Linear guide rail type rotatable platform for conveying mask plate

Abstract

The utility model relates to the technical field of mask transfer, and discloses a linear guide rail type rotatable platform for mask transfer, which comprises a linear transport slide rail and a rotatable platform arranged on the linear transport slide rail, and four groups of clamping, supporting and positioning components are arranged on the rotatable platform. Every two clamping, supporting and positioning assemblies are oppositely arranged, the rotatable platform is used for driving a mask plate to rotate to a preset angle, and every two clamping, supporting and positioning assemblies can linearly move oppositely or oppositely and are used for clamping the four side faces of the mask plate and supporting the lower end face of the mask plate. According to the mask transfer device, transfer of masks between adjacent parallel production lines is facilitated, the labor intensity of worker operation is relieved, the risk that the masks are polluted by manual transfer is reduced, and the transfer efficiency of the large-size masks between the parallel production lines is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of mask transfer, in particular to a linear guide type rotatable platform for mask transfer. Background Art

[0002] The glass for manufacturing photolithography mask products is smooth and fragile, which poses high requirements for the transfer device. At present, between adjacent parallel production lines, for the picking, placing and transferring of large-size masks, generally, the method of robot picking and placing + fixed plate rack for transfer + manual plate lifting assistance is adopted. For large-size masks, due to their large size and weight, manual plate lifting is time-consuming and laborious, and there are potential risks of collision and plate dropping during the plate lifting process. Moreover, direct hand contact with the mask may cause product contamination, and the cleanliness of the product cannot be guaranteed, seriously affecting production efficiency and quality. Therefore, we propose an automatic transfer device to solve the above problems. Content of the Utility Model

[0003] (1) Technical Problems to be Solved

[0004] In view of the deficiencies of the prior art, the utility model provides a linear guide type rotatable platform for mask transfer, which solves the problems that the picking, placing and transferring of existing large-size and heavy masks between different production lines are likely to cause product contamination, and it is inconvenient to adjust the angle of the mask during the transfer process, and the overall transfer efficiency needs to be improved.

[0005] (2) Technical Solutions

[0006] To achieve the above object, the utility model is realized through the following technical solutions:

[0007] A linear guide type rotatable platform for mask transfer includes a linear transport slide rail and a rotatable platform arranged on the linear electric slide rail. Four groups of clamping, supporting and positioning components are arranged on the rotatable platform, and two of the clamping, supporting and positioning components are arranged opposite to each other. The rotatable platform is used to drive the mask to rotate to a preset angle, and two of the clamping, supporting and positioning components can move linearly relative to or towards each other to clamp the four sides of the mask and support the lower end surface of the mask.

[0008] Preferably, the rotatable platform includes a driving component and an electric turntable. The electric turntable rotates through the driving component. A mounting seat is fixedly connected to the electric turntable. The clamping, supporting and positioning components are arranged on the mounting seat. The lower end surfaces of the electric turntable and the driving component are provided with a platform base component, and the platform base component is fixedly arranged on the linear transport slide rail.

[0009] Preferably, the clamping, supporting and positioning assembly includes a linear driving mechanism and a clamping and supporting seat arranged on the linear driving mechanism. The clamping and supporting seat clamps and supports the side edge of the mask plate sheet under the drive of the linear driving mechanism.

[0010] Preferably, four groups of the clamping, supporting and positioning assemblies are provided and are circumferentially arranged at intervals of 90° on the rotatable platform to respectively clamp and support the four side edges of the mask plate. Each of the four linear driving mechanisms is provided with an independent driving system and can move linearly independently.

[0011] Preferably, the linear driving mechanism includes a linear module and a moving mounting seat driven by the linear module. The clamping and supporting seat includes a supporting seat and a supporting part. The supporting seat is fixedly arranged on the moving mounting seat, and the two supporting parts are symmetrically and fixedly arranged on the supporting seat. A travel switch matching the moving mounting seat is arranged on one side of the linear module.

[0012] Preferably, the supporting seat is of a convex columnar structure, and the supporting surface of the supporting seat is arranged as an annular plane. The edge of the supported mask plate overlaps on the supporting surface, and the contact between the supporting surface and the mask plate is a line contact. The side surface of the mask plate sheet presses against the convex column of the supporting seat.

