Butt joint device convenient for pneumatic butt joint of film thickness measuring machine

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses a butt joint device convenient for pneumatic butt joint of a film thickness measuring machine, which comprises two cylinders, a shell and a fixed plate, and the two cylinders are distributed in bilateral symmetry. According to the butt joint device facilitating pneumatic butt joint of the film thickness measuring machine table, the butt joint part and other structures are protected by buffering and damping in the pneumatic impact process, the service life is prolonged, the situation that the butt joint part and other structures are inclined can be avoided, the stability of the device is improved, the measuring accuracy is guaranteed, and the butt joint device is convenient to use. The two positioning blocks can be moved out from the interiors of the two positioning grooves by screwing a hand wheel, so that the fixation of the two connecting blocks is relieved, and at the moment, the two connecting blocks can be pulled out from the interiors of the two connecting grooves, so that the butt-joint air bag is detached, and the butt-joint air bag is convenient to replace.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a docking device for facilitating pneumatic docking of a film thickness measuring machine. Background Technique

[0002] The film thickness measuring machine is mainly used to measure the thickness of materials such as coated films and thin sheets. In the semiconductor field, it is usually used to measure the thickness of functional coatings on wafers. The measuring platform of the film thickness measuring machine often moves through a pneumatic docking device. However, in the actual use process of the existing pneumatic docking device, since the airbag of the pneumatic docking device jacks up the docking part of the measuring platform, long-term impact movement will cause the internal structure of the docking part to be damaged and skewed, which will affect the use. Secondly, the airbag of the pneumatic device is very easy to be scratched and leak air during frequent contact with the docking part, which will cause inaccurate measurement results and even cause the machine to malfunction. Therefore, the airbag needs to be replaced. However, since most airbags are fixedly installed on the transmission part, it is not convenient to disassemble, resulting in inconvenience in replacing the airbag, which is not conducive to use. Therefore, a docking device for facilitating pneumatic docking of a film thickness measuring machine is proposed. Content of the Utility Model

[0003] (I) Technical Problems to be Solved

[0004] Aiming at the deficiencies of the prior art, the utility model provides a docking device for facilitating pneumatic docking of a film thickness measuring machine, which has the advantages of being able to buffer and shock-absorb the docking part and facilitating the disassembly of the airbag, and solves the problems in the actual use process of the existing pneumatic docking device. Since the airbag of the pneumatic docking device jacks up the docking part of the measuring platform, long-term impact movement will cause the internal structure of the docking part to be damaged and skewed, which will affect the use. Secondly, the airbag of the pneumatic device is very easy to be scratched and leak air during frequent contact with the docking part, which will cause inaccurate measurement results and even cause the machine to malfunction. Therefore, the airbag needs to be replaced. However, since most airbags are fixedly installed on the transmission part, it is not convenient to disassemble, resulting in inconvenience in replacing the airbag, which is not conducive to use.

