Vacuum pump control system

Abstract

The utility model provides a vacuum pump control system. The vacuum pump control system comprises a plurality of vacuum pumps; the micro-control unit is in communication connection with the vacuum pumps so as to receive feedback signals output by the vacuum pumps; a plurality of control relays, wherein each control relay is electrically connected with the micro-control unit; wherein the plurality of control relays comprise a plurality of first relays used for controlling start and stop of the plurality of vacuum pumps and a plurality of second relays used for controlling the plurality of vacuum pumps to operate in an energy-saving mode, each first relay is electrically connected with at least one vacuum pump, and each second relay is electrically connected with at least one vacuum pump. The technical problems that time and labor are wasted and working efficiency is affected during vacuum pump starting control and energy-saving mode control are solved.

Description

Technical Field

[0001] This application relates to the technical field of vacuum equipment, and particularly to a vacuum pump control system. Background Art

[0002] A vacuum pump is a device that improves, generates, and maintains a vacuum in a closed space, and is widely used in industries such as metallurgy, chemical industry, food, photovoltaic semiconductors, etc. For example, taking a dry vacuum pump as an example, since a dry vacuum pump is a mechanical vacuum pump without oil or other working media in the pump chamber, a dry vacuum pump can be applied to fields such as semiconductor etching processes or polysilicon preparation processes that generate corrosive gases and abrasive particles.

[0003] However, in the semiconductor etching process or polysilicon preparation process, multiple vacuum pumps need to work together. When operating multiple vacuum pumps, each vacuum pump needs to be operated individually. For example, when controlling the start-up of a vacuum pump and the energy-saving mode control, it is time-consuming and laborious to operate in a scenario with a large number of vacuum pumps and affects work efficiency. Utility Model Content

[0004] This application provides a vacuum pump control system to solve the above technical problems.

[0005] In a first aspect, this application provides a vacuum pump control system, including:

[0006] Multiple vacuum pumps;

[0007] A micro control unit, which is communicatively connected to multiple vacuum pumps to receive feedback signals output by the vacuum pumps;

[0008] Multiple control relays, each of which is electrically connected to the micro control unit;

[0009] Among them, the multiple control relays include multiple first relays for controlling the start and stop of multiple vacuum pumps and multiple second relays for controlling multiple vacuum pumps to operate in an energy-saving mode. Each first relay is electrically connected to at least one vacuum pump, and each second relay is electrically connected to at least one vacuum pump.

[0010] In some embodiments, the multiple vacuum pumps are divided into multiple groups and the number of vacuum pumps in at least one group is multiple. The vacuum pumps belonging to the same group are connected to the same first relay and the same second relay, and the vacuum pumps belonging to different groups are connected to different first relays and different second relays.

[0011] In some embodiments, the multiple vacuum pumps are divided into multiple groups, the number of vacuum pumps in each group is two, and the first relays and / or second relays to which the two vacuum pumps in any group are connected are different.

[0012] In some embodiments, the plurality of control relays further includes a plurality of third relays for eliminating the alarms of each group of vacuum pumps, and each third relay is electrically connected to each vacuum pump in the corresponding group.

[0013] In some embodiments, among the two vacuum pumps electrically connected to the first relay, the two vacuum pumps are respectively electrically connected to different third relays;

[0014] Among the two vacuum pumps electrically connected to the third relay, the two vacuum pumps are respectively electrically connected to different first relays.

[0015] In some embodiments, the vacuum pump control system further includes a plurality of display lights for displaying the operating states of multiple vacuum pumps, and a display relay for controlling the plurality of display lights;

[0016] The plurality of display relays correspond to the plurality of display lights one by one, each display relay is electrically connected to the micro control unit, and each display relay is electrically connected to the corresponding display light.

