Marking device

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a marking device which comprises a laser marking head and a bearing piece. The bearing piece is located on one side of the laser marking head, the bearing piece is provided with a plurality of bearing grooves, bearing walls are arranged in the bearing grooves, and the bearing walls are used for supporting workpieces and enabling the upper ends of the workpieces to be exposed out of the bearing grooves; the height of the bearing wall of the bearing groove close to the laser marking head is lower than the height of the bearing wall of the bearing groove away from the laser marking head. According to the marking device provided by the utility model, the bearing piece is provided with the plurality of bearing grooves, and the height of the bearing wall of the bearing groove close to the laser marking head is lower than the height of the bearing wall of the bearing groove far away from the laser marking head; the multiple workpieces can be installed on the bearing piece in one marking period, the multiple workpieces on the bearing piece can be marked through the laser marking head, and the marking efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor production, and particularly relates to a marking device. Background Art

[0002] In the process of semiconductor production, it is necessary to mark workpieces such as wafers and substrate wafers (usually laser engrave numbers) so as to be recognized in subsequent processes.

[0003] The current marking device installs the workpiece to be marked on a fixture, and then performs marking processing on the workpiece on the fixture through a laser marking head. After the workpiece on the fixture is marked, it is necessary to remove the marked workpiece from the fixture and install the next workpiece to be marked on the fixture. In one marking cycle of this marking device, only one workpiece can be placed on the fixture, which affects the marking efficiency. Summary of the Utility Model

[0004] Aiming to solve at least one of the technical problems in the prior art, the utility model provides a marking device, which can improve the marking efficiency.

[0005] To achieve the above object, the utility model provides a marking device having a first direction, including a laser marking head and a supporting member; the supporting member is located on one side of the laser marking head in the first direction, and a plurality of supporting grooves are recessed downward from the top of the supporting member, and the plurality of supporting grooves are distributed along the first direction. The supporting groove has a supporting wall for supporting the workpiece and exposing the upper end of the workpiece out of the supporting groove; wherein, along the first direction, in two adjacent supporting grooves, the height of the supporting wall of the supporting groove closer to the laser marking head is lower than the height of the supporting wall of the supporting groove farther from the laser marking head.

[0006] In some embodiments, the marking device further includes a driving mechanism, and the driving mechanism is connected to the supporting member and can drive the supporting member to approach or move away from the laser marking head along the first direction.

[0007] In some embodiments, the driving mechanism includes a base, a driving motor, a lead screw and a slider. The driving motor is installed on the base. The two ends of the lead screw in the first direction are respectively connected to the base. The driving motor and the lead screw are connected at any one end in the first direction. The slider is movably connected to the lead screw, and the supporting member is connected to the slider; wherein, the driving motor drives the lead screw to rotate around the central axis of the lead screw, and can drive the slider to move along the lead screw, so as to drive the supporting member to approach or move away from the laser marking head along the first direction.

[0008] In some embodiments, the marking device further includes a lifting mechanism, which is connected to the laser marking head and can drive the laser marking head to rise or fall.

[0009] In some embodiments, the supporting member is provided with a weight-reducing groove, and the weight-reducing groove is located below the supporting groove.

[0010] In some embodiments, the supporting wall includes a first side wall and a second side wall opposite to the first side wall, and the first side wall and the second side wall are parallel to each other.

[0011] In some embodiments, the supporting wall includes a first side wall and a second side wall opposite to the first side wall. The supporting groove has a vertical center line. The first side wall extends obliquely upward and away from the vertical center line, and the second side wall extends obliquely upward and away from the vertical center line.

[0012] In some embodiments, the supporting groove has a bottom wall, and the supporting wall is the bottom wall.

[0013] Compared with the prior art, the marking device provided by the embodiment of the present invention has the following beneficial effects: by providing a plurality of supporting grooves on the supporting member, a plurality of workpieces can be respectively installed on the plurality of supporting grooves of the supporting member. By providing a supporting wall in the supporting groove that can support the workpiece and expose the upper end of the workpiece, since the height of the supporting wall of the supporting groove close to the laser marking head is lower than the height of the supporting wall of the supporting groove far from the laser marking head, a plurality of workpieces can be arranged in a scattered and orderly manner in the plurality of supporting grooves, and the uppermost end of the workpiece close to the laser marking head will not block the uppermost end of the workpiece close to the laser marking head. Therefore, after the laser marking head completes the marking process on the uppermost end of the workpiece close to the laser marking head, it can still perform the marking process on the uppermost end of the workpiece far from the laser marking head. Therefore, the marking device of the present invention can install a plurality of workpieces on the supporting member and enable the laser marking head to perform marking processes on the plurality of workpieces on the supporting member within one marking cycle by providing a plurality of supporting grooves on the supporting member and making the height of the supporting wall of the supporting groove close to the laser marking head lower than the height of the supporting wall of the supporting groove far from the laser marking head, thereby improving the marking efficiency. Description of the Drawings

