Cooling turntable mechanism for vacuum coating

Abstract

The utility model relates to the related technical field of vacuum coating equipment, in particular to a cooling turntable mechanism for vacuum coating, which comprises a mechanism body, a cooling mechanism is arranged on the surface of one side of the mechanism body, and a clamping mechanism is arranged on the upper surface of the mechanism body. According to the cooling mechanism, through the arrangement of the fixing base, the first supporting rod, the second supporting rod, a cooling gun, a silencer and a spray head, when the cooling mechanism is used, a ventilation valve switch is turned on firstly, gas enters a cavity of the first supporting rod through a compressed air inlet formed in the first supporting rod, and the gas pushes a second telescopic rod contracted in the cavity of the first supporting rod; and meanwhile, the air flows into the cavity of the second supporting rod and then flows into the cavity of the cooling gun tightly installed with the second supporting rod, cold air is formed in the cooling gun, the cooled cold air flow is subjected to noise reduction treatment through the silencer and then is sprayed out through the spray head, and the effect that machined parts are accurately and evenly cooled is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to a cooling turntable mechanism for vacuum coating. Background Art

[0002] Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under a relatively high vacuum degree. Specifically, it includes many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is divided into two types: evaporation and sputtering. Its process involves high temperature. When the coating is finished, the product needs to be cooled immediately. With the development of industry, the requirements for vacuum coating equipment are gradually increasing, which also puts forward higher requirements for cooling equipment. Traditional cooling equipment usually uses cooling water transported through pipelines to cool the product. When the pipeline is long, the cooling effect of this method is not good, and it is easy to cause uneven cooling of the product, resulting in quality problems of the product coating. Therefore, a cooling turntable mechanism for vacuum coating is particularly needed.

[0003] Because the existing cooling equipment usually uses cooling water flowing through the pipeline. When the pipeline is set long, the cooling water is prone to temperature rise, which will cause uneven cooling of the product and lead to coating failure of the product, not only reducing the production efficiency but also increasing the production cost. Content of the Utility Model

[0004] The purpose of the utility model is to provide a cooling turntable mechanism for vacuum coating to solve the problems in the above background art that the existing cooling equipment usually uses cooling water flowing through the pipeline. When the pipeline is set long, the cooling water is prone to temperature rise, which will cause uneven cooling of the product and lead to coating failure of the product, not only reducing the production efficiency but also increasing the production cost.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A cooling turntable mechanism for vacuum coating, including a mechanism body. A cooling mechanism is arranged on one side surface of the mechanism body, and a clamping mechanism is arranged on the upper surface of the mechanism body;

[0006] The cooling mechanism includes a fixed seat, a first support rod, a second support rod, a cooling gun, a silencer and a nozzle. A fixed seat is fixedly connected to one side surface of the mechanism body. A first support rod is fixedly connected to the upper surface of the fixed seat. The inner wall of the first support rod is slidably connected to the second support rod. One end surface of the second support rod is tightly installed on the first support rod. One end surface of the first support rod is tightly installed with a silencer. One end surface of the silencer is fixedly connected to the silencer. A nozzle is tightly installed on the lower surface of the silencer.

[0007] Preferably, the clamping mechanism includes a fixing plate, a spring, a first adjusting rod, a second adjusting rod, and an arc-shaped fixing block. The fixing plate is welded to the upper surface of the mechanism body. The inner surface of the fixing plate is closely attached to the spring. The first adjusting rod is tightly installed on the inner wall of the spring. The second adjusting rod is tightly installed on the outer wall of the first adjusting rod. The arc-shaped fixing block is fixedly connected to one side surface of the second adjusting rod.

[0008] Preferably, the inner wall size of the cooling gun matches the outer wall size of the second support rod. Four groups of cooling guns are arranged on one side surface of the mechanism body.

[0009] Preferably, the second support rod and the first support rod form a telescopic structure, and the outer wall size of the second support rod matches the inner wall size of the first support rod.

