Flexible driving device and wax pasting equipment

Abstract

The utility model relates to a flexible driving device and a wax pasting device. Comprising a base, a first temperature control clamp installed on the base and provided with a positioning ring, a guide frame arranged on the base, a linear driving piece arranged on the guide frame, a floating connector arranged at the moving end of the linear driving piece, and a sliding frame connected to the guide frame in a sliding mode and arranged on the floating connector. The second temperature control clamp is arranged on the sliding frame and is provided with a clamping jaw group; the positioning ring, the floating joint and the clamping jaw group are approximately positioned on the same axis; the wax pasting equipment comprises the flexible driving device. According to the utility model, the workpiece and the fixing tool are centered and mounted, and the downward pressure is flexibly adjusted along the centering shaft, so that the problem that the thickness of a wax layer between the workpiece and the fixing tool is not uniform is solved, and the accurate control on the uniformity of the wax layer in the wax pasting process can be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a flexible driving device and wax sticking equipment. Background Art

[0002] In the silicon carbide ingot processing process, laser slicing technology is a new method for producing silicon carbide wafers, which is expected to replace the traditional diamond wire saw slicing process. In a dry environment, the pulsed laser is focused on the cutting surface parallel to the base surface through laser slicing technology. The local transient high temperature produces high-density dislocations, forming a very thin (<50μm) modified layer mixed with amorphous silicon, amorphous carbon and amorphous silicon carbide. In the modified layer, the molecular bonding of the material is destroyed and the connection of the material is weakened. It is then split into two and peeled off for the next grinding operation. Based on the processing quality requirements of silicon carbide wafers, fixed tooling is required to support and fix workpieces such as ingots or wafers to assist in processing. At this time, paraffin is needed to bond the workpiece to the fixed tooling.

[0003] The Chinese patent with authorization announcement number CN115410979B recently applied for by the applicant discloses a method for stripping a wafer, which adopts a stripping device to complete the loading, clamping, fixing and stripping steps; the stripping device includes a workbench, a linear drive module, a constant pressure adjustment mechanism, a pair of temperature control clamps, and a control module; the constant pressure adjustment mechanism includes a pressure detection module and a linear bearing arranged at the output end of the linear drive module, and an abutment rod slidably penetrated on the linear bearing, the pressure detection module is electrically connected to the control module, one end of the abutment rod abuts against the detection end of the pressure detection module, and the other end is connected to one of the temperature control clamps.

[0004] During the subsequent research and development process, the applicant transferred the above-mentioned stripping device to the waxing equipment. This pair of temperature-controlled clamps were used to install the workpiece and the fixed fixture respectively to complete the waxing fixation between the workpiece and the fixed fixture. During the waxing process, the applicant found that the above-mentioned constant pressure adjustment mechanism could only complete the constant pressure feeding of the linear drive module, and could not meet the need for adjusting the parallelism between the pressurized surfaces during the waxing process, resulting in uneven thickness of the wax layer between the workpiece and the fixed fixture, affecting the accuracy and quality of subsequent processing. Therefore, the applicant further developed a flexible drive device to achieve precise control of the uniformity of the wax layer during the waxing process, thereby improving the waxing quality and the subsequent processing accuracy of the workpiece. Utility Model Content

[0005] Aiming at the deficiencies of the existing technology, the first object of the present utility model is to provide a flexible driving device, which solves the problem of uneven thickness of the wax layer between the workpiece and the fixed fixture by centering and installing the workpiece and the fixed fixture, and flexibly adjusting the downward pressure along the centering axis, and can achieve precise control of the uniformity of the wax layer during the waxing process.

[0006] The second object of the present utility model is to provide a waxing device, which has the advantage of precisely controlling the uniformity of the wax layer.