[0005] (II) Technical Solution

[0006] To achieve the above purposes of buffering and damping the docking part and facilitating the disassembly of the airbag, the present utility model provides the following technical solutions: A docking device for facilitating pneumatic docking of a film thickness measuring machine, comprising two cylinders, a housing, and a fixing plate. The two cylinders are symmetrically distributed left and right. The output end of the left cylinder is provided with a mounting block fixedly connected to the output end of the right cylinder at one end. Both the left and right sides of the top of the mounting block are provided with connection grooves. Connection blocks are arranged inside both connection grooves. The top of the left connection block is provided with a docking airbag with one end fitting against the top of the mounting block and the other end fixedly connected to the top of the right connection block. The housing is located above the docking airbag. The bottom of the housing is provided with a docking part located above the docking airbag. The fixing plate is located above the housing. Both the left and right sides of the bottom of the fixing plate are provided with frames. Inside both frames, there are moving blocks with one end extending to their bottoms and fixedly connected to the top of the housing. On the inner walls of the opposite sides of both frames, there are limiting grooves. Inside both limiting grooves, there are limiting blocks with one end fixedly connected to the opposite sides of the two moving blocks respectively. The bottom of the fixing plate is provided with two hydraulic dampers located between the two frames and symmetrically distributed left and right. The piston rods of the two hydraulic dampers are fixedly connected to the top of the housing. The bottom of the fixing plate is provided with two fixing blocks located between the two hydraulic dampers and symmetrically distributed left and right. A buffer assembly is arranged between the two fixing blocks, with one end movably connected to the bottom of the fixing plate and the other end movably connected to the top of the housing. The bottom of the mounting block is provided with a mounting groove between the two connection grooves. The bottom of the mounting block is provided with a U-shaped frame below the mounting groove. A threaded rod is arranged between the left and right inner walls of the U-shaped frame. Both the left and right ends of the outer side of the threaded rod are provided with traction blocks with one end movably connected to the inner bottom wall of the U-shaped frame and the other end extending into the mounting groove and movably connected to the inner top wall of the mounting groove. Positioning grooves are arranged on the opposite sides of both connection blocks. Positioning blocks with one end extending into the two positioning grooves respectively are arranged on the opposite sides of both traction blocks. A cross plate is arranged between the front and rear inner walls of the mounting groove on the opposite sides of the two traction blocks. A driving assembly is arranged on the outer side of the threaded rod, with one end movably connected to the bottom of the cross plate and the other end extending to the bottom of the U-shaped frame.

[0007] Preferably, the buffer assembly includes a mounting rod. The mounting rod is fixedly installed between the two fixing blocks. Both the left and right ends of the outer side of the mounting rod are movably installed with sliders with one end movably connected to the bottom of the fixing plate. A buffer spring located on the outer side of the mounting rod is fixedly installed between the two sliders. The bottoms of both sliders are movably installed with connecting rods with one end movably connected to the top of the housing.

[0008] Preferably, the driving assembly includes a worm gear. A worm gear located between two traction blocks is fixedly installed on the outer side of the threaded rod. A worm is movably installed at the bottom of the cross plate, with one end meshing with the worm gear and the other end extending to the bottom of the U-shaped frame. A handwheel is fixedly installed at the bottom of the worm.

[0009] Preferably, first bearings are fixedly installed on both the left and right sides of the inner wall of the U-shaped frame. The threaded rod is rotatably connected to the inner wall of the U-shaped frame through the first bearings.

[0010] Preferably, two sections of threads are provided on the outer side of the threaded rod, and the two sections of threads have equal lengths and opposite directions. Threaded holes adapted to the threaded rod are formed inside both of the two traction blocks.

[0011] Preferably, a second bearing is fixedly installed at the bottom of the cross plate. The worm is rotatably connected to the bottom of the cross plate through the second bearing.

[0012] (III) Beneficial Effects

[0013] Compared with the prior art, the present utility model provides a docking device facilitating pneumatic docking of a film thickness measuring machine, having the following beneficial effects:

[0014] 1. For the docking device facilitating pneumatic docking of the film thickness measuring machine, by providing a frame body and a moving block, when the docking part receives an upward impact from the docking airbag, the docking part and the housing will move upward as a whole. Thus, two connecting rods are used to drive two sliders to move relatively, squeezing the buffer springs. Thereby, the impact force is buffered and degraded by the elastic force of the buffer springs. Secondly, during the upward movement of the housing, the piston rods of the two hydraulic dampers will also be squeezed, further degrading the impact force. Ultimately, it plays a role in buffering and damping the pneumatic impact process, protecting structures such as the docking part, thereby extending the service life. Secondly, it can also prevent structures such as the docking part from being skewed, thus improving the stability of the device and ensuring the accuracy of measurement.