[0017] In some embodiments, the plurality of display lights include an operating display light for indicating the completion of startup of each vacuum pump, a warning display light for indicating that at least one vacuum pump is in a warning state, and an alarm display light for indicating that at least one vacuum pump is in an alarm state;

[0018] The plurality of display relays include a fourth relay for controlling the operating display light, a fifth relay for controlling the warning display light, and a sixth relay for controlling the alarm display light;

[0019] The fourth relay is electrically connected to the operating display light, the fifth relay is electrically connected to the warning display light, and the sixth relay is electrically connected to the alarm display light.

[0020] In some embodiments, the vacuum pump control system further includes a signal feedback circuit;

[0021] The input end of the signal feedback circuit is electrically connected to the vacuum pump, and the output end of the signal feedback circuit is electrically connected to the micro control unit.

[0022] In some embodiments, the signal feedback circuit includes a first capacitor, a first inductor, a second capacitor, a third capacitor, and a resistor;

[0023] The first end of the first capacitor is connected to the first end of the first inductor, the second end of the first capacitor is connected to the ground terminal, and the first node between the first capacitor and the first inductor is electrically connected to the vacuum pump;

[0024] The second end of the first inductor is connected to the first end of the resistor, the second end of the resistor is connected to the power supply terminal, and the second node between the resistor and the first inductor is electrically connected to the micro control unit;

[0025] The first terminal of the second capacitor is connected to the second node between the resistor and the first inductor, and the second terminal of the second capacitor is connected to the ground terminal;

[0026] The first terminal of the third capacitor is connected to the second node between the resistor and the first inductor, and the second terminal of the third capacitor is connected to the ground terminal.

[0027] In some embodiments, the vacuum pump control system further includes a non-volatile memory and a display device;

[0028] The non-volatile memory is electrically connected to the micro-control unit, and the display device is electrically connected to the micro-control unit.

[0029] In this application, by electrically connecting a plurality of control relays to the micro-control unit, each first relay is connected to at least one vacuum pump, and each second relay is connected to at least one vacuum pump. Therefore, the micro-control unit can be used to control the start and stop of multiple vacuum pumps through the first relay, and the micro-control unit can be used to control multiple vacuum pumps to operate in an energy-saving mode through the second relay. When operating multiple vacuum pumps, there is no need to operate each vacuum pump separately, thus solving the technical problems of time-consuming and laborious operation and affecting work efficiency in the start control and energy-saving mode control of vacuum pumps. Description of the Drawings

[0030] In order to more clearly illustrate the technical solutions in the embodiments of this application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those skilled in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0031] Figure 1 is a schematic diagram of a vacuum pump control system provided in an embodiment of this application;

[0032] Figure 2 is another schematic diagram of a vacuum pump control system provided in an embodiment of this application;

[0033] Figure 3 is another schematic diagram of a vacuum pump control system provided in an embodiment of this application;

[0034] Figure 4 is another schematic diagram of a vacuum pump control system provided in an embodiment of this application;

[0035] Figure 5 is another schematic diagram of a vacuum pump control system provided in an embodiment of this application;

[0036] Figure 6 is another schematic diagram of a vacuum pump control system provided in an embodiment of this application;

[0037] Figure 7 It is another schematic diagram of the vacuum pump control system provided in the embodiments of the present application;

[0038] Figure 8 It is a schematic diagram of a signal feedback circuit provided in the embodiments of the present application;

[0039] Figure 9 It is another schematic diagram of the vacuum pump control system provided in the embodiments of the present application.

[0040] Wherein, 10 is a vacuum pump, 20 is a micro control unit, 30 is a control relay, 31 is a first relay, 32 is a second relay, 33 is a third relay, 40 is a display lamp, 41 is an operation display lamp, 42 is a warning display lamp, 43 is an alarm display lamp, 50 is a display relay, 51 is a fourth relay, 52 is a fifth relay, 53 is a sixth relay, 60 is a signal feedback circuit, 70 is a non-volatile memory, and 80 is a display device;

[0041] The first capacitor C1, the first inductor L1, the second capacitor C2, the third capacitor C3, the resistor R1, the first node M1, and the second node M2. Detailed implementation manners

[0042] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

[0043] In the description of the present invention, it should be understood that the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more, unless otherwise specifically defined.

