Thermal insulation structure of front open type crystal growth crucible

Abstract

The utility model provides a thermal insulation structure of a front open type crystal growth crucible, and relates to the technical field of crystal growth equipment. The front open type crystal growth crucible heat preservation structure comprises a first half barrel part, a second half barrel part, a first heat preservation felt and a second heat preservation felt. The first half barrel part is coated with the first heat preservation felt, and the second half barrel part is coated with the second heat preservation felt; two end faces of the first insulation felt are respectively butted with two end faces of the second insulation felt; a first concave-convex matching part is arranged on the end face of the first half barrel part, a second concave-convex matching part is arranged on the end face of the second half barrel part, and when the end face of the first half barrel part is in butt joint with the end face of the second half barrel part, the first concave-convex matching part is matched with the second concave-convex matching part so as to block a gap between the first half barrel part and the second half barrel part. The sealing performance is improved, the loss of internal heat can be reduced, the stability of an internal thermal field is improved, and the crystal growth quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of crystal growth equipment, and more specifically, to a front-opening thermal insulation structure for a crystal growth crucible. Background Art

[0002] After research by the inventor, it is found that there is a problem of unstable thermal field during the crystal growth process of the existing front-opening silicon carbide crystal growth equipment. The main reasons for this problem are as follows: after the front door of the equipment is closed, there are gaps with insufficient closure on the thermal insulation structure around the crystal growth crucible. These gaps are caused by the non-tight splicing of the front and rear halves of the thermal insulation structure (such as thermal insulation felt). During the crystal growth process, these gaps will cause heat leakage, resulting in an unstable thermal field and affecting the crystal growth quality. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a front-opening thermal insulation structure for a crystal growth crucible, which has good sealing performance, can reduce the loss of internal heat, improve the stability of the internal thermal field, and improve the crystal growth quality.

[0004] The embodiments of the utility model are implemented as follows:

[0005] The utility model provides a front-opening thermal insulation structure for a crystal growth crucible, which includes a first half-barrel part, a second half-barrel part, a first thermal insulation felt and a second thermal insulation felt;

[0006] The first thermal insulation felt is wrapped around the first half-barrel part, and the second thermal insulation felt is wrapped around the second half-barrel part; the end faces at both ends of the first thermal insulation felt are respectively butted against the end faces at both ends of the second thermal insulation felt; a first concave-convex matching part is arranged on the end face of the first half-barrel part, and a second concave-convex matching part is arranged on the end face of the second half-barrel part. When the end face of the first half-barrel part is butted against the end face of the second half-barrel part, the first concave-convex matching part cooperates with the second concave-convex matching part to block the gap between the first half-barrel part and the second half-barrel part.

[0007] In an optional embodiment, the first half-barrel part includes a first top wall, a first bottom wall and a first annular side wall, and the first annular side wall is connected between the first top wall and the first bottom wall;

[0008] The second half-barrel part includes a second top wall, a second bottom wall and a second annular side wall, and the second annular side wall is connected between the second top wall and the second bottom wall;

[0009] The end face of the first top wall is butted against the end face of the second top wall, the end face of the first bottom wall is butted against the end face of the second bottom wall, and the end faces at both ends of the first annular side wall are respectively butted against the end faces at both ends of the second annular side wall.

[0010] In an alternative embodiment, the first concave-convex engaging portion includes a groove provided on the end surface of the first top wall, and the second concave-convex engaging portion includes a convex portion provided on the end surface of the second top wall, and the groove engages with the convex portion.

[0011] In an alternative embodiment, the groove has a form with a wide opening and a narrow bottom.

[0012] In an alternative embodiment, the groove has the form of an isosceles trapezoid.

[0013] In an alternative embodiment, the first concave-convex engaging portion includes a first convex rib provided on one end surface of the first annular side wall, and the second concave-convex engaging portion includes a first notch provided on one end surface of the second annular side wall; the first convex rib engages with the first notch.

