Substrate stripping device

Abstract

The utility model belongs to the technical field of stripping equipment, and discloses a substrate stripping device which comprises a bearing table and stripping assemblies, the bearing table is used for bearing a substrate and is provided with a slot, the two ends of the slot in the extending direction are respectively provided with a group of stripping assemblies, and each group of stripping assemblies comprises an inserting frame module, a horizontal module, a lifting module and a plurality of rolling pieces. The inserting frame module is connected to the horizontal module, the horizontal module is configured to drive the inserting frame module to slide in the inserting groove in the horizontal direction, and the lifting module is configured to drive the horizontal module to drive the inserting frame module to ascend and descend in the height direction. In the stripping process, the stripping assembly on one side firstly strips one side of the substrate, the stripping assembly on the other side strips the other side of the substrate, and finally the stripping assemblies on the two sides synchronously strip the substrate, so that impact on the substrate is reduced, fragment generation is reduced, the multiple rolling pieces make contact with the substrate, friction force is reduced, and the service life of the substrate is prolonged. And the risk of circuit breakdown caused by static electricity generated on the surface is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of stripping equipment, in particular to a substrate stripping device. Background Art

[0002] At present, the traditional substrate coating equipment peels off the coated substrate by driving the ejector pin through the platform carrying the substrate through the driving part, and lifts up the substrate with the ejector pin to realize the peeling of the substrate and the platform; in the peeling process, a segmented peeling process is adopted, which is slow (staying) and fast peeling, that is, first maintain a low speed to slowly make the ejector pin contact with the substrate, and then use a higher speed to drive the ejector pin to separate the substrate from the platform. On the one hand, since the use of the ejector pin to lift the substrate is a hard contact, the impact force of the ejector pin on the substrate is likely to cause the substrate to break and cause damage to the substrate. On the other hand, static electricity is likely to be generated on the surface during peeling, resulting in risks such as static electricity breakdown of the circuit, and since it is necessary to control the impact force of the ejector pin on the substrate when lifting it, a slow stay stage is required during peeling, resulting in a long production cycle and reduced production efficiency.

[0003] Therefore, there is an urgent need for a substrate peeling device to solve the above problems. Utility Model Content

[0004] The utility model aims to provide a substrate peeling device with good protection, short production cycle and high production efficiency.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A substrate peeling device is provided, the substrate peeling device comprising:

[0007] A carrying platform, the carrying platform is used to carry a substrate, and a slot is provided on a side of the carrying platform facing the substrate;

[0008] A stripping assembly, wherein a group of the stripping assemblies are respectively provided at both ends along the extension direction of the slot, each group of the stripping assemblies comprises a rack module, a horizontal module, a lifting module and a plurality of rolling members, wherein the plurality of rolling members are rotatably provided on the rack module, the rack module is connected to the horizontal module, the horizontal module is configured to drive the rack module to slide in the slot along the horizontal direction, the horizontal module is connected to the lifting module, and the lifting module is configured to drive the horizontal module to drive the rack module to rise and fall along the height direction.

[0009] Optionally, a plurality of the slots are formed in the carrier table. The plug-in module includes plug-in members and a connecting plate corresponding to the plurality of slots one by one. The connecting plate is connected to the horizontal module. The plurality of plug-in members are spaced apart on the connecting plate, and a plurality of rotatable rolling members are provided on each plug-in member.

[0010] Optionally, the rolling member is a roller. Each plug-in member is composed of two baffles. The two baffles are spaced apart on the connecting plate. The plurality of rollers are rotatably provided between the two baffles, and the rollers are configured to abut against one side of the substrate facing the carrier table.

[0011] Optionally, the rolling member is a ball. Each plug-in member is a rod body provided with a plurality of circular grooves. The balls are rotatably embedded in the circular grooves, and the balls are configured to abut against one side of the substrate facing the carrier table.

[0012] Optionally, the plug-in member further includes a flexible sleeve corresponding to the plurality of rolling members one by one. The flexible sleeve is sleeved outside the roller.

[0013] Optionally, the height dimension of the rolling member in the lifting direction is smaller than the depth dimension of the slot in the lifting direction.

[0014] Optionally, the horizontal module includes a first driving member, a horizontal connecting seat, a first transmission lead screw, and a first lead screw slider. The horizontal connecting seat is connected to the lifting module. The first driving member is connected to the horizontal connecting seat and is connected to one end of the first transmission lead screw. The first driving member is configured to drive the first transmission lead screw to rotate. The first lead screw slider is slidably connected to the horizontal connecting seat, and the other end of the first transmission lead screw is rotatably connected to the first lead screw slider.