[0014] Figure 1 is a schematic structural diagram of a marking device provided by Embodiment 1 of the present invention;

[0015] Figure 2 is a schematic structural diagram of the supporting member provided by Embodiment 1 of the present invention;

[0016] Figure 3 is a front cross-sectional view of the supporting member provided by Embodiment 1 of the present invention;

[0017] Figure 4 It is a side view cross-sectional view of the supporting member provided in the first embodiment of the present utility model;

[0018] Figure 5 It is an effect diagram of the supporting wall of the supporting member provided in the embodiment of the present utility model for supporting the workpiece;

[0019] Figure 6 It is a side view cross-sectional view of the supporting member provided in the second embodiment of the present utility model;

[0020] Figure 7 It is a front view cross-sectional view of the supporting member provided in the third embodiment of the present utility model.

[0021] In the figure, 1. Laser marking head;

[0022] 2. Supporting member; 21. Supporting groove; 22. Weight reduction groove; 210. Supporting wall; 211. First side wall; 212. Second side wall; 213. Bottom wall;

[0023] 3. Driving mechanism; 31. Base; 32. Driving motor; 33. Lead screw; 34. Slide block;

[0024] 4. Lifting mechanism;

[0025] 5. Workpiece;

[0026] 20. Vertical center line;

[0027] X. First direction; Y. Second direction; Z. Third direction. Detailed implementation manners

[0028] The following combines the drawings and embodiments to further describe in detail the specific implementation manners of the present utility model. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.

[0029] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0030] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features.

[0031] In the present utility model, unless otherwise clearly specified and defined, terms such as "installed", "connected", "joined", "fixed", etc. shall be construed in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0032] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0033] Embodiment 1

[0034] As Figures 1-5 shown, a marking device provided in Embodiment 1 of the present utility model has a first direction X, and the marking device includes a laser marking head 1 and a supporting member 2.

[0035] The supporting member 2 is located on one side of the laser marking head 1 in the first direction X. A plurality of supporting grooves 21 are recessed downward at the top of the supporting member 2. The plurality of supporting grooves 21 are distributed along the first direction X. A supporting wall 210 is provided in the supporting groove 21. The supporting wall 210 is used to support the workpiece 5 and expose the upper end of the workpiece 5 out of the supporting groove 21. Among them, along the first direction X, in two adjacent supporting grooves 21, the height of the supporting wall 210 of the supporting groove 21 closer to the laser marking head 1 is lower than the height of the supporting wall 210 of the supporting groove 21 farther from the laser marking head 1.

[0036] Based on this technical solution, by providing a plurality of supporting grooves 21 on the supporting member 2, multiple workpieces 5 can be respectively installed on the multiple supporting grooves 21 of the supporting member 2 at one time. By providing a supporting wall 210 in the supporting groove 21 that can support the workpiece 5 and expose the upper end of the workpiece 5 upward, since the height of the supporting wall 210 of the supporting groove 21 close to the laser marking head 1 is lower than the height of the supporting wall 210 of the supporting groove 21 far from the laser marking head 1, the multiple workpieces 5 can be arranged in a well - arranged manner with different heights in the multiple supporting grooves 21, and the uppermost end of the workpiece 5 close to the laser marking head 1 will not block the uppermost end of the workpiece 5 close to the laser marking head 1. Thus, after the laser marking head 1 completes the marking process on the uppermost end of the workpiece 5 close to the laser marking head 1, it can still perform the marking process on the uppermost end of the workpiece 5 far from the laser marking head 1. Therefore, the marking device of the present utility model can install multiple workpieces 5 on the supporting member 2 within one marking cycle and enable the laser marking head 1 to perform marking processes on the multiple workpieces 5 on the supporting member 2 by providing a plurality of supporting grooves 21 on the supporting member 2 and making the height of the supporting wall 210 of the supporting groove 21 close to the laser marking head 1 lower than the height of the supporting wall 210 of the supporting groove 21 far from the laser marking head 1, thereby improving the marking efficiency.

