Tension control system and vacuum coating equipment

Abstract

The utility model provides a tension control system and vacuum coating equipment, and relates to the technical field of vacuum coating. The tension control system comprises a vacuum chamber, an unwinding roller, a winding shaft, an unwinding driving piece, a winding roller, a winding shaft, a winding driving piece and a magnetic fluid sealing piece, and the unwinding driving piece is used for driving the unwinding roller to rotate and enabling a base material to move at a preset speed; the winding driving piece is used for driving the winding roller to rotate and enabling the base material to move with preset tension; the unwinding roller and the winding roller are both located in the vacuum chamber, the unwinding driving part and the winding driving part are both located outside the vacuum chamber, the unwinding shaft and the winding shaft are both arranged in corresponding hole channels in the vacuum chamber in a penetrating mode, magnetic fluid sealing parts are arranged between the unwinding shaft and the corresponding hole channels, and magnetic fluid sealing parts are arranged between the winding shaft and the corresponding hole channels. Small tension adjustment of the base material can be achieved, and a larger tension adjustment interval is achieved so as to meet the requirements of multiple working conditions.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating, and particularly to a tension control system and a vacuum coating device. Background Art

[0002] As a special fluid, magnetic fluid can exhibit special properties under the action of a magnetic field, so it is often used as a dynamic sealing material, especially in vacuum coating equipment. However, the rotational resistance of magnetic fluid is relatively large. In the case where precise control of small tension is required, the rotational resistance of magnetic fluid will affect the control accuracy of the servo motor.

[0003] When it is necessary to control the tension of the substrate in a vacuum coating device, the traction servo motor for conveying the substrate needs to overcome the reverse torque of the unwinding servo motor and the rotational resistance of the magnetic fluid. That is, when the tension applied by the traction servo motor to the substrate is greater than the sum of the reverse torque of the unwinding servo motor and the rotational resistance of the magnetic fluid, feeding can be achieved. Obviously, this method cannot meet the requirement of small tension of the substrate, that is, the substrate is at a relatively low tension value. Summary of the Utility Model

[0004] In view of this, the purpose of the present application is to overcome the deficiencies in the prior art and provide a tension control system and a vacuum coating device, which can achieve small tension adjustment of the substrate and have a larger tension adjustment range to meet the requirements of multiple working conditions.

[0005] The present application provides the following technical solutions:

[0006] In a first aspect, an embodiment of the present application provides a tension control system. The tension control system includes a vacuum chamber, an unwinding roller, an unwinding shaft, an unwinding driving member, a winding roller, a winding shaft, a winding driving member, and a magnetic fluid seal. The unwinding driving member is connected to the unwinding shaft, the unwinding shaft is in transmission connection with the unwinding roller, and the unwinding shaft is used for unwinding the substrate. The winding shaft is used for winding the unwound substrate. The unwinding driving member is used to drive the unwinding shaft to rotate and make the substrate move at a preset speed; the winding driving member is connected to the winding shaft, the winding shaft is in transmission connection with the winding roller, and the winding driving member is used to drive the winding shaft to rotate and make the substrate move at a preset tension.

[0007] Wherein, both the unwinding roller and the winding roller are located in the vacuum chamber, both the unwinding driving member and the winding driving member are located outside the vacuum chamber, both the unwinding shaft and the winding shaft penetrate through corresponding holes in the vacuum chamber, and a magnetic fluid seal is provided between the unwinding shaft and the corresponding hole, and a magnetic fluid seal is provided between the winding shaft and the corresponding hole.

[0008] In one embodiment of the first aspect, the unwinding driving member includes an unwinding driving motor and a first motor driver. The first motor driver is electrically connected to the unwinding driving motor, and the first motor driver can adjust the rotation speed of the unwinding driving motor. The unwinding driving motor is disposed on the outer wall of the vacuum chamber, and the rotating shaft of the unwinding driving motor is connected to the unwinding shaft.

[0009] And / or, the winding driving member includes a winding driving motor and a second motor driver. The second motor driver is electrically connected to the winding driving motor, and the second motor driver can adjust the torque of the winding driving motor. The winding driving motor is disposed on the outer wall of the vacuum chamber, and the rotating shaft of the winding driving motor is connected to the winding shaft.