[0044] In this application, the term "exemplary" is used to mean "serving as an example, illustration, or instance". Any embodiment described as "exemplary" in this application is not necessarily to be construed as more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to make and use the present invention. In the following description, details are set forth for the purpose of explanation. It should be understood that those of ordinary skill in the art can recognize that the present invention can be implemented without these specific details. In other instances, well-known structures and processes are not elaborated in detail to avoid obscuring the description of the present invention with unnecessary details. Therefore, the present invention is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed in this application.

[0045] An embodiment of this application provides a vacuum pump control system, which will be described in detail below.

[0046] First, refer to Figure 1 , Figure 1 which shows a schematic diagram of a vacuum pump control system in an embodiment of this application. Among them, the vacuum pump control system includes multiple vacuum pumps 10, a micro control unit 20, and multiple control relays 30.

[0047] Specifically, the vacuum pump 10 can work under the control of the micro control unit 20 and output a feedback signal to the micro control unit 20. For example, after the micro control unit 20 controls the vacuum pump 10 to start, the vacuum pump 10 can feedback a start completion signal to the micro control unit 20 to indicate that the vacuum pump 10 has completed starting; for another example, after the micro control unit 20 controls the vacuum pump 10 to operate in an energy-saving mode, the vacuum pump 10 can feedback a feedback signal indicating the completion of starting the energy-saving mode operation to the micro control unit 20 to indicate that the vacuum pump 10 is in the energy-saving mode; for still another example, when the vacuum pump 10 works abnormally, the vacuum pump 10 can feedback an alarm / warning signal to the micro control unit 20 to indicate that the vacuum pump 10 is working abnormally.

[0048] Exemplarily, the micro control unit 20 can be, but is not limited to, a single-chip microcomputer or a system on chip (Soc). The vacuum pump 10 includes, but is not limited to, a dry screw vacuum pump, a reciprocating vacuum pump, a liquid ring vacuum pump, a Roots vacuum pump, a rotary vane slide valve vacuum pump, a fixed vane vacuum pump, and a multi-chamber rotary vane vacuum pump.

[0049] The microcontroller unit 20 is communicatively connected to multiple vacuum pumps 10. The microcontroller unit 20 can receive the feedback signals output by the vacuum pumps 10. At the same time, the microcontroller unit 20 can send control signals to the devices electrically connected thereto to control the corresponding devices to operate. For example, the microcontroller unit 20 can send control signals to the control relay 30 to indirectly control the vacuum pump 10 through the relay. Another example is that the microcontroller unit 20 can send display data to the display device 80 according to the signals fed back by the vacuum pump 10 to control the display device 80 to display the operating state of the vacuum pump 10.

[0050] Merely by way of example, the model of the microcontroller unit 20 of the present application may be STM32F103R1T6. It should be noted that the model of the microcontroller unit 20 is only an exemplary embodiment of the present application. Those skilled in the art can select the model according to actual needs, and it should not be construed as a limitation to the solution of the present application.

[0051] Each of the multiple control relays 30 is electrically connected to the microcontroller unit 20 so that the control relay 30 can control the corresponding vacuum pump to operate according to the control signal of the microcontroller unit 20. Among them, the multiple control relays 30 include multiple first relays 31 and multiple second relays 32. Each first relay 31 is electrically connected to at least one vacuum pump 10, and each second relay 32 is electrically connected to at least one vacuum pump 10. Therefore, the microcontroller unit 20 can control the start and stop of multiple vacuum pumps 10 through the first relay 31, and the microcontroller unit 20 can control multiple vacuum pumps 10 to operate in an energy-saving mode through the second relay 32.

[0052] Exemplarily, the control relay 30 can be, but is not limited to, an electromagnetic relay, a solid-state relay, a thermal relay, a voltage relay, a current relay, a digital relay, etc.

