Chip six-surface AOI device

Abstract

The utility model discloses a chip six-side AOI device, and relates to the chip detection field, the chip six-side AOI device comprises a back side detection structure, a left detection structure, a right detection structure, a bottom detection structure, a top detection structure and a front side detection structure, the back side detection structure comprises a bottom plate, a back side camera and a back side lens installation block, and the upper part of the bottom plate is provided with a back side screw rod module; a back rotating motor providing power for the back lead screw module is fixedly installed on the rear portion of the back lead screw module, an output shaft of the back rotating motor is fixedly connected with a lead screw of the back lead screw module, and the back camera, the back lens, the annular light source and the coaxial prism are all installed on a moving sliding table of the back lead screw module. And automatic focusing and image taking can be carried out on products of different specifications. According to the chip six-face AOI device, six-face AOI can detect six faces of a product at the same time, dead-angle-free detection coverage is achieved, and the risk of missing detection is reduced.

Description

Technical Field

[0001] The utility model relates to the field of chip detection, in particular to a chip six-sided AOI device. Background Art

[0002] In the chip manufacturing process, various quality defects will occur. Manual inspection is inefficient and the accuracy cannot meet the requirements. Using a device based on a machine vision system, the six sides of the product (top, bottom, left, right, front and back) can be comprehensively and accurately inspected. It can efficiently and accurately identify and mark various defects on the product surface, such as foreign matter, scratches, broken edges, bubbles, defects, etc., which can greatly improve the product yield.

[0003] The prior art has the following defects:

[0004] 1. Incomplete detection range: The detection range is usually limited to the front and back sides, and the four sides cannot be detected, which will cause defects in certain areas or angles to be missed, resulting in an increased risk of missed defects;

[0005] 2. Limited detection accuracy: For defects with small size or complex shape, manual operation cannot fully display all their details, affecting the accuracy and reliability of the results;

[0006] 3. Decreased detection efficiency: The detection process is time-consuming and labor-intensive. During the detection, personnel inspect the chips at different positions on a wafer in turn, which has high operational requirements and low detection efficiency when there are many chips. At the same time, manual detection is affected by human factors, which will lead to unstable detection results. Utility Model Content

[0007] The main purpose of the utility model is to provide a chip six-sided AOI device, which can effectively solve the technical problems in the background technology.

[0008] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0009] A six-sided AOI device for a chip, comprising a back detection structure, a left detection structure, a right detection structure, a bottom detection structure, a top detection structure and a front detection structure. The back detection structure includes a bottom plate, a back camera, and a back lens mounting block. A back screw module is mounted on the upper part of the bottom plate, and a back rotation motor providing power for the back screw module is fixedly mounted at the rear of the back screw module. The output shaft of the back rotation motor is fixedly connected to the screw of the back screw module. The back camera, the back lens, a ring light source and a coaxial prism are all mounted on the moving slide of the back screw module. The moving slide of the back screw module is fixedly mounted with the back lens through a first back lens mounting plate and a second back lens mounting plate. A coaxial prism mounting plate is fixedly mounted on the upper part of the coaxial prism, and a ring light source mounting block is fixedly mounted on the upper part of the coaxial prism mounting plate. The ring light source is fixedly mounted on the front part of the ring light source mounting block.

[0010] As a further solution of the present utility model, the left detection structure includes a left camera, a first left lens mounting plate, a second left lens mounting plate, a left lens, a left turning prism, a left turning prism mounting plate, a left screw module, a left lens mounting block, and a left rotation motor. The left camera and the left lens are connected and mounted on the moving slide of the left screw module for automatic focusing. The left turning prism is mounted on the left turning prism mounting plate, and the left turning prism mounting plate is mounted on the bottom plate. There is a slot on the bottom plate to limit that the right turning prism mounting plate can only move back and forth and cannot rotate.

[0011] As a further solution of the present utility model, the right detection structure includes a right camera, a first right lens mounting plate, a first right lens, a second right lens mounting plate, a right turning prism mounting plate, a right turning prism, a second right lens, a right screw module, a right lens mounting block, and a right rotation motor. The right camera and the first right lens are mounted on the moving slide of the right screw module for automatic focusing. The right turning prism is mounted on the right turning prism mounting plate, and the right turning prism mounting plate is mounted on the bottom plate. There is a slot on the bottom plate to limit that the right turning prism mounting plate can only move back and forth and cannot rotate.