[0014] In an alternative embodiment, the first concave-convex engaging portion includes a second notch provided on the other end surface of the first annular side wall, and the second concave-convex engaging portion includes a second convex rib provided on the other end surface of the second annular side wall; the second convex rib engages with the second notch.

[0015] In an alternative embodiment, both the first convex rib and the second convex rib extend in the vertical direction, and the length a of both the first convex rib and the second convex rib is greater than the distance b between the first top wall and the first bottom wall.

[0016] In an alternative embodiment, a first convex platform is provided on the bottom surface of the first top wall, the first annular side wall is provided on the periphery of the first convex platform, and the top surface of the first convex rib is higher than the bottom surface of the first convex platform;

[0017] A second convex platform is provided on the top surface of the first bottom wall, the first annular side wall is provided on the periphery of the second convex platform, and the bottom surface of the first convex rib is lower than the top surface of the second convex platform.

[0018] In an alternative embodiment, the diameters of both the first top wall and the first bottom wall are greater than the outer diameter of the first annular side wall. The bottom surface of the first top wall, the top surface of the first bottom wall, and the outer peripheral surface of the first annular side wall enclose a U-shaped installation groove, and the first heat insulation felt is installed in the U-shaped installation groove.

[0019] The beneficial effects of the front-opening crystal growth crucible heat insulation structure provided by the embodiments of the present utility model include:

[0020] By designing mutually matching concave-convex structures (the first concave-convex engaging portion and the second concave-convex engaging portion) on the docking surfaces of the front and rear halves (the first half-barrel portion and the second half-barrel portion) of the front-opening crystal growth crucible heat insulation structure, the gap between the first half-barrel portion and the second half-barrel portion can be sealed. During the crystal growth process, the phenomenon of heat leakage through the gap can be reduced, the stability of the internal thermal field can be improved, and the crystal growth quality can be improved. Description of the Drawings

[0021] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the accompanying drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following accompanying drawings only show certain embodiments of the present utility model and should not be regarded as a limitation of the scope. For those of ordinary skill in the art, without creative efforts, other related accompanying drawings can also be obtained based on these drawings.

[0022] Figure 1 It is a schematic diagram of the overall structure of a perspective view of the front-opening crystal growth crucible heat preservation structure provided by the embodiment of the present utility model;

[0023] Figure 2 For Figure 1 It is an exploded view of the front-opening crystal growth crucible heat preservation structure in

[0024] Figure 3 It is a schematic diagram of the overall structure of another perspective view of the front-opening crystal growth crucible heat preservation structure provided by the embodiment of the present utility model;

[0025] Figure 4 For Figure 3 It is an exploded view of the front-opening crystal growth crucible heat preservation structure in

[0026] Figure 5 It is a schematic diagram of the overall structure of a perspective view of the first half-barrel part;

[0027] Figure 6 It is a schematic diagram of the overall structure of another perspective view of the first half-barrel part;

[0028] Figure 7 It is a schematic diagram of the overall structure of a perspective view of the second half-barrel part;

[0029] Figure 8 It is a schematic diagram of the overall structure of another perspective view of the second half-barrel part.

[0030] Icon: 1 - First half-barrel part; 11 - First top wall; 111 - Groove; 112 - First boss; 12 - First bottom wall; 121 - Second boss; 13 - First annular side wall; 131 - First rib; 132 - Second notch; 2 - Second half-barrel part; 21 - Second top wall; 211 - Protrusion; 22 - Second bottom wall; 23 - Second annular side wall; 231 - First notch; 232 - Second rib; 3 - U-shaped mounting groove; 4 - First heat insulation felt; 5 - Second heat insulation felt; 6 - Top temperature measurement hole; 7 - Top electrode introduction hole; 8 - Bottom electrode introduction hole; 9 - Rotating shaft hole. Detailed implementation manners

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0032] Therefore, the detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts fall within the scope of protection of the present utility model.

[0033] It should be noted that similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0034] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this utility model is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance.