[0013] (III) Beneficial effects

[0014] The present utility model has the following beneficial effects:

[0015] The linear guide type rotatable platform for mask plate transmission is provided with a rotatable platform for linear transmission of mask plates between adjacent production lines and rotation at 0°, 90°, 180°, and 270° according to process requirements to achieve automatic docking and picking and placing by a robot. During the process of clamping and fixing the mask plate by the clamping, supporting and positioning assembly, the robot can automatically pick and place the mask plate from the platform, which is convenient for the transfer of the mask plate between adjacent parallel production lines, reduces the risk of accidental collision damage during the transportation of large-size mask plates by manual handling, and improves the practical performance. It reduces the labor intensity of workers' operations and the risk of contaminating the mask plate during manual transfer, and improves the plate transfer efficiency of large-size mask plates between parallel production lines. Description of the drawings

[0016] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0017] Figure 2 is a schematic diagram of the overall structure of the present utility model from another perspective;

[0018] Figure 3 is a schematic diagram of the layout structure of the supporting seat and the moving mounting seat of the present utility model.

[0019] In the figure: 1. Platform base assembly; 2. Rotatable platform; 21. Electric turntable; 22. Drive assembly; 23. Mounting seat; 3. Clamping, supporting and positioning assembly; 31. Linear drive mechanism; 311. Linear module; 312. Moving mounting seat; 313. Travel switch; 32. Clamping and supporting seat; 321. Supporting seat; 322. Supporting part. Detailed implementation manners

[0020] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0021] Please refer to Figure 1 , the present invention provides a technical solution: a linear guide rail type rotatable platform for mask plate transfer, including a linear transport slide rail and a rotatable platform 2 provided on the linear electric slide rail. Four groups of clamping, supporting and positioning assemblies 3 are provided on the rotatable platform, and two clamping, supporting and positioning assemblies 3 are arranged opposite to each other. The rotatable platform 2 is used to drive the mask plate to rotate to a preset angle, and two clamping, supporting and positioning assemblies 3 can move linearly relative to or towards each other to clamp the four sides of the mask plate and support the lower end surface of the mask plate.

[0022] In the present invention, the provided rotatable platform 2 is used for the linear transfer of mask plates between adjacent production lines and rotates at 0°, 90°, 180°, and 270° according to process requirements to achieve automatic docking and picking and placing by a robot. During the process of clamping and fixing the mask plate by the clamping, supporting and positioning assembly 3, the robot can automatically pick and place the mask plate from the platform, which is convenient for the transfer of the mask plate between adjacent parallel production lines, reduces the risk of accidental collision damage during the transportation of large-sized mask plates by manual handling, and improves the practical performance. It reduces the labor intensity of workers' operations and reduces the risk of manual transfer polluting the mask plate, and improves the transfer efficiency of large-sized mask plates between parallel production lines.

[0023] The linear electric slide rail selects a rail for a clean room in a dust-free chamber. The linear motion system has corrosion resistance and uses a rail with a ball retainer type. There is no friction between the balls, and almost no metal wear dust is generated, thus minimizing the generation of dust to the greatest extent. The electric slide rail drive assemblies 22 are all driven by servo motors.

[0024] In this embodiment, the rotatable platform 2 includes a driving component 22 and an electric turntable 21. The electric turntable 21 rotates through the driving component 22. A mounting seat 23 is fixedly connected to the electric turntable 21. The clamping, supporting and positioning component 3 is arranged on the mounting seat 23. The lower end surfaces of the electric turntable 21 and the driving component 22 are provided with a platform base component 1, and the platform base component 1 is fixedly arranged on the linear transport slide rail. A laser sensor is arranged at the center of the rotatable platform to detect whether the mask is at the entire clamping station.

[0025] In this embodiment, the clamping, supporting and positioning component 3 includes a linear driving mechanism 31 and a clamping and supporting seat 32 arranged on the linear driving mechanism 31. The clamping and supporting seat 32 clamps and supports the side of the mask plate under the drive of the linear driving mechanism 31.

