Coating device and coating equipment

Abstract

The embodiment of the utility model provides a coating device and coating equipment, and relates to the technical field of coating equipment, the coating device comprises a base and a moving mechanism, the moving mechanism is arranged on the base to move in a first direction; the rotating mechanism is arranged above the moving mechanism, and the rotating mechanism bears the workpiece to move in a second direction; the jacking mechanism drives the workpiece to move in a third direction in a jacking state and a non-jacking state; and the coating cleaning mechanism is arranged on one side of the rotating mechanism, and the coating cleaning mechanism is used for cleaning, glue discharging, resetting and testing before coating. The coating device is compatible with a cleaning function, improves the coating precision, is compatible with workpieces of different sizes, is compact in structure, saves space, and saves the production cost of the device.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, and particularly relates to a coating device and coating equipment. Background Art

[0002] The coating process is a conventional process in the ODF (One Drop Fill) process of semiconductor wafers. The flatness of the wafer surface, the rotation correction accuracy, and the cleanliness of the coating head are the key factors in the coating process technology; the flatness of the wafer in the wafer coating area, the position accuracy after wafer correction, and the cleanliness of the coating head will all cause instability in the dot coating amount and poor coating accuracy.

[0003] At present, the flatness of the wafer itself can meet relatively high requirements. However, since the wafer is very thin, when the wafer is placed on the coating platform, there are relatively high requirements for the flatness of the coating platform, the rotation correction accuracy of the coating platform driving the wafer, and the cleaning of the coating head.

[0004] In the prior art, the coating platform generally uses a DD motor for rotation correction, with a relatively large structure, poor jitter and rigidity, and cannot meet the requirements for the levelness of the coating platform. There is a need for a platform with high flatness, high rigidity, high correction and a cleaning function, which is compatible with wafers of different sizes. Summary of the Utility Model

[0005] The utility model provides a coating device and coating equipment to solve the problems in the prior art, such as unreasonable structure layout, low flexibility, and inability to be compatible with a cleaning unit. The device can be compatible with workpieces of different sizes to quickly complete the coating operation, with a compact structure and compatible with the coating cleaning unit, improving the coating accuracy.

[0006] To solve the above problems, the technical solution adopted by the utility model is:

[0007] The utility model provides a coating device, including:

[0008] A base;

[0009] A moving mechanism, which is arranged on the base to move in the first direction;

[0010] A rotating mechanism, which is arranged above the moving mechanism and the rotating mechanism carries the workpiece to move in the second direction;

[0011] A lifting mechanism, which drives the workpiece to move in the third direction in a lifted and non-lifted state;

[0012] A coating and cleaning mechanism, which is arranged on one side of the rotating mechanism and the coating and cleaning mechanism performs cleaning, degumming, resetting, and testing before coating.

[0013] Further, the rotation mechanism includes a first driving unit for movement in the second direction. The first driving unit includes a base plate, a first driving member provided on the base plate, a first lead screw connected to the first driving member, a plurality of support seats fixing the first lead screw and the first driving member, a first moving member provided between the support seats and fixed to the base plate, a nut slider sleeved on the first lead screw and fixed to the first moving member, a second moving member fixed to the nut slider, and a coating platform for carrying a workpiece. The center of the coating platform is fixed. A first auxiliary member for maintaining horizontal is provided below the coating platform, and a first fixing member for fixing the first auxiliary member. A first connecting member connects the coating platform and the second moving member. A second auxiliary member for maintaining horizontal is further provided below the first connecting member. The second auxiliary member is provided above the second moving member. The first moving member moves in the first direction, and the second moving member moves in the fourth direction.

[0014] Further, the lifting mechanism includes a second driving unit for driving the lifting mechanism to be in a lifted state and a non-lifted state, a support unit for supporting the coating platform, and a lifting column for lifting. The second driving unit includes a second driving member suspended above the base, a second lead screw connecting the second driving member and the coating platform, and a transmission member connecting the second driving member and the second lead screw. The support unit includes a first support member for supporting the second driving member and the second lead screw, a second support member for supporting the lifting column, a third support member for supporting the coating platform, and a fourth support member provided on both sides of the base plate and on the same horizontal plane. The third support member is vertically fixed downward to the base plate and vertically fixed upward below the first fixing member. The second support member is arranged parallel to the third direction below the coating platform. A second connecting member is provided below the second support member. A third moving member is further provided on the third support member. The third moving member and the second support member are connected by the second connecting member. A third moving member is further provided on the third support member. The third moving member and the second support member are connected by the second connecting member.