[0010] Preferably, the outer wall size of the cooling gun matches the inner wall size of the silencer, and the inner wall size of the silencer matches the outer wall size of the nozzle.

[0011] Preferably, the second adjusting rod and the first adjusting rod form a telescopic structure, and three groups of the first adjusting rods are arranged on one side surface of the fixing plate.

[0012] Preferably, one end surface of the spring is fixedly connected to one side surface of the arc-shaped fixing block, and the inner wall size of the spring matches the outer wall size of the first adjusting rod.

[0013] Compared with the prior art, the beneficial effects of the present utility model are as follows: For this cooling turntable mechanism for vacuum coating, through the settings of the fixed seat, the first support rod, the second support rod, the cooling gun, the silencer, and the nozzle, when in use, when it is necessary to cool the processed parts, first open the ventilation valve switch to make the cooling gun in a ventilated state. The gas enters the cavity of the first support rod through the compressed air inlet installed on the first support rod. The gas pushes the second telescopic rod contracted inside the cavity of the first support rod to rise. At the same time, the gas flows into the cavity of the second support rod and then into the cavity of the cooling gun tightly installed with the second support rod and forms cold air gas in its body. The model of this cooling gun is CAG-3009, which can regulate the cooling temperature of the gas. The cooled cold air flow is subjected to noise reduction treatment by the silencer and then flows through the nozzle and sprays out. The above work process realizes that the processed parts can be accurately and evenly cooled, solves the problem that the existing cooling equipment is prone to uneven cooling, resulting in product coating failure, reducing production efficiency and increasing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of the overall external structure of the present utility model;

[0015] Figure 2Schematic diagram of the cooling mechanism of the present utility model;

[0016] Figure 3 Schematic diagram of the clamping mechanism of the present utility model;

[0017] Figure 4 Schematic diagram of the cooperation structure of the spring and the first adjusting rod of the present utility model.

[0018] In the figure: 1, mechanism body; 2, cooling mechanism; 201, fixed seat; 202, first support rod; 203, second support rod; 204, cooling gun; 205, silencer; 206, nozzle; 3, clamping mechanism; 301, fixed plate; 302, spring; 303, first adjusting rod; 304, second adjusting rod; 305, arc-shaped fixing block. Specific implementation manner

[0019] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0020] Please refer to Figures 1-4 , the present utility model provides a technical solution: a cooling turntable mechanism for vacuum coating, including a mechanism body 1, a cooling mechanism 2 is arranged on one side surface of the mechanism body 1, and a clamping mechanism 3 is arranged on the lower surface of the mechanism body 1;

[0021] The cooling mechanism 2 includes a fixed seat 201, a first support rod 202, a second support rod 203, a cooling gun 204, a silencer 205 and a nozzle 206. A fixed seat 201 is fixedly connected to one side surface of the mechanism body 1. A first support rod 202 is fixedly connected to the upper surface of the fixed seat 201. A second support rod 203 is slidably connected to the inner wall of the first support rod 202. One end surface of the second support rod 203 is tightly mounted on the first support rod 202. A silencer 205 is tightly mounted on one end surface of the first support rod 202. A nozzle 206 is fixedly connected to one end surface of the silencer 205. Through the settings of the fixed seat 201, the first support rod 202, the second support rod 203, the cooling gun 204, the silencer 205 and the nozzle 206, when in use, when it is necessary to cool the processed parts, first open the ventilation valve switch to make the cooling gun 204 in a ventilated state. The gas enters the cavity of the first support rod 202 through the compressed air inlet installed on the first support rod 202. The gas pushes the second support rod 203 contracted inside the cavity of the first support rod 202 to make it rise. At the same time, the gas flows into the cavity of the second support rod 203 and then into the cavity of the cooling gun 204 tightly mounted with the second support rod 203 and forms cold air gas in its body. The model of this cooling gun 204 is CAG-3009, which can regulate the cooling temperature of the gas. The cooled cold air flow is subjected to noise reduction treatment by the silencer 205 and then flows through the nozzle 206 and is ejected. The above work process enables the processed parts to be cooled accurately and evenly.