[0007] To achieve the above first object, the present utility model provides the following technical solutions:

[0008] A flexible driving device includes a base, a first temperature control fixture installed on the base and provided with a positioning ring, a guiding frame arranged on the base, a linear driving member arranged on the guiding frame, a floating joint arranged at the moving end of the linear driving member, a sliding frame slidably connected to the guiding frame and arranged on the floating joint, and a second temperature control fixture arranged on the sliding frame and provided with a jaw group. The positioning ring, the floating joint and the jaw group are approximately on the same axis.

[0009] By adopting the above technical solutions, in the actual use process, first, a workpiece such as an ingot is placed on the positioning ring of the first temperature control fixture, and the fixed fixture is clamped and fixed by the jaw group of the second temperature control fixture to complete the centering installation of the workpiece and the fixed fixture. Then, an adhesive is coated on the top surface of the workpiece, and then the linear driving member is started to drive the sliding frame, the second temperature control fixture and the fixed fixture to press down as a whole. When the fixed fixture contacts the adhesive coating, the pressure between the two will be feedback to the floating joint, and the floating joint can be used to absorb eccentricity and angular deviation to realize the parallelism adjustment between the workpiece and the fixed fixture. Furthermore, it can ensure that during the downward pressure process, the thickness of the wax layer between the workpiece and the fixed fixture is uniform, improving the waxing quality. Then, through the temperature adjustment of the first temperature control fixture and the second temperature control fixture, heat or cold is conducted from the fixed fixture and the workpiece to the adhesive, so that the adhesive is bonded and fixed to form a wax layer. By adopting the above structure, due to the flexible characteristics of the floating joint, it can ensure that the TTV of the wax layer after bonding is within 100 μm, preferably within 30 μm, and the downward pressure is controlled by the linear driving member and other components to realize the control of the wax layer thickness within 10 - 300 μm.

[0010] The present utility model is further arranged as: a rotary driving member is arranged on the base, and the first temperature control fixture is arranged on the output shaft of the rotary driving member.

[0011] By adopting the above technical solution, during the processes of coating the bonding agent on the top surface of the workpiece and removing the excess bonding agent on the side surface of the workpiece, the coating point or scraping point can be kept unchanged, and the workpiece on the first temperature control fixture can be driven to rotate by itself through the rotation driving part. The first temperature control fixture can preferably adopt a vacuum chuck to enhance the installation stability and complete the corresponding operations, thereby improving the convenience and efficiency of the operation. In addition, the setting of the rotation driving part enables the workpiece to evenly coat the bonding agent during the wax pasting process, avoiding the problem of inconsistent wax layer thickness caused by uneven manual operation.

[0012] The present utility model is further configured such that: the rotation driving part is set as a rotation motor or a rotation cylinder.

[0013] By adopting the above technical solution, preferably using a rotation motor as the rotation driving part can achieve precise rotational speed control and stable rotational motion, thereby ensuring that the bonding agent on the surface of the workpiece is evenly distributed during the processes of coating the bonding agent and scraping the excess bonding agent, further improving the uniformity and quality of the wax layer. The use of the rotation motor can also reduce the labor intensity of the operator and improve the production efficiency.

[0014] The present utility model is further configured such that: the linear driving part is set as a cylinder, a hydraulic cylinder, a linear motor module or an electric push rod.

[0015] By adopting the above technical solution, preferably using a cylinder as the linear driving part can achieve fast response and high-precision linear motion control. The use of the cylinder also has the characteristics of low cost and simple maintenance. The stroke and speed of the cylinder can be adjusted according to actual needs to adapt to the wax pasting requirements of workpieces with different sizes and shapes. In addition, the use of the cylinder can reduce the complexity of the equipment and improve the reliability of the system.

[0016] The present utility model is further configured such that: the floating joint is an integral floating joint.