[0015] Preferably, the coating platform includes an adsorption groove for adsorbing a workpiece and through holes for the lifting column to perform a lifting movement. The inner cavity of the adsorption groove is divided into a plurality of independent adsorption areas, and the through holes are several.

[0016] Preferably, a buffer member for buffering when receiving the workpiece is provided at the upper end of the lifting column. The lifting column and the buffer member perform movement in the third direction through the through holes.

[0017] Further, the coating and cleaning mechanism includes a coating head, a testing unit for performing coating tests on the coating head, a resetting unit for resetting the coating head, a cleaning unit for cleaning the coating head, and a glue discharging unit for discharging glue from the coating head. The testing unit includes a proofing area for pre-coating the coating head and a detection camera for detecting the coating state in the proofing area. The proofing area is provided in front of the coating platform and on the same horizontal plane as the coating platform. The detection camera is provided on one side of the coating head.

[0018] Preferably, the reset unit includes a first sensing member for sensing the height of the coating head in the third direction, a second sensing member for identifying the coordinates of the fourth direction and the first direction of the coating head, and a second fixing member for fixing the first sensing member and the second sensing member. The first sensing member and the second sensing member are located on one side of the proofing area. The cleaning unit includes a wiping member for cleaning the coating head, a clamping member for fixing the wiping member, and a bracket member connecting the proofing area and the clamping member. There are multiple bracket members located on both sides of the proofing area. The glue discharging unit includes a glue collecting box for collecting glue, and there are multiple glue collecting boxes.

[0019] Preferably, a protective cover is provided on the coating platform, and the glue collecting box is fixed on the protective cover. There are multiple first support columns and second support columns on the fourth support member. The first support columns support the protective cover, and the second support columns are used to support the proofing area.

[0020] Further, the moving mechanism includes a third driving member and a fourth moving member fixed on the base, and a bottom plate is provided on the third driving member and the fourth moving member.

[0021] The present utility model provides a coating device, and the coating device includes the coating device described above.

[0022] Compared with the prior art, the present utility model has the following beneficial effects:

[0023] The coating device and the coating equipment provided by the present utility model move the workpiece in the first direction, the second direction, the third direction, and the fourth direction by designing a rotating mechanism, a jacking mechanism, and a moving mechanism, and are compatible with workpieces of different sizes. The structure is compact and space-saving. At the same time, it is equipped with a coating cleaning unit, and the coating head completes testing, resetting, and cleaning work before coating, improving the coating accuracy. Description of the Drawings

[0024] In order to more clearly illustrate the technical solutions proposed by the present utility model, the following will be described in detail with reference to the embodiments and the drawings. It should be understood that the drawings in the following description are only some embodiments of the present utility model, and those skilled in the art can make changes to these drawings under the concept of the present utility model.

[0025] Figure 1 It is an assembled three-dimensional view of the coating device provided by the present utility model;

[0026] Figure 2 It is an assembled three-dimensional view of the jacking mechanism provided by the present utility model;

[0027] Figure 3 It is an assembled three-dimensional view of the rotating mechanism provided by the present utility model;

[0028] 1. Base; 2. Coating platform; 20. Adsorption tank; 21. Through hole; 40. Base plate; 41. First driving member; 42. Support base; 43. First lead screw; 44. First moving member; 45. Second moving member; 46. Nut slider; 47. First connecting member; 48. Second auxiliary member; 5. Lifting column; 50. Buffer member; 60. Second driving member; 61. Second lead screw; 62. Transmission member; 63. Third moving member; 64. Second connecting member; 70. First support member; 71. Second support member; 72. Third support member; 73. Fourth support member; 80. Proofing area; 90. First sensing member; 100. Wiping member; 101. Clamping member; 102. Bracket member; 110. Glue collecting box; 12. Protective cover; 130. Third driving member; 131. Fourth moving member. Detailed implementation manners

[0029] The following will clearly and completely describe the technical solutions in the embodiments with reference to the accompanying drawings in the embodiments of the present invention. Similar component numbers in the drawings represent similar components. Obviously, the embodiments to be described below are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0030] It should be understood that when used in this specification and the appended claims, the terms "comprising" and "including" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0031] It should also be understood that the terms used in the specification of the embodiments of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the embodiments of the present invention. As used in the specification of the embodiments of the present invention and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms.