[0012] As a further solution of the present utility model, the bottom detection structure includes a bottom camera, a first bottom lens mounting plate, a second bottom lens mounting plate, a bottom lens, a bottom turning prism, a bottom turning prism mounting plate, a screw module base, a base, a bottom lens mounting block, a bottom screw module, and a bottom rotation motor. The bottom camera and the bottom lens are mounted on the moving slide of the bottom screw module for automatic focusing. The bottom turning prism is mounted on the bottom turning prism mounting plate, and the bottom turning prism mounting plate is mounted on the screw module base. There is a slot on the screw module base to limit that the bottom turning prism mounting plate can only move back and forth and cannot rotate.

[0013] As a further solution of the present utility model, the top detection structure includes a top camera, a lead screw module mounting plate, a top lead screw module, a top lens mounting block, a top lens, a top turning prism mounting plate, a top turning prism, a first support plate, a first support seat, a top large plate, a second support seat, a first top lens mounting plate, a second top lens mounting plate, a second support plate, and a first mounting plate. The top camera and the top lens are mounted on the moving slide of the top lead screw module and can perform autofocus. The top turning prism is mounted on the top turning prism mounting plate, and the top turning prism mounting plate is mounted on the lead screw module mounting plate. There is a card slot on the lead screw module mounting plate to limit that the top turning prism mounting plate can only translate forward and backward and cannot rotate.

[0014] As a further solution of the present utility model, the front detection structure includes a front camera, a first front lens mounting plate, a second front lens mounting plate, a front lens, a front prism mounting plate, a front turning prism, a front large plate, an X-direction adjusting rod, an X-direction adjusting fixing block, a vertical plate, a Y-direction moving block, a Y-direction adjusting fixing block, a Y-direction adjusting rod, a front rotating motor, and a front lead screw module. The front camera and the front lens are mounted on the moving slide of the front lead screw module and can perform autofocus. The front turning prism is mounted on the front turning prism mounting plate, and the front turning prism mounting plate is mounted on the lead screw module mounting plate. The front turning prism can perform 90-degree light conversion. The Y-direction moving block is mounted on the vertical plate, and the vertical plate is connected through the X-direction adjusting rod and the X-direction adjusting fixing block.

[0015] The beneficial effects of the present utility model are as follows:

[0016] 1. Comprehensive detection ability: The six-sided AOI can detect six faces of the product simultaneously, achieving a non-blind-spot detection coverage and reducing the risk of missed detection.

[0017] 2. Improved detection accuracy: High-resolution industrial cameras are used to obtain high-definition images of the product, and combined with the independently developed processing software, precise image processing and analysis can be carried out to identify tiny defects.

[0018] 3. Improved product yield: The six-sided AOI can monitor the situation of the swing arm sucking and placing products in real time during the production process. Once a defect is found, it can immediately alarm or directly remove the NG products, preventing defective products from flowing into the next process and improving the yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is the rear view of the six-sided AOI layout;

[0020] Figure 2 It is the isometric view of the overall structure of the six-sided AOI;

[0021] Figure 3 It is the layout diagram of the rear detection CCD;

[0022] Figure 4 It is the layout diagram of the left - hand side detection CCD;

[0023] Figure 5 It is the layout diagram of the right - hand side detection CCD;

[0024] Figure 6 It is the layout diagram of the bottom - side detection CCD;

[0025] Figure 7 It is the layout diagram of the top - side detection CCD;

[0026] Figure 8 It is the layout diagram of the front - side detection CCD.

[0027] In the figure: 1. Rear - side detection structure; 1 - 1. Rear - side camera; 1 - 2. First rear - side lens mounting plate; 1 - 3. Rear - side lens; 1 - 4. Second rear - side lens mounting plate; 1 - 5. Ring - shaped light source mounting block; 1 - 6. Ring - shaped light source; 1 - 7. Bottom plate; 1 - 8. Coaxial prism; 1 - 9. Coaxial prism mounting plate; 1 - 10. Rear - side lens mounting block; 1 - 11. Rear - side lead - screw module; 1 - 12. Rear - side rotating motor;

[0028] 2. Left - hand side detection structure; 2 - 1. Left - hand side camera; 2 - 2. First left - hand side lens mounting plate; 2 - 3. Second left - hand side lens mounting plate; 2 - 4. Left - hand side lens; 2 - 5. Left - hand side turning prism; 2 - 6. Left - hand side turning prism mounting plate; 2 - 7. Left - hand side lead - screw module; 2 - 8. Left - hand side lens mounting block; 2 - 9. Left - hand side rotating motor;