[0010] In one embodiment of the first aspect, the tension control system further includes at least one guide roller. The guide roller is rotatably connected to the vacuum chamber, and the guide roller, the winding roller, and the unwinding roller are arranged in parallel.

[0011] In one embodiment of the first aspect, the tension control system further includes:

[0012] A speed detection member. The speed detection member is disposed in the vacuum chamber, and the speed detection member can detect the linear speed of the substrate.

[0013] In one embodiment of the first aspect, the tension control system further includes:

[0014] A controller. The controller is electrically connected to the speed detection member and the first motor driver respectively.

[0015] In one embodiment of the first aspect, the speed detection member includes a speed sensor. The speed sensor is installed in the vacuum chamber.

[0016] In one embodiment of the first aspect, the tension control system further includes:

[0017] A tension detection member. The tension detection member is disposed in the vacuum chamber, and the tension detection member can detect the tension of the substrate conveyed from the unwinding roller to the winding roller.

[0018] In one embodiment of the first aspect, the controller is electrically connected to the tension detection member and the second motor driver respectively.

[0019] In one embodiment of the first aspect, the tension detection member includes a tension roller and a tension sensor. The substrate is wound around the tension roller, and the tension sensor is connected to the tension roller.

[0020] In a second aspect, the present application further provides a vacuum coating apparatus, which includes the tension control system described in any one of the above embodiments.

[0021] The embodiments of the present application have the following advantages:

[0022] The present application provides a tension control system. During the unwinding process, the unwinding driving member drives the unwinding shaft to rotate at a preset speed, thereby driving the unwinding roller to release the substrate. Both the unwinding shaft and the unwinding roller are located in the vacuum chamber. The unwinding shaft passes through the hole in the vacuum chamber and cooperates with the magnetic fluid seal to form a dynamic seal. During the winding process, the winding driving member drives the winding shaft to rotate at a preset torque, thereby driving the winding roller to wind the coated substrate. The winding shaft and the winding roller are also located in the vacuum chamber. The winding shaft passes through the hole in the vacuum chamber and cooperates with the magnetic fluid seal to form a dynamic seal. That is to say, the unwinding driving member is in a speed mode, that is, the unwinding driving member can adjust the rotation speed of the unwinding shaft, actively feed the substrate forward, and keep the linear velocity of the substrate constant by adjusting the rotation speed. The winding driving member is in a torque mode and keeps the tension of the substrate constant by adjusting the torque. At this time, the tension of the substrate is the difference between the torque generated by the winding driving member and the resistance of the magnetic fluid. Even if the magnetic fluid resistance is large, it does not affect the adjustment of the small tension required for the substrate.

[0023] Obviously, by precisely controlling the rotation speed and torque of the unwinding driving member and the winding driving member, precise control of the substrate tension can be achieved. And the rotation directions of the unwinding shaft and the winding shaft are set to be the same, which helps to reduce the influence of the rotational resistance of the magnetic fluid on the tension control. That is, by precisely controlling the rotation speed and torque of the unwinding driving member and the winding driving member, small tension adjustment of the substrate can be realized, and a larger range of tension adjustment can be achieved to meet the requirements of multiple working conditions. And by precisely controlling the tension, the processing quality during the coating process can be improved.

[0024] In addition, the present application also relates to a vacuum coating apparatus. Since the above-mentioned tension control system has the above technical effects, the vacuum coating apparatus including this tension control system should have the same technical effects, which will not be elaborated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0026] Figure 1 FIG. shows a schematic structural view of a tension control system provided by an embodiment of the present application from a perspective;

[0027] Figure 2 The figure shows a schematic structural diagram of another perspective of a tension control system provided by an embodiment of the present application.

[0028] Description of main component symbols:

[0029] 100 - Unwinding drive; 200 - Rewinding drive; 300 - Tension detector; 400 - Guide roller; 500 - Vacuum chamber; 600 - Magnetic fluid seal; 700 - Unwinding shaft; 800 - Unwinding roller; 900 - Rewinding shaft; 1000 - Rewinding roller; 1100 - Speed detector. Detailed implementation manners

[0030] The embodiments of the present application will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as a limitation to the present application.