[0017] By adopting the above technical solution, the integral floating joint has better integrity and strength and can withstand greater pressure without deformation. Its design can ensure that during the wax pasting process, even if there are slight unevenness between the workpiece and the fixed tooling, the floating joint can effectively compensate for it, thereby maintaining the parallelism between the two. In addition, the structure of the integral floating joint is simple, facilitating installation and maintenance, reducing the downtime caused by joint damage, and improving the stability and reliability of the equipment.

[0018] The present utility model is further configured such that: the position of the jaws of the jaw group on the second temperature control fixture is adjustable.

[0019] By adopting the above technical solutions, the radial movement of the jaws of the jaw group on the second temperature control fixture can be realized by using a conventional chuck structure. The jaw structure can be adaptively designed according to the outer contour of the fixed tooling, so as to achieve precise clamping of workpieces with different shapes and sizes; the position adjustability of the jaw group makes the equipment have higher flexibility and adaptability, and can meet diverse production requirements; at the same time, by adjusting the position of the jaws, it can ensure that the workpiece remains stable during the waxing process, avoid workpiece displacement caused by insufficient clamping, and further improve the uniformity of the wax layer and the waxing quality.

[0020] To achieve the above second object, the present utility model provides the following technical solutions:

[0021] A waxing device, including the above flexible driving device.

[0022] By adopting the above technical solutions, the waxing device can achieve precise control of the thickness of the wax layer on the surface of the workpiece, thereby ensuring the uniformity of the wax layer.

[0023] The present utility model is further configured as: further including a wax injector, and the moving path of the wax injection end of the wax injector passes above the first temperature control fixture.

[0024] By adopting the above technical solutions, the wax injection end of the wax injector can be moved above the first temperature control fixture by means of manual or robotic arm assistance, so as to achieve the operation of coating the binder before processing and removing the wax injection end during processing, thereby improving production efficiency and operation convenience. The precise control of the moving path of the wax injection end of the wax injector ensures the uniform coating of the binder on the surface of the workpiece and avoids the problem of inconsistent wax layer thickness caused by uneven manual operation.

[0025] The present utility model is further configured as: further including a scraper, and the scraper is installed on the guide frame in a manner that the blade faces the circumferential wall of the workpiece on the first temperature control fixture.

[0026] By adopting the above technical solutions, the scraper can precisely scrape off the excess binder on the side of the workpiece to ensure the uniformity of the wax layer thickness; the installation position and angle of the scraper can be adjusted according to the shape and size of the workpiece to meet the waxing requirements of different workpieces. Through the precise control of the guide frame, the scraper can perform a uniform scraping action along the circumferential wall of the workpiece, avoiding the inconsistencies that may be brought about by manual operation; in addition, the use of the scraper can also reduce the waste of the binder and lower the production cost.

[0027] The present utility model is further configured as: an elastic connecting member is provided between the scraper and the guide frame, and the moving direction of the elastic connecting member is perpendicular to the axial direction of the workpiece on the first temperature control fixture.

[0028] By adopting the above technical solutions, the elastic connecting piece can absorb the vibration and impact force generated during the scraping process of the scraper, thereby ensuring the smoothness of the scraping action. It can also keep an appropriate pre-pressure between the scraper and the workpiece surface, effectively avoiding scratching or damaging the workpiece surface and improving the surface quality of the wax layer. At the same time, the elastic characteristics of the elastic connecting piece can also adapt to adhesives with different hardnesses and thicknesses, ensuring the consistency of the scraping effect. In addition, by precisely controlling the elastic coefficient of the elastic connecting piece, fine-tuning of the scraper pressure can be achieved, further improving the uniformity of the wax layer thickness.