[0053] In the embodiment of the present application, by electrically connecting the multiple control relays 30 to the microcontroller unit 20, each first relay 31 is electrically connected to at least one vacuum pump 10, and each second relay 32 is electrically connected to at least one vacuum pump 10. Therefore, the microcontroller unit 20 can be used to control the start and stop of multiple vacuum pumps 10 through the first relay 31, and the microcontroller unit 20 can be used to control multiple vacuum pumps 10 to operate in an energy-saving mode through the second relay 32. When operating multiple vacuum pumps 10, it is not necessary to operate each vacuum pump 10 individually, thus solving the technical problems of time-consuming and laborious operation and affecting work efficiency during the start control and energy-saving mode control of the vacuum pump 10.

[0054] In some embodiments of the present application, multiple vacuum pumps 10 are divided into multiple groups, and the number of vacuum pumps 10 in at least one group is multiple. The vacuum pumps 10 belonging to the same group are connected to the same first relay 31 and the same second relay 32, and the vacuum pumps 10 belonging to different groups are connected to different first relays 31 and different second relays 32.

[0055] For example, referring to Figure 1 , the vacuum pump 10 numbered 1 and the vacuum pump 10 numbered 2 are divided into one group. The vacuum pump 10 numbered 1 and the vacuum pump 10 numbered 2 are connected to the same first relay 31 numbered 1 and the same second relay 32 numbered 1; the vacuum pump 10 numbered n - 1 and the vacuum pump 10 numbered n are divided into one group. The vacuum pump 10 numbered n - 1 and the vacuum pump 10 numbered n are connected to the same first relay 31 numbered m and the same second relay 32 numbered m; however, the vacuum pump 10 numbered n - 1 and the vacuum pump 10 numbered 1 are connected to different first relays 31 and different second relays 32. Therefore, the same first relay 31 can control the start of two vacuum pumps 10, and the same second relay 32 can control two vacuum pumps 10 to operate in an energy-saving mode. While achieving the decoupling control of multiple vacuum pumps 10, it avoids the problem of increasing the cost of the vacuum pump control system caused by setting a first relay 31 and a second relay 32 for each vacuum pump 10 at the same time.

[0056] It can be understood that in some possible embodiments, each first relay 31 and each second relay 32 can also be electrically connected to a larger number of vacuum pumps 10 to control the start of a larger number of vacuum pumps 10 or to operate in an energy-saving mode. For example, each first relay 31 is electrically connected to three vacuum pumps 10, and each second relay 32 is electrically connected to four vacuum pumps 10.

[0057] In some embodiments of the present application, multiple vacuum pumps 10 are divided into multiple groups, the number of vacuum pumps in each group is two, and the first relay 31 and / or the second relay 32 to which the two vacuum pumps 10 in any group are connected are different.

[0058] For example, taking that each first relay 31 is connected to a group of two vacuum pumps 10 and each second relay 32 is connected to a group of two vacuum pumps 10 as an example, among the two vacuum pumps 10 electrically connected to the first relay 31, the two vacuum pumps 10 are respectively electrically connected to different second relays 32; among the two vacuum pumps 10 electrically connected to the second relay 32, the two vacuum pumps 10 are respectively electrically connected to different first relays 31.

[0059] For example, referring to Figure 2 , Figure 2Another schematic diagram of the vacuum pump control system in the embodiments of the present application is shown. Among them, among the vacuum pumps 10 numbered 1 and the vacuum pumps 10 numbered 2 electrically connected to the first relay 31 numbered 1, the vacuum pump 10 numbered 1 and the vacuum pump 10 numbered 2 are respectively electrically connected to the second relay 32 numbered 1 and the second relay 32 numbered m; and among the vacuum pumps 10 numbered 1 and the vacuum pumps 10 numbered n - 1 electrically connected to the second relay 32 numbered 1, the vacuum pump 10 numbered 1 and the vacuum pump 10 numbered n - 1 are respectively electrically connected to the first relay 31 numbered 1 and the first relay 31 numbered m.