[0031] It should be noted that when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. On the contrary, when an element is referred to as being "directly on" another element, there is no intermediate element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration.

[0032] In the present application, unless otherwise clearly defined and limited, the terms "installed", "connected", "connected to", "fixed" and other terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0033] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality of" means two or more unless otherwise clearly and specifically defined.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terms used in the specification of the template herein are for the purpose of describing specific embodiments only and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0035] In the related art, the unwinding and rewinding tension control system of a vibration coating device includes an unwinding servo motor, a rewinding servo motor, and a traction servo motor. The unwinding servo motor and the rewinding servo motor generally operate in a torque control mode, and automatically adjust the output torque according to the corresponding tension detection feedback to achieve the purpose of constant tension. The traction servo motor generally operates in a speed mode and runs at a constant speed according to production requirements to ensure the stable running speed and tension of the material. The unwinding servo motor, the rewinding servo motor, and the traction servo motor are all installed outside the vacuum chamber, and transfer torque (tension) to the substrate in the vacuum chamber through a magnetic fluid.

[0036] When it is necessary to control the tension of the substrate in a vacuum coating device, the traction servo motor for conveying the substrate needs to overcome the reverse torque of the unwinding servo motor and the rotational resistance of the magnetic fluid. That is, when the tension applied by the traction servo motor to the substrate is greater than the sum of the reverse torque of the unwinding servo motor and the rotational resistance of the magnetic fluid, feeding can be achieved. Obviously, this method cannot meet the small-tension requirement of the substrate, that is, the substrate is at a relatively low tension value.

[0037] As Figure 1 and Figure 2 shown, to solve the above technical problems, an embodiment of this application provides a tension control system. The tension control system includes a vacuum chamber 500, an unwinding roller 800, an unwinding shaft 700, an unwinding driving member 100, a rewinding roller 1000, a rewinding shaft 700, a rewinding driving member 200, and a magnetic fluid seal 600. The unwinding driving member 100 is connected to the unwinding shaft 700, the unwinding shaft 700 is in transmission connection with the unwinding roller 800. The unwinding shaft is used for unwinding the substrate, and the rewinding shaft is used for winding the unwound substrate. The unwinding driving member is used to drive the unwinding shaft to rotate and move the substrate at a preset speed; the rewinding driving member 200 is connected to the rewinding shaft 900, the rewinding shaft 900 is in transmission connection with the rewinding roller 1000. The rewinding driving member 200 is used to drive the rewinding shaft 900 to rotate and move the substrate at a preset tension, and the unwinding shaft 700 and the rewinding shaft 900 have the same rotation direction;

[0038] Among them, the unwinding roller 800 and the winding roller 1000 are both located in the vacuum chamber 500, the unwinding drive component 100 and the winding drive component 200 are both located outside the vacuum chamber 500, the unwinding shaft 700 and the winding shaft 900 are both passed through the corresponding channels on the vacuum chamber 500, and a magnetic fluid seal 600 is arranged between the unwinding shaft 700 and the corresponding channel, and a magnetic fluid seal 600 is arranged between the winding shaft 900 and the corresponding channel.

[0039] In these embodiments, the main components of the tension control system provided by the present application are: the vacuum chamber 500 is used to provide a vacuum environment to ensure high quality during the coating process. The unwinding roller 800 is used to unwind and release the substrate to be coated. The unwinding shaft 700 is connected to the unwinding roller 800 by transmission, and the unwinding shaft 700 is used to drive the unwinding roller 800 to rotate. The unwinding drive 100 drives the unwinding shaft 700 to rotate to control the substrate to rotate at a preset speed. The winding roller 1000 is used to wind up the coated substrate. The winding shaft 900 is connected to the winding roller 1000 by transmission, and the winding shaft 900 is used to drive the winding roller 1000. The winding drive 200 drives the winding shaft 900 to rotate to control the substrate to rotate at a preset tension; it is foreseeable that the tension of the substrate is controlled by adjusting the torque of the winding shaft; obviously, the preset torque is not limited to a fixed value, and can also be set to multiple preset torques, and the output torque of the winding drive 200 can be adjusted by conventional adjustment. The magnetic fluid seal 600 is used to form a seal between the unwinding shaft 700 and the rewinding shaft 900 and the channel of the vacuum chamber 500 to prevent gas leakage and ensure the vacuum degree in the vacuum chamber 500 .