[0015] Optionally, the horizontal module further includes a horizontal slide rail and a horizontal slider. The horizontal slide rail is connected to the horizontal connecting seat. The horizontal slider is slidably provided on the horizontal slide rail, and the first lead screw slider is connected to the horizontal slider.

[0016] Optionally, the lifting module includes a second driving member, a lifting connecting seat, a second transmission lead screw, a second lead screw slider, and a connecting table. The second driving member is connected to the lifting connecting seat and is connected to one end of the second transmission lead screw. The second driving member is configured to drive the second transmission lead screw to rotate. The second lead screw slider is slidably provided on the lifting connecting seat, and the other end of the second transmission lead screw is rotatably inserted into the second lead screw slider. The connecting table is connected to the second lead screw slider.

[0017] Optionally, the lifting module further includes a lifting slide rail and a lifting slider. The lifting slide rail is connected to the lifting connection seat, the lifting slider is slidably disposed on the lifting slide rail, and the connection table is connected to the lifting slider.

[0018] Advantages of the present utility model:

[0019] The present utility model provides a substrate peeling device. By providing a slot on the carrier table and respectively arranging a set of peeling components at both ends in the extending direction of the slot, during peeling, the lifting module of one side peeling component drives the horizontal module to drive the plug-in module to align with the slot. The plug-in module extends into the slot under the drive of the horizontal module, and then the lifting module drives the horizontal module to drive the plug-in module to peel one side of the substrate. By the lifting module of the other side peeling component driving the horizontal module to drive the plug-in module to align with the slot, the plug-in module extends into the slot under the drive of the horizontal module, and then the lifting module drives the horizontal module to drive the plug-in module to peel the other side of the substrate. Finally, the lifting modules on both sides drive their respective corresponding horizontal modules to drive the plug-in module to peel the substrate simultaneously, thereby reducing the impact on the substrate during substrate peeling, avoiding the generation of broken pieces on the substrate, and arranging a plurality of rotatable rolling members on the plug-in module, thereby reducing the friction with the substrate and avoiding the risk of generating static electricity on the substrate surface, resulting in risks such as electrostatic breakdown of the circuit, improving the protection of the substrate during peeling, and since there is no need for a slow stop stage during peeling, the production cycle can be greatly shortened and the production efficiency can be improved. Description of the Drawings

[0020] Figure 1 is a schematic diagram of the substrate peeling device provided by the present utility model when the peeling operation has not started;

[0021] Figure 2 is a schematic diagram of the substrate peeling device provided by the present utility model when the peeling operation is in progress;

[0022] Figure 3 is a schematic structural diagram of the peeling component in the substrate peeling device provided by the present utility model;

[0023] Figure 4 is an assembled structural diagram of the plug-in module and the rolling member in the substrate peeling device provided by the present utility model;

[0024] Figure 5 is a schematic structural diagram of the horizontal module in the substrate peeling device provided by the present utility model;

[0025] Figure 6 is a schematic structural diagram of the lifting module in the substrate peeling device provided by the present utility model.

[0026] In the figure:

[0027] 100. Substrate;

[0028] 1. Carrying platform; 11. Slot

[0029] 2. Stripping component; 21. Insertion frame module; 211. Connection plate; 212. Connector; 22. Horizontal module; 221. First driving member; 222. Horizontal connection seat; 223. First transmission lead screw; 224. First lead screw slider; 225. Horizontal slide rail; 226. Horizontal slider; 23. Lifting module; 231. Second driving member; 232. Lifting connection seat; 233. Second transmission lead screw; 234. Second lead screw slider; 235. Connection table; 236. Lifting slide rail; 237. Lifting slider; 24. Rolling member. Detailed implementation manner

[0030] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the convenience of description, only parts related to the present utility model are shown in the drawings, rather than all the structures.

[0031] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0032] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above" and "on the top" of the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below" and "under the bottom" of the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.

[0033] In the description of this embodiment, the orientation or positional relationships such as "upper", "lower", "right", etc. are based on the orientation or positional relationships shown in the drawings. It is only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0034] Embodiment 1

[0035] In order to reduce the impact force on the substrate during peeling, reduce the generation of static electricity on the substrate surface during peeling, resulting in risks such as electrostatic breakdown of the circuit, and at the same time to shorten the production cycle and improve production efficiency, this embodiment provides a substrate peeling device, where Figure 1 shows a schematic diagram of the substrate peeling device provided in this embodiment when the peeling operation has not started. Figure 2 shows a schematic diagram of the substrate peeling device provided in this embodiment when the peeling operation is in progress. Figure 3 shows a schematic structural diagram of the peeling component 2 in the substrate peeling device provided in this embodiment.

