Target C scanning detection device

Abstract

The utility model discloses a target material C scanning detection device which comprises a box body, and a scanning assembly is arranged at the upper end in the box body. An inner box is arranged in the box body and composed of a front side plate, a rear side plate, a left side plate and a right side plate, the front side plate and the rear side plate are symmetrical, and the left side plate and the right side plate are both provided with corresponding limiting sliding grooves. A first placing assembly and a second placing assembly are arranged in the inner box. According to the utility model, two groups of placing assemblies are arranged, so that the device is suitable for cylindrical and disc-shaped target materials; for a cylindrical target material, the supporting distance can be adjusted, and stable supporting and driving rotation can be achieved for target materials of different sizes; and for the disc-shaped target material, the placing assembly is put down when the target material is used, the placing assembly is put up when the target material is not used, disassembly is not needed, and operation is easy and rapid.

Description

Technical Field

[0001] The utility model relates to the technical field of ultrasonic detection, in particular to a target C-scan detection device. Background Art

[0002] Sputtering is one of the main technologies for fabricating thin-film integrated circuits, and the raw material for sputtering and depositing thin films is a target. The target consists of a target blank and a backplane. The quality of the target mainly depends on the purity and the connection process between the target blank and the backplane. There may be impurities such as inclusions and air at the connection, which are likely to cause the target to crack and affect the overall performance of the target. Ultrasonic scanning can be used to detect it.

[0003] The piezoelectric wafer built into the ultrasonic probe emits ultrasonic waves under the stimulation of an electric current and enters the target through the coupling medium water. Since the acoustic impedance of ultrasonic waves is different in different media, once encountering defects such as internal inclusions, cracks or air, the reflected waves will also show amplitude changes. The defects, purity and density distribution inside the target can be clearly detected from the ultrasonic scanning image to judge the quality problems inside the target.

[0004] In actual use, there are two types of targets, cylindrical and disc-shaped, and the ultrasonic detection placement components for them are different. In the prior art, the common placement structure is for cylindrical targets and is not applicable to disc-shaped targets. In addition, the placement structure for cylindrical targets is fixed, and when driving the target to rotate for detection, the fixed placement structure is not applicable to targets of different sizes and there is room for improvement. Summary of the Utility Model

[0005] The utility model aims to solve the technical problems in the prior art that the placement structures for cylindrical and disc-shaped targets are not universal and have low applicability, and provides a target C-scan detection device.

[0006] To solve the above technical problems, the technical solution provided by the utility model is: a target C-scan detection device, including a box body, an entrance is hinged near the front end on the upper surface of the box body, and a scanning component is arranged at the upper end inside the box body; an inner box is arranged inside the box body, and the inner box is composed of symmetric front and rear side plates and symmetric left and right side plates, and corresponding limiting chutes are arranged on both the left and right side plates; a placement component one and a placement component two are arranged inside the inner box;

[0007] The placement component one includes a plurality of round rollers, shafts are arranged on the left sides of the round rollers, and motors are connected to the left sides of the shafts; threaded rods are connected to the left sides of the motors, the threaded rods all extend out of the corresponding limiting chutes and are threadedly connected with locking nuts on the outside; a through hole is arranged on the right side of the inner box, and a bearing capable of being connected to the round roller is arranged in the through hole, and the right sides of the round rollers extend out of the inner box and are provided with threaded rods two, and locking nuts two are threadedly connected to the outside of the threaded rods two;

[0008] The second placing component includes several support rods arranged inside the inner box. The upper ends of the support rods are commonly connected to a long strip-shaped connecting plate, and several support plates are hinged on the front surface of the connecting plate and located at the upper end.

[0009] Preferably, concave surfaces are provided on the mutually remote side surfaces of the front and rear side plates of the inner box, and several reinforcing braces are provided in the concave surfaces.

[0010] Preferably, the inner diameters of the lock nut and the second lock nut are greater than the height of the limit sliding groove.

[0011] Preferably, mounting plates are provided at the lower ends of the support rods. A plurality of mounting holes are evenly distributed on the mounting plates, and they are all connected to the inner box through bolts.

[0012] Preferably, the connecting plate and the support plate are connected through hinges at the upper end.

[0013] Preferably, several reinforcing members are provided on the inner back surface of the inner box. The reinforcing members are all L-shaped and are connected to the inner box and the connecting plate through bolts.