[0029] 3. Right - hand side detection structure; 3 - 1. Right - hand side camera; 3 - 2. First right - hand side lens mounting plate; 3 - 3. First right - hand side lens; 3 - 4. Second right - hand side lens mounting plate; 3 - 5. Right - hand side turning prism mounting plate; 3 - 6. Right - hand side turning prism; 3 - 7. Second right - hand side lens; 3 - 8. Right - hand side lead - screw module; 3 - 9. Right - hand side lens mounting block; 3 - 10. Right - hand side rotating motor;

[0030] 4. Bottom - side detection structure; 4 - 1. Bottom - side camera; 4 - 2. First bottom - side lens mounting plate; 4 - 3. Second bottom - side lens mounting plate; 4 - 4. Bottom - side lens; 4 - 5. Bottom - side turning prism; 4 - 6. Bottom - side turning prism mounting plate; 4 - 7. Lead - screw module base; 4 - 8. Base; 4 - 9. Bottom - side lens mounting block; 4 - 10. Bottom - side lead - screw module; 4 - 11. Bottom - side rotating motor;

[0031] 5. Top detection structure; 5-1. Top camera; 5-2. Screw module mounting plate; 5-3. Top screw module; 5-4. Top lens mounting block; 5-5. Top lens; 5-6. Top corner prism mounting plate; 5-7. Top corner prism; 5-8. Support plate 1; 5-9. Support base 1; 5-10. Top large plate; 5-11. Support base 2; 5-12. Top lens mounting plate 1; 5-13. Top lens mounting plate 2; 5-14. Support plate 2; 5-15. Mounting plate 1

[0032] 6. Front detection structure; 6-1. Front camera; 6-2. Front lens mounting plate 1; 6-3. Front lens mounting plate 2; 6-4. Front lens; 6-5. Front prism mounting plate; 6-6. Front corner prism; 6-7. Front large plate; 6-8. X-direction adjustment rod; 6-9. X-direction adjustment fixing block; 6-10. Vertical plate; 6-11. Y-direction moving block; 6-12. Y-direction adjustment fixing block; 6-13. Y-direction adjustment rod; 6-14. Front rotation motor; 6-15. Front screw module; 7. Manipulator Specific embodiments

[0033] In order to make the technical means, creative features, achieved purposes and effects of the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0034] As Figures 1 - 8 shown, a six-sided AOI device for chips includes a back detection structure 1, a left detection structure 2, a right detection structure 3, a bottom detection structure 4, a top detection structure 5 and a front detection structure 6. The back detection structure 1 includes a bottom plate 1-7, a back camera 1-1, and a back lens mounting block 1-10. A back screw module 1-11 is installed on the upper part of the bottom plate 1-7, and a back rotation motor 1-12 that provides power for the back screw module 1-11 is fixedly installed at the rear of the back screw module 1-11. The output shaft of the back rotation motor 1-12 is fixedly connected to the screw of the back screw module 1-11. The back camera 1-1, the back lens 1-3, the ring light source 1-6 and the coaxial prism 1-8 are all installed on the moving slide of the back screw module 1-11, and the moving slide of the back screw module 1-11 and the back lens 1-3 are fixedly installed through a back lens mounting plate 1-2 and a back lens mounting plate 2-4. A coaxial prism mounting plate 1-9 is fixedly installed on the upper part of the coaxial prism 1-8, and a ring light source mounting block 1-5 is fixedly installed on the upper part of the coaxial prism mounting plate 1-9. The ring light source 1-6 is fixedly installed in the front of the ring light source mounting block 1-5.

[0035] The left detection structure 2 includes a left camera 2-1, a first left lens mounting plate 2-2, a second left lens mounting plate 2-3, a left lens 2-4, a left turning prism 2-5, a left turning prism mounting plate 2-6, a left lead screw module 2-7, a left lens mounting block 2-8, and a left rotating motor 2-9. The left camera 2-1 is connected to the left lens 2-4 and is installed on the moving slide of the left lead screw module 2-7. The left turning prism 2-5 is installed on the left turning prism mounting plate 2-6, and the left turning prism mounting plate 2-6 is installed on the bottom plate 1-7. There are card slots on the bottom plate 1-7 to limit that the right turning prism mounting plate 3-5 can only translate forward and backward and cannot rotate.

