Purifying device for recycling and treating thinning scribing wastewater

Abstract

The utility model discloses a purification device for recycling and treating thinning scribing wastewater, which relates to the technical field of wastewater recycling and purification and comprises a treatment box, a water inlet hopper, a nanofiltration membrane and a filter element, a water inlet hole is formed in the top of the treatment box, and the nanofiltration membrane and the filter element are mounted on opposite inner walls of the treatment box. In the use process, the two water inlet hoppers move through the motor, the lead screw and the T-shaped block, then the other water inlet hopper is aligned with the water inlet hole, meanwhile, when one water inlet hopper moves, the sliding block and the concentric-square-shaped frame move, and when the sliding block makes contact with the L-shaped baffle, the filter screen does not move any more; at the moment, the water inlet hoppers continue to move, so that the filter screens are not located under the water inlet hoppers, then accumulated impurities fall down, the impurities on the filter screens can be cleaned without manual work, meanwhile, through the arrangement of the two water inlet hoppers, the other filter screen can be detached and replaced while filtering is conducted, waiting is not needed, and use is convenient.

Description

Technical Field

[0001] The utility model relates to the technical field of wastewater recovery and purification, and particularly relates to a purification device for the recovery and treatment of thinning and dicing wastewater. Background Art

[0002] In the semiconductor industrial manufacturing process, a large amount of high-quality pure water is required. Generally, high-purity water with a resistivity above 10 MΩ·cm is required, and a large amount of wastewater is generated. The generated wastewater can be roughly divided into etching wastewater, lithography wastewater, filter tube cleaning wastewater, reverse osmosis wastewater, ion exchange resin wastewater, and chemical mechanical polishing (CMP) wastewater, etc. Electronic packaging is an indispensable process after the production of integrated circuit chips and is a bridge from devices to systems. Among them, the thinning and dicing wastewater in the CMP process contains a large amount of nanoscale particles and is relatively complex to treat, which is the most common problem in the wastewater treatment of the current semiconductor industry. When recycling, treating, and purifying the thinning and dicing wastewater, an ultrafiltration water purification device is often used for purification treatment.

[0003] In the prior art, an ultrafiltration device for water purification treatment disclosed in the patent with the publication number CN218421272U includes a shell, a water inlet hole, a fixing rod, a connecting plate, a rubber ring, a water inlet hopper, a handle, a sealing ring, a cover plate, a collecting hopper, a filter screen, a diversion plate, a support column, a waste discharge pipe, a plug, a base, a top seat, a nanofiltration membrane, a filter element, filter holes, a water outlet pipe, a control valve, and an observation window. The filter screen conducts preliminary filtration, which can remove large particle impurities and sundries in advance to avoid blocking the filter assembly. The collecting hopper collects the impurities for centralized treatment. However, the impurities are likely to affect the filtration when accumulating in the collecting hopper, and it is not provided with a cleaning mechanism. When the accumulation is excessive, manual dumping is required, which increases the labor intensity of the staff. Moreover, when replacing the filter screen, the filtration needs to be stopped and then replaced, which is likely to affect the filtration and is not convenient to use. In view of the deficiencies of the prior art, the utility model discloses a purification device for the recovery and treatment of thinning and dicing wastewater to solve the above problems. Summary of the Utility Model

[0004] The purpose of this application is to provide a purification device for the recovery and treatment of thinning and dicing wastewater to solve the problems raised in the above background art.

