carrier plate, making the carrier plate face the scanning part for scanning, improving the accuracy of the flatness detection device 3 for scanning the carrier plate.

[0062] Refer to Figures 1 to 19 , the positioning mechanism 9 includes a fixing part 901 and a positioning part 902. The fixing part 901 is a cylinder connected to an external air source. The cylinder body of the cylinder is fixed on the fixed frame 1, and the position of the cylinder body is arranged between the two supporting parts 201 and on one side of the leveling mechanism 8. The positioning part 902 is installed on the piston rod of the cylinder, and the positioning part 902 is an L-shaped baffle. When the carrier plate moves on the moving device 2, the positioning part 902 of the positioning mechanism 9 will rise from the fixing part 901 to block the carrier plate on the moving device 2. Then the leveling mechanism 8 on one side of the positioning mechanism 9 will lift the carrier plate for scanning. The setting of the positioning mechanism 9 can block the carrier plate on the moving device 2, facilitating the subsequent leveling mechanism 8 to level the carrier plate.

[0063] The specific working principle of this embodiment is as follows: Before use, adjust the width between the two supporting parts 201 of the moving device 2 so that it can adapt to the size of the carrier board. Adjust the support rod 304 of the flatness detection device 3 so that the emitting part 302 and the collecting part 303 of the flatness detection device 3 are facing the moving device 2. Then place the carrier board on the conveying part 203 of the moving device 2, and drive the carrier board to move backward on the conveying part 203 through the transmission part. When the carrier board moves on the moving device 2, it will first pass through the first code scanning mechanism 5. The first code scanning mechanism 5 identifies the information of the moving carrier board. When the carrier board continues to move backward and reaches below the flatness detection device 3, the positioning part 902 of the positioning mechanism 9 rises to block the carrier board at the current position. Then the flat plate part 802 of the leveling mechanism 8 rises to lift the carrier board. The flatness detection device 3 scans and records the carrier board. After the scanning is completed, the flat plate part 802 of the leveling mechanism 8 descends to place the carrier board back on the moving device 2, and the positioning part 902 of the positioning mechanism 9 drops. The carrier board continues to move on the moving device 2. Subsequently, the carrier board passes through the appearance detection device 7. The appearance detection devices 7 above and below respectively take pictures and detect the upper and lower surfaces of the carrier board and record them. After the detection is completed, the carrier board moves backward and passes through the second code scanning mechanism 5. The second code scanning mechanism 5 reads the information of the carrier board and sends the read structure to the grasping structure. The grasping structure moves the carrier board with unqualified flat surface according to the information of the carrier board. The moving end of the slide rail part 401 moves to directly above the carrier board, the lifting part 402 descends, and the suction cup 404 of the grasping part 403 sucks the carrier board tightly. Then the lifting part 402 rises, the moving end of the slide rail part 401 moves to directly above the first recovery area, the lifting part 402 descends, and the suction cup 404 releases to place the carrier board in the first recovery area. Use the same steps to move the carrier board with unqualified appearance to the second recovery area. The carrier boards with qualified flatness and appearance will not be grasped by the moving device 2 and continue to move backward on the moving device 2.

[0064] In this embodiment, the flatness detection device 3 is used to scan the carrier board, and the carrier board on the moving device 2 is detected and analyzed through the optical flatness measurement technology. While ensuring the measurement accuracy, the non-contact measurement method of light irradiation can avoid damaging the carrier board during the measurement process; by installing two appearance detection devices 7 above and below the moving device 2, the upper and lower surfaces of the carrier board can be simultaneously detected for appearance, shortening the time used for appearance detection and improving the detection efficiency; the grasping structure 4 can effectively grasp and move the carrier board without scratching the surface through the design of the slide rail, the lifting part 402, the grasping part 403 and the suction cup 404; combined with the action of the grasping structure 4, the code scanning mechanism 5 can classify and store the carrier boards according to the flatness results, improving the detection and classification efficiency; the positioning mechanism 9 and the leveling mechanism 8 ensure that the carrier board is in an accurate position and flat state during scanning, enhancing the accuracy and reliability of the scanning results and reducing the errors caused by the position deviation of the carrier board.

[0065] The above are all preferred embodiments of the present utility model, and do not limit the protection scope of the present utility model accordingly. Therefore, all equivalent changes made according to the structure, shape and principle of the present utility model shall be covered within the protection scope of the present utility model.