[0026] Refer to Figure 2 As shown, in this embodiment, the clamping, supporting and positioning component 3 is arranged in four groups, circumferentially spaced 90° on the rotatable platform 2, and clamps and supports the four sides of the mask plate respectively. The four linear driving mechanisms 31 are all provided with independent driving systems and can move linearly independently. During the process of clamping and fixing the mask by the clamping, supporting and positioning component 3, the oppositely arranged clamping and supporting seats 32 will move to a position slightly larger than the size of the mask in advance according to the set formula parameters, and then move towards each other, and finally clamp the mask with the set protection torque. The clamping parts can minimize the product contact area while ensuring the safe clamping of the product, thereby reducing the pollution to the product.

[0027] Refer to Figure 2 And 3 As shown, in this embodiment, the linear driving mechanism 31 includes a linear module 311 and a moving mounting seat 312 driven by the linear module 311. The clamping and supporting seat 32 includes a supporting seat 321 and a supporting part 322. The supporting seat 321 is fixedly arranged on the moving mounting seat 312. Two supporting parts 322 are symmetrically and fixedly arranged on the supporting seat 321. A travel switch matching the moving mounting seat is arranged on one side of the linear module. The linear module 311 can accurately adjust the position of the moving mounting seat 312, provide appropriate pre-tightening force and supporting force for workpiece clamping, and at the same time center the workpiece to facilitate docking with the robot.

[0028] Refer to Figure 3As shown, in this embodiment, the support seat 321 is a convex columnar structure, the support surface of the support seat 321 is set in an annular plane, the edge of the supported mask overlaps the support surface, the contact between the support surface and the mask is a line contact, and the side of the mask plate is pressed against the convex column of the support seat 321. Two support seats 321 are installed on each group of clamping support positioning components 3. The support seat 321 is a convex columnar structure, the support surface of the support seat 321 is set in an annular plane, the edge of the supported mask overlaps the support surface, and the supporting capacity is good. When supporting, the contact with the mask is a line contact, which effectively reduces the contact area of ​​the mask, and tries to avoid mask contamination when supporting the mask; when the plate is placed on the support seat 321, the side of the plate is pressed against the convex column of the support seat 321, which effectively plays the effect of clamping the plate.

[0029] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions. The sentence "includes an element defined by ... does not exclude the existence of other identical elements in the process, method, article or device including the element".

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A linear guide type rotatable platform for mask transmission, characterized in that: It includes a linear transport slide and a rotatable platform arranged on the linear electric slide, the rotatable platform is provided with four groups of clamping, supporting and positioning components, two of the clamping, supporting and positioning components are arranged relatively to each other, the rotatable platform is used to drive the mask plate to rotate to a preset angle, two of the clamping, supporting and positioning components can move linearly relative to or towards each other, so as to clamp the four sides of the mask plate and support the lower end surface of the mask plate.

2. The linear guide type rotatable platform for mask transmission according to claim 1, characterized in that: The rotatable platform includes a driving assembly and an electric turntable. The electric turntable is rotated by the driving assembly. A mounting seat is fixedly connected to the electric turntable. The clamping support positioning assembly is arranged on the mounting seat. A platform base assembly is installed on the lower end surfaces of the electric turntable and the driving assembly. The platform base assembly is fixedly arranged on the linear transport slide rail.

3. The linear guide type rotatable platform for mask transmission according to claim 1, characterized in that: The clamping support positioning assembly comprises a linear drive mechanism and a clamping support seat arranged on the linear drive mechanism. The clamping support seat clamps and supports the side of the mask plate when driven by the linear drive mechanism.

4. The linear guide type rotatable platform for mask transmission according to claim 3, characterized in that: The clamping support positioning components are arranged in four groups, which are arranged on the rotatable platform at 90° circumferential intervals to clamp and support the four sides of the mask plate respectively. The four linear drive mechanisms are all provided with independent drive systems and can move linearly independently.

5. The linear guide type rotatable platform for mask transmission according to claim 4, characterized in that: The linear drive mechanism includes a linear module and a movable mounting seat driven by the linear module. The clamping support seat includes a support seat and a support part. The support seat is fixedly arranged on the movable mounting seat. The two support parts are symmetrically fixedly arranged on the support seat. A travel switch matching the movable mounting seat is arranged on one side of the linear module.

6. The linear guide type rotatable platform for mask transmission according to claim 5, characterized in that: The support seat is a convex column structure, the support surface of the support seat is arranged in an annular plane, the edge of the supported mask plate overlaps the support surface, the contact between the support surface and the mask plate is line contact, and the side surface of the mask plate material is in pressure contact with the convex column of the support seat.

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