Liquid supplementing device and texturing equipment

Abstract

The utility model discloses a liquid supplementing device and a texturing device. The liquid supplementing device comprises a liquid storage tank, a liquid supplementing component and a conductivity detection component, the liquid storage tank is connected to a texturing tank through the liquid supplementing component, and the liquid supplementing component is used for supplementing an adjusting solution in the liquid storage tank into the texturing tank. And the conductivity detection part is arranged in the texturing groove and is used for detecting the conductivity of the texturing solution in the texturing groove. According to the liquid supplementing device, the liquid supplementing action is performed in time according to the dynamic change of the concentration of the alkali liquor by monitoring the conductivity of the texturing solution, so that the purposes of adjusting the concentration of the texturing solution and enabling the reflectivity of the'pyramid 'textured surface on the monocrystalline silicon wafer to reach the standard are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaics, and particularly to a liquid replenishing device and a texturing equipment. Background Art

[0002] A "pyramid" structure is formed on the surface of a single crystal silicon. The reflectivity of the "pyramid" textured surface is obtained by measuring the weight loss of the single crystal silicon wafer, that is, weighing once before texturing and once after texturing, and the difference between the two weighings is used as the weight loss. In each monitoring batch, the weight loss values of the single crystal silicon wafers in the complete flower basket are measured respectively, and the reflectivity is monitored through the weight loss values. Then, the operator adjusts the concentration of the alkaline solution and the content of the additive to control the reflectivity of the single crystal silicon wafer after texturing, so as to change the number and morphology of the "pyramid" textured surfaces per unit area. When the single crystal silicon wafer is corroded in the texturing tank, it will become thinner. Due to the anisotropy of the crystal, the corrosion rates of different planes are different, and different pyramid textured surface morphologies will be formed. In actual production, it is difficult to ensure that the sizes and morphologies of the "pyramid" bases on the single crystal silicon wafer all meet the requirements, such as large "pyramids" with a small number per unit area or small "pyramids" with a large number per unit area. The small "pyramids" with a large number per unit area have a better light absorption effect and a higher reflectivity. Therefore, the morphology and number of the "pyramid" textured surfaces cannot be monitored only by the weight loss. In addition, the method of monitoring the reflectivity by measuring the weight loss in the traditional technology has low accuracy and will affect the texturing yield of the battery chips. Summary of the Utility Model

[0003] Based on this, it is necessary to provide a liquid replenishing device. The liquid replenishing device of the utility model monitors the conductivity of the texturing solution, and makes a liquid replenishing action in time according to the dynamic change of the alkaline solution concentration, so as to adjust the concentration of the texturing solution and achieve the purpose of basically meeting the standard of the reflectivity of the "pyramid" textured surface on the single crystal silicon wafer.

[0004] An embodiment of the present application provides a liquid replenishing device.

[0005] A liquid replenishing device includes a liquid storage tank, a liquid replenishing component and a conductivity detection component. The liquid storage tank is connected to the texturing tank through the liquid replenishing component. The liquid replenishing component is used to replenish the adjusting solution in the liquid storage tank into the texturing tank. The conductivity detection component is used to be arranged in the texturing tank to detect the conductivity of the texturing solution in the texturing tank.

[0006] In some of the embodiments, the liquid replenishing device further includes a control mechanism. The control mechanism is electrically connected to the liquid replenishing component and the conductivity detection component. The control mechanism can control the liquid replenishing component to replenish liquid according to the conductivity detected by the conductivity detection component.

[0007] In some of these embodiments, when the conductivity detected by the conductivity detection component is less than the minimum value of the preset range, the control mechanism controls the liquid replenishment component to replenish liquid according to the conductivity detected by the conductivity detection component.

[0008] In some of these embodiments, the preset range is 29 ms / cm to 30 ms / cm.

[0009] In some of these embodiments, the control mechanism is a PLC programmable logic controller.

[0010] In some of these embodiments, the measurement range of the conductivity detection component is 10 ms / cm to 2000 ms / cm.

[0011] In some of these embodiments, the operating environment temperature of the conductivity detection component is 65 °C to 75 °C.

[0012] In some of these embodiments, the liquid replenishment component includes a liquid inlet pipe, a driving pump, and a valve component. One end of the liquid inlet pipe is connected to the liquid storage tank, the other end of the liquid inlet pipe extends into the texturing tank, and the driving pump and the valve component are both arranged on the liquid inlet pipe.

[0013] In some of these embodiments, the valve component is a solenoid valve.

[0014] An embodiment of the present application further provides a texturing device.

[0015] A texturing device includes a texturing tank and the liquid replenishment device.