[0040] During the unwinding process, the unwinding drive 100 drives the unwinding shaft 700 to rotate, thereby driving the unwinding roller 800 to release the substrate. The unwinding shaft 700 and the unwinding roller 800 are both located in the vacuum chamber 500. The unwinding shaft 700 passes through the hole on the vacuum chamber 500 and cooperates with the magnetic fluid seal 600 to form a dynamic seal.

[0041] During the winding process, the winding drive 200 drives the winding shaft 900 to rotate, thereby driving the winding roller 1000 to wind up the coated substrate. The winding shaft 900 and the winding roller 1000 are also located in the vacuum chamber 500. The winding shaft 900 passes through the hole on the vacuum chamber 500 and cooperates with the magnetic fluid seal 600 to form a dynamic seal.

[0042] That is, the unwinding drive 100 is in speed mode, and the winding drive 200 is in torque mode. The unwinding roller 800 actively feeds forward, and automatically adjusts the speed according to the speed detection feedback to ensure that the substrate speed is constant. At this time, the tension of the substrate is the difference between the torque generated by the winding drive 200 and the resistance of the magnetic fluid. Even if the resistance of the magnetic fluid is large, it does not affect the small tension required to adjust the substrate.

[0043] Obviously, by precisely controlling the rotational speeds and torques of the unwinding driving member 100 and the winding driving member 200, precise control of the substrate tension can be achieved. And the rotation directions of the unwinding shaft 700 and the winding shaft 900 are set to be the same, which helps to reduce the influence of the rotational resistance of the magnetic fluid on the tension control. That is, by precisely controlling the rotational speeds and torques of the unwinding driving member 100 and the winding driving member 200, small-tension adjustment of the substrate can be realized, and a larger range of tension adjustment can be achieved to meet the requirements of multiple working conditions. Moreover, by precisely controlling the tension, the processing quality during the coating process can be improved.

[0044] As Figure 1 and Figure 2 shown, in some embodiments, the unwinding driving member includes an unwinding driving motor and a first motor driver. The first motor driver is electrically connected to the unwinding driving motor, and the first motor driver can adjust the rotational speed of the unwinding driving motor. The unwinding driving motor is arranged on the outer wall of the vacuum chamber, and the rotating shaft of the unwinding driving motor is connected to the unwinding shaft.

[0045] In these embodiments, the unwinding driving motor is a motor used to drive the rotation of the unwinding shaft 700. The unwinding driving motor is arranged on the outer wall of the vacuum chamber 500, which means that the unwinding driving motor does not work inside the vacuum chamber 500, but drives the unwinding shaft 700 to rotate through its rotating shaft. The unwinding driving motor drives the unwinding shaft 700 through the rotation of its rotating shaft, and then drives the unwinding roller 800 to release the substrate.

[0046] Exemplarily, the unwinding driving motor is a servo motor. Of course, in other embodiments, the unwinding driving motor can also be a stepper motor, a DC motor, etc.

[0047] During the driving process, the first motor driver can adjust the rotational speed of the unwinding driving motor, and thus control the linear speed of the substrate.

[0048] The rotating shaft of the unwinding driving motor is connected to the unwinding shaft 700 through an appropriate connection method (such as a coupling or through a transmission mechanism). When the unwinding driving motor starts, its rotating shaft rotates, driving the unwinding shaft 700 to rotate. The rotation of the unwinding shaft 700 drives the unwinding roller 800 to release the substrate. By precisely controlling the rotational speed of the unwinding driving motor, precise control of the rotational speed of the unwinding shaft 700 can be achieved, and thus the release speed of the substrate can be controlled, thereby realizing the control of the substrate tension.

