Automatic sheet loading and unloading inclined plane flushing device

Abstract

The utility model discloses an automatic loading and unloading inclined plane washing device, which relates to the technical field of semiconductor substrate material manufacturing, and comprises a material moving mechanism, a loading carrier, an unloading carrier, a fixing assembly and a spraying assembly, the fixing assembly comprises a plurality of jigs; the jigs are distributed at intervals in a step mode from bottom to top. The jig is used for fixing the substrate slice and enabling the substrate slice to be obliquely arranged relative to the ground; the spraying assemblies are in one-to-one correspondence with the fixing assemblies; the spraying assembly comprises a first spraying piece and a second spraying piece. Automatic feeding and discharging of substrate slices can be achieved, operation is easy, and the cleaning efficiency is effectively improved; a plurality of jigs are distributed at intervals in a step mode from bottom to top to be staggered mutually, so that residual liquid on cleaned substrate slices cannot drop onto adjacent substrate slices, the jigs fix the substrate slices in the mode that the substrate slices are obliquely arranged relative to the ground, and compared with staggered arrangement in a vertical state, the staggered arrangement in the inclined arrangement has the advantages that the substrate slices are not prone to falling off. And the occupation of longitudinal space can be reduced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and particularly relates to an automatic wafer loading and unloading inclined surface flushing device. Background Art

[0002] Indium phosphide substrates have a wide application market in the fields of radio frequency devices such as the manufacture of high-frequency and high-power devices, optical fiber communication, wireless transmission, and radio astronomy.

[0003] In the manufacture of indium phosphide substrate materials, the polished indium phosphide wafers need to be cleaned. The existing cleaning methods mainly include spraying or immersion cleaning. Among them, the devices used for spraying cleaning are mostly manual loading and unloading, with cumbersome operations and low cleaning efficiency. Summary of the Utility Model

[0004] In view of this, the purpose of the present application is to provide an automatic wafer loading and unloading inclined surface flushing device to solve the technical problems of cumbersome operations and low cleaning efficiency in the existing spraying cleaning method using manual loading and unloading.

[0005] To achieve the above technical purpose, the present application provides an automatic wafer loading and unloading inclined surface flushing device, including a material transfer mechanism, a loading carrier, an unloading carrier, a fixing component, and a spraying component;

[0006] The loading carrier is used for carrying the wafers to be loaded;

[0007] The unloading carrier is used for carrying the wafers that have been cleaned;

[0008] The fixing component includes a plurality of fixtures;

[0009] The plurality of fixtures are arranged at intervals in a stepped manner from bottom to top;

[0010] The fixture is used for fixing the wafer and making the wafer inclined relative to the ground;

[0011] The spraying component corresponds to the fixing component one by one and is used for spraying and cleaning the wafers fixed by the fixing component;

[0012] The spraying component includes a first spraying member and a second spraying member;

[0013] The first spraying member is provided with a plurality of first spray holes for spraying and cleaning the first surface of the wafer located on the fixture;

[0014] The second spraying member is provided with a plurality of second spray holes for spraying and cleaning the second surface of the wafer located on the fixture;

[0015] The material transfer mechanism is used for transferring the wafers on the loading carrier to the fixtures;

[0016] The material transfer mechanism is also used to transfer the substrate films on the fixture to the blanking carrier.

[0017] Further, the material transfer mechanism includes a clamping mechanism, a rotating mechanism, a first linear displacement mechanism, a second linear displacement mechanism, and a third linear displacement mechanism;

[0018] The clamping mechanism is used to grasp the substrate films;

[0019] The rotating mechanism is connected to the clamping mechanism and is used to adjust the inclination angle of the clamping mechanism;

[0020] The first linear displacement mechanism is connected to the loading carrier, the blanking carrier, and the fixing component, and is used to drive the loading carrier, the blanking carrier, and the fixing component to move along the first horizontal straight line direction;

[0021] The second linear displacement mechanism is connected to the rotating mechanism and is used to drive the rotating mechanism to move along the second horizontal straight line direction perpendicular to the first horizontal straight line direction;

[0022] The third linear displacement mechanism is connected to the second displacement linear mechanism and is used to drive the second displacement linear mechanism to move in the vertical straight line direction.

