Solid shaft of polycrystalline silicon furnace

Abstract

The utility model discloses a solid shaft of a polycrystalline silicon furnace, which relates to the technical field of solid shafts and comprises a shaft body, bearing seats are arranged on two sides of the shaft body, the shaft body can slide on the bearing seats by a micro distance, and buffer structures are arranged between the bearing seats and the shaft body. A cooling structure used for cooling is arranged in the shaft body, and a self-lubricating structure used for reducing friction is arranged on the side, located on the cooling structure, of the shaft body. A sensor is arranged between the cooling structure and the self-lubricating structure in the shaft body; according to the invention, higher durability, stability and efficiency are shown in operation, and reliable technical support and economic benefits are provided for industrial production.

Description

Technical Field

[0001] The utility model relates to the technical field of solid shafts, and more specifically, to the solid shaft of a polysilicon furnace. Background Art

[0002] Polysilicon is a high-purity silicon material, whose crystal structure is more ordered than that of ordinary amorphous silicon, and has excellent electrical and optical properties. It is one of the basic materials for manufacturing semiconductor devices. The polysilicon furnace is mainly used for producing high-purity polysilicon blocks. Its working principle includes heating silicon raw materials (usually metallurgical-grade silicon that has been smelted) to a high temperature to melt it, and under appropriate process conditions, making the melt solidify into polysilicon crystals through crystal growth methods such as the Czochralski method or the floating zone method.

[0003] Among them, the solid shaft of the polysilicon furnace is mainly used to support and drive the key process of crystal growth. It is responsible for keeping the molten silicon material in the furnace in an appropriate position and condition to ensure the smooth progress of the crystal growth process.

[0004] At present, when the solid shaft of the polysilicon furnace works for a long time or in a high-temperature environment, the shaft body of the solid shaft is prone to overheating, which affects its own working performance, working efficiency and service life. Summary of the Utility Model

[0005] Aiming at the problems existing in the prior art, the purpose of the utility model is to solve the problems put forward in the above background art.

[0006] To solve the above problems, the utility model adopts the following technical solutions:

[0007] The solid shaft of the polysilicon furnace includes:

[0008] A shaft body, bearing seats are arranged on both sides of the shaft body, and the shaft body can slide a short distance on the bearing seats. A buffer structure is arranged between the bearing seats and the shaft body;

[0009] A cooling structure for cooling is arranged inside the shaft body, and a self-lubricating structure for reducing friction is arranged on one side of the shaft body where the cooling structure is located;

[0010] A sensor is arranged inside the shaft body between the cooling structure and the self-lubricating structure.

[0011] As a preferred solution of the utility model, the buffer structure includes shock absorbers fixedly arranged on the bearing seats, and rubber gaskets are fixedly arranged at the connection between the shock absorbers and the bearing seats.

[0012] As a preferred embodiment of the present utility model, the cooling structure includes a cooling channel axially arranged inside the shaft body. The cooling channel is arranged in a spiral shape, and both ends of the cooling channel penetrate through the shaft body, which are respectively a liquid inlet and a liquid outlet. Sealing rings are arranged on both the liquid inlet and the liquid outlet.

[0013] As a preferred embodiment of the present utility model, the self-lubricating structure includes an oil storage layer arranged inside the shaft body. A plurality of uniformly distributed notches are axially formed on the surface of the shaft body, and the oil storage layer communicates with the notches.

[0014] As a preferred embodiment of the present utility model, a plurality of sensors are provided, and the types of the plurality of sensors are different from each other.

[0015] As a preferred embodiment of the present utility model, reinforcing ribs are fixedly arranged on the outer side of the shaft body. A plurality of reinforcing ribs are provided, and the plurality of reinforcing ribs are uniformly distributed.

[0016] Compared with the prior art, the advantages of the present utility model are as follows:

[0017] Vibration and shock reduction: The shock absorber and the rubber gasket effectively reduce the vibration and shock generated during the operation of the shaft body, protect the bearings and other key components, and improve the stability and reliability of the system.

[0018] Remarkable temperature reduction effect: The spiral cooling channel structure effectively reduces the working temperature of the shaft body, prevents overheating, extends the service life of the equipment, and improves the working efficiency and safety.

[0019] Automatic lubrication and friction reduction: The oil storage layer embedded inside the shaft body and the axially distributed notches automatically supply lubricating oil through capillary action, reduce friction and wear, extend the service life of the shaft body and related components, and reduce the maintenance cost.

[0020] Real-time monitoring and safety guarantee: A plurality of types of sensors real-time monitor various parameters of the shaft body, including temperature, pressure, vibration, etc., improve the safe operation and management efficiency of the system, and timely discover and solve potential problems.