[0035] In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging, but can be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0036] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0037] Please refer toFigures 1 to 4 , this embodiment provides a front-opening heat-insulating structure for a crystal-growing crucible. The front-opening heat-insulating structure for a crystal-growing crucible includes a first half-barrel portion 1, a second half-barrel portion 2, a first heat-insulating felt 4, and a second heat-insulating felt 5.

[0038] Among them, the first heat-insulating felt 4 is wrapped around the first half-barrel portion 1, and the second heat-insulating felt 5 is wrapped around the second half-barrel portion 2; the end faces at both ends of the first heat-insulating felt 4 are respectively butted against the end faces at both ends of the second heat-insulating felt 5; a first concave-convex mating portion is provided on the end face of the first half-barrel portion 1, and a second concave-convex mating portion is provided on the end face of the second half-barrel portion 2. When the end face of the first half-barrel portion 1 is butted against the end face of the second half-barrel portion 2, the first concave-convex mating portion cooperates with the second concave-convex mating portion to seal the gap between the first half-barrel portion 1 and the second half-barrel portion 2. Here, the first concave-convex mating portion and the second concave-convex mating portion can be a convex portion 211 and a concave groove 111 that can cooperate with each other, which can not only increase the stability of the cooperation between the first half-barrel portion 1 and the second half-barrel portion 2, but also reduce the phenomenon of heat leakage through the gap, improve the stability of the internal thermal field, and improve the crystal-growing quality.

[0039] Specifically, the first half-barrel portion 1 includes a first top wall 11, a first bottom wall 12, and a first annular side wall 13, and the first annular side wall 13 is connected between the first top wall 11 and the first bottom wall 12; the second half-barrel portion 2 includes a second top wall 21, a second bottom wall 22, and a second annular side wall 23, and the second annular side wall 23 is connected between the second top wall 21 and the second bottom wall 22.

[0040] The end face of the first top wall 11 is butted against the end face of the second top wall 21 and is provided with a mutually cooperating concave-convex structure. The end face of the first bottom wall 12 is butted against the end face of the second bottom wall 22. The end faces at both ends of the first annular side wall 13 are respectively butted against the end faces at both ends of the second annular side wall 23 and are provided with a mutually cooperating concave-convex structure.

[0041] The diameters of the first top wall 11 and the first bottom wall 12 are both larger than the outer diameter of the first annular side wall 13. The bottom surface of the first top wall 11, the top surface of the first bottom wall 12, and the outer peripheral surface of the first annular side wall 13 enclose a U-shaped installation groove 3. In this way, the overall outer shape of the first half-barrel portion 1 and the second half-barrel portion 2 is in an I-shaped form, and the first heat-insulating felt 4 is installed in the U-shaped installation groove 3, which can make the installation of the first heat-insulating felt 4 stable.

[0042] The structural form of the second half-barrel portion 2 can be the same as that of the first half-barrel portion 1, and will not be elaborated here.

[0043] The first heat-insulating felt 4 and the second heat-insulating felt 5 are spliced to form a complete circular ring to achieve complete wrapping of the outer peripheral surfaces of the first half-barrel portion 1 and the second half-barrel portion 2. The mutually butted end faces of the first heat-insulating felt 4 and the second heat-insulating felt 5 can also be designed with mutually cooperating concave-convex structures to further improve the sealing performance after the first heat-insulating felt 4 and the second heat-insulating felt 5 are spliced.

[0044] Please refer to Figure 1 and Figure 2 ,The first top wall 11 and the second top wall 21 are spliced to form a complete top disk, and a top temperature measuring hole 6 and a top electrode introduction hole 7 are also provided on the top disk. In this embodiment, two top electrode introduction holes 7 are provided for installing the electrodes of the single-phase heater.