[0060] It can be seen that in the above embodiments, the vacuum pump 10 numbered 1 is electrically connected to the first relay 31 numbered 1 and the second relay 32 numbered 1; the vacuum pump 10 numbered 2 is electrically connected to the first relay 31 numbered 1 and the second relay 32 numbered m; the vacuum pump 10 numbered n - 1 is electrically connected to the first relay 31 numbered m and the second relay 32 numbered 1; the vacuum pump 10 numbered n is electrically connected to the first relay 31 numbered m and the second relay 32 numbered m; that is to say, the first relay 31 and / or the second relay 32 connected by two vacuum pumps 10 in any group are different. Then, through this connection method, the start control of a single vacuum pump 10 or the control to operate in an energy-saving mode can be realized.

[0061] For example, in Figure 2 , taking the example that the same vacuum pump 10 needs to receive the output signals corresponding to the first relay 31 and the second relay 32 at the same time to start the energy-saving mode (for example, the signals input by the first relay 31 and the second relay 32 are ANDed through an AND gate circuit as the actual control signal). When it is necessary to control the vacuum pump 10 numbered 1 to operate in the energy-saving mode, the first relay 31 numbered 1 and the second relay 32 numbered 1 need to output signals at the same time to make the vacuum pump 10 numbered 1 operate in the energy-saving mode, while the other first relay 31 and the second relay 32 do not output signals. Therefore, because the other vacuum pumps 10 do not receive the output signals of the corresponding first relay 31 and the second relay 32 at the same time, the other vacuum pumps 10 will not start the energy-saving mode, and thus the separate energy-saving mode control of the vacuum pump 10 numbered 1 is realized.

[0062] Therefore, the connection method among the first relay 31, the second relay 32, and multiple vacuum pumps 10 in the above embodiments can not only realize the separate start control or energy-saving mode control of each vacuum pump 10, but also avoid the problem that the cost of the vacuum pump control system increases due to the simultaneous setting of the first relay 31 and the second relay 32 for each vacuum pump 10.

[0063] In some embodiments of the present application, refer to Figure 3 , Figure 3 which shows another schematic diagram of the vacuum pump control system in the embodiments of the present application. Among them, the multiple control relays 30 further include multiple third relays 33 for eliminating the alarms of each group of vacuum pumps 10. Each third relay 33 is electrically connected to each vacuum pump 10 in the corresponding group. Therefore, the micro control unit 20 can also control the vacuum pump 10 to eliminate the alarm state through the third relay 33 according to the feedback signal input by the vacuum pump 10, avoiding the phenomenon that the vacuum pump 10 continues to alarm after eliminating the abnormal state.

[0064] In some embodiments of the present application, for example, in the embodiment where the number of each group of vacuum pumps 10 is two, among the two vacuum pumps 10 electrically connected to the first relay 31, the two vacuum pumps 10 are respectively electrically connected to different third relays 33; among the two vacuum pumps 10 electrically connected to the third relay 33, the two vacuum pumps 10 are respectively electrically connected to different first relays 31.

[0065] For example, refer to Figure 4 , Figure 4 which shows another schematic diagram of the vacuum pump control system in the embodiments of the present application. Among them, among the vacuum pump 10 numbered 1 and the vacuum pump 10 numbered 2 electrically connected to the first relay 31 numbered 1, the vacuum pump 10 numbered 1 and the vacuum pump 10 numbered 2 are respectively electrically connected to the third relay 33 numbered 1 and the third relay 33 numbered m; while among the vacuum pump 10 numbered 1 and the vacuum pump 10 numbered n - 1 electrically connected to the third relay 33 numbered 1, the vacuum pump 10 numbered 1 and the vacuum pump 10 numbered n - 1 are respectively electrically connected to the first relay 31 numbered 1 and the first relay 31 numbered m.

[0066] Specifically, when it is necessary to control the vacuum pump 10 numbered 1 to start, the first relay 31 numbered 1 and the third relay 33 numbered 1 output signals simultaneously (for example, taking the logical AND of the signals input to the first relay 31 and the third relay 33 as the actual control signal) to enable the vacuum pump 10 numbered 1 to start. Since the other vacuum pumps 10 do not receive the output signals of the first relay 31 and the third relay 33 simultaneously, the other vacuum pumps 10 will not start, thus realizing the separate start control of the vacuum pump 10 numbered 1.