[0014] The advantages of the present utility model compared with the prior art are as follows:

[0015] 1. Two groups of placing components are provided, which are applicable to both cylindrical and disc-shaped target materials;

[0016] 2. For the cylindrical target material, the support spacing can be adjusted, so as to stably support and drive the rotation of target materials of different sizes;

[0017] 3. For the disc-shaped target material, when in use, the placing component is put down, and when not in use, it can be retracted upward. There is no need to disassemble, and the operation is simple and fast. And according to the actual size or quantity of the target material, the corresponding number of support plates can be selected to be put down, and the rest is still retracted, so that the first placing component below is exposed, so that the disc-shaped and cylindrical target materials can be detected simultaneously. Description of the Drawings

[0018] Figure 1 is a schematic structural view of the present utility model.

[0019] Figure 2 is a schematic view of the internal structure of the inner box of the present utility model disassembled.

[0020] Figure 3 is a schematic structural view of the first placing component of the present utility model.

[0021] Figure 4 is a schematic structural view of the round roller of the present utility model.

[0022] Figure 5It is a schematic structural diagram of the second placement component of the present utility model.

[0023] Figure 6 It is a schematic structural diagram of the right side plate of the inner box of the present utility model.

[0024] Figure 7 It is a schematic structural diagram of the reinforcement member of the present utility model.

[0025] As shown in the figure: 1. Box body, 2. Entrance, 3. Inner box, 4. Front and rear side plates, 5. Left and right side plates, 6. Limit sliding groove, 7. Reinforcing strut, 8. Round roller, 9. Shaft, 10. Motor, 11. Threaded rod, 12. Locking nut, 13. Bearing, 14. Second threaded rod, 15. Second locking nut, 16. Support rod, 17. Mounting plate, 18. Connecting plate, 19. Support plate, 20. Reinforcement member. Specific embodiments

[0026] The following further describes the present utility model in detail with reference to the accompanying drawings.

[0027] Embodiment 1, in combination with the attached Figure 1 , the target C scanning detection device includes a box body 1, and an entrance 2 is hinged on the upper surface of the box body 1 near the front end, and a scanning component is provided at the upper end inside the box body 1.

[0028] In combination with the attached Figure 1 , 2 , 6, an inner box 3 is provided inside the box body 1. The inner box 3 is composed of symmetric front and rear side plates 4 and symmetric left and right side plates 5. Corresponding limit sliding grooves 6 are provided on both the left and right side plates 5 for accommodating the threaded rod 11 and the second threaded rod 14 proposed below; concave surfaces are provided on the mutually remote sides of the front and rear side plates 4 of the inner box 3, and a plurality of reinforcing struts 7 are provided in the concave surfaces to improve the structural strength of the inner box 3; a first placement component and a second placement component are provided inside the inner box 3 for placing cylindrical target workpieces and disc-shaped target workpieces respectively.

[0029] In combination with the attached Figure 2 , 34. The placement component 1 includes a plurality of round rollers 8. A shaft 9 is provided on the left side of the round rollers 8. A motor 10 is connected to the left side of the shaft 9. The round rollers 8 are driven to rotate by the motor 10 and the shaft 9, thereby driving the target workpiece placed between the two round rollers 8 to rotate for detection; a threaded rod 11 is connected to the left side of the motor 10. The threaded rod 11 extends out of the corresponding limiting slide groove 6 and is threadedly connected to a locking nut 12 on the outer side; a through hole is provided on the right side of the inner box 3. A bearing 13 that can be connected to the round roller 8 is provided in the through hole, so that the round roller 8 can rotate in the inner box 3. A threaded rod 2 14 is provided on the right side of the round roller 8 extending out of the inner box 3. A locking nut 2 15 is threadedly connected to the outer side of the threaded rod 2 14; the round roller 8 can be restricted in the inner box 3 by relatively rotating the locking nut 12 and the locking nut 2 15, and then the motor 10 and the bearing 13 are cooperated to enable the round roller 8 to rotate in the inner box 3.

[0030] Combined with Figure 2 , 3 4. The inner diameters of the locking nut 12 and the locking nut 15 are greater than the height of the limiting slide groove 6, so that the locking nut 12 and the locking nut 15 can limit the threaded rod 11 and the threaded rod 14 outside the inner box 3 without entering the limiting slide groove 6.

[0031] Combined with Figure 2 , 5 The placement component 2 includes a plurality of support rods 16 provided in the inner box 3, and the upper ends of the support rods 16 are connected together with a long connecting plate 18. A plurality of supporting plates 19 are hingedly provided on the front side of the connecting plate 18 and at the upper end. The connecting plates 18 and the supporting plates 19 are connected by hinges at the upper ends. Since the connecting plates 18 and the supporting plates 19 have a certain thickness, they will abut against each other when put down to avoid a large flip angle, which causes the connecting plates 18 and the supporting plates 19 to be uneven.