[0036] As Figures 1-3 shown, the substrate peeling device includes a carrier 1 and a peeling component 2. The carrier 1 is used to carry the substrate 100. A slot 11 is opened on one side of the carrier 1 facing the substrate 100. A set of peeling components 2 are respectively provided at both ends along the extending direction of the slot 11. Each set of peeling components 2 includes a plug-in frame module 21, a horizontal module 22, a lifting module 23, and a plurality of rolling members 24. The plurality of rolling members 24 are rotatably provided on the plug-in frame module 21. The plug-in frame module 21 is connected to the horizontal module 22. The horizontal module 22 is configured to drive the plug-in frame module 21 to slide horizontally in the slot 11. The horizontal module 22 is connected to the lifting module 23. The lifting module 23 is configured to drive the horizontal module 22 to drive the plug-in frame module 21 to lift in the height direction.

[0037] By providing a slot 11 on the carrier table 1 and arranging a set of peeling components 2 at both ends in the extending direction of the slot 11, during peeling, the lifting module 23 of one side of the peeling component 2 drives the horizontal module 22 to drive the plug-in module 21 to align with the slot 11. The plug-in module 21 extends into the slot 11 under the drive of the horizontal module 22. Then, the lifting module 23 drives the horizontal module 22 to drive the plug-in module 21 to peel one side of the substrate 100. Next, the lifting module 23 of the other side of the peeling component 2 drives the horizontal module 22 to drive the plug-in module 21 to align with the slot 11. The plug-in module 21 extends into the slot 11 under the drive of the horizontal module 22. Then, the lifting module 23 drives the horizontal module 22 to drive the plug-in module 21 to peel the other side of the substrate 100. Finally, the lifting modules 23 on both sides drive the corresponding horizontal modules 22 to drive the plug-in module 21 to peel the substrate 100 simultaneously, thereby reducing the impact on the substrate 100 during peeling, avoiding fragmentation of the substrate 100, and arranging a plurality of rotatable rolling members 24 on the plug-in module 21, thereby reducing the friction with the substrate 100 and avoiding risks such as electrostatic breakdown of circuits caused by static electricity on the surface of the substrate 100, improving the protection of the substrate 100 during peeling, and since there is no need for a slow stop stage during peeling, the production cycle can be greatly shortened and the production efficiency can be improved.

[0038] The extending direction of the slot 11 can be freely set according to requirements, which can be consistent with the length direction of the carrier table 1, or can be consistent with the width direction of the carrier table 1, or can be set at an angle with the length direction or the width direction. In this embodiment, the extending direction of the slot 11 is consistent with the length direction of the carrier table 1.

[0039] Figure 4 Shows a schematic assembly structure diagram of the plug-in module 21 and the rolling member 24 in the substrate peeling device provided in this embodiment, as Figure 2 、 Figure 4 shown. Optionally, a plurality of slots 11 are provided on the carrier table 1. The plug-in module 21 includes plug-in members 212 corresponding to the plurality of slots 11 one by one and a connecting plate 211. The connecting plate 211 is connected to the horizontal module 22. The plurality of plug-in members 212 are arranged at intervals on the connecting plate 211, and a plurality of rotatable rolling members 24 are provided on each plug-in member 212. By providing a plurality of slots 11 on the carrier table 1 and arranging plug-in members 212 corresponding to the plurality of slots 11 one by one in the plug-in module 21, the contact area between the plug-in module 21 and the substrate 100 during plugging is increased. On the one hand, during peeling, the pressure of the plug-in module 21 on the substrate 100 is reduced, improving the protection of the substrate 100. On the other hand, by increasing the contact area, the plug-in module 21 is more stable when supporting the substrate 100.

[0040] The number of the slots 11 and the connectors 212 can be freely set according to requirements. In this embodiment, three slots 11 are formed on the carrier 1, and three connectors 212 connected to the connection plate 211 are provided in the corresponding plug-in module 21.

[0041] Optionally, as Figure 4 shown, the rolling members 24 are rollers. Each connector 212 is composed of two baffles. The two baffles are spaced on the connection plate 211, and a plurality of rollers are rotatably arranged between the two baffles. The rollers are configured to abut against one side of the substrate 100 facing the carrier 1. Each connector 212 is composed of two baffles spaced on the connection plate 211. By using rollers as the rolling members 24 and rotatably arranging a plurality of rollers between the two baffles, the rollers are abutted against one side of the substrate 100 facing the carrier 1. By arranging a plurality of rollers in the connector 212, when the connector 212 is inserted into the slot 11, the friction is reduced by the rollers, and the probability of the substrate 100 generating static electricity during peeling is reduced, so as to avoid the risk of static electricity breakdown of the circuit on the surface of the substrate 100 during peeling.