[0022] Further, the clamping mechanism 3 includes a fixing plate 301, a spring 302, a first adjusting rod 303, a second adjusting rod 304 and an arc-shaped fixing block 305. The fixing plate 301 is welded to the upper surface of the mechanism body 1. One side surface of the fixing plate 301 is fixedly connected with the spring 302. The inner wall of the spring 302 is closely installed with the first adjusting rod 303. The inner wall of the first adjusting rod 303 is slidably installed with the second adjusting rod 304. One end surface of the second adjusting rod 304 is fixedly connected with the arc-shaped fixing block 305. Through the setting of the fixing plate 301, the spring 302, the first adjusting rod 303, the second adjusting rod 304 and the arc-shaped fixing block 305, when in use, first apply a force horizontally towards the fixing plate 301 to the arc-shaped fixing block 305. This force causes the arc-shaped fixing block 305 to move horizontally towards the fixing plate 301 and compresses the spring 302 to deform and contract. At the same time, this force causes the second adjusting rod 304 to displace and contract into the first adjusting rod 303. At this time, a gap appears between the originally two closely fitting arc-shaped fixing blocks 305. When this gap can accommodate the processing part, place the part to be processed in the gap, and then remove the applied force. At this time, the spring 302 returns from the compressed state to the original state, pushing the arc-shaped fixing block 305 to move horizontally away from the fixing plate 301 until the arc-shaped fixing block 305 presses against the part to be processed until the two arc-shaped fixing blocks 305 are in an equilibrium state with the part to be processed under extrusion, so as to realize the position fixation of the part to be processed.

[0023] Further, the inner wall size of the cooling gun 204 matches the outer wall size of the second support rod 203. Four groups of cooling guns 204 are arranged on one side surface of the mechanism body 1. Through the setting of the cooling gun 204, it can accurately cool the flowing gas, realize accurate cooling of the product, and avoid the situation of uneven cooling.

[0024] Further, the second support rod 203 and the first support rod 202 form a telescopic structure. The outer wall size of the second support rod 203 matches the inner wall size of the first support rod 202. Through the setting of the first support rod 202, the height of the cooling gun 204, the silencer 205 and the nozzle 206 can be adjusted, so as to be able to cool products at different heights.

[0025] Further, the outer wall size of the cooling gun 204 matches the inner wall size of the silencer 205. The inner wall size of the silencer 205 matches the outer wall size of the nozzle 206. Through the setting of the silencer 205, the flowing gas can be noise-reduced to meet the actual production requirements.

[0026] Further, the second adjusting rod 304 and the first adjusting rod 303 form a telescopic structure. There are three groups of the first adjusting rods 303 arranged on one side surface of the fixed plate 301. Through the arrangement of the first adjusting rods 303, the stable support and position limitation of the spring 302 can be ensured, and the position adjustment of the arc-shaped fixing block 305 is realized.

[0027] Further, one end surface of the spring 302 is fixedly connected to one side surface of the arc-shaped fixing block 305. The inner wall size of the spring 302 is matched with the outer wall size of the first adjusting rod 303. Through the arrangement of the spring 302, the arc-shaped fixing block 305 can be restored after displacement, ensuring a stable state of tight extrusion when the part to be processed is placed, and realizing the position fixation of the part to be processed.

