Temperature control device and exposure equipment
By designing the temperature control device and using air duct and heat transfer technology, the positioning error and exposure quality problems caused by ambient temperature fluctuations in laser direct write exposure equipment are solved, and the precise control of the internal temperature of the equipment and the improvement of exposure quality are achieved.
Patent Information
- Application Number
- CN202420483046.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-12
- Publication Date
- 2025-06-13
- Estimated Expiration
- 2034-03-12
AI Technical Summary
In the field of micro-nano manufacturing, especially in the field of direct laser exposure, fluctuations in ambient temperature will lead to positioning errors of precision motion platforms and instability of optical path structure, affecting the exposure quality.
A temperature control device is designed, including air ducts, temperature control components, heat dissipation components and exposure components in the body. Through the cooperation of heat transfer and circulation filter components, precise control of the internal temperature of the equipment can be achieved.
It effectively stabilizes the internal temperature of the equipment, improves the positioning accuracy and exposure quality of the precision motion platform, and reduces the impact of ambient temperature fluctuations on the equipment.
Smart Images
Figure CN222979914U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of exposure equipment, and particularly relates to a temperature control device and an exposure equipment. Background Art
[0002] Micro-nano manufacturing equipment refers to precision instruments and technical platforms used for processing and constructing three-dimensional structures and devices at the micro-meter, nano-meter, and even pico-meter scales. Limited by the influence of thermal expansion and contraction, in the field of micro-nano manufacturing, the higher the precision level, the more stringent the control of the internal environment temperature of the equipment. Therefore, the control precision of the internal temperature determines the precision of micro-nano manufacturing equipment. In the field of laser direct writing exposure, the exposure substrate realizes the exposure of patterns through the scanning and stepping movements of a precision motion platform and the corresponding changes of a pattern generator.
[0003] To make the movement of the platform and the accuracy of the optical path reach the corresponding precision level, it is also particularly important to control the temperature stability inside the equipment. The positioning accuracy of the precision motion platform directly affects the quality of exposure, and the position feedback of the platform is easily affected by the ambient temperature. When the temperature fluctuates, the platform will expand and contract, resulting in positioning errors. The stability of the optical path structure is also affected by the ambient temperature. The fluctuation of the ambient temperature will cause the relevant structures to expand and contract thermally, directly affecting the stability of alignment and exposure. Summary of the Utility Model
[0004] The utility model provides a temperature control device and an exposure equipment for improving the positioning accuracy of the precision motion platform of a laser direct writing exposure machine and the exposure quality problem. The specific technical solutions are as follows:
[0005] A temperature control device includes: a body, in which a wind channel formed by air flow and connected end to end is formed; a temperature control component arranged at the head end of the wind channel, which can change its own temperature and transfer heat with the wind channel; a heat dissipation component arranged on the flow path of the wind channel, and the heat of the heat dissipation component can be absorbed by the coolant inside the temperature control component; and an exposure component arranged on the flow path of the wind channel, which can transfer heat with the heat dissipation component through the wind channel.
[0006] Further, it further includes a circulation filtration component arranged on the flow path of the wind channel. The circulation filtration component is on the flow path between the temperature control component and the exposure component. The circulation filtration component includes a circulation fan, which is located at the intersection of the flow path of the wind channel.
[0007] Further, it further includes a heat dissipation component arranged on the flow path of the wind channel. The heat dissipation component includes: a heat dissipation part in contact with the temperature control component, which is arranged on the flow path of the wind channel; and a heat dissipation fan participating in the formation of the wind channel, which draws air to flow through the heat dissipation part from the temperature control component.
[0008] Furthermore, the exposure component includes: a precision motion platform disposed on the air duct flow path, on the top surface of which a substrate to be exposed is placed; an exposure member disposed on the precision motion platform; an exposure member heat sink disposed at the heat generating part of the exposure member, which can transfer heat to and from the exposure member; and an exposure member heat dissipation duct disposed on the exposure member heat sink, through which the third air duct flowing through the exposure member heat sink moves. A first cavity and a second cavity are formed inside the machine body, and the first cavity and the second cavity are connected through a cavity ventilation hole. The air duct forms an air flow that is connected end to end inside the first cavity and the second cavity. The air duct includes a first air duct flowing through the temperature control component, a second air duct flowing through the precision motion platform, a third air duct flowing through the exposure member heat sink, and a fourth air duct flowing from the cavity ventilation hole to the temperature control component. Among them, the first air duct, the second air duct, and the fourth air duct together with the first air duct, the third air duct, and the fourth air duct form two loops of the air duct.
[0009] Preferably, the control system is provided with a temperature sensor, and the control system can control the temperature of the temperature control component. The temperature control component includes a cold and heat source, which cools or heats according to the temperature inside the machine body measured by the control system. The cold and heat source changes the temperature of the air duct through the liquid flowing in the circulation pipeline.