[0023] Further, a support plate is connected to the driving end of the first linear displacement mechanism;

[0024] The loading carrier, the blanking carrier, and the fixing component are installed on the support plate.

[0025] Further, the first spraying member is installed on the support plate and is provided with an inclined surface;

[0026] A plurality of the fixtures are installed on the inclined surface from bottom to top to be distributed at stepped intervals;

[0027] A liquid cavity is provided in the first spraying member;

[0028] The first spray holes are opened on the inclined surface and communicate with the liquid cavity;

[0029] A first pipe joint communicating with the liquid cavity is provided on the first spraying member.

[0030] Further, the second spraying member includes a spraying support and a plurality of spray heads;

[0031] A plurality of the spray heads are installed on the spraying support at intervals along the length direction of the spraying support;

[0032] Each of the spray heads is connected to a second pipe joint;

[0033] The nozzle of the nozzle head forms the second nozzle hole.

[0034] Furthermore, the fixing components are multiple and arranged at intervals;

[0035] There are multiple spraying components, and they correspond one-to-one to the fixing components.

[0036] Furthermore, the fixture is provided with an inclined slot for inserting the substrate sheet.

[0037] Furthermore, there are two slots on the fixture, which are arranged at intervals.

[0038] Further, the fixture is a U-shaped block structure;

[0039] The clamping grooves are respectively arranged at two ends of the top surface of the fixture.

[0040] Further, the clamping mechanism includes a finger cylinder and a clamping claw;

[0041] The finger cylinder is connected to the clamping jaw and is used to drive the clamping jaw to open and close.

[0042] It can be seen from the above technical solutions that the automatic upper and lower sheet inclined surface washing device designed in the present application uses a material transfer mechanism to realize automatic loading and unloading of substrate sheets, which is simple to operate and effectively improves the cleaning efficiency; furthermore, multiple fixtures are arranged in a step-by-step manner from bottom to top to stagger each other, so that the residual liquid on the cleaned substrate sheet will not drip onto the adjacent substrate sheet, and the fixture fixes the substrate sheet in a manner that the substrate sheet is tilted relative to the ground. Compared with the staggered setting in the vertical state, this staggered setting under the inclined setting can reduce the occupancy of the longitudinal space and has a more compact structure; in addition, the first spray member and the second spray member are used to synchronously spray the first surface and the second surface of the substrate sheet, which can further improve the spraying efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0044] Figure 1 A three-dimensional diagram of an automatic upper and lower sheet bevel washing device provided in the present application;

[0045] Figure 2 A three-dimensional diagram of the coordination of a second linear displacement mechanism, a rotation mechanism and a clamping mechanism of an automatic upper and lower sheet bevel washing device provided in the present application;

[0046] Figure 3 This is a perspective view of the cooperation between the spraying component and the fixing component of an automatic upper and lower sheet inclined surface flushing device provided in this application;

[0047] Figure 4 This is a perspective view of the cooperation between the fixture and the lining sheet of an automatic upper and lower sheet inclined surface flushing device provided in this application;

[0048] In the figure: 1. Material transfer mechanism; 11. First linear displacement mechanism; 12. Second linear displacement mechanism; 13. Third linear displacement mechanism; 14. Rotating mechanism; 15. Clamping mechanism; 151. Finger cylinder; 152. Claw; 2. First spraying part; 20. Inclined surface; 21. First spray hole; 22. First pipe joint; 3. Second spraying part; 31. Spraying bracket; 32. Nozzle; 33. Second pipe joint; 4. Fixture; 41. Card slot; 5. Lining sheet; 6. Loading carrier; 7. Unloading carrier; 8. Support plate. Detailed implementation manners

[0049] Next, the technical solutions of the embodiments of this application will be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of this application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in this application without creative efforts shall fall within the scope of protection of the embodiments of this application.

[0050] In the description of the embodiments of this application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the embodiments of this application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0051] In the description of the embodiments of this application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of this application can be understood according to specific situations.