[0067] It can be seen that the connection manners among the first relay 31, the third relay 33, and the multiple vacuum pumps 10 in the above embodiments can not only realize the separate start control of each vacuum pump 10, but also avoid the problem that the cost of the vacuum pump control system increases due to the simultaneous setting of the first relay 31 and the third relay 33 for each vacuum pump 10.

[0068] Understandably, in some possible embodiments, among the two vacuum pumps 10 electrically connected to the second relay 32, the two vacuum pumps 10 are respectively electrically connected to different third relays 33, and among the two vacuum pumps 10 electrically connected to the third relay 33, the two vacuum pumps 10 are respectively electrically connected to different second relays 32.

[0069] In some embodiments of the present application, referring to Figure 5 , Figure 5 shows another schematic diagram of the vacuum pump control system in the embodiments of the present application. The vacuum pump control system further includes a plurality of display lights 40 for displaying the operating states of multiple vacuum pumps 10, and a display relay 50 for controlling the plurality of display lights 40; the plurality of display relays 50 correspond to the plurality of display lights 40 one by one, each display relay 50 is electrically connected to the micro control unit 20, and each display relay 50 is electrically connected to the corresponding display light 40, so that the micro control unit 20 can control the display light 40 to turn off or on through the display relay 50, thereby displaying the operating state of the vacuum pump 10.

[0070] For example, after the vacuum pump 10 completes starting and inputs a feedback signal to the micro control unit 20, the micro control unit 20 controls a display light 40 to turn on through the display relay 50 to indicate that the vacuum pump 10 has completed starting. For another example, after the vacuum pump 10 completes starting the energy-saving mode and inputs a feedback signal to the micro control unit 20, the micro control unit 20 controls a display light 40 to turn on through the display relay 50 to indicate that the vacuum pump 10 is in the energy-saving mode.

[0071] As an example, referring to Figure 6 , Figure 6 shows another schematic diagram of the vacuum pump control system in the embodiments of the present application. The plurality of display lights 40 include an operating display light 41 for indicating that each vacuum pump 10 has completed starting, a warning display light 42 for indicating that at least one vacuum pump 10 is in a warning state, and an alarm display light 43 for indicating that at least one vacuum pump 10 is in an alarm state. The plurality of display relays 50 include a fourth relay 51 for controlling the operating display light 41, a fifth relay 52 for controlling the warning display light 42, and a sixth relay 53 for controlling the alarm display light 43.

[0072] Among them, the fourth relay 51 is electrically connected to the operation display lamp 41, so that the micro control unit 20 can control the operation display lamp 41 to turn off or on through the fourth relay 51, thereby indicating whether the vacuum pump 10 is started; the fifth relay 52 is electrically connected to the warning display lamp 42, so that the micro control unit 20 can control the operation warning display lamp 42 to turn off or on through the fifth relay 52, thereby indicating that the vacuum pump 10 has an abnormal working condition; the sixth relay 53 is electrically connected to the alarm display lamp 43, so that the micro control unit 20 can control the operation alarm display lamp 43 to turn off or on through the sixth relay 53, thereby indicating that the vacuum pump 10 has an emergency abnormal working condition.

[0073] In some embodiments of the present application, refer to Figure 7 , Figure 7 which shows another schematic diagram of the vacuum pump control system in the embodiments of the present application. The vacuum pump control system further includes a signal feedback circuit 60; the input end of the signal feedback circuit 60 is electrically connected to the vacuum pump 10, and the output end of the signal feedback circuit 60 is electrically connected to the micro control unit 20, so that the feedback signal output by the vacuum pump 10 can be processed by the feedback circuit and then input into the micro control unit 20, thereby ensuring the stability of the micro control unit 20 receiving the feedback signal remotely.

