Vacuum magnetron sputtering coating device

Abstract

The utility model discloses a vacuum magnetron sputtering coating device. The vacuum magnetron sputtering coating device comprises a body, the hanging point is convexly arranged on the side surface of the body; the metal hanging plate is hung on the body through a hanging point; an adsorption pad is arranged on one side, opposite to the body, of the metal hanging plate; and the adsorption pad is a fluorine-containing polyurethane porous membrane. The fluorine-containing polyurethane porous membrane is arranged on the metal hanging plate to serve as the adsorption pad, the adsorption pad can be tightly attached to the metal hanging plate and can tightly adsorb the cover plate by means of the flexibility of the fluorine-containing polyurethane porous membrane, and compared with the scheme of an adsorption pad with double-face foam, the problems that the adsorption pad is prone to falling off and adhesive residues are avoided in the scheme, and the service life of the adsorption pad is prolonged. And meanwhile, the fluorine-containing polyurethane porous membrane is not easy to adhere foreign matters and dust, so that the risk that the cover plate is scratched by the foreign matters is greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum magnetron sputtering coating, in particular to a vacuum magnetron sputtering coating device. Background Art

[0002] In the existing vacuum magnetron sputtering coating technology, the fixation and cleaning of the coating cover plate are key steps to ensure the coating quality. The traditional fixing method of the coating cover plate mostly uses double-sided foam for adhesion, but this method has problems such as double-sided sticky residual glue, easy falling off, easy adhesion of dust and foreign objects. These problems not only affect the stability of the coating process, but also increase the risk of cover plate scratching.

[0003] How to avoid and solve the above technical problems has become an urgent technical problem in the industry. Summary of the Invention

[0004] In order to at least solve the above technical problems, the purpose of the utility model is to provide a vacuum magnetron sputtering coating device. By setting a fluorinated polyurethane porous membrane as an adsorption pad on the metal hanging plate, and using the flexibility of the fluorinated polyurethane porous membrane, while the adsorption pad is closely attached to the metal hanging plate, it can also tightly adsorb the cover plate. Compared with the adsorption pad scheme of double-sided foam, this scheme will not have problems such as easy falling off and residual glue. At the same time, the fluorinated polyurethane porous membrane is not easy to adhere to foreign objects and dust, greatly reducing the risk of the cover plate being scratched by foreign objects.

[0005] To achieve the above purpose, the vacuum magnetron sputtering coating device provided by this application includes:

[0006] A body;

[0007] Hanging points, prominently arranged on the side of the body;

[0008] A metal hanging plate, suspended on the body through the hanging points;

[0009] An adsorption pad is provided on the side of the metal hanging plate facing away from the body;

[0010] The adsorption pad is a fluorinated polyurethane porous membrane.

[0011] Further, one side of the fluorinated polyurethane porous membrane is adsorbed on the metal hanging plate, and the other side is used to adsorb the cover plate.

[0012] Further, the side of the metal hanging plate facing away from the body has two fitting surfaces;

[0013] Each fitting surface corresponds to a cover plate;

[0014] The side of the metal hanging plate facing away from the body is in the shape of a folding door.

[0015] Further, the joint of the two fitting surfaces bulges outwards.

[0016] Further, the cover plate is a glass cover plate.

[0017] Further, there are multiple hanging points;

[0018] The multiple hanging points are annularly distributed on the side surface of the main body;

[0019] The number of metal hanging plates is not less than the number of hanging points.

[0020] Further, the multiple hanging points are equally spaced on the side surface of the main body.

[0021] Further, a fan fixing part is also provided at the upper part of the main body;

[0022] A fan is correspondingly provided at the fan fixing part;

[0023] The fan fixing part is arranged above the hanging point.

[0024] Further, the multiple fan fixing parts are equally spaced on the main body.

[0025] Further, the number of fan fixing parts is the same as the number of hanging points;

[0026] Each fan fixing part corresponds to a hanging point.