[0015] 2. For the docking device facilitating pneumatic docking of the film thickness measuring machine, by turning the handwheel to drive the worm to rotate, and then driving the threaded rod to rotate through the worm gear. During the rotation of the threaded rod, the two traction blocks and the positioning block will move relatively, causing the two positioning blocks to move out of the two positioning grooves respectively, thus releasing the fixation of the two connecting blocks. At this time, the two connecting blocks can be respectively pulled out from the two connecting grooves, thereby disassembling the docking airbag, achieving the purpose of facilitating the disassembly of the airbag, and facilitating the replacement of the docking airbag. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic structural diagram of the present utility model;

[0017] Figure 2 For the present utility model Figure 1 Enlarged view of position A in the present utility model;

[0018] Figure 3 For the present utility model Figure 1 Enlarged view of position B in the present utility model.

[0019] In the figure: 1 cylinder, 2 mounting block, 3 connecting groove, 4 connecting block, 5 docking airbag, 6 housing, 7 docking part, 8 fixing plate, 9 frame body, 10 moving block, 11 limiting groove, 12 limiting block, 13 hydraulic damper, 14 fixing block, 15 buffer assembly, 151 mounting rod, 152 slider, 153 buffer spring, 154 connecting rod, 16 mounting groove, 17 U-shaped frame, 18 threaded rod, 19 traction block, 20 positioning groove, 21 positioning block, 22 cross plate, 23 driving assembly, 231 worm gear, 232 worm, 233 hand wheel. Specific embodiments

[0020] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0021] Please refer to Figures 1-3 , the present utility model provides a technical solution: a docking device for facilitating pneumatic docking of a film thickness measuring machine, including two cylinders 1, a housing 6 and a fixing plate 8. The two cylinders 1 are symmetrically distributed left and right. The output end of the left cylinder 1 is fixedly installed with a mounting block 2 whose one end is fixedly connected to the output end of the right cylinder 1. Connecting grooves 3 are respectively opened on the left and right sides of the top of the mounting block 2. Connecting blocks 4 are movably installed inside the two connecting grooves 3. The bottoms of the two connecting blocks 4 are respectively in contact with the inner bottom walls of the two connecting grooves 3. The top of the left connecting block 4 is fixedly installed with a docking airbag 5 whose one end is in contact with the top of the mounting block 2 and the other end is fixedly connected to the top of the right connecting block 4. The housing 6 is located above the docking airbag 5. The housing 6 is in the shape of a round cover. The bottom of the housing 6 is fixedly installed with a docking part 7 located above the docking airbag 5. The docking part 7 is a metal columnar body. The fixing plate 8 is located above the housing 6.

[0022] On the left and right sides of the bottom of the fixed plate 8, there are fixedly installed frame bodies 9. Inside both of the two frame bodies 9, there is movably installed a moving block 10 whose one end extends to its bottom and is fixedly connected to the top of the housing 6. On the inner walls of the opposite sides of the two frame bodies 9, there are respectively opened limiting grooves 11. Inside both of the two limiting grooves 11, there is movably installed a limiting block 12 whose one end is fixedly connected to the opposite side of the two moving blocks 10 respectively. At the bottom of the fixed plate 8, there is fixedly installed a hydraulic damper 13 which is located between the two frame bodies 9, has a quantity of two and is distributed symmetrically left and right. The piston rods of the two hydraulic dampers 13 are both fixedly connected to the top of the housing 6.