[0005] To achieve the above object, the present application provides the following technical solutions: A purification device for recycling and treating thinning and dicing wastewater, comprising a treatment tank, a water inlet hopper, a nanofiltration membrane and a filter element. An inlet hole is opened at the top of the treatment tank. The nanofiltration membrane and the filter element are installed on the opposite inner walls of the treatment tank. A T-shaped block is arranged above the treatment tank, and a driving mechanism for moving the T-shaped block is arranged on the treatment tank. Water inlet hoppers are installed on both sides of the T-shaped block away from each other. Two sliding grooves are opened at the bottom of each of the two water inlet hoppers. Slide rods are installed on the opposite inner walls of the four sliding grooves. Sliders are slidably sleeved on the four slide rods. A detachable installation of a return frame is jointly arranged on the sides of each two matching sliders. Filter meshes are arranged on the inner walls of the two return frames. Two L-shaped baffles are installed on the opposite sides of the treatment tank. Elastic mechanisms are arranged on the sides of the four sliders.

[0006] Preferably, the driving mechanism includes two fixed blocks installed on the top of the treatment tank. A motor is installed on the side of one of the fixed blocks. A lead screw is rotatably installed on the opposite sides of the two fixed blocks. One end of the lead screw is installed on the output shaft of the motor. The T-shaped block is threadedly sleeved on the lead screw.

[0007] Preferably, a guide rod is jointly installed on the opposite sides of the two fixed blocks. A guide hole is opened on the side of the T-shaped block. The guide rod passes through the guide hole.

[0008] Preferably, the elastic mechanism includes a return spring installed on the side of the slider. The other end of the return spring is installed on the side inner wall of the sliding groove.

[0009] Preferably, two installation holes are opened on the side of the slider. Fixing bolts are movably installed in the two installation holes. Two threaded holes are opened on the side of the return frame. The end parts of the two fixing bolts are respectively threadedly installed in the two threaded holes.

[0010] Preferably, pulling blocks are installed on the sides of the two return frames.

[0011] Preferably, buffer pads are installed on the sides of the four sliders.

[0012] In summary, the technical effects and advantages of the present utility model:

[0013] 1. In the present utility model, when filtering for a period of time, first, the motor and the lead screw are used to move the T-shaped block. The movement of the T-shaped block will cause the two water inlet funnels to move, thereby aligning the other water inlet funnel with the water inlet hole. At the same time, when one of the water inlet funnels moves, the square frame will move. When the slider contacts the L-shaped baffle, the filter screen will no longer move. At this time, if the water inlet funnel continues to move, the filter screen will not be directly below it, so that the accumulated debris will fall, thus cleaning the debris on the filter screen without manual labor. At the same time, through the setting of the two water inlet funnels, it is convenient to disassemble and replace the other filter screen while filtering, without waiting, which is convenient for use.

[0014] 2. In the present utility model, through the setting of the return spring, when the L-shaped baffle does not limit the slider, under the elastic action of the return spring, the slider will return to its original position. The return of the slider will cause the square frame to return to its original position, and then the filter screen will be directly below the water inlet funnel, which is convenient for the next use. Through the setting of the fixing bolts, it is convenient to disassemble the square frame, so as to facilitate the replacement of the filter screen. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0016] Figure 1 It is a three-dimensional structure schematic diagram of the first perspective in the embodiment of the present application;

[0017] Figure 2 It is a three-dimensional structure schematic diagram of the second perspective in the embodiment of the present application;

[0018] Figure 3 It is a three-dimensional structure schematic diagram of a partial section in the embodiment of the present application;