[0045] The first bottom wall 12 and the second bottom wall 22 are spliced to form a complete bottom disk, and a bottom electrode introduction hole 8 and a rotating shaft hole 9 are also provided on the bottom disk. In this embodiment, six bottom electrode introduction holes 8 are provided for installing the electrodes of the three-phase heater. The rotating shaft hole 9 is provided at the center of the bottom disk for installing the rotating shaft supporting the crystal growth crucible, and the rotating shaft is a hollow structure, and the bottom temperature of the crystal growth crucible can be measured through the rotating shaft.

[0046] Please refer to Figures 3 to 8 ,The first concave-convex fitting part includes a groove 111 provided on the end surface of the first top wall 11, and the second concave-convex fitting part includes a convex part 211 provided on the end surface of the second top wall 21. The number of convex parts 211 can be one or more. In this embodiment, only one convex part 211 is shown.

[0047] The groove 111 cooperates with the convex part 211. Among them, the groove 111 is in the form of a wide opening and a narrow bottom, specifically in the form of an isosceles trapezoid, and the structural form of the convex part 211 naturally adapts to the structural form of the groove 111.

[0048] The first concave-convex fitting part includes a first convex rib 131 provided on one end surface of the first annular side wall 13, and the second concave-convex fitting part includes a first notch 231 provided on one end surface of the second annular side wall 23; the first convex rib 131 cooperates with the first notch 231.

[0049] The first concave-convex fitting part includes a second notch 132 provided on the other end surface of the first annular side wall 13, and the second concave-convex fitting part includes a second convex rib 232 provided on the other end surface of the second annular side wall 23; the second convex rib 232 cooperates with the second notch 132.

[0050] Please refer to Figure 6 and Figure 8, both the first convex rib 131 and the second convex rib 232 extend in the vertical direction, and the length a of both the first convex rib 131 and the second convex rib 232 is greater than the distance b between the first top wall 11 and the first bottom wall 12. A first convex platform 112 is provided on the bottom surface of the first top wall 11, and the first annular side wall 13 is arranged on the periphery of the first convex platform 112, and the top surface of the first convex rib 131 is higher than the bottom surface of the first convex platform 112; a second convex platform 121 is provided on the top surface of the first bottom wall 12, and the first annular side wall 13 is arranged on the periphery of the second convex platform 121, and the bottom surface of the first convex rib 131 is lower than the top surface of the second convex platform 121. In this way, the first convex rib 131 and the second convex rib 232 can completely block the gap between the first annular side wall 13 and the second annular side wall 23, significantly improving the sealing performance.

[0051] The beneficial effects of the front-opening crystal growth crucible heat preservation structure provided by the embodiment of the present utility model include:

[0052] 1. By designing mutually matching concave-convex structures (including mutually matching convex part 211 and groove 111, mutually matching first convex rib 131 and first notch 231, mutually matching second convex rib 232 and second notch 132) on the docking surfaces of the front and rear halves (the first half barrel part 1 and the second half barrel part 2) of the front-opening crystal growth crucible heat preservation structure, the gap between the first half barrel part 1 and the second half barrel part 2 can be blocked. During the crystal growth process, the phenomenon of heat leakage through the gap can be reduced, the stability of the internal thermal field can be improved, and the crystal growth quality can be improved.

[0053] 2. Designing mutually matching concave-convex structures on the docking surfaces of the first half barrel part 1 and the second half barrel part 2 can also improve the assembly stability and accuracy of the first half barrel part 1 and the second half barrel part 2.

[0054] The above are only the preferred embodiments of the present utility model and are not used to limit the present utility model. For those skilled in the art, the present utility model can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included in the protection scope of the present utility model.