[0074] As an example, refer to Figure 8 , Figure 8 which shows another schematic diagram of the signal feedback circuit 60 in the embodiments of the present application. Among them, the signal feedback circuit 60 includes a first capacitor C1, a first inductor L1, a second capacitor C2, a third capacitor C3 and a resistor R1; the first end of the first capacitor C1 is connected to the first end of the first inductor L1, the second end of the first capacitor C1 is connected to the ground terminal, and the first node M1 between the first capacitor C1 and the first inductor L1 is electrically connected to the vacuum pump 10; the second end of the first inductor L1 is connected to the first end of the resistor R1, the second end of the resistor R1 is connected to the power supply terminal, and the second node M2 between the resistor R1 and the first inductor L1 is electrically connected to the micro control unit 20; the first end of the second capacitor C2 is connected to the second node M2 between the resistor R1 and the first inductor L1, and the second end of the second capacitor C2 is connected to the ground terminal; the first end of the third capacitor C3 is connected to the second node M2 between the resistor R1 and the first inductor L1, and the second end of the third capacitor C3 is connected to the ground terminal. Specifically, the first capacitor C1, the first inductor L1, the second capacitor C2, the third capacitor C3 and the resistor R1 form the signal feedback circuit 60 of the LC filter circuit and the RC filter circuit, which is beneficial to ensuring the reliability of the micro control unit 20 receiving the feedback signal and avoiding the phenomenon that the micro control unit 20 performs abnormal control due to receiving an incorrect feedback signal.

[0075] In some embodiments of the present application, refer to Figure 9 , Figure 9Another schematic diagram of the vacuum pump control system in the embodiment of the present application is shown. Among them, the vacuum pump control system further includes a non-volatile memory 70 and a display device 80; the non-volatile memory 70 is electrically connected to the micro-control unit 20, and the display device 80 is electrically connected to the micro-control unit 20. Specifically, the non-volatile memory 70 (Non-Volatile Memory, NVM) is a storage device in which the stored data will not disappear after power-off. Therefore, the reliability of the stored data required by the vacuum pump control system can be ensured. At the same time, the display device 80 can be electrically connected to the micro-control unit 20 through a 232 communication chip. The user can perform control operations through the display screen and view the working status of the vacuum pump 10, which is conducive to making the operation of the vacuum pump control system more convenient.

[0076] Exemplarily, the non-volatile memory 70 can be, but is not limited to, PROM (Programmable read-only memory), EAROM (Electrically alterable read only memory), EPROM (Erasable programmable read only memory), EEPROM (Electrically erasable programmable read only memory); the display device 80 can be, but is not limited to, a CRT monitor, a liquid crystal display, an OLED display, a quantum dot display, a Mini-LED display, etc.

[0077] In the above embodiments, the descriptions of the various embodiments have their own emphases. For the parts not detailed in a certain embodiment, reference can be made to the detailed descriptions of other embodiments above, and will not be elaborated here.

[0078] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only an example and does not constitute a limitation to the present application. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to the present application. Such modifications, improvements, and corrections are proposed in the present application, so such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of the present application.

[0079] Meanwhile, this application uses specific terms to describe the embodiments of this application. For example, "an embodiment", "one embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that the "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.

[0080] For each patent, patent application, patent application publication, and other materials cited in this application, such as articles, books, specifications, publications, documents, etc., their entire contents are hereby incorporated into this application by reference, except for the application history documents that are inconsistent with or conflict with the content of this application, and also except for the documents that limit the broadest scope of the claims of this application (currently or subsequently attached to this application). It should be noted that if there are any inconsistencies or conflicts between the descriptions, definitions, and / or uses of terms in the attached materials of this application and the content described in this application, the descriptions, definitions, and / or uses of terms in this application shall prevail.

[0081] The above has introduced in detail a vacuum pump control system provided by the embodiments of this application. Specific examples are used herein to elaborate on the principles and implementation manners of the present invention. The description of the above embodiments is only used to help understand the method and its core idea of the present invention; at the same time, for those skilled in the art, based on the idea of the present invention, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present invention.