[0028] Working principle: When in use, when it is necessary to cool the processed part, first open the ventilation valve switch to make the cooling gun 204 in a ventilated state. The gas enters the cavity of the first support rod 202 through the compressed air inlet installed on the first support rod 202. The gas pushes the second support rod 203 contracted inside the cavity of the first support rod 202 to rise. At the same time, the gas flows into the cavity of the second support rod 203 and then into the cavity of the cooling gun 204 tightly installed with the second support rod 203 and forms cold air gas in its body. The model of this cooling gun 204 is CAG-3009, which can regulate the cooling temperature of the gas. The cooled cold air flow is subjected to noise reduction treatment by the silencer 205 and then flows through the nozzle 206 and sprays out. The above work process realizes that the processed part can be accurately and evenly cooled. When in need of use, first apply a force horizontally towards the fixed plate 301 to the arc-shaped fixing block 305. This force causes the arc-shaped fixing block 305 to move horizontally towards the fixed plate 301 and squeezes the spring 302 to deform and contract. At the same time, this force causes the second adjusting rod 304 to displace and contract into the first adjusting rod 303. At this time, a gap appears between the two originally tightly fitting arc-shaped fixing blocks 305. When this gap can accommodate the part to be processed, place the part to be processed in the gap, and then remove the applied force. At this time, the spring 302 returns from the compressed state to the original state, pushing the arc-shaped fixing block 305 to move horizontally away from the fixed plate 301 until the arc-shaped fixing block 305 is in contact with the part to be processed until the two arc-shaped fixing blocks 305 and the part to be processed are in a balanced state of extrusion, so as to realize the position fixation of the part to be processed.

[0029] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cooling turntable mechanism for vacuum coating, comprising a mechanism body (1), characterized in that: A cooling mechanism (2) is provided on one side surface of the mechanism body (1), and a clamping mechanism (3) is provided on the upper surface of the mechanism body (1); The cooling mechanism (2) comprises a fixed seat (201), a first support rod (202), a second support rod (203), a cooling gun (204), a silencer (205) and a nozzle (206); a side surface of the mechanism body (1) is fixedly connected to the fixed seat (201); an upper surface of the fixed seat (201) is fixedly connected to the first support rod (202); an inner wall of the first support rod (202) is slidably connected to the second support rod (203); one end surface of the second support rod (203) is tightly mounted with the first support rod (202); one end surface of the first support rod (202) is tightly mounted with the silencer (205); one end surface of the silencer (205) is fixedly connected to the silencer (205); and a lower surface of the silencer (205) is tightly mounted with the nozzle (206).

2. The cooling turntable mechanism for vacuum coating according to claim 1, characterized in that: The clamping mechanism (3) comprises a fixing plate (301), a spring (302), a first adjusting rod (303), a second adjusting rod (304) and an arc-shaped fixing block (305); the fixing plate (301) is welded to the upper surface of the mechanism body (1); the spring (302) is fixedly connected to one side surface of the fixing plate (301); the first adjusting rod (303) is tightly mounted on the inner wall of the spring (302); the second adjusting rod (304) is slidably mounted on the inner wall of the first adjusting rod (303); and the arc-shaped fixing block (305) is fixedly connected to one end surface of the second adjusting rod (304).

3. The cooling turntable mechanism for vacuum coating according to claim 1, characterized in that: The inner wall size of the cooling gun (204) matches the outer wall size of the second support rod (203), and four groups of the cooling gun (204) are arranged on the surface of one side of the mechanism body (1).

4. The cooling turntable mechanism for vacuum coating according to claim 1, characterized in that: The second support rod (203) and the first support rod (202) form a telescopic structure, and the outer wall size of the second support rod (203) matches the inner wall size of the first support rod (202).

5. The cooling turntable mechanism for vacuum coating according to claim 1, characterized in that: The outer wall size of the cooling gun (204) matches the inner wall size of the silencer (205), and the inner wall size of the silencer (205) matches the outer wall size of the nozzle (206).

6. The cooling turntable mechanism for vacuum coating according to claim 2, characterized in that: The second adjustment rod (304) and the first adjustment rod (303) form a telescopic structure, and the first adjustment rod (303) is arranged in three groups on a surface of one side of the fixing plate (301).

7. The cooling turntable mechanism for vacuum coating according to claim 2, characterized in that: One end surface of the spring (302) is fixedly connected to a side surface of the arc-shaped fixing block (305), and the inner wall size of the spring (302) matches the outer wall size of the first adjusting rod (303).

Images