[0036] The right detection structure 3 includes a right camera 3-1, a first right lens mounting plate 3-2, a first right lens 3-3, a second right lens mounting plate 3-4, a right turning prism mounting plate 3-5, a right turning prism 3-6, a second right lens 3-7, a right lead screw module 3-8, a right lens mounting block 3-9, and a right rotating motor 3-10. The right camera 3-1 and the first right lens 3-3 are installed on the moving slide of the right lead screw module 3-8. The right turning prism 3-6 is installed on the right turning prism mounting plate 3-5, and the right turning prism mounting plate 3-5 is installed on the bottom plate 1-7. There are card slots on the bottom plate 1-7 to limit that the right turning prism mounting plate 3-5 can only translate forward and backward and cannot rotate.

[0037] The bottom detection structure 4 includes a bottom camera 4-1, a first bottom lens mounting plate 4-2, a second bottom lens mounting plate 4-3, a bottom lens 4-4, a bottom turning prism 4-5, a bottom turning prism mounting plate 4-6, a lead screw module base 4-7, a base 4-8, a bottom lens mounting block 4-9, a bottom lead screw module 4-10, and a bottom rotating motor 4-11. The bottom camera 4-1 and the bottom lens 4-4 are installed on the moving slide of the bottom lead screw module 4-10. The bottom turning prism 4-5 is installed on the bottom turning prism mounting plate 4-6, and the bottom turning prism mounting plate 4-6 is installed on the lead screw module base 4-7. There are card slots on the lead screw module base 4-7 to limit that the bottom turning prism mounting plate 4-6 can only translate forward and backward and cannot rotate.

[0038] The top detection structure 5 includes a top camera 5-1, a lead screw module mounting plate 5-2, a top lead screw module 5-3, a top lens mounting block 5-4, a top lens 5-5, a top turning prism mounting plate 5-6, a top turning prism 5-7, a first support plate 5-8, a first support seat 5-9, a top large plate 5-10, a second support seat 5-11, a first top lens mounting plate 5-12, a second top lens mounting plate 5-13, a second support plate 5-14, and a first mounting plate 5-15. The top camera 5-1 and the top lens 5-5 are installed on the moving slide of the top lead screw module 5-3. The top turning prism 5-7 is installed on the top turning prism mounting plate 5-6, and the top turning prism mounting plate 5-6 is installed on the lead screw module mounting plate 5-2. There are card slots on the lead screw module mounting plate 5-2 to limit that the top turning prism mounting plate 5-6 can only translate forward and backward and cannot rotate.

[0039] The front detection structure 6 includes a front camera 6-1, a first front lens mounting plate 6-2, a second front lens mounting plate 6-3, a front lens 6-4, a front prism mounting plate 6-5, a front corner prism 6-6, a front large plate 6-7, an X-direction adjustment rod 6-8, an X-direction adjustment fixing block 6-9, a vertical plate 6-10, a Y-direction moving block 6-11, a Y-direction adjustment fixing block 6-12, a Y-direction adjustment rod 6-13, a front rotation motor 6-14, and a front lead screw module 6-15. The front camera 6-1 and the front lens 6-4 are mounted on the moving slide of the front lead screw module 6-15. The front corner prism 6-6 is mounted on the corner front prism mounting plate 6-5, and the corner front prism mounting plate 6-5 is mounted on the lead screw module mounting plate 5-2. The front corner prism 6-6 can perform a 90-degree light conversion. The Y-direction moving block 6-11 is mounted on the vertical plate 6-10, and the vertical plate 6-10 is connected by the X-direction adjustment rod 6-8 and the X-direction adjustment fixing block 6-9.

[0040] It should be noted that the present utility model is a six-sided AOI device for chips. When in use:

[0041] When the manipulator 7 picks up the chip to the detection position, the back, left, right, bottom, and top cameras take pictures in sequence. After the picture taking is completed, the manipulator 7 continues to rotate and place the chip. After the placement is completed and the swing arm is moved away, the front camera 6-1 takes pictures. The software identifies and marks the defects on the six surfaces according to the pictures taken.

[0042] The back camera 1-1, the back lens 1-3, the annular light source 1-6, and the coaxial prism 1-8 are mounted on the moving slide of the back lead screw module 1-11 and can perform autofocus. The back can be programmed to switch between annular light and coaxial light, and the lighting type can be selected according to the type of defect.