[0037] In this embodiment, the first direction X, the second direction Y, and the third direction Z are perpendicular to each other pairwise, and the first direction X, the second direction Y, and the third direction Z are the length direction, the width direction, and the height direction of the marking device respectively.

[0038] In this embodiment, the number of the supporting grooves 21 is thirteen.

[0039] In some other embodiments, the number of the supporting grooves 21 can be any number such as two, three, four, five, six, seven, eight, nine, ten, eleven, twelve, fourteen, etc.

[0040] In this embodiment, the workpiece 5 is a backing wafer.

[0041] In some other embodiments, the workpiece 5 can also be other workpieces that need to be marked during the semiconductor production process such as wafers, and no limitation is made here.

[0042] In this embodiment, the workpiece 5 has a circular structure.

[0043] In some other embodiments, the workpiece 5 can also have any shape structure such as a rectangular structure, an oval structure, a polygonal structure, etc., and no limitation is made here.

[0044] The marking device provided by the first embodiment of the present utility model further includes a driving mechanism 3. The driving mechanism 3 is connected to the supporting member 2 and can drive the supporting member 2 to approach or move away from the laser marking head 1 along the first direction X. In this way, the driving mechanism 3 can drive the supporting member 2 to move so as to move the first workpiece 5 to the preset marking position. After the laser marking head 1 finishes the marking process of the first workpiece 5, the driving mechanism 3 can drive the supporting member 2 to move along the first direction X, so that the first workpiece 5 leaves the preset marking position and the second workpiece 5 moves to the preset marking position, and so on. The driving mechanism 3 can move multiple workpieces 5 on the supporting member 2 to the preset marking positions for marking processes; therefore, by using the driving mechanism 3, the marking positions of multiple workpieces 5 on the supporting member 2 can be the same or basically the same, which helps to improve the consistency and stability of the marking quality of multiple workpieces 5.

[0045] Refer to Figure 1 , in this embodiment, the driving mechanism is a lead screw driving device. The lead screw driving device includes a base 31, a driving motor 32, a lead screw 33, and a slider 34. The driving motor 32 is installed on the base 31. The two ends of the lead screw 33 in the first direction X are respectively connected to the base 31. The driving motor 32 and the lead screw 33 are connected at any one end in the first direction X. The slider 34 is movably connected to the lead screw 33. The supporting member 2 is connected to the slider 34; wherein, the driving motor 32 drives the lead screw 33 to rotate around the central axis of the lead screw 33, and can drive the slider 34 to move along the lead screw 33, so as to drive the supporting member 2 to approach or move away from the laser marking head 1 along the first direction X. The lead screw driving device has the characteristics of high precision, good stability, strong load capacity, etc.

[0046] In some other embodiments, the driving mechanism 3 can also be any driving device such as a linear module, a hydraulic cylinder, a pneumatic cylinder, etc. that can realize driving the supporting member 2 to approach or move away from the laser marking head 1 along the first direction X, and is not limited herein.

[0047] Refer to Figure 1 , the marking device provided by the first embodiment of the present utility model further includes a lifting mechanism 4. The lifting mechanism 4 is connected to the laser marking head 1 and can drive the laser marking head 1 to rise or fall. By using the lifting mechanism 4, the laser marking head 1 can be better aligned with the uppermost end of any one workpiece 5 on the supporting member 2, which helps to improve the marking quality of the workpiece 5.

[0048] Optionally, the lifting mechanism 4 can be any lifting device such as a linear module, a hydraulic cylinder, a pneumatic cylinder, an electric cylinder, a lead screw 33 transmission mechanism, etc. that can realize driving the laser marking head 1 to rise or fall, and is not limited herein.

[0049] Refer to Figures 2-5, in Embodiment 1 of the present utility model, the supporting member 2 is provided with a weight-reducing groove 22, and the weight-reducing groove 22 is located below the supporting groove 21. The use of the weight-reducing groove 22 can reduce the weight of the supporting member 2 and the use of materials for the supporting member 2, saving energy and protecting the environment.

[0050] In this embodiment, the supporting groove 21 does not have a bottom wall, and the supporting groove 21 is communicated with the weight-reducing groove 22.

[0051] In this embodiment, the supporting groove 21 has a side wall, and the supporting wall 210 is the side wall of the supporting groove 21.