[0052] The embodiment of the present application discloses an automatic loading and unloading bevel flushing device.

[0053] Please refer to Figure 1 and Figure 3 As shown, an embodiment of an automatic loading and unloading bevel flushing device provided in the embodiment of the present application includes:

[0054] A material transfer mechanism 1, a loading carrier 6, a unloading carrier 7, a fixing component and a spraying component.

[0055] The loading carrier 6 is used to carry the substrate wafer 5 to be loaded, and the unloading carrier 7 is used to carry the cleaned substrate wafer 5; both the loading carrier 6 and the unloading carrier 7 are box structures with loading cavities, and no specific limitation is made.

[0056] The fixing component includes a plurality of fixtures 4, and the plurality of fixtures 4 are arranged at intervals in a stepped manner from bottom to top; the fixture 4 is used to fix the substrate wafer 5 and make the substrate wafer 5 inclined relative to the ground; the substrate wafers 5 fixed on adjacent fixtures 4 are staggered with each other.

[0057] The spraying component corresponds to the fixing component one by one and is used to spray and clean the substrate wafer 5 fixed by the fixing component.

[0058] The spraying component includes a first spraying member 2 and a second spraying member 3; a plurality of first spray holes 21 for spraying and cleaning the first surface of the substrate wafer 5 located on each fixture 4 are provided on the first spraying member 2; a plurality of second spray holes for spraying and cleaning the second surface of the substrate wafer 5 located on each fixture 4 are provided on the second spraying member 3. Taking the first surface as the back surface, the corresponding second surface is the front surface.

[0059] The material transfer mechanism 1 is used to transfer the substrate wafer 5 on the loading carrier 6 to the fixture 4 to complete loading; the material transfer mechanism 1 is also used to transfer the substrate wafer 5 on the fixture 4 to the unloading carrier 7 to complete unloading.

[0060] The inclination angle of the substrate wafer 5 of the present application can be 45° or other angles, which can make the first surface and the second surface have a certain spraying and cleaning angle to ensure that they can be simultaneously sprayed and cleaned by the first spray pipe and the second spray pipe.

[0061] The automatic upper and lower sheet inclined surface washing device designed in the present application utilizes a material transfer mechanism 1 to realize automatic loading and unloading of a substrate sheet 5, is simple to operate, and effectively improves the cleaning efficiency; furthermore, a plurality of jigs 4 are arranged in a stepped manner from bottom to top to be staggered with each other, so that residual liquid on the substrate sheet 5 after cleaning will not drip onto an adjacent substrate sheet 5, and the jig 4 fixes the substrate sheet 5 in a manner that the substrate sheet 5 is tilted relative to the ground. Compared with the staggered arrangement in a vertical state, this staggered arrangement under the inclined setting can reduce the occupancy of the longitudinal space and has a more compact structure; in addition, the first spray component 2 and the second spray component 3 are used to synchronously spray the first surface and the second surface of the substrate sheet 5, which can further improve the spraying efficiency.

[0062] The fixture 4, the first spray part 2, and the second spray part 3 in the present application can be made of PEEK material, and the loading carrier 6 and the unloading carrier 7 can be made of PFA material, without specific limitation.

[0063] The above is the first embodiment of an automatic upper and lower slice bevel washing device provided in the embodiment of the present application. The following is the second embodiment of an automatic upper and lower slice bevel washing device provided in the embodiment of the present application. For details, please refer to Figures 1 to 4 .

[0064] Based on the solution of the above embodiment 1:

[0065] Furthermore, if Figure 1 as well as Figure 2 As shown, the material transfer mechanism 1 includes a clamping mechanism 15 , a rotating mechanism 14 , a first linear displacement mechanism 11 , a second linear displacement mechanism 12 and a third linear displacement mechanism 13 .

[0066] The clamping mechanism 15 is used to grasp the substrate sheet 5 , and may include a finger cylinder 151 and a clamping jaw 152 . The finger cylinder 151 is connected to the clamping jaw 152 and drives the clamping jaw 152 to open and close so as to clamp or release the substrate sheet 5 .