[0032] A coating device provided by the present invention includes:

[0033] Base 1;

[0034] A moving mechanism that is arranged on the base 1 to move in a first direction;

[0035] A rotating mechanism that is arranged above the moving mechanism and the rotating mechanism carries a workpiece to move in a second direction;

[0036] The lifting mechanism can drive the workpiece to move in the third direction between the lifted state and the non-lifted state.

[0037] The coating and cleaning mechanism is arranged on one side of the rotating mechanism. The coating and cleaning mechanism performs cleaning, degumming, resetting, and testing before coating.

[0038] In an embodiment of the coating device, the target workpiece to be coated is transported above the coating platform 2 by the loading fork.

[0039] Please refer to Figure 1 、 Figure 2 The lifting mechanism includes a second driving unit for driving the lifting column 5 to lift. The second driving unit includes a second driving member 60 suspended above the base 1, a second lead screw 61 connecting the second driving member 60 and the coating platform 2, and a transmission member 62 connecting the second driving member 60 and the second lead screw 61. The supporting unit includes a first supporting member 70 for supporting the second driving member 60 and the second lead screw 61, a second supporting member 71 for supporting the lifting column 5, a third supporting member 72 for supporting the coating platform 2, and fourth supporting members 73 arranged on both sides of the bottom plate 40 and at the same horizontal plane. The third supporting member 72 is vertically fixed downward on the bottom plate 40 and vertically fixed upward below the first fixing member. The second supporting member 71 is arranged parallel to the coating platform 2 in the third direction below the coating platform 2. A second connecting member 64 is provided below the second supporting member 71. A third moving member 63 is also provided on the third supporting member 72. The third moving member 63 is connected to the second supporting member 71 through the second connecting member 64.

[0040] The coating platform 2 includes an adsorption groove 20 for adsorbing the workpiece and a through hole 21 for the lifting column 5 to perform lifting movement. The inner cavity of the adsorption groove 20 is divided into multiple independent adsorption areas. There are several through holes 21, which are distributed in the inner circle and the outer circle. For workpieces of different sizes, different adsorption areas can be opened for adsorption, and the lifting column 5 performs movement in the third direction through the through holes 21 in the outer circle or the inner circle.

[0041] A buffer member 50 for buffering is provided at the upper end of the lifting column 5. The lifting column 5 and the buffer member 50 perform movement in the third direction through the through hole 21.

[0042] The lifting column 5 moves upward in the third direction through the second driving unit, passes through the through hole. The buffer member 50 receives the workpiece, the fork resets, and the lifting column 5 descends again in the third direction to completely place the workpiece on the coating platform 2.

[0043] Please refer to Figure 1, a third driving member 130 and a fourth moving member 131 are provided on the base 1. The third driving member 130 can be a linear motor, and there are more than two groups of the fourth moving members 131, which are located on both sides of the third driving member 130. The fourth moving member 131 can be a guide rail slider combination. After the coating platform 2 completely adsorbs the workpiece through the adsorption groove 20, the third driving member 130 and the fourth moving member 131 drive the coating platform 2 to move in the first direction, and move the coating platform 2 to the photographing position for photographing and calibration.

[0044] Please refer to Figure 3 , a base plate 40 is fixed on the third driving member 130 and the fourth moving member 131. A first driving member 41 is provided on the base plate 40. The first driving member 41 is connected to a first lead screw 43. The first lead screw 43 and the first driving member 41 are fixed to the base plate 40 through more than two support seats 42. A first moving member 44 fixed to the base plate 40 is provided between the support seats 42. A nut slider 46 is sleeved on the first lead screw 43. A second moving member 45 is fixed on the nut slider 46. A first auxiliary member for maintaining horizontal and a first fixing member for fixing the first auxiliary member are provided below the coating platform 2. A first connecting member 47 connecting the coating platform 2 and the second moving member 45 is provided. A second auxiliary member 48 for maintaining horizontal is further provided below the first connecting member 47. The second auxiliary member 48 is provided above the second moving member 45.