[0052] Specifically, the supporting wall 210 includes a first side wall 211 and a second side wall 212 opposite to the first side wall 211, and the first side wall 211 and the second side wall 212 are parallel to each other. The supporting wall 210 in this way can be used to accommodate the circular workpiece 5. When the diameter of the circular workpiece 5 is greater than the relative distance between the first side wall 211 and the second side wall 212 (the groove width of the supporting groove 21), the first side wall 211 and the second side wall 212 can abut against the outer wall of the circular workpiece 5 and hold the circular workpiece 5, so as to support the circular workpiece 5 and make the upper end of the circular workpiece 5 expose out of the supporting groove 21.

[0053] In some other embodiments, the supporting wall 210 can also be the bottom wall 213 of the supporting groove 21, a protrusion provided in the supporting groove 21, or any other structure that can support the workpiece 5 in the supporting groove 21 and make the upper end of the workpiece 5 expose out of the supporting groove 21, which is not limited herein.

[0054] Embodiment 2

[0055] Refer to Figure 6 , the supporting wall 210 provided in Embodiment 2 is the side wall of the supporting groove 21. The supporting wall 210 includes a first side wall 211 and a second side wall 212 opposite to the first side wall 211.

[0056] Different from Embodiment 1, the supporting groove 21 provided in Embodiment 2 has a vertical center line 20. The first side wall 211 extends obliquely from bottom to top and away from the vertical center line 20, and the second side wall 212 extends obliquely from bottom to top and away from the vertical center line 20. In this way, the supporting groove 21 can be in a form where the groove width gradually decreases from top to bottom between the first side wall 211 and the second side wall 212. As long as the width of the workpiece 5 is greater than the minimum groove width of the supporting groove 21, the first side wall 211 and the second side wall 212 can abut against the outer wall of the workpiece 5 and hold the workpiece 5, so as to support the workpiece 5 and make the upper end of the workpiece 5 expose out of the supporting groove 21; therefore, the supporting wall 210 in this way can be used to accommodate workpieces 5 of any shape, with a wide range of applications.

[0057] Embodiment 3

[0058] Refer to Figure 7 Differing from the first embodiment, the supporting groove 21 has a bottom wall 213, and the supporting wall 210 is the bottom wall 213. In this way, the bottom wall 213 can abut against the bottom of the workpiece 5 to support the workpiece 5 and expose the upper end of the workpiece 5 out of the supporting groove 21; the supporting wall 210 in this way can be used to accommodate workpieces 5 of any shape and any width dimension, and has a wider application range.

[0059] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and replacements can be made, and these improvements and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A marking device having a first direction, characterized in that: Laser marking head; A supporting member, the supporting member is located on one side of the laser marking head in the first direction, the top of the supporting member is recessed downward and is provided with a plurality of supporting grooves, the plurality of supporting grooves are distributed along the first direction, the supporting grooves have supporting walls therein, the supporting walls are used to support the workpiece and allow the upper end of the workpiece to be exposed from the supporting groove; Wherein, along the first direction, in two adjacent supporting grooves, the height of the supporting wall of the supporting groove close to the laser marking head is lower than the height of the supporting wall of the supporting groove far from the laser marking head.

2. The marking device according to claim 1, characterized in that: It also includes a driving mechanism, which is connected to the supporting member and can drive the supporting member to approach or move away from the laser marking head along the first direction.

3. The marking device according to claim 2, characterized in that: The driving mechanism comprises a base, a driving motor, a lead screw and a slider, wherein the driving motor is mounted on the base, the two ends of the lead screw in the first direction are respectively connected to the base, the driving motor is connected to any one end of the lead screw in the first direction, the slider is movably connected to the lead screw, and the supporting member is connected to the slider; The driving motor drives the lead screw to rotate around the central axis of the lead screw, and can drive the slider to move along the lead screw, so as to drive the supporting member to approach or move away from the laser marking head along the first direction.

4. The marking device according to claim 1, characterized in that: It also includes a lifting mechanism, which is connected to the laser marking head and can drive the laser marking head to rise or fall.

5. The marking device according to claim 1, characterized in that: The supporting member is provided with a weight-reducing groove, and the weight-reducing groove is located below the supporting groove.

6. The marking device according to any one of claims 1 to 5, characterized in that: The supporting wall includes a first side wall and a second side wall opposite to the first side wall, and the first side wall and the second side wall are parallel.

7. The marking device according to any one of claims 1 to 5, characterized in that: The supporting wall includes a first side wall and a second side wall opposite to the first side wall. The supporting groove has a vertical center line. The first side wall extends obliquely from bottom to top and away from the vertical center line. The second side wall extends obliquely from bottom to top and away from the vertical center line.

8. The marking device according to any one of claims 1 to 5, characterized in that: The supporting groove has a bottom wall, and the supporting wall is the bottom wall.

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