[0049] As Figure 1 and Figure 2 shown, in some embodiments, the winding driving member includes a winding driving motor and a second motor driver. The second motor driver is electrically connected to the winding driving motor, and the second motor driver can adjust the torque of the winding driving motor. The winding driving motor is arranged on the outer wall of the vacuum chamber, and the rotating shaft of the winding driving motor is connected to the winding shaft.

[0050] In these embodiments, the winding drive motor is an electric motor used to drive the rotation of the winding shaft 900. The winding drive motor is disposed on the outer wall of the vacuum chamber 500, which means that the winding drive motor does not operate inside the vacuum chamber 500, but drives the rotation of the winding shaft 900 by connecting to it through a rotating shaft. The winding drive motor drives the winding shaft 900 through the rotation of its rotating shaft, and then drives the winding roller 1000 to wind the coated substrate.

[0051] The rotating shaft of the winding drive motor is connected to the winding shaft 900 through an appropriate connection method (such as a coupling, or through a transmission mechanism). When the winding drive motor starts, its rotating shaft rotates, driving the rotation of the winding shaft 900. The rotation of the winding shaft 900 drives the winding roller 1000 to wind the coated substrate.

[0052] By precisely controlling the torque of the winding drive motor through the second motor driver, precise control of the torque of the winding shaft 900 can be achieved, thereby realizing the control of the substrate tension. Obviously, by precisely controlling the torque of the winding drive motor, precise control of the rotation speed of the winding shaft 900 can be achieved, thereby realizing the precise control of the substrate tension.

[0053] As Figure 1 and Figure 2 shown, in some embodiments, the tension control system further includes at least one guide roller 400. The guide roller 400 is rotatably connected to the vacuum chamber 500, and the guide roller 400, the winding roller 1000, and the unwinding roller 800 are arranged in parallel.

[0054] In these embodiments, the guide roller 400 is a roller used to guide the substrate to move along a predetermined path. The guide roller 400 is rotatably connected inside the vacuum chamber 500 and is arranged in parallel with the winding roller 1000 and the unwinding roller 800. Exemplarily, the guide roller 400 is rotatably connected to the inner wall of the vacuum chamber 500. Alternatively, the guide roller 400 is rotatably mounted on a bracket inside the vacuum chamber 500.

[0055] The guide roller 400 is located between the unwinding roller 800 and the winding roller 1000 and is arranged in parallel with both. After the substrate is released from the unwinding roller 800, it is guided by the guide roller 400 and finally wound onto the winding roller 1000. The guide roller 400 can help the substrate move smoothly along a predetermined path, reduce the fluctuation of the substrate during movement, and thus contribute to improving the processing quality during the coating process.

[0056] Exemplarily, the number of guide rollers 400 is 2. Of course, in other embodiments, the number of guide rollers 400 is 3, 4, 5, 6, 7, etc.

[0057] It should be noted that in this application, only the rewinding drive member 200 and the unwinding drive member 100 are adopted, effectively reducing the usage amount of the magnetic fluid and facilitating cost reduction.

[0058] As Figure 1 and Figure 2 shown, in some embodiments, the tension control system further includes a speed detection member 1100. The speed detection member 1100 is disposed inside the vacuum chamber 500, and the speed detection member 1100 can detect the linear velocity of the substrate.

[0059] In these embodiments, the speed detection member 1100 is a sensor or detection device for measuring the rotational speed of a rotating shaft. The speed detection member 1100 is disposed inside the vacuum chamber 500. The speed detection member 1100 can detect the linear velocity of the substrate in real time to ensure that the linear velocity of the substrate during the unwinding process remains within a predetermined range, that is, by dynamically adjusting the speed, the rotational speed of the unwinding shaft 700 is at a preset speed, that is, ensuring that the moving speed of the substrate is constant.

[0060] Alternatively, in other embodiments, by detecting the moving speed of the substrate, the tension of the substrate is further ensured to be constant.