[0027] The vacuum magnetron sputtering coating device according to the embodiment of the present application includes: a main body; a hanging point, protruding on the side surface of the main body; a metal hanging plate, suspended on the main body through the hanging point; an adsorption pad is provided on the side of the metal hanging plate facing away from the main body; the adsorption pad is a fluorine-containing polyurethane porous membrane. By setting a fluorine-containing polyurethane porous membrane as the adsorption pad on the metal hanging plate, and using the flexibility of the fluorine-containing polyurethane porous membrane, while the adsorption pad closely adheres to the metal hanging plate, it can also tightly adsorb the cover plate. Compared with the adsorption pad scheme of double-sided foam, this scheme will not have the problems of easy detachment and residual glue. At the same time, the fluorine-containing polyurethane porous membrane is not easy to adhere to foreign objects and dust, greatly reducing the risk of the cover plate being scratched by foreign objects; the front surface of the metal hanging plate is designed as two fitting surfaces, increasing the hanging capacity of the metal hanging plate and improving the coating production capacity; the design of the fan enables the removal of film debris on the metal hanging plate or dust and foreign objects adhered to the surface of the cover plate during the coating process. These foreign objects can be blown away by the fan, reducing foreign object defects during the coating of the cover plate, and further improving the coating quality; improving the yield rate of the product and enhancing the market competitiveness of the product. Description of the Drawings

[0028] The drawings are used to provide a further understanding of the present application, and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application, and do not constitute a limitation to the present application. In the drawings:

[0029] Figure 1 This is a schematic structural diagram of the vacuum magnetron sputtering coating device according to an embodiment of the present application.

[0030] Explanation of reference numerals in the drawings:

[0031] 101 Body; 102 - Hanging point; 103 - Metal hanging plate; 104 - Fan fixing part; 105 - Fan. Specific embodiments

[0032] Hereinafter, embodiments of the present application will be described in more detail with reference to the accompanying drawings. Although some embodiments of the present application are shown in the drawings, it should be understood that the present application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. On the contrary, these embodiments are provided to more thoroughly and completely understand the present application. It should be understood that the drawings and embodiments of the present application are only for exemplary purposes and are not used to limit the protection scope of the present application.

[0033] It should be understood that the various steps described in the method embodiments of the present application can be executed in different orders and / or executed in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present application is not limited in this regard.

[0034] As used herein, the term "including" and its variants are open-ended, that is, "including but not limited to". The term "based on" is "at least partially based on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one additional embodiment"; the term "some embodiments" means "at least some embodiments". The relevant definitions of other terms will be given in the following description.

[0035] It should be noted that the modifications of "one" and "multiple" mentioned in the present application are illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly stated in the context, it should be understood as "one or more". "Multiple" should be understood as two or more.

[0036] The vacuum magnetron sputtering coating device according to an embodiment of the present application includes:

[0037] A body;

[0038] A hanging point, protruding on the side surface of the body;

[0039] A metal hanging plate, suspended on the body through the hanging point;

[0040] An adsorption pad is provided on the side of the metal hanging plate facing away from the body;

[0041] The adsorption pad is a fluorine-containing polyurethane porous membrane.

[0042] Embodiment 1

[0043] Figure 1 is a schematic structural diagram of the vacuum magnetron sputtering coating device according to an embodiment of the present application. The following will be combined with Figure 1 to describe in detail the vacuum magnetron sputtering coating device according to an embodiment of the present application.

[0044] The vacuum magnetron sputtering coating device according to an embodiment of the present application is used for vacuum magnetron sputtering coating of the cover plate.

[0045] In some exemplary embodiments, the vacuum magnetron sputtering coating device according to an embodiment of the present application includes: a main body 101.

[0046] In some exemplary embodiments, the main body 101 is used to carry the remaining components, and it can be understood that the components in the present application all rely on the main body 101.

[0047] In some exemplary embodiments, hanging points 102 are provided on the main body 101.

[0048] In some exemplary embodiments, the hanging points 102 are prominently provided on the side surface of the main body 101.

[0049] In some exemplary embodiments, the hanging points 102 are in an inverted "T" shape.

[0050] In some exemplary embodiments, the vacuum magnetron sputtering coating device according to an embodiment of the present application further includes: a metal hanging plate 103.

[0051] In some exemplary embodiments, the metal hanging plate 103 is hung on the main body 101 through the hanging points 102.

[0052] In some exemplary embodiments, a notch is provided at the upper end of the metal hanging plate 103, and the notch matches the hanging points 102.

[0053] In some exemplary embodiments, an adsorption pad is provided on the side of the metal hanging plate 103 facing away from the main body 101, that is, when the metal hanging plate 103 is hung on the hanging points 102, the back surface of the metal hanging plate 103 faces the main body 101, and the front surface of the metal hanging plate 103 faces away from the main body 101; an adsorption pad is provided on the front surface of the metal hanging plate 103.

[0054] In some exemplary embodiments, the adsorption pad is a fluorine-containing polyurethane porous membrane.

[0055] In some exemplary embodiments, when the cover plate is hung on the metal hanging plate 103, the cover plate is attached to the metal hanging plate 103 through the fluorine-containing polyurethane porous membrane, that is, one side of the fluorine-containing polyurethane porous membrane is adsorbed on the metal hanging plate 103, and the other side is used to adsorb the cover plate.