[0029] In summary, the beneficial technical effects of the present utility model are as follows:

[0030] 1. By precisely controlling the wax layer thickness, the wax layer on the workpiece surface is ensured to be uniform, thereby improving the waxing quality of the workpiece;

[0031] 2. By adopting technical means such as a rotating motor and a floating joint, the convenience and efficiency of operation are improved, and the labor intensity of operators is reduced;

[0032] 3. Through the quick response and high-precision control of the linear driving member, the uniformity of the adhesive distribution on the workpiece surface is achieved, further improving the uniformity and quality of the wax layer;

[0033] 4. The adjustability of the position of the jaw group makes the equipment have higher flexibility and adaptability, can meet diverse production requirements, and ensure the stability of the workpiece during the waxing process;

[0034] 5. The precise control of the moving path of the wax injection end of the wax injection machine, as well as the reasonable design of the scraper and the guide frame, effectively avoid the problems caused by uneven manual operation, reduce the waste of the adhesive, and lower the production cost;

[0035] 6. The setting of the elastic connecting piece not only ensures the smoothness of the scraping action, but also improves the surface quality of the wax layer. At the same time, it adapts to adhesives with different hardnesses and thicknesses, ensuring the consistency of the scraping effect. Description of the Drawings

[0036] Figure 1 It is a schematic structural diagram of the flexible driving device according to Embodiment 1 of the present utility model.

[0037] Figure 2 It is a schematic structural diagram of the waxing device according to Embodiment 2 of the present utility model.

[0038] Figure 3 It is a schematic connection relationship diagram between the scraper and the elastic connecting piece according to Embodiment 2 of the present utility model.

[0039] In the figure, 1 is the base; 2 is the rotary drive; 3 is the guide frame; 4 is the first temperature-controlled fixture; 41 is the positioning ring; 5 is the linear drive; 51 is the floating joint; 6 is the sliding frame; 7 is the second temperature-controlled fixture; 71 is the jaw group; 8 is the wax injection machine; 9 is the scraper; 10 is the elastic connecting member; 11 is the sleeve; 12 is the adjusting rod; 13 is the tension spring; 14 is the baffle plate. Detailed implementation mode

[0040] In order to make the technical means, creative features, achieved purposes and functions realized by the present utility model clearer and easier to understand, the present utility model will be further described below in conjunction with the accompanying drawings and specific implementation modes.

[0041] Example 1: Refer to Figure 1 , a flexible drive device disclosed by the present utility model, includes a base 1, a rotary drive 2 and a guide frame 3 arranged on the base 1, a first temperature-controlled fixture 4 arranged on the output shaft of the rotary drive 2 and provided with a positioning ring 41, a linear drive 5 arranged on the guide frame 3, a floating joint 51 arranged on the moving end of the linear drive 5, a sliding frame 6 slidably connected to the guide frame 3 and arranged on the floating joint 51, and a second temperature-controlled fixture 7 arranged on the sliding frame 6 and provided with a jaw group 71. Among them, the positioning ring 41, the floating joint 51 and the jaw group 71 are approximately on the same axis.

[0042] In the actual use process, first, a workpiece such as an ingot is placed on the positioning ring 41 of the first temperature-controlled fixture 4, and the fixing tooling is clamped and fixed by the jaw group 71 of the second temperature-controlled fixture 7 to complete the centering installation of the workpiece and the fixing tooling. Then, an adhesive is coated on the top surface of the workpiece, and then the linear drive 5 is started to drive the sliding frame 6, the second temperature-controlled fixture 7 and the fixing tooling to press down as a whole. When the fixing tooling contacts the adhesive coating, the pressure between the two will be feedback to the floating joint 51, and the floating joint 51 can be used to absorb eccentricity and angular deviation to realize the parallelism adjustment between the workpiece and the fixing tooling. Furthermore, it can ensure that during the downward pressing process, the wax layer thickness between the workpiece and the fixing tooling is uniform, improve the wax sticking quality, and then through the temperature adjustment of the first temperature-controlled fixture 4 and the second temperature-controlled fixture 7, heat or cold is conducted from the fixing tooling and the workpiece to the adhesive, so that the adhesive is bonded and fixed to form a wax layer; by adopting the above structure, due to the flexible characteristics of the floating joint 51, it can ensure that the TTV of the wax layer after bonding is within 100 μm, preferably within 30 μm, and the downward pressing pressure is controlled by the linear drive 5 and the like to realize the control of the wax layer thickness within 10 - 300 μm.