[0016] The above liquid replenishment device can achieve good control of the reflectivity of the "pyramid" texture surface on the single-crystalline silicon wafer by monitoring the conductivity of the texturing solution, and can basically control the number of "pyramids" per unit area of the single-crystalline silicon wafer, so that the size, number, and morphology of the "pyramids" per unit area meet the requirements. Specifically, in the present application, when the liquid replenishment device is in use, if the conductivity detection component detects that the conductivity of the texturing solution in the texturing tank is within the preset range, it means that the reflectivity of the "pyramid" texture surface on the single-crystalline silicon wafer can basically reach the preset value. If the conductivity detection component detects that the conductivity of the texturing solution in the texturing tank is less than the minimum value of the preset range, it means that the reflectivity of the "pyramid" texture surface on the single-crystalline silicon wafer is difficult to reach the preset value, and the system automatically adjusts the liquid replenishment. The liquid replenishment component replenishes the regulating solution (such as acid solution, alkali solution) in the liquid storage tank into the texturing tank to adjust the conductivity of the texturing solution in the texturing tank until the conductivity of the texturing solution reaches within the preset range, so as to achieve the purpose of adjusting the morphology and quantity of the "pyramid" texture surface per unit area. Finally, the texturing step is completed, ultimately improving the performance of the battery chip, reducing the probability of rework of the battery chip, and saving costs. Description of the Drawings

[0017] To more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. For those skilled in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0018] To more comprehensively understand the present application and its beneficial effects, the following will be described in conjunction with the drawings. Among them, the same reference numerals in the following description represent the same parts.

[0019] Figure 1 Schematic diagram of the fluid infusion device according to an embodiment of the present utility model.

[0020] Description of reference numerals

[0021] 10. Fluid infusion device; 100. Liquid storage tank; 200. Fluid infusion component; 210. Liquid inlet pipeline; 220. Driving pump; 230. Valve component; 300. Conductivity detection component; 400. Control mechanism; 20. Texturing tank. Specific embodiments

[0022] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following will describe the specific embodiments of the present utility model in detail with reference to the drawings. Many specific details are set forth in the following description to facilitate a full understanding of the present utility model. However, the present utility model can be implemented in many other ways different from those described herein. Those skilled in the art can make similar improvements without departing from the spirit of the present utility model. Therefore, the present utility model is not limited by the specific embodiments disclosed below.

[0023] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present utility model.

[0024] In the present utility model, unless otherwise clearly defined or limited, terms such as "installation", "connection", "linkage", "fixation" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral one; it may be a mechanical connection or an electrical connection; it may be a direct connection or an indirect connection through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly limited. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0025] In the present utility model, unless otherwise clearly defined or limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "below" and "beneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0026] In the description of the present utility model, the meaning of "several" is more than one, the meaning of "multiple" is more than two, and understandings such as "greater than", "less than", "exceeding" do not include the present number, and understandings such as "above", "below", "within" include the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0027] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which the present utility model belongs. The terms used in the specification of the present utility model herein are only for the purpose of describing specific embodiments, and are not intended to limit the present utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0028] The embodiment of the present application provides a liquid supplement device 10 to solve the problems that in the traditional technology, the method of monitoring the reflectivity by measuring weight loss in the texturing process during the production of solar cells has low accuracy, resulting in low efficiency of the prepared battery wafers; and the manual adjustment of the concentration of the lye and the content of the additive by the operators cannot meet the requirements of large-scale production. The liquid supplement device 10 will be described below with reference to the accompanying drawings.

[0029] The liquid supplement device 10 provided by the embodiment of the present application, for example, please refer to Figure 1 as shown Figure 1This is a schematic structural diagram of the liquid replenishing device 10 provided by the embodiments of the present application. The liquid replenishing device 10 of the present application can be used for the texturing process in the production of solar cells. Specifically, the liquid replenishing device 10 of the present application can detect the conductivity of the texturing solution in the texturing tank 20 and timely replenish and adjust the solution to control the reflectivity of the "pyramid" texture surface of the monocrystalline silicon wafer after texturing.

[0030] To more clearly illustrate the structure of the liquid replenishing device 10, the liquid replenishing device 10 will be introduced below in conjunction with the accompanying drawings. Exemplarily, please refer to Figure 1 As shown, a liquid replenishing device 10 includes a liquid storage tank 100, a liquid replenishing component 200, and a conductivity detection component 300. The liquid storage tank 100 is connected to the texturing tank 20 through the liquid replenishing component 200. The liquid replenishing component 200 is used to replenish the regulating solution in the liquid storage tank 100 into the texturing tank 20. The conductivity detection component 300 is used to be arranged in the texturing tank 20 to detect the conductivity of the texturing solution in the texturing tank 20.

[0031] In some embodiments, the conductivity detection component 300 can be a corresponding concentration detection sensor.