[0019] Figure 4 It is Figure 3 The enlarged structure schematic diagram at A in

[0020] In the figure: 1. Processing box; 2. Fixed block; 3. Motor; 4. Lead screw; 5. T-shaped block; 6. Water inlet funnel; 7. Slide bar; 8. Slider; 9. Square frame; 10. Filter screen; 11. Fixing bolt; 12. Return spring; 13. L-shaped baffle; 14. Pulling block; 15. Guide rod; 16. Buffer pad. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0022] Embodiment: Refer to Figures 1-4 A purification device for recycling and treating thinning and scribing wastewater shown in the figure, which includes a treatment tank 1, a water inlet hopper 6, a nanofiltration membrane and a filter element. An inlet hole is opened at the top of the treatment tank 1. The nanofiltration membrane and the filter element are installed on the opposite inner walls of the treatment tank 1. A T-shaped block 5 is arranged above the treatment tank 1. A driving mechanism for moving the T-shaped block 5 is arranged on the treatment tank 1. Water inlet hoppers 6 are installed on both sides of the T-shaped block 5 away from each other. Two chutes are opened at the bottom of each of the two water inlet hoppers 6. Slide rods 7 are installed on the opposite inner walls of the four chutes. Slide blocks 8 are slidably sleeved on the four slide rods 7. A return frame 9 is detachably installed on the side of each two matching slide blocks 8. Filter meshes 10 are arranged on the inner walls of the two return frames 9. Two L-shaped baffles 13 are installed on the sides of the treatment tank 1 away from each other. Elastic mechanisms are arranged on the sides of the four slide blocks 8.

[0023] With the above structure, when in use, first pour water into one of the water inlet hoppers 6. At this time, the water will be preliminarily filtered through the filter mesh 10. The filtered water will flow into the treatment tank 1 through the inlet hole, and then be filtered again by the nanofiltration membrane and the filter element. At the same time, the impurities after preliminary filtration will accumulate on the filter mesh 10. When filtering for a period of time, the T-shaped block 5 is moved through the driving mechanism. The movement of the T-shaped block 5 will cause the two water inlet hoppers 6 to move, so that the other water inlet hopper 6 is aligned with the inlet hole. At the same time, the movement of one of the water inlet hoppers 6 will cause the slide block 8 to move, and the movement of the slide block 8 will cause the return frame 9 to move. When the slide block 8 contacts the L-shaped baffle 13, the slide block 8 is blocked and stops moving. The non-movement of the slide block 8 will cause the filter mesh 10 to stop moving through the return frame 9. At this time, the continuous movement of the water inlet hopper 6 will cause the filter mesh 10 not to be directly below it, so that the accumulated debris will fall, thus enabling the regular cleaning of the accumulated garbage on the filter mesh 10 without manual labor. At the same time, through the arrangement of the two water inlet hoppers 6, it is convenient to disassemble and replace the other filter mesh 10 while filtering, without waiting, which is convenient for use.

[0024] As Figure 1As shown in the figure, the driving mechanism includes two fixed blocks 2 installed on the top of the processing box 1. A motor 3 is installed on the side of one of the fixed blocks 2. A lead screw 4 is rotatably installed on the opposite sides of the two fixed blocks 2. One end of the lead screw 4 is installed on the output shaft of the motor 3. A T-shaped block 5 is threadedly sleeved on the lead screw 4. The advantage of such a setting is that, through the settings of the fixed block 2, the motor 3 and the lead screw 4, it is convenient to move the T-shaped block 5.

[0025] Specifically, the output of the motor 3 will cause the lead screw 4 to rotate. The rotation of the lead screw 4 will cause the T-shaped block 5 to move. The movement of the T-shaped block 5 will cause the two water inlet hoppers 6 to move, so that the other water inlet hopper 6 is aligned with the water inlet hole, and at the same time, the large particles and sundries on the other filter screen 10 are discharged, avoiding the accumulation of impurities and affecting the next use.

[0026] As Figure 1 shown in the figure, a guide rod 15 is jointly installed on the opposite sides of the two fixed blocks 2. A guide hole is opened on the side of the T-shaped block 5, and the guide rod 15 passes through the guide hole. The advantage of such a setting is that, through the setting of the guide rod 15, the T-shaped block 5 moves along the horizontal direction.

[0027] As Figure 4 shown in the figure, the elastic mechanism includes a return spring 12 installed on the side of the slider 8. The other end of the return spring 12 is installed on the inner wall of the side of the chute. The advantage of such a setting is that, through the setting of the return spring 12, it is convenient to reset the slider 8.

[0028] Specifically, when the L-shaped baffle 13 does not limit the slider 8, under the elastic action of the return spring 12, the slider 8 will be reset. The reset of the slider 8 will cause the return frame 9 to be reset, and then the filter screen 10 will be located directly below the water inlet hopper 6, so as to preliminarily filter the water.