[0043] The rotation driving member 2 is set as a rotary motor, which can achieve precise rotational speed control and stable rotational motion, thereby ensuring uniform distribution of the binder on the surface of the workpiece during the processes of applying the binder and scraping off the excess binder, and further improving the uniformity and quality of the wax layer. The use of the rotary motor can also reduce the labor intensity of the operator and improve the production efficiency.

[0044] The linear driving member 5 is set as a cylinder, which can achieve fast response and high-precision linear motion control. The use of the cylinder also has the characteristics of low cost and simple maintenance; the stroke and speed of the cylinder can be adjusted according to actual needs to meet the wax application requirements of workpieces with different sizes and shapes; in addition, the use of the cylinder can reduce the complexity of the equipment and improve the reliability of the system.

[0045] The floating joint 51 is an integral floating joint 51. The integral floating joint 51 has better integrity and strength and can withstand greater pressure without deformation. Its design can ensure that during the wax application process, even if there are slight unevenness between the workpiece and the fixed fixture, the floating joint 51 can effectively compensate for it, thereby maintaining the parallelism between the two. In addition, the structure of the integral floating joint 51 is simple, which is convenient for installation and maintenance, reduces the downtime caused by joint damage, and improves the stability and reliability of the equipment.

[0046] The position of the jaws of the jaw group 71 on the second temperature control fixture 7 is adjustable. A conventional chuck structure can be used to achieve the radial movement of the jaws of the jaw group 71 on the second temperature control fixture 7, and the jaw structure can be adaptively designed according to the outer contour of the fixed fixture, so as to achieve precise clamping of workpieces with different shapes and sizes; the position adjustability of the jaw group 71 makes the equipment have higher flexibility and adaptability and can meet diverse production requirements; at the same time, by adjusting the position of the jaws, it can be ensured that the workpiece remains stable during the wax application process, avoiding workpiece displacement caused by insufficient clamping, and further improving the uniformity of the wax layer and the wax application quality.

[0047] Embodiment 2: Refer to Figure 2 , a wax application device disclosed by the present utility model, includes the flexible driving device of Embodiment 1, a wax injector 8, and a scraping knife 9. Among them, the moving path of the wax injection end of the wax injector 8 passes above the first temperature control fixture 4, and the scraping knife 9 is installed on the guiding frame 3 in a manner that the cutting edge faces the circumferential wall of the workpiece on the first temperature control fixture 4.

[0048] The wax injection end of the wax injection machine 8 can be moved above the first temperature control fixture 4 manually or with the assistance of a robotic arm, so as to apply the binder before processing and remove the wax injection end during processing, thereby improving production efficiency and operation convenience. The precise control of the movement path of the wax injection end of the wax injection machine 8 ensures the uniform coating of the binder on the surface of the workpiece, avoiding the problem of inconsistent wax layer thickness caused by uneven manual operation.

[0049] The scraper 9 can accurately scrape off the excess binder on the side of the workpiece to ensure the uniformity of the wax layer thickness; the installation position and angle of the scraper 9 can be adjusted according to the shape and size of the workpiece to meet the wax application requirements of different workpieces. Through the precise control of the guide frame 3, the scraper 9 can perform a uniform scraping action along the circumferential wall of the workpiece, avoiding the inconsistencies that may be caused by manual operation; in addition, the use of the scraper 9 can also reduce the waste of the binder and lower the production cost.

[0050] During the process of applying the binder on the top surface of the workpiece and removing the excess binder on the side of the workpiece, etc., the coating point or scraping point can be kept unchanged, and the workpiece on the first temperature control fixture 4 can be driven to rotate by the rotation driving member 2. The first temperature control fixture 4 can preferably adopt a vacuum chuck to enhance the installation stability, complete the corresponding operations, thereby improving the operation convenience and efficiency. In addition, the setting of the rotation driving member 2 enables the binder to be uniformly coated on the workpiece during the wax application process, avoiding the problem of inconsistent wax layer thickness caused by uneven manual operation.