[0056] In some exemplary embodiments, one side of the metal hanging plate 103 facing away from the body 101 has two fitting surfaces, that is, the front surface of the metal hanging plate 103 has two fitting surfaces.

[0057] In some exemplary embodiments, each fitting surface corresponds to a cover plate, which can be understood as each metal hanging plate 103 can hang two cover plates.

[0058] In some exemplary embodiments, one side of the metal hanging plate 103 facing away from the body 101 is in the shape of a folding door.

[0059] In some exemplary embodiments, the joint of the two fitting surfaces bulges outwards; the protruding setting is for better coating treatment of the cover plate.

[0060] In some exemplary embodiments, the cover plate is a glass cover plate.

[0061] In some exemplary embodiments, there are multiple hanging points 102.

[0062] In some exemplary embodiments, the multiple hanging points 102 are annularly distributed on the side surface of the body 101.

[0063] In some exemplary embodiments, the number of metal hanging plates is not less than the number of hanging points 102.

[0064] In some exemplary embodiments, the number of metal hanging plates is equal to the number of hanging points 102.

[0065] In some exemplary embodiments, the multiple hanging points 102 are equally spaced on the side surface of the body 101.

[0066] In some exemplary embodiments, a fan fixing part 104 is further provided at the upper part of the body 101, and the fan fixing part 104 is provided, for example, at the top of the body 101.

[0067] In some exemplary embodiments, a fan 105 is correspondingly provided for the fan fixing part 104, that is, the fan 105 is installed on the fan fixing part 104.

[0068] In some exemplary embodiments, the fan fixing part 104 is arranged above the hanging point 102.

[0069] In some exemplary embodiments, there are multiple fan fixing parts 104.

[0070] In some exemplary embodiments, each fan fixing part 104 is installed with a fan 105.

[0071] In some exemplary embodiments, the multiple fan fixing parts 104 are equally spaced on the body 101.

[0072] In some exemplary embodiments, the number of the fan fixing parts 104 is the same as the number of the hanging points 102.

[0073] In some exemplary embodiments, each fan fixing part 104 corresponds to one hanging point 102, which can be understood as arranging a fan fixing part 104 directly above each hanging point 102.

[0074] Although the disclosed embodiments of the present invention are as above, the content is only the embodiments adopted for facilitating the understanding of the present invention and is not used to limit the present invention. Any person skilled in the art within the scope of the present invention can make any modifications and changes in the form and details of the implementation without departing from the spirit and scope disclosed by the present invention. However, the scope of patent protection of the present invention shall still be subject to the scope defined by the appended claims.

Claims

1. A vacuum magnetron sputtering coating device, characterized in that: include: ontology; A hanging point, protrudingly arranged on the side of the body; A metal hanging plate, hung on the body through the hanging point; An adsorption pad is provided on the side of the metal hanging plate facing away from the main body; The adsorption pad is a fluorine-containing polyurethane porous membrane; One side of the fluorine-containing polyurethane porous membrane is adsorbed on the metal hanging plate, and the other side is used to adsorb the cover plate; The side of the metal hanging plate facing away from the main body has two fitting surfaces; Each of the laminating surfaces corresponds to one of the cover plates; The side of the metal hanging plate facing away from the main body is in the shape of a folding door.

2. The vacuum magnetron sputtering coating device according to claim 1, characterized in that: The junction of the two fitting surfaces protrudes outwards.

3. The vacuum magnetron sputtering coating device according to claim 2, characterized in that: The cover plate is a glass cover plate.

4. The vacuum magnetron sputtering coating device according to claim 3, characterized in that: The hanging points include a plurality of; A plurality of the hanging points are distributed in a ring shape on the side of the body; The number of the metal hanging plates is not less than the number of the hanging points.

5. The vacuum magnetron sputtering coating device according to claim 4, characterized in that: The plurality of hanging points are distributed at equal intervals on the side surface of the main body.

6. The vacuum magnetron sputtering coating device according to claim 5, characterized in that: A fan fixing portion is also provided on the upper portion of the body; The fan fixing portion is correspondingly provided with a fan; The fan fixing portion is arranged above the hanging point.

7. The vacuum magnetron sputtering coating device according to claim 6, characterized in that: The plurality of fan fixing parts are distributed on the main body at equal intervals.

8. The vacuum magnetron sputtering coating device according to claim 7, characterized in that: The number of the fan fixing parts is the same as the number of the hanging points; Each of the fan fixing parts corresponds to one of the hanging points.

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