[0023] At the bottom of the fixed plate 8, there are fixedly installed fixed blocks 14 which are located between the two hydraulic dampers 13, have a quantity of two and are distributed symmetrically left and right. Between the two fixed blocks 14, there is fixedly installed a buffer assembly 15 whose one end is movably connected to the bottom of the fixed plate 8 and the other end is movably connected to the top of the housing 6. The buffer assembly 15 includes an installation rod 151. Between the two fixed blocks 14, there is fixedly installed an installation rod 151. On the left and right ends of the outer side of the installation rod 151, there are movably installed sliders 152 whose one ends are movably connected to the bottom of the fixed plate 8. Inside both of the two sliders 152, there are respectively opened installation holes adapted to the installation rod 151. Between the two sliders 152, there is fixedly installed a buffer spring 153 located on the outer side of the installation rod 151. At the bottom of both of the two sliders 152, there is movably installed a connecting rod 154 whose one end is movably connected to the top of the housing 6. On the bottom of both of the two sliders 152 and on the left and right sides of the top of the housing 6, there are fixedly installed rotating blocks. The connecting rod 154 is movably connected to the slider 152 and the housing 6 respectively through the rotating blocks.

[0024] At the bottom of the installation block 2, there is an installation groove 16 located between the two connecting grooves 3. At the bottom of the installation block 2, there is fixedly installed a U-shaped frame 17 located below the installation groove 16. Between the left and right sides of the inner wall of the U-shaped frame 17, there is movably installed a threaded rod 18. On the left and right sides of the inner wall of the U-shaped frame 17, there are respectively fixedly installed first bearings. The threaded rod 18 is rotationally connected to the inner wall of the U-shaped frame 17 through the first bearings. On the left and right ends of the outer side of the threaded rod 18, there are respectively threadedly connected traction blocks 19 whose one ends are movably connected to the inner bottom wall of the U-shaped frame 17 and the other ends extend into the installation groove 16 and are movably connected to the inner top wall of the installation groove 16. There are two sections of threads on the outer side of the threaded rod 18 and the lengths of the two sections of threads are equal and the directions are opposite. Inside both of the two traction blocks 19, there are respectively opened threaded holes adapted to the threaded rod 18. On the opposite sides of the two connecting blocks 4, there are respectively opened positioning grooves 20. On the opposite sides of the two traction blocks 19, there are respectively fixedly installed positioning blocks 21 whose one ends respectively extend into the two positioning grooves 20.

[0025] A cross plate 22 located on the opposite sides of the two traction blocks 19 is fixedly installed between the front and rear sides of the inner wall of the installation groove 16. A driving assembly 23 is fixedly installed on the outer side of the threaded rod 18, with one end movably connected to the bottom of the cross plate 22 and the other end extending to the bottom of the U-shaped frame 17. The driving assembly 23 includes a worm gear 231. A worm gear 231 located between the two traction blocks 19 is fixedly installed on the outer side of the threaded rod 18. One end of a worm 232 is movably installed at the bottom of the cross plate 22 and meshes with the worm gear 231, and the other end extends to the bottom of the U-shaped frame 17. A second bearing is fixedly installed at the bottom of the cross plate 22. The worm 232 is rotatably connected to the bottom of the cross plate 22 through the second bearing. A handwheel 233 is fixedly installed at the bottom of the worm 232.

[0026] During use, the fixing plate 8 is fixed to the machine table. When the docking part 7 is impacted upward by the docking airbag 5, the docking part 7 and the housing 6 will move upward as a whole. In this way, the two sliders 152 are driven to move relative to each other through the two connecting rods 154 to squeeze the buffer springs 153. Thus, the impact force is buffered and degraded by the elastic force of the buffer springs 153. Secondly, during the upward movement of the housing 6, the piston rods of the two hydraulic dampers 13 will also be squeezed to further degrade the impact force. Finally, it plays a role in buffering and damping the pneumatic impact process, thereby protecting structures such as the docking part 7 and extending the service life. Secondly, it can also prevent structures such as the docking part 7 from being skewed, thereby improving the stability of the device and ensuring the accuracy of measurement. When the docking airbag 5 is scratched and leaks air, the handwheel 233 can be rotated to drive the worm 232 to rotate, and then the threaded rod 18 is driven to rotate through the worm gear 231. During the rotation of the threaded rod 18, the two traction blocks 19 and the positioning blocks 21 will move relative to each other, so that the two positioning blocks 21 are respectively removed from the inside of the two positioning grooves 20, thus releasing the fixation of the two connecting blocks 4. At this time, the two connecting blocks 4 can be respectively pulled out from the inside of the two connecting grooves 3 to disassemble the docking airbag 5. Then, the two connecting blocks 4 on the new docking airbag 5 are respectively inserted into the inside of the two connecting grooves 3, and then the handwheel 233 is rotated in the reverse direction to make the two positioning blocks 21 respectively move into the inside of the two positioning grooves 20, and the new docking airbag 5 can be fixed, which facilitates the quick replacement of the docking airbag 5 and avoids affecting the normal use of the device.