[0032] In some embodiments, the liquid replenishing device 10 further includes a control mechanism 400. The control mechanism 400 is electrically connected to the liquid replenishing component 200 and the conductivity detection component 300. The control mechanism 400 can control the liquid replenishing component 200 to replenish liquid according to the conductivity detected by the conductivity detection component 300.

[0033] In some embodiments, when the conductivity detected by the conductivity detection component 300 is less than the minimum value of the preset range, the control mechanism 400 controls the liquid replenishing component 200 to replenish liquid according to the conductivity detected by the conductivity detection component 300.

[0034] In some embodiments, the preset range is 29 ms / cm to 30 ms / cm.

[0035] In some embodiments, the control mechanism 400 is a PLC programmable logic controller. In the present application, corresponding programs are set in the PLC programmable logic controller. For example, when the conductivity detected by the conductivity detection component 300 is not within the range of 29 ms / cm to 30 ms / cm, the control mechanism 400 controls the liquid replenishing component 200 to perform a liquid replenishing action to replenish liquid into the texturing tank 20 until the conductivity detected by the conductivity detection component 300 is again within the range of 29 ms / cm to 30 ms / cm. After the conductivity is within the range of 29 ms / cm to 30 ms / cm, the control mechanism 400 controls the liquid replenishing component 200 to stop replenishing liquid.

[0036] In some of these embodiments, the measurement range of the conductivity detection component 300 is 10 ms / cm to 2000 ms / cm.

[0037] In some of these embodiments, the operating ambient temperature of the conductivity detection component 300 is 65°C to 75°C. Preferably, the operating ambient temperature of the conductivity detection component 300 is controlled to be 70°C. That is to say, the temperature of the texturing solution in the texturing tank 20 detected by the conductivity detection component 300 is controlled to be 65°C to 75°C.

[0038] It should be noted that in this application, when it comes to numerical intervals (i.e., numerical ranges), unless otherwise specified, the distribution of the selectable numerical values within this numerical interval is regarded as continuous, and includes the two numerical endpoints (i.e., the minimum value and the maximum value) of this numerical interval, as well as each numerical value between these two numerical endpoints. Unless otherwise specified, when the numerical interval only refers to the integers within this numerical interval, it includes the two endpoint integers of this numerical range, as well as each integer between the two endpoints, which is equivalent to directly listing each integer. When providing multiple numerical ranges to describe features or characteristics, these numerical ranges can be combined. In other words, unless otherwise specified, the numerical ranges disclosed in this application should be understood to include any and all sub-ranges subsumed therein. The "numerical values" in this numerical interval can be any quantitative values, such as numbers, percentages, ratios, etc. The "numerical interval" allows for a broad inclusion of quantitative intervals such as percentage intervals, ratio intervals, and ratio value intervals.

[0039] In some of these embodiments, the conductivity detection component 300 selects a DN50 type inductive conductivity sensor. The DN50 type inductive conductivity sensor has a simple structure, can be used in strong acid and strong base environments, has no characteristics such as electrode polarization and capacitance effect, and has extremely strong anti-pollution ability and corrosion resistance characteristics, which is convenient to use.

[0040] In some of these embodiments, the liquid replenishing component 200 includes a liquid inlet pipe 210, a driving pump 220, and a valve component 230. One end of the liquid inlet pipe 210 is connected to the liquid storage tank 100. The other end of the liquid inlet pipe 210 extends into the texturing tank 20, and the driving pump 220 and the valve component 230 are both arranged on the liquid inlet pipe 210.

[0041] In some of these embodiments, the valve component 230 is a solenoid valve. The valve component 230 is electrically connected to the above-mentioned control mechanism 400.

[0042] In some of these embodiments, the adjusting solution can be an acidic solution and / or an alkaline solution.

[0043] In some of these embodiments, when the adjustment solution includes an acidic solution and a basic solution, there can be multiple liquid storage tanks 100. At least one of the liquid storage tanks 100 stores an acidic solution such as hydrofluoric acid, and at least one of the liquid storage tanks 100 stores a basic solution such as sodium hydroxide solution. Different liquid storage tanks 100 are respectively connected to the texturing tank 20 through the liquid replenishing component 200.

[0044] During the texturing process, a basic solution is placed in the texturing tank 20, and the basic solution can be sodium hydroxide. The following will take sodium hydroxide as an example for illustration. During texturing, the hydroxide ions in the sodium hydroxide solution are consumed, and the ionic reaction process is that Si reacts with hydroxide ions to form silicate ions. Therefore, it is necessary to monitor the concentration of hydroxide ions in the alkaline solution, and the concentration of hydroxide ions is a key factor in preparing a low-reflection textured surface. If the conductivity value of the texturing solution in the texturing tank 20 is lower than the range of 29 ms / cm to 30 ms / cm, then sodium hydroxide solution with the same concentration needs to be replenished into the texturing tank 20 until the conductivity value of the texturing solution in the texturing tank 20 is within the range of 29 ms / cm to 30 ms / cm.