[0021] Structure strengthening and stability improvement: The externally uniformly distributed reinforcing ribs enhance the mechanical strength and rigidity of the shaft body, ensuring stable operation and long-term reliability under high-load working conditions.

[0022] In summary, the combined action of various design measures enables the solid shaft of the polysilicon furnace to exhibit higher durability, stability and efficiency during operation, providing reliable technical support and economic benefits for industrial production. Description of the Drawings

[0023] Figure 1Schematic three-dimensional structure diagram of the present utility model;

[0024] Figure 2 Schematic connection structure diagram of the shaft body and the bearing seat of the present utility model;

[0025] Figure 3 Schematic side sectional structure diagram of the shaft body of the present utility model;

[0026] Figure 4 For the present utility model Figure 3 Enlarged structure diagram at position A in

[0027] Description of reference numerals in the figure:

[0028] 1. Shaft body; 2. Bearing seat; 3. Buffer structure; 31. Shock absorber; 32. Rubber gasket; 4. Cooling structure; 41. Cooling channel; 42. Liquid inlet; 43. Liquid outlet; 44. Sealing ring; 5. Self-lubricating structure; 51. Oil storage layer; 52. Notch; 6. Sensor; 7. Reinforcing rib. Detailed implementation manners

[0029] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0030] Embodiment

[0031] As Figures 1-4 shown, a solid shaft of a polysilicon furnace includes:

[0032] A shaft body 1, with bearing seats 2 provided on both sides of the shaft body 1, and the shaft body 1 can slide a small distance on the bearing seats 2. A buffer structure 3 is provided between the bearing seats 2 and the shaft body 1;

[0033] A cooling structure 4 for cooling is provided inside the shaft body 1, and a self-lubricating structure 5 for reducing friction is provided on one side of the shaft body 1 where the cooling structure 4 is located;

[0034] A sensor 6 is provided inside the shaft body 1 between the cooling structure 4 and the self-lubricating structure 5.

[0035] In a further embodiment, the shaft body 1 serves as the main supporting and rotating component, bearing mechanical loads and transmitting power, providing mechanical strength and stability; the bearing housing 2 supports the shaft body 1, enabling the shaft body 1 to rotate stably, reducing friction, lowering the movement resistance of the shaft body 1, and at the same time allowing the shaft body 1 to perform micro-distance sliding on the bearing housing 2; the buffer structure 3 is used to absorb and relieve the vibration and impact generated during the operation of the shaft body 1; the cooling structure 4 can effectively cool down, preventing the shaft body 1 from deforming or being damaged due to overheating, extending the service life of the equipment, and improving work efficiency; the self-lubricating structure 5 reduces the friction coefficient, reduces wear, extends the service life of the shaft body 1 and related components, and reduces the maintenance and replacement frequency; the sensor 6 monitors the working state of the shaft body 1 in real time, providing data support for timely maintenance and adjustment to ensure the safe and efficient operation of the system.

[0036] Specifically, the buffer structure 3 includes a shock absorber 31 fixedly arranged on the bearing housing 2, and a rubber gasket 32 is fixedly arranged at the connection between the shock absorber 31 and the bearing housing 2.

[0037] In a further embodiment, the main function of the shock absorber 31 is to absorb and relieve the vibration and impact generated during the operation of the shaft body 1, and reduce the transmission of vibration through the shock-absorbing material or structure inside it; the rubber gasket 32 is arranged at the connection between the shock absorber 31 and the bearing housing 2, playing a further shock-absorbing and buffering role. The rubber material has good elasticity and shock-absorbing performance, and can absorb and disperse mechanical vibration; through shock absorption and buffering, the key components of the equipment are protected, and the service life of the system is extended.

[0038] Specifically, the cooling structure 4 includes a cooling channel 41 axially arranged inside the shaft body 1. The cooling channel 41 is arranged in a spiral shape. Both ends of the cooling channel 41 penetrate the shaft body 1, and are respectively a liquid inlet 42 and a liquid outlet 43. Sealing rings 44 are arranged on both the liquid inlet 42 and the liquid outlet 43.