[0067] The rotating mechanism 14 can be a servo motor that can rotate forward and reverse, or a cylinder, which is connected to the clamping mechanism 15 and is used to adjust the tilt angle of the clamping mechanism 15 so that the substrate sheet 5 can be accurately placed on the fixture 4 at an angle.

[0068] The first linear displacement mechanism 11 is connected to the loading carrier 6, the unloading carrier 7 and the fixed component, and is used to drive the loading carrier 6, the unloading carrier 7 and the fixed component to move along the first horizontal linear direction; the second linear displacement mechanism is connected to the rotating mechanism 14, and is used to drive the rotating mechanism 14 to move along the second horizontal linear direction perpendicular to the first horizontal linear direction; the third linear displacement mechanism is connected to the second linear displacement mechanism, and is used to drive the second linear displacement mechanism to move in the vertical linear direction.

[0069] Connect the first linear displacement mechanism 11 to the loading carrier 6 and the unloading carrier 7, which can drive the loading carrier 6 and the unloading carrier 7 to move between the loading position and the non-loading position. For example, it can drive the loading carrier 6 and the unloading carrier 7 to move below the clamping mechanism 15 to facilitate the clamping mechanism 15 to pick up the lining film 5 in the loading carrier 6, or place the lining film 5 in the unloading carrier 7. Similarly, through the first linear displacement mechanism 11, the jig 4 can be driven to move below the clamping mechanism 15 to facilitate the clamping mechanism 15 to load the lining film 5 into the jig 4 or pick up the lining film 5 from the jig 4. In addition, by connecting the first linear displacement mechanism 11 to the fixing component, it can also control the reciprocating movement of the fixing component, thereby realizing dynamic cleaning and further improving the cleaning effect.

[0070] The first linear displacement mechanism 11, the second linear displacement mechanism 12, and the third linear displacement mechanism 13 in this application can be linear sliders, such as lead screw sliders, and there is no specific limitation.

[0071] Furthermore, as Figure 1 shown, a support plate 8 is connected to the driving end of the first linear displacement mechanism 11, and the loading carrier 6, the unloading carrier 7, and the fixing component are installed on the support plate 8. The support plate 8 can also be prepared from PEEK material. By setting the support plate 8, the installation and fixation of the fixing component, the loading carrier 6, and the unloading carrier 7 are more convenient.

[0072] Furthermore, as Figure 3 shown, the first spraying member 2 is fixedly installed on the support plate 8 and is provided with an inclined surface 20. A plurality of jigs 4 are installed on the inclined surface 20 from bottom to top to be distributed at stepped intervals; in this way, the first spraying member 2 not only has a spraying function but also has a function of installing and fixing the jigs 4, and the overall structure is more compact.

[0073] A liquid cavity is provided in the first spraying member 2. The first spray holes 21 are opened on the inclined surface 20 and communicate with the liquid cavity. A first pipe joint 22 communicating with the liquid cavity is provided on the first spraying member 2. The first pipe joint 22 is used to connect and conduct the cleaning liquid supply source, or connect the cleaning liquid supply source and the gas supply source through a three-way valve. When cleaning operations are required, the cleaning liquid supply source is conducted. When drying operations are required, the gas supply source is conducted.

[0074] Furthermore, in terms of the design of the second spraying member 3, it includes a spraying support 31 and a plurality of nozzles 32.

[0075] A plurality of nozzles 32 are installed on the spraying support 31 at intervals along the length direction of the spraying support 31. The spraying support 31 can be a rod structure and plays a role of bearing and fixing.

[0076] Each nozzle 32 is connected with a second pipe joint 33. The nozzle of the nozzle 32 forms a second spray hole. The second pipe joint 33 is used to connect and conduct the cleaning liquid supply source, or connect the cleaning liquid supply source and the gas supply source through a three-way valve. When cleaning operation is required, the cleaning liquid supply source is conducted. When drying operation is required, the gas supply source is conducted.

[0077] Further, the fixing components are preferably designed as multiple ones and are arranged at intervals; the spraying components are multiple ones and correspond to the fixing components one by one. The design of multiple fixing components and spraying components can complete the cleaning operation of multiple substrate wafers 5 at one time, further improving the cleaning efficiency.