[0010] Preferably, the exposure device is equipped with the above temperature control device.
[0011] As can be seen from the above technical solutions, the present utility model has the following beneficial effects:
[0012] The present utility model sets the control system to detect the temperature inside the cavity and compare it with the temperature required by the exposure component, and then feedback it to the temperature control component for adjusting its own temperature. The heat of the temperature control component and the heat dissipation component is exchanged by heat transfer, so that the temperature of the heat dissipation component tends to the temperature required by the exposure component. Secondly, the exposure component can transfer heat to and from the heat dissipation component through the air duct, realizing the temperature control component to control the temperature of the exposure component, so that the internal temperature of the exposure device equipped with the temperature control device always fluctuates within a small range around the temperature required by the exposure component, improving the positioning accuracy of the precision motion platform of the exposure device and the exposure quality problem. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 It is a front view of an embodiment of the present utility model;
[0014] Figure 2 It is a schematic structural diagram of an embodiment of the present utility model.
[0015] In the figure: 1. body, 2. temperature control component, 3. heat dissipation component, 4. circulation filter component, 5. exposure component, 6. control system, 12. first cavity, 13. second cavity, 14. air duct, 141. first air duct, 142. second air duct, 143. third air duct, 144. fourth air duct, 131. door panel vents, 132. air door baffle, 133. air inlet duct, 15. cavity vents, 21. circulation duct, 22. cold and heat sources, 31. heat dissipation component, 32. heat dissipation fan, 321. heat dissipation duct, 41. circulation fan, 42. filter component, 51. exposure component, 52. exposure component cover, 53. exposure heat dissipation duct, 54. exposure component fan, 55. precision motion platform. DETAILED DESCRIPTION
[0016] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0017] In the description of the embodiments of the present invention, it should be noted that the terms "inside", "outside", "upper", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0018] like Figure 1 As shown, an embodiment of the utility model includes a body 1, which uses a heat-insulating material to avoid the influence of the external ambient temperature on its internal temperature as much as possible. The body 1 includes a first cavity 12 on the left and a second cavity 13 on the right. The first cavity 12 and the second cavity 13 are connected through a cavity ventilation hole 15, so that the air in the body 1 can flow in the first and second cavities.
[0019] A heat dissipation component 3 is fixedly connected to the top of the second cavity 12, and the heat dissipation component 3 includes a heat sink 31 and a heat dissipation fan 32. The heat sink 31 in this embodiment adopts a honeycomb aluminum structure as a heat dissipation structure, and a heat sink of other materials and structures may also be adopted. The left side of the heat sink 31 is in direct contact with the first cavity 12 so that the temperatures of the two are kept consistent. The heat dissipation fan 32 draws air from the temperature control component 2 through the heat sink 31 to form a heat dissipation duct 321, so that the heat dissipation duct 321 can accelerate the heat exchange between the heat sink 31 and the temperature control component 2.
[0020] Secondly, a temperature control component 2 is fixedly connected to the top of the second cavity 13, and the temperature control component 2 includes a cold and hot source 22 and a circulation pipe 21. The cold and hot source 22 can be a miniature air conditioner so that it can adjust its own temperature. The heat of the cold and hot source 22 is transferred through the coolant inside the circulation pipe 21. The end of the circulation pipe 21 is in direct contact with the heat sink 31, so that the heat of the heat sink 31 can be absorbed by the coolant inside the circulation pipe 21, thereby reducing the temperature of the heat sink 31. The heat dissipation fan 32 installed on the heat sink 31 promotes air flow, which can accelerate heat transfer, and then form a heat dissipation duct 321 in the heat sink 31. At the same time, the heat dissipation fan 32 pushes the air that has exchanged heat with the circulation pipe 21 to form the head end of the duct 14.
[0021] Among them, the air duct 14 moves along the top of the first cavity 12 to form a first air duct 141, and passes through a circulation filter component 4 fixed on the left side of the top of the first cavity 12. The circulation filter component 4 includes a circulation fan 41 and a filter element 42. The circulation fan 41 drives the first air duct 141 to first filter the air flowing through the filter element 42, and then changes its moving direction to make it move downward to form a second air duct 142.