[0045] The center of the coating platform 2 is fixed. The first moving member 44 moves in the first direction, and the second moving member 45 moves in the fourth direction. After the photographing is completed, the first connecting member 47 is driven to move through the first moving member 44 and the second moving member 45. The first connecting member 47 drives the centrally fixed coating platform 2 to complete the movement in the second direction, complete the calibration in the second direction and move to the working position in the first direction.

[0046] Please refer to Figure 1 , the coating and cleaning mechanism includes a coating head, a test unit for performing coating tests on the coating head, a reset unit for resetting the coating head, a cleaning unit for cleaning the coating head, and a glue discharging unit for discharging glue from the coating head; the test unit includes a proofing area 80 for pre-coating the coating head and an inspection camera for detecting the coating state of the proofing area 80. The proofing area 80 is provided in front of the coating platform 2 and on the same horizontal plane as the coating platform 2. The inspection camera is provided on one side of the coating head.

[0047] The reset unit includes a first sensor 90 for sensing the height of the coating head in the third direction, a second sensor for identifying the coordinates of the coating head in the fourth direction and the first direction, and a second fixing member for fixing the first sensor 90 and the second sensor. The first sensor 90 and the second sensor are located on one side of the proofing area 80. The cleaning unit includes a wiping member 100 for cleaning the coating head, a clamping member 101 for fixing the wiping member 100, and a bracket member 102 connecting the proofing area 80 and the clamping member 101. There are multiple bracket members 102 located on both sides of the proofing area 80. There are multiple wiping members 100 located on both sides of the proofing area 80. The glue discharging unit includes a glue collecting box 110 for collecting glue, and there are multiple glue collecting boxes 110.

[0048] A protective cover 12 is provided on the coating platform 2, and the glue collecting box 110 is fixed on the protective cover 12. Multiple first support columns and second support columns are provided on the fourth support member 73. The first support columns support the protective cover 12, and the second support columns are used to support the proofing area 80. The protective cover 12 can prevent foreign objects from entering and protect the core mechanism.

[0049] Before coating, the coating head moves above the glue collecting box 110 to perform a glue discharging operation, discharging the excess glue on the coating head to not affect the next coating amount. After completing the glue discharging, the coating head moves to the proofing area 80 for a trajectory test. When it is judged by the detection camera that there is no problem with the trajectory, the coating head moves to the reset unit for origin reset, calculates the height of the coating head in the third direction and the coordinates in the first direction and the fourth direction, and performs high-precision coating on the target. After the target workpiece is coated, the adsorption groove 20 of the coating platform 2 breaks the vacuum, and the lifting column 5 rises along the third direction through the second driving unit to separate the workpiece from the coating platform 2, and the fork reconnects to the coated workpiece.

[0050] In an embodiment of the coating equipment, the coating equipment includes the coating device described in the embodiment of the above coating device.

[0051] The coating equipment provided in this embodiment includes the coating device described in the embodiment of the above coating device, and has the same beneficial effects as the above coating device, which will not be elaborated here.

[0052] In the above embodiments, the descriptions of each embodiment have their own emphases. For parts not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0053] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0054] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality of" means two or more unless otherwise specifically defined.

[0055] In the present utility model, unless otherwise clearly defined and limited, the terms such as "installed", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it can be a connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0056] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0057] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0058] Obviously, those skilled in the art can make various changes and modifications to the present utility model without departing from the spirit and scope of the present utility model. Thus, provided that these modifications and variations of the present utility model fall within the scope of the claims of the present utility model and their equivalent technologies, the present utility model also intends to include these modifications and variations.

[0059] As described above, the above is the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered by the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A coating device for supporting a coating target workpiece, characterized in that: include: Base; A moving mechanism, the moving mechanism is arranged on the base and moves in a first direction; A rotating mechanism, the rotating mechanism is arranged above the moving mechanism, and the rotating mechanism carries the workpiece to move in the second direction; A lifting mechanism, wherein the lifting mechanism drives the workpiece to move in a third direction in a lifting state and a non-lifting state; The coating and cleaning mechanism is arranged on one side of the rotating mechanism, and the coating and cleaning mechanism performs cleaning, glue removal, resetting and testing before coating.