[0061] The speed detection member 1100 can detect the rotational speed using various principles, such as a Hall effect sensor, an optical encoder, etc. When the unwinding shaft 700 rotates, the speed detection member 1100 will monitor the rotational speed generated on the shaft. The speed detection member 1100 sends the detected rotational speed signal to the control system. The control system adjusts the rotational speed or the applied force of the unwinding shaft 700 according to the rotational speed signal to maintain the stability of the tension of the substrate. By adjusting the rotational speed of the unwinding shaft 700, the control system can ensure that the tension of the substrate during the unwinding process remains within a predetermined range, which is crucial for ensuring the quality of the substrate.

[0062] In some embodiments, the tension control system further includes a controller. The controller is electrically connected to the speed detection member and the first motor driver respectively. Furthermore, the controller can send an instruction to the first motor driver according to the detected linear velocity of the substrate to adjust the rotational speed of the unwinding drive motor, thereby controlling the linear velocity of the substrate.

[0063] In some embodiments, the speed detection member 1100 includes a speed sensor. The speed sensor is disposed inside the vacuum chamber, and the speed sensor is electrically connected to the controller.

[0064] For example, the speed sensor is connected to the unwinding shaft, and the speed sensor is used to directly detect the rotation speed of the unwinding shaft 700. When the unwinding shaft 700 rotates, the speed sensor monitors the rotation speed generated on the shaft and converts the signal into an electrical signal. The speed sensor converts the detected rotation speed signal into an electrical signal and sends it to the control system. The signal processing unit amplifies and filters the electrical signal to improve the accuracy of the signal. The control system adjusts the rotation speed of the unwinding shaft 700 according to the rotation speed signal to maintain the speed of the substrate stable.

[0065] Of course, in other embodiments, the speed detection element 1100 can also be configured as a magneto-electric induction speed sensor, a photoelectric speed sensor, a Hall effect speed sensor, and the like.

[0066] like Figure 1 and Figure 2 As shown, in some embodiments, the tension control system also includes a tension detection member 300, which is disposed in the vacuum chamber 500, the unwinding roller 800 is used to unwind the substrate, the winding roller 1000 is used to wind up the free end of the substrate, and the tension detection member 300 can detect the tension of the substrate transported from the unwinding roller 800 to the winding roller 1000.

[0067] In these embodiments, the tension detection member 300 is a sensor or detection device for measuring the tension of the substrate. The tension detection member 300 is disposed in the vacuum chamber 500. The tension detection member 300 can monitor the tension of the substrate conveyed from the unwinding roller 800 to the winding roller 1000 in real time to ensure that the tension of the substrate is maintained within a predetermined range, thereby ensuring the quality of the coating.

[0068] For example, there are multiple tension detection members 300, which are distributed on the moving path of the substrate, so that various locations of the substrate can be detected in real time. Of course, in other embodiments, a single tension detection member 300 can also be provided.

[0069] In some embodiments, the controller is electrically connected to the tension detection member and the second motor driver, respectively, and the controller can send instructions to the second motor driver according to the detected tension of the substrate to adjust the torque of the winding drive motor, thereby controlling the tension of the substrate.

[0070] In some embodiments, the tension detecting member 300 includes a tension roller and a tension sensor, the substrate is wound around the tension roller, the tension sensor is connected to the tension roller, and the tension sensor is electrically connected to the controller.

[0071] In these implementations, the tension roller is a roller used to guide the substrate and measure its tension. The tension roller is located between the unwinding roller 800 and the winding roller 1000, and the tension roller helps guide the substrate and detects the tension of the substrate through the tension sensor thereon.

[0072] A tension sensor is a sensor used to measure the torque (i.e., rotational moment) on a rotating shaft. The tension sensor is connected to a tension roller. The tension sensor can monitor the torque on the tension roller in real time to indirectly measure the tension of the substrate.

[0073] Specifically, after the substrate is released from the unwind roller 800, it passes through the tension roller and then is wound onto the windup roller 1000. When the substrate passes through the tension roller, a force is exerted on the tension roller, and this force is proportional to the tension of the substrate. The tension sensor monitors the torque on the tension roller, and this torque is associated with the tension of the substrate.