[0043] The left camera 2-1 is connected to the left lens 2-4 and is mounted on the moving slide of the left lead screw module 2-7 and can perform autofocus. The left corner prism 2-5 is mounted on the left corner prism mounting plate 2-6, and the left corner prism mounting plate 2-6 is mounted on the bottom plate 1-7. There is a slot on the bottom plate 1-7 to limit that the left corner prism mounting plate 2-6 can only be translated forward and backward and cannot rotate. The left corner prism 2-5 can perform a 90-degree light conversion and can image and take pictures of the left side of the product.

[0044] The right camera 3-1 and the right lens 3-3 are mounted on the moving slide of the right lead screw module 3-8 and can perform autofocus. The right corner prism 3-6 is mounted on the right corner prism mounting plate 3-6, and the right corner prism mounting plate 3-6 is mounted on the bottom plate 1-7. There is a slot on the bottom plate 1-7 to limit that the right corner prism mounting plate 3-5 can only be translated forward and backward and cannot rotate. The right corner prism 3-6 can perform a 90-degree light conversion and can image and take pictures of the right side of the product.

[0045] The bottom camera 4-1 and the bottom lens 4-4 are installed on the moving slide of the bottom lead screw module 4-10 and can perform autofocus; the bottom turning prism 4-5 is installed on the bottom turning prism mounting plate 4-6, and the bottom turning prism mounting plate 4-6 is installed on the lead screw module base 4-7. There are slots on the lead screw module base 4-7 to limit that the bottom turning prism mounting plate 4-6 can only translate forward and backward and cannot rotate; the bottom turning prism 4-5 can perform 90-degree light conversion and can image and capture pictures of the bottom of the product.

[0046] The top camera 5-1 and the top lens 5-5 are installed on the moving slide of the top lead screw module 5-3 and can perform autofocus; the top turning prism 5-7 is installed on the top turning prism mounting plate 5-6, and the top turning prism mounting plate 5-6 is installed on the top lead screw module mounting plate 5-2. There are slots on the top lead screw module mounting plate 5-2 to limit that the top turning prism mounting plate 5-6 can only translate forward and backward and cannot rotate; the top turning prism 5-7 can perform 90-degree light conversion and can image and capture pictures of the top of the product.

[0047] The front camera 6-1 and the front lens 6-2 are installed on the moving slide of the front lead screw module 6-15 and can perform autofocus; the front turning prism 6-6 is installed on the front turning prism mounting plate 6-5, and the front turning prism mounting plate 6-5 is installed on the front lead screw module mounting plate 5-2. The front turning prism 6-6 can perform 90-degree light conversion and can image and capture pictures of the top of the product; the Y-direction moving block 6-11 is installed on the vertical plate 6-10. Through the Y-direction fixing and adjusting block 6-12 and the Y-direction adjusting rod 6-13, the central position of the overall image capture can be conveniently adjusted; the vertical plate 6-10 can be conveniently adjusted in the X-direction position of the overall imaging through the X-direction adjusting rod 6-8 and the X-direction adjusting and fixing block.

[0048] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed.

Claims

1. A chip six-sided AOI device, comprising a back detection structure (1), a left detection structure (2), a right detection structure (3), a bottom detection structure (4), a top detection structure (5) and a front detection structure (6), characterized in that: The back detection structure (1) comprises a base plate (1-7), a back camera (1-1), and a back lens mounting block (1-10); a back screw module (1-11) is mounted on the upper part of the base plate (1-7); a back rotating motor (1-12) for providing power to the back screw module (1-11) is fixedly mounted on the rear part of the back screw module (1-11); an output shaft of the back rotating motor (1-12) is fixedly connected to the screw of the back screw module (1-11); and the back camera (1-1), the back lens (1-3), the annular light source (1-6) and the back lens mounting block (1-10) are mounted on the back of the base plate (1-7); The coaxial prisms (1-8) are all mounted on a moving slide of a back screw module (1-11), and the moving slide of the back screw module (1-11) and the back lens (1-3) are fixedly mounted via a back lens mounting plate 1 (1-2) and a back lens mounting plate 2 (1-4), a coaxial prism mounting plate (1-9) is fixedly mounted on the upper part of the coaxial prism (1-8), and an annular light source mounting block (1-5) is fixedly mounted on the upper part of the coaxial prism mounting plate (1-9), and the annular light source (1-6) is fixedly mounted on the front part of the annular light source mounting block (1-5).