[0029] As Figure 4 shown in the figure, two mounting holes are opened on the side of the slider 8. Two fixing bolts 11 are movably installed in the two mounting holes. Two threaded holes are opened on the side of the return frame 9. The ends of the two fixing bolts 11 are respectively threadedly installed in the two threaded holes. The advantage of such a setting is that, through the setting of the fixing bolts 11, it is convenient to disassemble the return frame 9, so as to facilitate the replacement of the filter screen 10.

[0030] As Figure 4 shown in the figure, a pulling block 14 is installed on the side of each of the two return frames 9. The advantage of such a setting is that, through the setting of the pulling block 14, it is convenient to pull the return frame 9 when replacing the filter screen 10.

[0031] As Figure 4 shown in the figure, a buffer pad 16 is installed on the side of each of the four sliders 8. The advantage of such a setting is that, through the setting of the buffer pad 16, it plays a certain buffering role and reduces the vibration generated when the slider 8 is reset.

[0032] Finally, it should be noted that the above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A purification device for recycling and treating wastewater from thinning and scribing, comprising a treatment box (1), a water inlet hopper (6), a nanofiltration membrane and a filter element, characterized in that: A water inlet hole is provided on the top of the treatment box (1); the nanofiltration membrane and the filter element are installed on the opposite inner walls of the treatment box (1); a T-shaped block (5) is provided above the treatment box (1); a driving mechanism for moving the T-shaped block (5) is provided on the treatment box (1); water inlet buckets (6) are provided on the two sides of the T-shaped block (5) away from each other; two slide grooves are provided at the bottom of the two water inlet buckets (6); sliding rods (7) are provided on the opposite inner walls of the four slide grooves; sliding blocks (8) are slidably sleeved on the four sliding rods (7); a circular frame (9) is detachably installed on the sides of each two matching sliding blocks (8); filter screens (10) are provided on the inner walls of the two circular frames (9); two L-shaped baffles (13) are provided on the sides of the treatment box (1) away from each other; and elastic mechanisms are provided on the sides of the four sliding blocks (8).

2. The purification device for recycling and treating wastewater from thinning and scribing according to claim 1, characterized in that: The driving mechanism comprises two fixed blocks (2) mounted on the top of the processing box (1), a motor (3) being mounted on the side of one of the fixed blocks (2), a screw rod (4) being rotatably mounted on the opposite sides of the two fixed blocks (2), one end of the screw rod (4) being mounted on the output shaft of the motor (3), and the T-shaped block (5) being threadedly sleeved on the screw rod (4).

3. The purification device for recycling and treating wastewater from thinning and dicing according to claim 2, characterized in that: A guide rod (15) is commonly installed on the opposite sides of the two fixing blocks (2), a guide hole is opened on the side of the T-shaped block (5), and the guide rod (15) passes through the guide hole.

4. The purification device for recycling and treating wastewater from thinning and dicing according to claim 1, characterized in that: The elastic mechanism comprises a return spring (12) mounted on the side of the slider (8), and the other end of the return spring (12) is mounted on the inner wall of the side of the slide groove.

5. The purification device for recycling and treating wastewater from thinning and scribing according to claim 1, characterized in that: The side of the slider (8) is provided with two mounting holes, and fixing bolts (11) are movably installed in the two mounting holes. The side of the circular frame (9) is provided with two threaded holes, and the ends of the two fixing bolts (11) are respectively threadedly installed in the two threaded holes.

6. The purification device for recycling and treating wastewater from thinning and dicing according to claim 1, characterized in that: Pull blocks (14) are installed on the sides of the two circular frames (9).

7. The purification device for recycling and treating wastewater from thinning and scribing according to claim 1, characterized in that: Buffer pads (16) are installed on the sides of the four sliding blocks (8).

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