Claims

1. A vacuum pump control system, characterized in that: include: Multiple vacuum pumps; A micro control unit, wherein the micro control unit is communicatively connected with the plurality of vacuum pumps to receive feedback signals output by the vacuum pumps; A plurality of control relays, each of the control relays being electrically connected to the micro control unit; Among them, the multiple control relays include multiple first relays for controlling the start and stop of the multiple vacuum pumps and multiple second relays for controlling the multiple vacuum pumps to operate in energy-saving mode, each of the first relays is electrically connected to at least one of the vacuum pumps, and each of the second relays is electrically connected to at least one of the vacuum pumps.

2. The vacuum pump control system according to claim 1, characterized in that: The multiple vacuum pumps are divided into multiple groups and at least one group has multiple vacuum pumps. The vacuum pumps belonging to the same group are connected to the same first relay and the same second relay, and the vacuum pumps belonging to different groups are connected to different first relays and different second relays.

3. The vacuum pump control system according to claim 1, characterized in that: The plurality of vacuum pumps are divided into a plurality of groups, each group of the vacuum pumps comprises two vacuum pumps, and the first relay and / or the second relay connected to the two vacuum pumps in any group are different.

4. The vacuum pump control system according to claim 2 or 3, characterized in that: The plurality of control relays further include a plurality of third relays for eliminating the alarm of each group of vacuum pumps, and each of the third relays is electrically connected to each of the vacuum pumps of the corresponding group.

5. The vacuum pump control system according to claim 4, characterized in that: Among the two vacuum pumps electrically connected to the first relay, the two vacuum pumps are electrically connected to different third relays respectively; Among the two vacuum pumps electrically connected to the third relay, the two vacuum pumps are electrically connected to different first relays, respectively.

6. The vacuum pump control system according to claim 1, characterized in that: The vacuum pump control system further comprises a plurality of display lights for displaying the operating status of the plurality of vacuum pumps, and a display relay for controlling the plurality of display lights; The plurality of display relays correspond to the plurality of display lights one by one, each of the display relays is electrically connected to the micro control unit, and each of the display relays is electrically connected to the corresponding display light.

7. The vacuum pump control system according to claim 6, characterized in that: The plurality of display lights include an operation display light for indicating that each vacuum pump has completed startup, a warning display light for indicating that at least one vacuum pump is in a warning state, and an alarm display light for indicating that at least one vacuum pump is in an alarm state; The plurality of display relays include a fourth relay for controlling the operation display light, a fifth relay for controlling the warning display light, and a sixth relay for controlling the alarm display light; The fourth relay is electrically connected to the operation display light, the fifth relay is electrically connected to the warning display light, and the sixth relay is electrically connected to the alarm display light.

8. The vacuum pump control system according to claim 1, characterized in that: The vacuum pump control system also includes a signal feedback circuit; The input end of the signal feedback circuit is electrically connected to the vacuum pump, and the output end of the signal feedback circuit is electrically connected to the micro control unit.

9. The vacuum pump control system according to claim 8, characterized in that: The signal feedback circuit includes a first capacitor, a first inductor, a second capacitor, a third capacitor and a resistor; The first end of the first capacitor is connected to the first end of the first inductor, the second end of the first capacitor is connected to the ground, and the first node between the first capacitor and the first inductor is electrically connected to the vacuum pump; The second end of the first inductor is connected to the first end of the resistor, the second end of the resistor is connected to the power supply end, and the second node between the resistor and the first inductor is electrically connected to the micro control unit; A first end of the second capacitor is connected to a second node between the resistor and the first inductor, and a second end of the second capacitor is connected to a ground terminal; A first end of the third capacitor is connected to a second node between the resistor and the first inductor, and a second end of the third capacitor is connected to a ground terminal.

10. The vacuum pump control system according to claim 1, characterized in that: The vacuum pump control system also includes a non-volatile memory and a display device; The nonvolatile memory is electrically connected to the micro control unit, and the display device is electrically connected to the micro control unit.

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