2. The chip six-sided AOI device according to claim 1, characterized in that: The left detection structure (2) comprises a left camera (2-1), a left lens mounting plate 1 (2-2), a left lens mounting plate 2 (2-3), a left lens (2-4), a left corner prism (2-5), a left corner prism mounting plate (2-6), a left screw module (2-7), a left lens mounting block (2-8), and a left rotating motor (2-9); the left camera (2-1) and the left lens (2-4) are connected and mounted on a moving slide of the left screw module (2-7); the left corner prism (2-5) is mounted on the left corner prism mounting plate (2-6); the left corner prism mounting plate (2-6) is mounted on the bottom plate (1-7); and a card slot is provided on the bottom plate (1-7) to limit the right corner prism mounting plate (3-5) to only be able to translate forward and backward but not to rotate.

3. The chip six-sided AOI device according to claim 1, characterized in that: The right detection structure (3) comprises a right camera (3-1), a right lens mounting plate 1 (3-2), a right lens 1 (3-3), a right lens mounting plate 2 (3-4), a right corner prism mounting plate (3-5), a right corner prism (3-6), a right lens 2 (3-7), a right screw module (3-8), a right lens mounting block (3-9), and a right rotating motor (3-10); the right camera (3-1) and the right lens 1 (3-3) are mounted on a moving slide of the right screw module (3-8); the right corner prism (3-6) is mounted on the right corner prism mounting plate (3-5); the right corner prism mounting plate (3-5) is mounted on a bottom plate (1-7); and a card slot is provided on the bottom plate (1-7) to limit the right corner prism mounting plate (3-5) to only be able to translate forward and backward but not to rotate.

4. The chip six-sided AOI device according to claim 1, characterized in that: The bottom detection structure (4) comprises a bottom camera (4-1), a bottom lens mounting plate 1 (4-2), a bottom lens mounting plate 2 (4-3), a bottom lens (4-4), a bottom corner prism (4-5), a bottom corner prism mounting plate (4-6), a screw module base (4-7), a base (4-8), a bottom lens mounting block (4-9), a bottom screw module (4-10), and a bottom rotating motor (4-11); the bottom camera (4-1) and the bottom lens (4-4) are mounted on a moving slide of the bottom screw module (4-10); the bottom corner prism (4-5) is mounted on the bottom corner prism mounting plate (4-6); the bottom corner prism mounting plate (4-6) is mounted on the screw module base (4-7); and a card slot is provided on the screw module base (4-7) to limit the bottom corner prism mounting plate (4-6) to only be able to translate forward and backward but not to rotate.

5. The chip six-sided AOI device according to claim 1, characterized in that: The top detection structure (5) comprises a top camera (5-1), a screw module mounting plate (5-2), a top screw module (5-3), a top lens mounting block (5-4), a top lens (5-5), a top corner prism mounting plate (5-6), a top corner prism (5-7), a support plate 1 (5-8), a support seat 1 (5-9), a top large plate (5-10), a support seat 2 (5-11), a top lens mounting plate 1 (5-12), and a top lens mounting plate 2 (5-13). , a supporting plate 2 (5-14), a mounting plate 1 (5-15), a top camera (5-1) and a top lens (5-5) are mounted on a moving slide of a top screw rod module (5-3), a top corner prism (5-7) is mounted on a top corner prism mounting plate (5-6), and a top corner prism mounting plate (5-6) is mounted on a screw rod module mounting plate (5-2), and a slot is provided on the screw rod module mounting plate (5-2) to limit the top corner prism mounting plate (5-6) to only be able to translate forward and backward but not to rotate.

6. The chip six-sided AOI device according to claim 1, characterized in that: The front detection structure (6) comprises a front camera (6-1), a front lens mounting plate 1 (6-2), a front lens mounting plate 2 (6-3), a front lens (6-4), a front prism mounting plate (6-5), a front corner prism (6-6), a front large plate (6-7), an X-direction adjustment rod (6-8), an X-direction adjustment fixed block (6-9), a vertical plate (6-10), a Y-direction moving block (6-11), a Y-direction adjustment fixed block (6-12), a Y-direction adjustment rod (6-13), a front rotation motor (6-14), and a front screw rod module (6-15). 6-15), a front camera (6-1) and a front lens (6-4) are mounted on a moving slide of a front screw module (6-15), a front corner prism (6-6) is mounted on a corner front prism mounting plate (6-5), and the corner front prism mounting plate (6-5) is mounted on a screw module mounting plate (5-2), the front corner prism (6-6) can perform 90-degree light conversion, a Y-direction moving block (6-11) is mounted on a vertical plate (6-10), and the vertical plate (6-10) is adjusted by an X-direction adjusting rod (6-8) and an X-direction adjusting fixed block (6-9).

Images