[0045] An embodiment of the present application also provides a texturing device.

[0046] A texturing device includes a texturing tank 20 and a liquid replenishing device 10.

[0047] When the above-mentioned texturing device is in use, the untextured monocrystalline silicon wafer goes through the steps of weighing, texturing, drying, weighing again, measuring conductivity, and becoming a finished product. Among them, measuring conductivity and texturing are coordinated processes. When measuring conductivity, the conductivity of the sodium hydroxide solution in the texturing tank 20 is about 29 ms / cm to 30 ms / cm, and the conductivity of hydroxide ions can reach 24 ms / cm. When the conductivity measured by the conductivity detection component 300 is determined to be 22 ms / cm, it does not reach the set standard value, and about 20 mL of sodium hydroxide solution with the same concentration should be replenished. When the conductivity measured by the conductivity detection component 300 is determined to be 26 ms / cm, it exceeds the preset standard value, and about 20 mL of an acid solution such as hydrofluoric acid with the same concentration should be replenished. Then, the conductivity of the solution in the texturing tank 20 is detected again by the conductivity detection component 300, and so on, until the conductivity of the solution in the texturing tank 20 is between 29 ms / cm and 30 ms / cm, and then the texturing process can be carried out.

[0048] In summary, the above-mentioned liquid replenishing device 10 realizes good control of the reflectivity of the "pyramid" textured surface on the monocrystalline silicon wafer by monitoring the conductivity of the texturing solution, controls the number of "pyramids" per unit area of the monocrystalline silicon wafer, and the size, number, and morphology of the "pyramids" per unit area meet the requirements. It can also more accurately remove impurities, particle contamination, oil stains, etc. on the damaged layer of the silicon wafer surface.

[0049] In the above embodiments, the descriptions of the respective embodiments each have their own emphasis. For parts not described in detail in a certain embodiment, reference may be made to the relevant descriptions of other embodiments.

[0050] The technical features of the above-described embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as falling within the scope described in this specification.

[0051] The above-described embodiments merely represent several implementation manners of the present utility model. The descriptions thereof are relatively specific and detailed, but should not be construed as limiting the scope of the patent of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the patent of the present utility model shall be subject to the appended claims.

Claims

1. A fluid replenishing device (10), characterized in that: The invention comprises a liquid storage tank (100), a liquid replenishing component (200) and a conductivity detection component (300), wherein the liquid storage tank (100) is connected to a texturing tank (20) via the liquid replenishing component (200), the liquid replenishing component (200) is used to replenish the regulating solution in the liquid storage tank (100) into the texturing tank (20), and the conductivity detection component (300) is used to be arranged in the texturing tank (20) to detect the conductivity of the texturing solution in the texturing tank (20).

2. The fluid infusion device (10) according to claim 1, characterized in that: The fluid replenishment device (10) further comprises a control mechanism (400), wherein the control mechanism (400) is electrically connected to the fluid replenishment component (200) and the conductivity detection component (300), and the control mechanism (400) is capable of controlling the fluid replenishment component (200) to replenish fluid according to the conductivity detected by the conductivity detection component (300).

3. The fluid infusion device (10) according to claim 2, characterized in that: When the conductivity detected by the conductivity detection component (300) is less than the minimum value of the preset conductivity range, the control mechanism (400) controls the liquid replenishing component (200) to replenish liquid according to the conductivity detected by the conductivity detection component (300).

4. The fluid infusion device (10) according to claim 3, characterized in that: The preset range of conductivity is 29ms / cm~30ms / cm.

5. The fluid infusion device (10) according to any one of claims 2 to 4, characterized in that: The control mechanism (400) is a PLC programmable logic controller.

6. The fluid infusion device (10) according to any one of claims 1 to 4, characterized in that: The measurement range of the conductivity detection component (300) is 10 ms / cm to 2000 ms / cm.

7. The fluid infusion device (10) according to any one of claims 1 to 4, characterized in that: The working environment temperature of the conductivity detection component (300) is 65°C to 75°C.

8. The fluid infusion device (10) according to any one of claims 1 to 4, characterized in that: The liquid replenishing component (200) comprises a liquid inlet pipe (210), a driving pump (220) and a valve component (230); one end of the liquid inlet pipe (210) is connected to the liquid storage tank (100), and the other end of the liquid inlet pipe (210) extends into the texturing tank (20); the driving pump (220) and the valve component (230) are both arranged on the liquid inlet pipe (210).

9. The fluid infusion device (10) according to claim 8, characterized in that: The valve component (230) is a solenoid valve.

10. A texturing device, characterized in that: It comprises a texturing tank (20) and a liquid replenishing device (10) as claimed in any one of claims 1 to 9.

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