[0078] Further, in order to fix the columnar substrate wafer 5, the fixture 4 is provided with a slot 41 for the substrate wafer 5 to be inserted and is inclined.

[0079] Further, there are two slots 41 on the fixture 4 and they are arranged at intervals; the design of the spaced double slots 41 can play a better role in fixing the substrate wafer 5.

[0080] Further, in terms of the structural design of the fixture 4, it is preferably a U-shaped block structure, which saves manufacturing materials while meeting certain strength requirements.

[0081] The slots 41 are respectively arranged at both ends of the top surface of the fixture 4.

[0082] Working principle (taking three fixing components and three spraying components, with each fixing component having five fixtures 4 as an example):

[0083] Loading process:

[0084] 1. Manually load 15 substrate wafers 5 into the loading carrier 6;

[0085] 2. Install the loading carrier 6 on the support plate 8;

[0086] 3. The third linear displacement mechanism 13 and the second linear displacement mechanism 12 cooperate so that the clamping mechanism 15 moves onto the loading carrier 6, and then the clamping mechanism 15 clamps the substrate wafer 5 in the loading carrier 6 at the clamping position;

[0087] 4. The first linear displacement mechanism 11 drives the support plate 8 to move until the corresponding fixture 4 thereon is at the wafer placing position (for example, the position below the clamping mechanism 15);

[0088] 5. The third linear displacement mechanism 13 and the second linear displacement mechanism 12 cooperate so that the clamping mechanism 15 moves to the fixture 4 that needs to be loaded, and then the clamping mechanism 15 releases the substrate wafer 5 to place the substrate wafer 5 on the corresponding fixture 4;

[0089] 6. The third linear displacement mechanism 13 and the second linear displacement mechanism 12 cooperate to reset the clamping mechanism 15;

[0090] 7. The first linear displacement mechanism 11 drives the loading carrier 6 to move to the material clamping position;

[0091] 8. Return and re - execute process step 3 until all the substrate wafers 5 are loaded onto the corresponding fixtures 4.

[0092] Unloading process:

[0093] 1. The first linear displacement mechanism 11 drives the support plate 8 to move until the corresponding fixture 4 thereon is at the wafer unloading position (for example, a position below the clamping mechanism 15);

[0094] 2. The third linear displacement mechanism 13 and the second linear displacement mechanism 12 cooperate to move the clamping mechanism 15 to the fixture 4 where unloading is required, and then the clamping mechanism 15 clamps the substrate wafer 5;

[0095] 3. The first linear displacement mechanism 11 drives the support plate 8 to move until the unloading carrier 7 thereon is at the unloading position (for example, a position below the clamping mechanism 15);

[0096] 4. The third linear displacement mechanism 13 and the second linear displacement mechanism 12 cooperate to move the clamping mechanism 15 to the unloading carrier 7 and release the substrate wafer 5 to unload the substrate wafer 5 into the unloading carrier 7;

[0097] 5. Return and re - execute process step 2 until all the substrate wafers 5 are unloaded into the unloading carrier 7.

[0098] Cleaning process:

[0099] 1. After all the substrate wafers 5 are loaded, the first linear displacement mechanism 11 drives the support plate 8 to reciprocate;

[0100] 2. Connect the first pipe head and the second pipe joint 33 to make the first spraying part 2 and the second spraying part 3 spray the cleaning liquid to clean the substrate wafers 5.

[0101] The above has introduced in detail an automatic upper and lower wafer inclined flushing device provided by the present application. For those of ordinary skill in the art, according to the idea of the embodiments of the present application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to the present application.