[0022] A part of the second air duct 142 flows through the exposure assembly 5 fixedly connected to the bottom of the first cavity 12. The exposure assembly 5 includes a precision motion platform 55 at the bottom. The motion accuracy of the precision motion platform 55 is related to the temperature around it. When there is a temperature difference between the second air duct 142 and the precision motion platform 55, the two will exchange heat. The exposure assembly 5 also includes an exposure member 51 above the precision motion platform 55. The exposure member 51 generates a large amount of heat in the working state. Therefore, an exposure member heat sink 52 is fixedly connected to the exposure member 51. The exposure member heat sink 52 and the heat sink 31 can have the same structure. The exposure member heat sink 52 is connected to the exposure member heat sink 52. The circulating fan 4 drives part of the airflow of the first air duct 141 to flow through the exposure member heat sink 52, and heat is exchanged through the exposure member heat sink 53, thereby forming a third air duct 143. The third air duct 143 flows out of the first cavity 12 and moves upward to the heat sink 3, forming an end-to-end air duct 14.
[0023] In addition, a door panel vent hole 131 is formed on the upper right side of the second cavity 13, and a damper baffle 132 is formed below it. The damper baffle 132 is a one-way channel that only allows air to enter from the door panel vent hole 131 and the damper baffle 132. Air cannot flow out from the damper baffle 132, so that the second cavity 13 can maintain a weak positive pressure, thereby reducing the impact of external airflow on the temperature of the first cavity 12.
[0024] Although the embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.
[0025] The technologies, shapes, and structures not described in detail in the present utility model are all well-known technologies.
Claims
1. A temperature control device, characterized in that: include: A machine body (1), wherein an air duct (14) composed of air flows connected end to end is formed in the machine body (1); A temperature control component (2) disposed at the head end of the air duct (14), the temperature control component (2) being capable of changing its own temperature and transferring heat with the air duct (14); A heat dissipation component (3) is arranged on the flow path of the air duct (14), and the heat of the heat dissipation component (3) can be absorbed by the cooling liquid inside the temperature control component (2); and An exposure component (5) is arranged on the flow path of the air duct (14), and the exposure component (5) can transfer heat with the heat dissipation component (3) through the air duct (14).
2. The temperature control device according to claim 1, characterized in that: It also includes a circulation filter component (4) arranged on the flow path of the air duct (14), the circulation filter component (4) is on the flow path between the temperature control component (2) and the exposure component (5), and the circulation filter component (4) includes a circulation fan (41), and the circulation fan (41) is located at the intersection of the flow path of the air duct (14).
3. The temperature control device according to claim 1, characterized in that: The heat dissipation component (3) comprises: a heat sink (31) in contact with the temperature control component (2), the heat sink (31) being arranged on a flow path of the air duct (14); and A heat dissipation fan (32) is involved in forming the air duct (14), and the heat dissipation fan (32) draws air from the temperature control component (2) to flow through the heat dissipation element (31).
4. The temperature control device according to claim 1, characterized in that: The exposure assembly (5) comprises: A precision motion platform (55) is arranged on the flow path of the air duct (14), and a substrate to be exposed is placed on the top surface of the precision motion platform (55); An exposure member (51) disposed on the precision motion platform (55); an exposure member heat sink (52) disposed at a heat generating portion of the exposure member (51), the exposure member heat sink (52) and the exposure member (51) being capable of heat transfer; and An exposure member heat dissipation duct (53) is arranged on the exposure member heat dissipation member (52), and a third air duct (143) flowing through the exposure member heat dissipation member (52) moves in the exposure member heat dissipation duct (53).
5. The temperature control device according to claim 4, characterized in that: A first cavity (12) and a second cavity (13) are formed inside the machine body (1); the first cavity (12) and the second cavity (13) are connected via a cavity ventilation hole (15); and the air duct (14) forms an end-to-end connected air flow inside the first cavity (12) and the second cavity (13).
6. The temperature control device according to claim 5, characterized in that: The air duct (14) includes a first air duct (141) flowing through the temperature control component (2), a second air duct (142) flowing through the precision motion platform (55), a third air duct (143) flowing through the exposure element heat dissipation element (52), and a fourth air duct (144) flowing from the cavity ventilation hole (15) to the temperature control component (2), wherein the first air duct (141), the second air duct (142) and the fourth air duct (144) together with the first air duct (141), the third air duct (143) and the fourth air duct (144) constitute two circuits of the air duct (14).
7. The temperature control device according to claim 1, characterized in that: Also includes: A control system (6) is provided with a temperature sensor, and the control system (6) is capable of controlling the temperature of the temperature control component (2).
8. The temperature control device according to claim 7, characterized in that: The temperature control component (2) comprises a cold or heat source (22), which performs cooling or heating according to the temperature inside the machine body (1) measured by the control system (6), and the cold or heat source (22) changes the temperature of the air duct (14) by means of a liquid flowing in a circulation pipe (21).
9. The temperature control device according to claim 1, characterized in that: The machine body (1) further comprises a door panel ventilation hole (131) and a damper baffle (132).
10. An exposure device, characterized in that: The exposure equipment is equipped with a temperature control device as described in any one of claims 1 to 9.