[0074] In some embodiments, the present application also provides a vacuum coating apparatus, which includes the tension control system as described in any one of the above embodiments.

[0075] Since the above tension control system has the above technical effects, the vacuum coating apparatus including this tension control system should have the same technical effects, which will not be elaborated here.

[0076] In all the examples shown and described here, any specific value should be construed as merely exemplary, not as a limitation. Therefore, other examples of the exemplary embodiments may have different values.

[0077] It should be noted that like reference numerals and letters denote like items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0078] The above-described embodiments merely represent several implementation manners of the present application. Their descriptions are relatively specific and detailed, but should not be construed as limiting the scope of the present application. It should be pointed out that for those of ordinary skill in the art, without departing from the concept of the present application, several modifications and improvements can still be made, and these all fall within the protection scope of the present application.

Claims

1. A tension control system, characterized in that: The tension control system comprises a vacuum chamber, an unwinding roller, an unwinding shaft, an unwinding driving member, a winding roller, a winding shaft, a winding driving member and a magnetic fluid seal, wherein the unwinding driving member is connected to the unwinding shaft, the unwinding shaft is connected to the unwinding roller in a transmission manner, the unwinding shaft is used to unwind the substrate, the winding shaft is used to rewind the unwinded substrate, the unwinding driving member is used to drive the unwinding shaft to rotate and move the substrate at a preset speed; the winding driving member is connected to the unwinding shaft, the unwinding shaft is connected to the winding roller in a transmission manner, and the winding driving member is used to drive the unwinding shaft to rotate and move the substrate at a preset tension; Among them, the unwinding roller and the winding roller are both located in the vacuum chamber, the unwinding drive member and the winding drive member are both located outside the vacuum chamber, the unwinding shaft and the winding shaft are both passed through the corresponding channels on the vacuum chamber, and the magnetic fluid seal is arranged between the unwinding shaft and the corresponding channel, and the magnetic fluid seal is arranged between the unwinding shaft and the corresponding channel.

2. The tension control system according to claim 1, characterized in that: The unwinding drive member includes an unwinding drive motor and a first motor driver, the first motor driver is electrically connected to the unwinding drive motor, the first motor driver can adjust the speed of the unwinding drive motor, the unwinding drive motor is arranged on the outer wall of the vacuum chamber, and the rotating shaft of the unwinding drive motor is connected to the unwinding shaft; The winding drive component includes a winding drive motor and a second motor driver, the second motor driver is electrically connected to the winding drive motor, the second motor driver can adjust the torque of the winding drive motor, the winding drive motor is arranged on the outer wall of the vacuum chamber, and the rotating shaft of the winding drive motor is connected to the winding shaft.

3. The tension control system according to claim 1, characterized in that: The tension control system further comprises at least one guide roller, the guide roller is rotatably connected to the vacuum chamber, and the guide roller, the winding roller and the unwinding roller are arranged in parallel.

4. The tension control system according to claim 2, characterized in that: The tension control system further comprises: A speed detection component is disposed in the vacuum chamber and is capable of detecting the linear speed of the substrate.

5. The tension control system according to claim 4, characterized in that: The tension control system further comprises: A controller is electrically connected to the speed detection component and the first motor driver respectively.

6. The tension control system according to claim 5, characterized in that: The speed detecting member comprises a speed sensor, which is installed in the vacuum chamber and is electrically connected to the controller.

7. The tension control system according to claim 6, characterized in that: The tension control system further comprises: A tension detection member is disposed in the vacuum chamber and is capable of detecting the tension of the substrate conveyed from the unwinding roller to the winding roller.

8. The tension control system according to claim 7, characterized in that: The controller is electrically connected to the tension detecting member and the second motor driver respectively.

9. The tension control system according to claim 8, characterized in that: The tension detection member comprises a tension roller and a tension sensor, the substrate is wound around the tension roller, the tension sensor is connected to the tension roller, and the tension sensor is electrically connected to the controller.

10. A vacuum coating device, characterized in that: The vacuum coating equipment comprises the tension control system as claimed in any one of claims 1 to 9.

Images