Claims

1. An automatic upper and lower sheet inclined surface washing device, characterized in that: It comprises a material transfer mechanism (1), a material loading carrier (6), a material unloading carrier (7), a fixing component and a spraying component; The loading carrier (6) is used to carry the substrate sheet (5) to be loaded; The unloading carrier (7) is used to carry the cleaned substrate sheet (5); The fixing assembly comprises a plurality of jigs (4); The plurality of jigs (4) are distributed in a stepped manner from bottom to top; The jig (4) is used to fix the substrate sheet (5) and to enable the substrate sheet (5) to be tilted relative to the ground; The spraying components correspond to the fixing components one by one, and are used to spray and clean the substrate sheet (5) fixed by the fixing components; The spray assembly comprises a first spray component (2) and a second spray component (3); The first spraying member (2) is provided with a plurality of first spray holes (21) for spraying and cleaning the first surface of the substrate sheet (5) located on the fixture (4); The second spraying member (3) is provided with a plurality of second spray holes for spraying and cleaning the second surface of the substrate sheet (5) located on the fixture (4); The material transfer mechanism (1) is used to transfer the substrate sheet (5) on the loading carrier (6) to the jig (4); The material transfer mechanism (1) is also used to transfer the substrate sheet (5) on the jig (4) to the unloading carrier (7).

2. The automatic upper and lower sheet inclined surface washing device according to claim 1, characterized in that: The material transfer mechanism (1) comprises a clamping mechanism (15), a rotating mechanism (14), a first linear displacement mechanism (11), a second linear displacement mechanism (12) and a third linear displacement mechanism (13); The clamping mechanism (15) is used to grasp the substrate sheet (5); The rotating mechanism (14) is connected to the clamping mechanism (15) and is used to adjust the inclination angle of the clamping mechanism (15); The first linear displacement mechanism (11) is connected to the loading carrier (6), the unloading carrier (7) and the fixed component, and is used to drive the loading carrier (6), the unloading carrier (7) and the fixed component to move along a first horizontal linear direction; The second linear displacement mechanism is connected to the rotating mechanism (14) and is used to drive the rotating mechanism (14) to move along a second horizontal linear direction perpendicular to the first horizontal linear direction; The third linear displacement mechanism is connected to the second linear displacement mechanism and is used to drive the second linear displacement mechanism to move in a vertical linear direction.

3. The automatic upper and lower sheet inclined surface washing device according to claim 2, characterized in that: A support plate (8) is connected to the driving end of the first linear displacement mechanism (11); The loading carrier (6), the unloading carrier (7) and the fixing assembly are mounted on the support plate (8).

4. The automatic upper and lower sheet inclined surface washing device according to claim 3, characterized in that: The first spraying member (2) is mounted on the supporting plate (8) and is provided with an inclined surface (20); A plurality of the jigs (4) are installed on the inclined surface (20) from bottom to top so as to be distributed at intervals in a stepped manner; The first spraying element (2) is provided with a liquid cavity; The first spray hole (21) is formed on the inclined surface (20) and is connected to the liquid cavity; The first spraying member (2) is provided with a first pipe joint (22) connected to the liquid chamber.

5. The automatic upper and lower sheet inclined surface washing device according to claim 4, characterized in that: The second spraying member (3) comprises a spraying bracket (31) and a plurality of spray heads (32); A plurality of the spray heads (32) are installed on the spray bracket (31) at intervals along the length direction of the spray bracket (31); Each of the nozzles (32) is connected to a second pipe joint (33); The nozzle of the nozzle head (32) forms the second nozzle hole.

6. The automatic upper and lower sheet inclined surface washing device according to claim 1, characterized in that: The fixing components are multiple and arranged at intervals; There are multiple spraying components, and they correspond one-to-one to the fixing components.

7. The automatic upper and lower sheet inclined surface washing device according to claim 1, characterized in that: The jig (4) is provided with an inclined slot (41) for inserting the substrate sheet (5).

8. The automatic upper and lower sheet inclined surface washing device according to claim 7, characterized in that: There are two clamping slots (41) on the fixture (4), which are arranged at intervals.

9. The automatic upper and lower sheet inclined surface washing device according to claim 8, characterized in that: The jig (4) is a U-shaped block structure; The clamping grooves (41) are respectively provided at two ends of the top surface of the fixture (4).

10. The automatic upper and lower sheet inclined surface washing device according to claim 2, characterized in that: The clamping mechanism (15) comprises a finger cylinder (151) and a clamping claw (152); The finger cylinder (151) is connected to the clamping jaw (152) and is used to drive the clamping jaw (152) to open and close.

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