[0032] Combined with Figure 2 The lower end of the support rod 16 is provided with a mounting plate 17, and a plurality of mounting holes are evenly distributed on the mounting plate 17, and are all connected to the inner box 3 by bolts, so as to increase the stability of the support rod 16 and enable disassembly.

[0033] Combined with Figure 5 , 7 A plurality of reinforcing members 20 are provided on the inner back of the inner box 3 . The reinforcing members 20 are all L-shaped and are connected to the inner box 3 and the connecting plate 18 by bolts. The reinforcing members 20 can increase the stability of the connecting plate 18 .

[0034] Working principle of the present utility model: When it is necessary to detect a cylindrical target workpiece, the distance between the corresponding round rollers 8 is adjusted according to the size of the target. During adjustment, the threaded rod 11 and the second threaded rod 14 slide between the corresponding limit sliding grooves 6, and then the locking nuts 12 and the second locking nuts 15 are tightened for limitation. The target workpiece is placed between the two round rollers 8, and the motor 10 drives the round rollers 8 to rotate through the shaft 9, thereby driving the target workpiece to rotate for detection;

[0035] When it is necessary to detect a disc-shaped target workpiece, the hinged support plate 19 is lowered to the horizontal, and the target workpiece is placed on the support plate 19 for detection, without the need for frequent installation and disassembly;

[0036] In addition, only part of the hinged support plate 19 is lowered to expose part of the rotating round roller 8. At this time, the detection of both cylindrical and disc-shaped target workpieces can be carried out simultaneously.

[0037] The present utility model and its implementation manners have been described above. Such description is not restrictive. What is shown in the drawings is only one of the implementation manners of the present utility model, and the actual structure is not limited thereto. All in all, if those of ordinary skill in the art are inspired by it and, without departing from the gist of the creation of the present utility model, design similar structural manners and embodiments to this technical solution without creative efforts, they shall fall within the protection scope of the present utility model.

Claims

1. A target material C scanning detection device, comprising a box (1), an inlet (2) is hingedly provided on the top of the box (1) near the front end, and a scanning component is provided at the upper end of the box (1); the characteristics are: An inner box (3) is arranged inside the box body (1), and the inner box (3) is composed of symmetrical front and rear side panels (4) and symmetrical left and right side panels (5), wherein the left and right side panels (5) are both provided with corresponding limiting slide grooves (6); a placement component 1 and a placement component 2 are arranged inside the inner box (3); The placement component 1 comprises a plurality of round rollers (8), each of which is provided with a shaft (9) on the left side of each round roller (8), and each of which is connected to a motor (10) on the left side of each shaft (9); each of which is connected to a threaded rod (11) on the left side of each motor (10), and each of which extends out of a corresponding limiting slide groove (6) and is threadedly connected to a locking nut (12) on the outer side; a through hole is provided on the right side of the inner box (3), and a bearing (13) capable of being connected to the round roller (8) is provided in the through hole; a threaded rod 2 (14) is provided on the right side of the round roller (8) extending out of the inner box (3), and a locking nut 2 (15) is threadedly connected to the outer side of the threaded rod 2 (14); The second placement component comprises a plurality of support rods (16) arranged in the inner box (3), the upper ends of the support rods (16) being commonly connected with a long strip connecting plate (18), and a plurality of support plates (19) being hingedly arranged on the front side and at the upper end of the connecting plate (18).

2. The target material C-scanning detection device according to claim 1, characterized in that: The sides of the front and rear side plates (4) of the inner box (3) that are away from each other are both provided with concave surfaces, and a plurality of reinforcing braces (7) are both provided in the concave surfaces.

3. The target material C-scanning detection device according to claim 1, characterized in that: The inner diameters of the locking nut (12) and the second locking nut (15) are greater than the height of the limiting sliding groove (6).

4. The target material C-scanning detection device according to claim 1, characterized in that: The lower ends of the support rods (16) are each provided with a mounting plate (17), and the mounting plate (17) is evenly provided with a plurality of mounting holes, and each of the mounting plates (17) is connected to the inner box (3) via bolts.

5. The target material C-scanning detection device according to claim 1, characterized in that: The connection plate (18) and the support plate (19) are connected at the upper end by hinges.

6. The target material C-scanning detection device according to claim 1, characterized in that: A plurality of reinforcing members (20) are provided on the inner back surface of the inner box (3); the reinforcing members (20) are all L-shaped and are connected to the inner box (3) and the connecting plate (18) by bolts.

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