Claims

1. A carrier board flatness detection device, characterized in that: It comprises a fixed frame (1), a moving device (2) and a flatness detection device (3), The moving device (2) is installed below the fixed frame (1), and comprises a supporting portion (201), a driving portion (202) and a transmitting portion (203), wherein the two supporting portions (201) are fixedly installed on the fixed frame (1), the driving portion (202) is fixedly installed on one of the supporting portions (201), the transmitting portion (203) is rotatably installed between the two supporting portions (201), and the transmitting portion (203) is transmission-connected to the driving portion (202); The flatness detection device (3) is installed above the fixed frame (1), and comprises a processing unit (301), a transmitting unit (302) and a collecting unit (303); the processing unit (301) is installed on the fixed frame (1); the processing unit (301) is arranged vertically above the conveying unit (203); the transmitting unit (302) and the collecting unit (303) are arranged below the processing unit (301); the transmitting unit (302) and the collecting unit (303) are arranged along the direction of the conveying unit (203); and the transmitting unit (302) and the collecting unit (303) are oriented in the direction of the conveying unit (203).

2. The carrier flatness detection device according to claim 1, characterized in that: The fixed frame (1) is also provided with a gripping mechanism (4), the gripping mechanism (4) comprising a slide rail portion (401), a lifting portion (402) and a gripping portion (403), the slide rail portion (401) being fixedly mounted on the fixed frame (1), the slide rail portion (401) being arranged above the moving device (2), the lifting portion (402) being slidably mounted on the slide rail portion (401), the gripping portion (403) being slidably mounted on the lifting portion (402), and a plurality of groups of suction cups (404) being arranged at the bottom of the gripping portion (403).

3. A carrier board flatness detection device according to claim 2, characterized in that: Two code scanning mechanisms (5) are also arranged vertically above the moving device (2). The two code scanning mechanisms (5) are respectively fixedly mounted on the fixed frame (1) along the direction of the moving device (2). The two code scanning mechanisms (5) are respectively arranged upstream of the flatness detection device (3) and the gripping mechanism (4) along the moving direction of the moving device (2).

4. The device for detecting the flatness of a carrier plate according to claim 3, characterized in that: A recovery station (6) is also installed on the fixed frame (1), and the recovery station (6) is arranged on one side of the moving device (2). The recovery station (6) is arranged vertically below the slide rail portion (401) of the gripping mechanism (4).

5. A carrier board flatness detection device according to any one of claims 1 to 4, characterized in that: An appearance detection device (7) is also provided on the fixed frame (1). The appearance detection device (7) is provided behind the flatness detection device (3) along the direction of the movable device (2). The appearance detection device (7) comprises a camera module (701) and a shielding portion (702). The camera module (701) is mounted on the fixed frame (1). The camera module (701) is provided vertically above the movable device (2). The shielding portion (702) is provided between the camera module (701) and the movable device (2).

6. The device for detecting the flatness of a carrier plate according to claim 5, characterized in that: The appearance detection device (7) is provided in two groups, and the two groups of the appearance detection device (7) are respectively provided above and below the mobile device (2), and the camera modules (701) of the two groups of the appearance detection device (7) are respectively facing the mobile device (2).

7. A carrier board flatness detection device according to any one of claims 1 to 4, characterized in that: Three support rods (304) are also slidably arranged on the processing part (301), one end of the support rod (304) is slidably mounted on the processing part (301), and the other end of the support rod (304) is fixedly connected to the fixed frame (1), and the three support rods (304) are respectively arranged at three positions of the processing part (301).

8. A carrier board flatness detection device according to any one of claims 1 to 4, characterized in that: The fixed frame (1) is also provided with a leveling mechanism (8), the leveling mechanism (8) being arranged in front of the flatness detection device (3), the leveling mechanism (8) comprising an adjusting portion (801) and a flat plate portion (802), the adjusting portion (801) being mounted on the fixed frame (1), the adjusting portion (801) being arranged between the two supporting portions (201), and the flat plate portion (802) being hinged to the top of the adjusting portion (801).

9. A carrier board flatness detection device according to any one of claims 1 to 4, characterized in that: A positioning mechanism (9) is also provided on the fixed frame (1), and the positioning mechanism (9) is provided vertically below the flatness detection device (3). The positioning mechanism (9) comprises a fixing portion (901) and a positioning portion (902), and the fixing portion (901) is installed between the two supporting portions (201) in a direction perpendicular to the moving device (2), and the positioning portion (902) is slidably installed on the fixing portion (901).

10. A carrier board flatness detection device according to any one of claims 1 to 4, characterized in that: A screw sleeve (205) is also provided on the two support parts (201) of the moving device (2), and an adjusting screw (204) is also provided between the two support parts (201); the adjusting screw (204) is arranged in coordination with the two screw sleeves (205).

Images