[0039] In a further embodiment, the cooling structure 4 cools the inside of the shaft body 1 by adding a coolant. The spiral cooling channel 41 increases the flow path and heat exchange area of the coolant, enabling the coolant to more effectively absorb the heat inside the shaft body 1, improving the cooling efficiency, ensuring that the shaft body 1 can quickly cool down under high-temperature operating conditions, and preventing the shaft body 1 from deforming or being damaged due to overheating; the liquid inlet 42 and the liquid outlet 43 are used for the inlet and outlet of the coolant. Through the settings of the liquid inlet 42 and the liquid outlet 43, continuous flow and heat exchange of the coolant can be achieved, keeping the shaft body 1 always within an appropriate temperature range; the sealing rings 44 ensure the sealing of the cooling system, prevent the coolant from leaking during the inlet and outlet process, maintain the utilization efficiency of the coolant, avoid environmental pollution, and at the same time ensure the normal operation of the cooling system.

[0040] Specifically, the self-lubricating structure 5 includes an oil storage layer 51 disposed inside the shaft body 1. A plurality of uniformly distributed notches 52 are axially formed on the surface of the shaft body 1. The oil storage layer 51 communicates with the notches 52.

[0041] In a further embodiment, the oil storage layer 51 is disposed inside the shaft body 1 for storing lubricating oil. The oil storage layer 51 provides a continuous supply of lubricating oil to ensure that the shaft body 1 can be fully lubricated during operation, reducing friction and wear. Through capillary action, the lubricating oil can automatically penetrate from the oil storage layer 51 into the notches 52, thereby lubricating the surface of the shaft body 1. The notches 52 can evenly distribute the lubricating oil, reducing the friction between the shaft body 1 and other components, reducing wear, improving the lubrication effect, and extending the service life of the shaft body 1 and related components.

[0042] Specifically, a plurality of sensors 6 are provided, and the types of the plurality of sensors 6 are different from each other.

[0043] In a further embodiment, a plurality of different types of sensors 6 are provided for real-time monitoring of various parameters of the shaft body 1 to ensure the safe operation and efficient management of the system. Different types of sensors 6 can provide a variety of data. A variety of sensors 6 such as temperature, pressure, and vibration sensors can be set to help detect and solve potential problems in a timely manner.

[0044] Specifically, a plurality of reinforcing ribs 7 are fixedly provided on the outer side of the shaft body 1, and the plurality of reinforcing ribs 7 are uniformly distributed.

[0045] In a further embodiment, the reinforcing ribs 7 enhance the structural stability and anti-deformation ability of the shaft body 1 to ensure that the shape and position of the shaft body 1 do not change under high-load operating conditions, improving the reliability and durability of the system.

[0046] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, other different forms of changes or variations can be made based on the above description. It is impossible to list all the implementation manners here. Any obvious changes or variations derived from the technical solutions of the present invention still fall within the protection scope of the present invention.

Claims

1. A solid shaft for a polysilicon furnace, characterized in that: include: A shaft body (1), bearing seats (2) are arranged on both sides of the shaft body (1), and the shaft body (1) can slide on the bearing seats (2) at a micro distance, and a buffer structure (3) is arranged between the bearing seats (2) and the shaft body (1); A cooling structure (4) for reducing temperature is arranged inside the shaft body (1), and a self-lubricating structure (5) for reducing friction is arranged on one side of the shaft body (1) located on the cooling structure (4); A sensor (6) is arranged inside the shaft body (1) between the cooling structure (4) and the self-lubricating structure (5).

2. The polysilicon furnace solid shaft according to claim 1, characterized in that: The buffer structure (3) comprises a shock absorber (31) fixedly arranged on the bearing seat (2), and a rubber gasket (32) is fixedly arranged at the connection between the shock absorber (31) and the bearing seat (2).

3. The polysilicon furnace solid shaft according to claim 1, characterized in that: The cooling structure (4) comprises a cooling channel (41) arranged axially inside the shaft body (1); the cooling channel (41) is arranged in a spiral shape; both ends of the cooling channel (41) penetrate the shaft body (1) and are respectively a liquid inlet (42) and a liquid outlet (43); and sealing rings (44) are arranged on the liquid inlet (42) and the liquid outlet (43).

4. The polysilicon furnace solid shaft according to claim 1, characterized in that: The self-lubricating structure (5) comprises an oil storage layer (51) arranged inside the shaft body (1); a plurality of evenly distributed notches (52) are provided on the surface of the shaft body (1) along the axial direction; and the oil storage layer (51) and the notches (52) are communicated with each other.

5. The polysilicon furnace solid shaft according to claim 1, characterized in that: A plurality of sensors (6) are provided, and the types of the plurality of sensors (6) are different.

6. The polysilicon furnace solid shaft according to claim 1, characterized in that: A reinforcing rib (7) is fixedly provided on the outer side of the shaft body (1), and a plurality of the reinforcing ribs (7) are provided, and the plurality of reinforcing ribs (7) are evenly distributed.

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