[0042] In this embodiment, the connector 212 further includes a bearing and a connecting shaft. Connecting holes are formed on the baffles. Two ends of the connecting shaft are inserted into the connecting holes, the roller is sleeved on the connecting shaft, and the bearing is arranged between the roller and the connecting shaft. In order to ensure the structural stability, the baffle is connected to the connection plate 211 by welding.

[0043] Optionally, the connector 212 further includes a flexible sleeve corresponding to each of the plurality of rolling members 24. The flexible sleeve is sleeved outside the roller. By arranging the flexible sleeve outside the rolling member 24, when the lifting module 23 drives the horizontal module 22 to drive the plug-in module 21 to lift, the impact force of the rolling member 24 on the substrate 100 is reduced through the buffering effect of the flexible sleeve, thereby improving the protection of the substrate 100. In this embodiment, the flexible sleeve is a rubber sleeve.

[0044] Optionally, the height dimension of the rolling member 24 in the lifting direction is smaller than the depth dimension of the slot 11 in the lifting direction. By making the height dimension of the rolling member 24 smaller than the depth dimension of the slot 11, when the connector 212 is inserted into the slot 11, it is possible to avoid the premature contact between the rolling member 24 and the substrate 100 before the connector 212 is inserted in place, and strengthen the protection of the substrate 100 before peeling.

[0045] Optionally, Figure 5 The structural schematic diagram of the horizontal module 22 in the substrate peeling device provided in this embodiment is shown, as Figure 5As shown, the horizontal module 22 includes a first driving member 221, a horizontal connecting seat 222, a first transmission lead screw 223, and a first lead screw slider 224. The horizontal connecting seat 222 is connected to the lifting module 23. The first driving member 221 is connected to the horizontal connecting seat 222 and is connected to one end of the first transmission lead screw 223. The first driving member 221 is configured to drive the first transmission lead screw 223 to rotate. The first lead screw slider 224 is slidably connected to the horizontal connecting seat 222, and the other end of the first transmission lead screw 223 is rotatably connected to the first lead screw slider 224. By adopting the lead screw transmission method to realize the horizontal movement of the plug-in module 21 by the horizontal module 22, on the one hand, it has a high transmission efficiency, and on the other hand, it has a high transmission accuracy, and can accurately control the moving distance of the plug-in module 21.

[0046] In this embodiment, the first driving member 221 is a servo motor. Through the encoder in the servo motor, the moving distance and moving speed of the plug-in module 21 can be accurately controlled.

[0047] Optionally, as Figure 5 shown, the horizontal module 22 further includes a horizontal slide rail 225 and a horizontal slider 226. The horizontal slide rail 225 is connected to the horizontal connecting seat 222. The horizontal slider 226 is slidably disposed on the horizontal slide rail 225, and the first lead screw slider 224 is connected to the horizontal slider 226. By providing the horizontal slide rail 225 and the horizontal slider 226 on the horizontal connecting seat 222, the first lead screw slider 224 connected to the horizontal slider 226 can reduce the sliding friction under the action of the horizontal slide rail 225 and the horizontal slider 226, making the sliding action smoother and more fluent.

[0048] In this embodiment, a sliding groove is further formed on the horizontal slider 226, and the horizontal slide rail 225 is disposed in the sliding groove. The sliding groove can also play a role in limiting the sliding of the horizontal slider 226, ensuring the linearity of the sliding trajectory of the first lead screw slider 224 connected to the horizontal slider 226.

[0049] Optionally, Figure 6 shows a schematic structural diagram of the lifting module 23 in the substrate peeling device provided in this embodiment. As Figure 6As shown in the figure, the lifting module 23 includes a second driving member 231, a lifting connecting seat 232, a second transmission lead screw 233, a second lead screw slider 234, and a connecting platform 235. The second driving member 231 is connected to the lifting connecting seat 232 and is connected to one end of the second transmission lead screw 233. The second driving member 231 is configured to drive the second transmission lead screw 233 to rotate. The second lead screw slider 234 is slidably disposed on the lifting connecting seat 232. The other end of the second transmission lead screw 233 is rotatably inserted into the second lead screw slider 234. The connecting platform 235 is connected to the second lead screw slider 234, and the horizontal connecting seat 222 is connected to the connecting platform 235.

[0050] By adopting the lead screw transmission method to realize the vertical movement of the horizontal module 22 driven by the lifting module 23, on the one hand, it has high transmission efficiency, and on the other hand, it has high transmission accuracy, and can accurately control the lifting distance of the horizontal module 22.