Claims

1. A front-opening crystal growth crucible insulation structure, characterized in that: The front-opening crystal growth crucible heat-insulating structure comprises a first half barrel portion (1), a second half barrel portion (2), a first heat-insulating felt (4) and a second heat-insulating felt (5); The first thermal insulation felt (4) is wrapped around the first half barrel portion (1), and the second thermal insulation felt (5) is wrapped around the second half barrel portion (2); the end faces of both ends of the first thermal insulation felt (4) are respectively butted against the end faces of both ends of the second thermal insulation felt (5); a first concave-convex fitting portion is provided on the end face of the first half barrel portion (1), and a second concave-convex fitting portion is provided on the end face of the second half barrel portion (2); when the end face of the first half barrel portion (1) is butted against the end face of the second half barrel portion (2), the first concave-convex fitting portion is matched with the second concave-convex fitting portion to seal the gap between the first half barrel portion (1) and the second half barrel portion (2).

2. The front-opening crystal growth crucible insulation structure according to claim 1, characterized in that: The first half barrel portion (1) comprises a first top wall (11), a first bottom wall (12) and a first annular side wall (13), wherein the first annular side wall (13) is connected between the first top wall (11) and the first bottom wall (12); The second half barrel portion (2) comprises a second top wall (21), a second bottom wall (22) and a second annular side wall (23), wherein the second annular side wall (23) is connected between the second top wall (21) and the second bottom wall (22); The end surface of the first top wall (11) is connected to the end surface of the second top wall (21), the end surface of the first bottom wall (12) is connected to the end surface of the second bottom wall (22), and the end surfaces at both ends of the first annular side wall (13) are respectively connected to the end surfaces at both ends of the second annular side wall (23).

3. The front-opening crystal growth crucible insulation structure according to claim 2, characterized in that: The first concave-convex matching portion comprises a groove (111) arranged on the end surface of the first top wall (11), and the second concave-convex matching portion comprises a convex portion (211) arranged on the end surface of the second top wall (21), and the groove (111) matches with the convex portion (211).

4. The front-opening crystal growth crucible heat preservation structure according to claim 3, characterized in that: The groove (111) is in the form of a wide opening and a narrow bottom.

5. The front-opening crystal growth crucible heat preservation structure according to claim 4, characterized in that: The groove (111) is in the form of an isosceles trapezoid.

6. The front-opening crystal growth crucible heat preservation structure according to claim 2, characterized in that: The first concave-convex matching portion comprises a first ridge (131) arranged on an end surface of one side of the first annular side wall (13), and the second concave-convex matching portion comprises a first notch (231) arranged on an end surface of one side of the second annular side wall (23); the first ridge (131) matches with the first notch (231).

7. The front-opening crystal growth crucible heat preservation structure according to claim 6, characterized in that: The first concave-convex matching portion comprises a second notch (132) arranged on the end surface of the other side of the first annular side wall (13), and the second concave-convex matching portion comprises a second ridge (232) arranged on the end surface of the other side of the second annular side wall (23); the second ridge (232) matches with the second notch (132).

8. The front-opening crystal growth crucible heat preservation structure according to claim 7, characterized in that: The first convex ridge (131) and the second convex ridge (232) both extend in a vertical direction, and the length a of the first convex ridge (131) and the second convex ridge (232) are both greater than the distance b between the first top wall (11) and the first bottom wall (12).

9. The front-opening crystal growth crucible heat preservation structure according to claim 8, characterized in that: A first boss (112) is arranged on the bottom surface of the first top wall (11), the first annular side wall (13) is arranged on the periphery of the first boss (112), and the top surface of the first convex ridge (131) is higher than the bottom surface of the first boss (112); A second boss (121) is arranged on the top surface of the first bottom wall (12), the first annular side wall (13) is arranged on the periphery of the second boss (121), and the bottom surface of the first convex ridge (131) is lower than the top surface of the second boss (121).

10. The front-opening crystal growth crucible heat preservation structure according to claim 2, characterized in that: The diameters of the first top wall (11) and the first bottom wall (12) are both larger than the outer diameter of the first annular side wall (13); the bottom surface of the first top wall (11), the top surface of the first bottom wall (12) and the outer peripheral surface of the first annular side wall (13) form a U-shaped mounting groove (3); and the first thermal insulation felt (4) is mounted in the U-shaped mounting groove (3).

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