2. The coating device according to claim 1, characterized in that The rotating mechanism includes a first driving unit for moving in a second direction, the first driving unit includes a base plate, a first driving member arranged on the base plate, a first screw connected to the first driving member, a plurality of support seats for fixing the first screw and the first driving member, a first moving member arranged between the support seats and fixed to the base plate, a nut slider sleeved on the first screw and fixed to the first moving member, a second moving member fixed on the nut slider, and a coating platform for carrying a workpiece, the center of the coating platform is fixed, a first auxiliary member for maintaining horizontality, a first fixing member for fixing the first auxiliary member, a first connecting member connecting the coating platform and the second moving member, a second auxiliary member for maintaining horizontality is also provided below the first connecting member, the second auxiliary member is arranged above the second moving member, the first moving member moves along the first direction, and the second moving member moves along the fourth direction.

3. The coating device according to claim 2, characterized in that: The lifting mechanism includes a second driving unit for driving the lifting mechanism to lift and non-lifting states, a supporting unit supporting the coating platform and a lifting column for lifting, the second driving unit includes a second driving member suspended above the base, a second screw connecting the second driving member and the coating platform, and a transmission member connecting the second driving member and the second screw; the supporting unit includes a first supporting member for supporting the second driving member and the second screw, a second supporting member supporting the lifting column, a third supporting member supporting the coating platform, and a fourth supporting member provided on both sides of the bottom plate and in the same horizontal plane, the third supporting member is vertically fixed downward on the bottom plate and vertically fixed upward below the first fixing member, the second supporting member is parallelly arranged below the coating platform along the third direction, a second connecting member is provided below the second supporting member, a third moving member is also provided on the third supporting member, and the third moving member is connected to the second supporting member through the second connecting member.

4. The coating device according to claim 3, characterized in that: The coating platform comprises an adsorption groove for adsorbing workpieces and a through hole for the jacking column to perform jacking movement. The inner cavity of the adsorption groove is divided into a plurality of independent adsorption areas, and the through holes are in a plurality.

5. The coating device according to claim 4, characterized in that The upper end of the lifting column is provided with a buffer member for buffering when receiving a workpiece, and the lifting column and the buffer member move in the third direction through the through hole.

6. The coating device according to claim 5, characterized in that The coating and cleaning mechanism includes a coating head, a testing unit for performing coating tests on the coating head, a resetting unit for resetting the coating head, a cleaning unit for cleaning the coating head, and a degumming unit for degumming the coating head; the testing unit includes a proofing area for pre-coating by the coating head and a detection camera for detecting the coating status of the proofing area, the proofing area is arranged in front of the coating platform and on the same horizontal plane as the coating platform, and the detection camera is arranged on one side of the coating head.

7. The coating device according to claim 6, characterized in that: The reset unit includes a first sensing member for sensing the height of the coating head in the third direction, a second sensing member for identifying the coordinates of the coating head in the fourth direction and the first direction, and a second fixing member for fixing the first sensing member and the second sensing member, and the first sensing member and the second sensing member are located on one side of the proofing area; the cleaning unit includes a wiping member for cleaning the coating head, a clamping member for fixing the wiping member, and a bracket member connecting the proofing area and the clamping member, and the bracket members are multiple and located on both sides of the proofing area; the glue removal unit includes a glue collecting box for collecting glue, and the glue collecting box is multiple.

8. The coating device according to claim 7, characterized in that: The coating platform is provided with a protective cover, and the glue collecting box is fixed on the protective cover; the fourth support member is provided with a plurality of first support columns and second support columns, the first support columns support the protective cover, and the second support columns are used to support the proofing area.

9. The coating device according to claim 8, characterized in that The moving mechanism comprises a third driving member and a fourth moving member fixed on the base, and the bottom plate is arranged on the third driving member and the fourth moving member.

10. A coating device, characterized in that: The coating device comprises the coating device according to any one of claims 1 to 9.

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