[0027] In summary, for the docking device facilitating pneumatic docking of the film thickness measuring machine tool, by setting the frame 9 and the moving block 10, when the docking part 7 is impacted upward by the docking airbag 5, the docking part 7 and the housing 6 will move upward as a whole. In this way, two connecting rods 154 are used to drive two sliders 152 to move relatively, so as to squeeze the buffer spring 153. Thus, the impact force is buffered and degraded by the elastic force of the buffer spring 153. Secondly, during the upward movement of the housing 6, the piston rods of the two hydraulic dampers 13 will also be squeezed, so as to further degrade the impact force, and finally play a role in buffering and damping the pneumatic impact process, thereby protecting structures such as the docking part 7, and further extending the service life. Secondly, it can also prevent structures such as the docking part 7 from being skewed, thereby improving the stability of the device, and further ensuring the accuracy of measurement. Secondly, by turning the handwheel 233 to drive the worm 232 to rotate, and then driving the threaded rod 18 to rotate through the worm gear 231. During the rotation of the threaded rod 18, two traction blocks 19 and positioning blocks 21 will be driven to move relatively, so that the two positioning blocks 21 are respectively removed from the inside of the two positioning grooves 20, thus releasing the fixation of the two connecting blocks 4. At this time, the two connecting blocks 4 can be respectively pulled out from the inside of the two connecting grooves 3, so as to disassemble the docking airbag 5, thereby achieving the purpose of facilitating the disassembly of the airbag, and further facilitating the replacement of the docking airbag 5, solving the problems that in the actual use process of the existing pneumatic docking device, since the airbag of the pneumatic docking device jacks up the docking part of the measuring platform, long-term impact movement will cause structural loss and skew inside the docking part, which will further affect the use. Secondly, during the frequent contact between the airbag of the pneumatic device and the docking part, it is easy to be scratched and leak air, which will cause inaccurate measurement results and even cause the machine tool to malfunction. Therefore, the airbag needs to be replaced. However, since most airbags are fixedly installed on the transmission part and are not convenient to disassemble, it is not convenient to replace the airbag, which is not conducive to use.

[0028] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or sequence between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including a..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element.