[0051] In addition, an elastic connecting member 10 is arranged between the scraper 9 and the guide frame 3, and the moving direction of the elastic connecting member 10 is perpendicular to the axial direction of the workpiece on the first temperature control fixture 4. Refer to Figure 3 Specifically, the elastic connecting member 10 includes a sleeve 11 arranged on the guide frame 3, an adjusting rod 12 arranged on the scraper 9 and slidably inserted into the sleeve 11, a tension spring 13 sleeved on the adjusting rod 12, and a baffle 14 arranged at the end of the adjusting rod 12. The two ends of the tension spring 13 are respectively fixed on the sleeve 11 and the baffle 14.

[0052] The elastic connecting member 10 can absorb the vibration and impact force generated during the scraping process of the scraper 9, thereby ensuring the smoothness of the scraping action, and can also keep an appropriate pre-pressure between the scraper 9 and the surface of the workpiece, effectively avoiding scratching or damaging the surface of the workpiece by the scraper 9 and improving the surface quality of the wax layer; at the same time, the elastic characteristics of the elastic connecting member 10 can also adapt to binders with different hardnesses and thicknesses to ensure the consistency of the scraping effect; in addition, by precisely controlling the elastic coefficient of the elastic connecting member 10, the fine adjustment of the pressure of the scraper 9 can be realized, further improving the uniformity of the wax layer thickness.

[0053] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered by the scope of the claims of the present invention.

Claims

1. A flexible driving device, characterized in that: The invention comprises a base (1), a first temperature control fixture (4) mounted on the base (1) and having a positioning ring (41), a guide frame (3) arranged on the base (1), a linear drive member (5) arranged on the guide frame (3), a floating joint (51) arranged on the movable end of the linear drive member (5), a sliding frame (6) slidably connected to the guide frame (3) and arranged on the floating joint (51), and a second temperature control fixture (7) arranged on the sliding frame (6) and having a clamping jaw group (71), wherein the positioning ring (41), the floating joint (51) and the clamping jaw group (71) are approximately on the same axis.

2. A flexible driving device according to claim 1, characterized in that: A rotary drive component (2) is arranged on the base (1), and the first temperature control fixture (4) is arranged on an output shaft of the rotary drive component (2).

3. A flexible driving device according to claim 2, characterized in that: The rotary drive member (2) is configured as a rotary motor or a rotary cylinder.

4. A flexible driving device according to claim 1, characterized in that: The linear drive member (5) is configured as a cylinder, a hydraulic cylinder, a linear motor module or an electric push rod.

5. A flexible driving device according to claim 1, characterized in that: The floating joint (51) is an integrated floating joint (51).

6. A flexible driving device according to claim 1, characterized in that: The positions of the clamping jaws of the clamping jaw group (71) on the second temperature control fixture (7) are adjustable.

7. A wax application device, characterized in that: It comprises a flexible driving device according to any one of claims 1 to 6.

8. The wax application device according to claim 7, characterized in that: It also comprises a wax injection machine (8), wherein the moving path of the wax injection end of the wax injection machine (8) passes above the first temperature control fixture (4).

9. The wax application device according to claim 7, characterized in that: It also comprises a scraper (9), wherein the scraper (9) is mounted on the guide frame (3) in a manner such that the blade faces the peripheral wall of the workpiece on the first temperature control fixture (4).

10. The wax application device according to claim 9, characterized in that: An elastic connecting member (10) is provided between the scraper (9) and the guide frame (3), and the moving direction of the elastic connecting member (10) is perpendicular to the axis of the workpiece on the first temperature control fixture (4).

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