[0029] Although embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A docking device for facilitating pneumatic docking of a film thickness measuring machine, comprising two cylinders (1), a shell (6) and a fixing plate (8), wherein the two cylinders (1) are symmetrically distributed on the left and right sides, and the output end of the left cylinder (1) is provided with a mounting block (2) having one end fixedly connected to the output end of the right cylinder (1), and the left and right sides of the top of the mounting block (2) are provided with connecting grooves (3), and the insides of the two connecting grooves (3) are provided with connecting blocks (4), and the top of the left connecting block (4) is provided with a docking airbag (5) having one end in contact with the top of the mounting block (2) and the other end fixedly connected to the top of the right connecting block (4), and the shell (6) is located above the docking airbag (5), and the bottom of the shell (6) is provided with a docking portion (7) located above the docking airbag (5), and the fixing plate (8) is located above the shell (6), characterized in that: The fixing plate (8) is provided with a frame body (9) on both left and right sides of the bottom, and a moving block (10) having one end extending to the bottom and fixedly connected to the top of the shell (6) is provided inside the two frames (9), and a limiting groove (11) is provided on the inner walls on opposite sides of the two frames (9), and a limiting block (12) having one end fixedly connected to the opposite sides of the two moving blocks (10) is provided inside the two limiting grooves (11). The fixing plate (8) is provided with two hydraulic dampers (13) located between the two frames (9) and symmetrically distributed on the left and right sides at the bottom, and the piston rods of the two hydraulic dampers (13) are fixedly connected to the top of the shell (6). The fixing plate (8) is provided with two fixing blocks (14) located between the two hydraulic dampers (13) and symmetrically distributed on the left and right sides at the bottom, and a buffer component (15) having one end movably connected to the bottom of the fixing plate (8) and the other end movably connected to the top of the shell (6) is provided between the two fixing blocks (14). The mounting The bottom of the block (2) is provided with a mounting groove (16) located between the two connecting grooves (3); the bottom of the mounting block (2) is provided with a U-shaped frame (17) located below the mounting groove (16); a threaded rod (18) is provided between the left and right sides of the inner wall of the U-shaped frame (17); and the left and right ends of the outer side of the threaded rod (18) are provided with a traction block (19) with one end movably connected to the inner bottom wall of the U-shaped frame (17) and the other end extending into the interior of the mounting groove (16) and movably connected to the inner top wall of the mounting groove (16). , positioning grooves (20) are provided on opposite sides of the two connecting blocks (4), positioning blocks (21) are provided on opposite sides of the two traction blocks (19) with one end extending into the inside of the two positioning grooves (20), a transverse plate (22) is provided between the front and rear sides of the inner wall of the installation groove (16) and is located on opposite sides of the two traction blocks (19), and a driving component (23) is provided on the outer side of the threaded rod (18) with one end movably connected to the bottom of the transverse plate (22) and the other end extending to the bottom of the U-shaped frame (17).

2. A docking device for facilitating pneumatic docking of a film thickness measuring machine according to claim 1, characterized in that: The buffer assembly (15) comprises a mounting rod (151), the mounting rod (151) being fixedly mounted between the two fixing blocks (14), a slider (152) having one end movably mounted on the left and right ends of the outer side of the mounting rod (151), one end of which is movably connected to the bottom of the fixing plate (8), a buffer spring (153) located on the outer side of the mounting rod (151) being fixedly mounted between the two sliders (152), and a connecting rod (154) having one end movably connected to the top of the housing (6) being movably mounted on the bottom of the two sliders (152).

3. The docking device for facilitating pneumatic docking of a film thickness measuring machine according to claim 1, characterized in that: The driving assembly (23) comprises a worm wheel (231), the outer side of the threaded rod (18) is fixedly mounted with a worm wheel (231) located between two traction blocks (19), the bottom of the cross plate (22) is movably mounted with a worm (232) having one end meshing with the worm wheel (231) and the other end extending to the bottom of the U-shaped frame (17), and the bottom of the worm (232) is fixedly mounted with a hand wheel (233).

4. The docking device for facilitating pneumatic docking of a film thickness measuring machine according to claim 1, characterized in that: First bearings are fixedly mounted on both left and right sides of the inner wall of the U-shaped frame (17), and the threaded rod (18) is rotatably connected to the inner wall of the U-shaped frame (17) via the first bearings.

5. The docking device for facilitating pneumatic docking of a film thickness measuring machine according to claim 1, characterized in that: The outer side of the threaded rod (18) is provided with two sections of threads, and the two sections of threads are of equal length and opposite directions. The insides of the two traction blocks (19) are provided with threaded holes that are compatible with the threaded rod (18).

6. The docking device for facilitating pneumatic docking of a film thickness measuring machine according to claim 3, characterized in that: A second bearing is fixedly mounted on the bottom of the transverse plate (22), and the worm (232) is rotatably connected to the bottom of the transverse plate (22) via the second bearing.

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