[0051] In this embodiment, the second driving member 231 is a servo motor. Through the encoder in the servo motor, the moving distance and moving speed of the plug-in module 21 can be accurately controlled.

[0052] Optionally, the lifting module 23 further includes a lifting slide rail 236 and a lifting slider 237. The lifting slide rail 236 is connected to the lifting connecting seat 232. The lifting slider 237 is slidably disposed on the lifting slide rail 236. The connecting platform 235 is connected to the lifting slider 237. By providing the lifting slide rail 236 and the lifting slider 237 on the lifting connecting seat 232, the second lead screw slider 234 connected to the lifting slider 237 can reduce the sliding friction force under the action of the lifting slide rail 236 and the lifting slider 237, making the sliding action smoother and more fluent.

[0053] In this embodiment, a sliding groove is further opened on the lifting slider 237, and the lifting slide rail 236 is disposed in the sliding groove. The sliding groove can also play a role in limiting the sliding of the lifting slider 237, ensuring the linearity of the sliding track of the horizontal module 22 connected to the lifting slider 237.

[0054] Embodiment Two

[0055] The components that are the same as or corresponding to those in Embodiment One adopt the corresponding reference numerals in Embodiment One. For the sake of simplicity, only the differences between Embodiment Two and Embodiment One are described.

[0056] The difference is that in the second embodiment, the rolling member 24 is a ball, and each plug-in member 212 is a rod body provided with a plurality of circular grooves. The balls are rotatably embedded in the circular grooves, and the balls are configured to abut against the side of the substrate 100 facing the carrier 1. By using balls as the rolling members 24 and rotatably arranging a plurality of balls in the circular grooves of the plug-in members 212, the balls are used to abut against the side of the substrate 100 facing the carrier 1. By arranging a plurality of balls in the plug-in members 212, when the plug-in members 212 are inserted into the slots 11, the friction force is reduced by the balls, and the probability of the substrate 100 generating static electricity during peeling is reduced, so as to avoid the risk of static electricity breakdown of the circuit on the surface of the substrate 100 during peeling.

[0057] Obviously, the above-mentioned embodiments of the present invention are only examples for clearly explaining the present invention, and are not intended to limit the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A substrate peeling device, characterized in that: The substrate peeling device comprises: A carrying platform (1), the carrying platform (1) being used to carry a substrate (100), and a slot (11) being provided on a side of the carrying platform (1) facing the substrate (100); A stripping assembly (2), wherein a group of the stripping assemblies (2) are respectively arranged at both ends along the extension direction of the slot (11), each group of the stripping assemblies (2) comprises a rack module (21), a horizontal module (22), a lifting module (23) and a plurality of rolling members (24), wherein the plurality of rolling members (24) are rotatably arranged on the rack module (21), the rack module (21) is connected to the horizontal module (22), the horizontal module (22) is configured to drive the rack module (21) to slide in the slot (11) along the horizontal direction, the horizontal module (22) is connected to the lifting module (23), and the lifting module (23) is configured to drive the horizontal module (22) to drive the rack module (21) to rise and fall along the height direction.

2. The substrate peeling device according to claim 1, characterized in that: The support platform (1) is provided with a plurality of slots (11); the rack module (21) comprises connectors (212) and a connecting plate (211) corresponding one to one to the plurality of slots (11); the connecting plate (211) is connected to the horizontal module (22); a plurality of connectors (212) are arranged on the connecting plate (211) at intervals; and each connector (212) is provided with a plurality of rotatable rolling elements (24).

3. The substrate peeling device according to claim 2, characterized in that: The rolling member (24) is a roller, and each of the connectors (212) is composed of two baffles, the two baffles are arranged on the connecting plate (211) at intervals, and a plurality of rollers are rotatably arranged between the two baffles, and the rollers are configured to abut against a side of the substrate (100) facing the supporting platform (1).

4. The substrate peeling device according to claim 2, characterized in that: The rolling element (24) is a ball, and each of the plug-in elements (212) is a rod body with a plurality of circular grooves. The ball is rotatably embedded in the circular groove, and the ball is configured to abut against a side of the substrate (100) facing the support platform (1).

5. The substrate peeling device according to claim 2, characterized in that: The plug-in connector (212) further comprises a flexible sleeve corresponding one-to-one to the plurality of rolling elements (24), wherein the flexible sleeve is arranged on the outside of the rolling element (24).

6. The substrate peeling device according to claim 1, characterized in that: The height dimension of the rolling element (24) along the lifting direction is smaller than the depth dimension of the slot (11) along the lifting direction.

7. The substrate peeling device according to claim 1, characterized in that: The horizontal module (22) comprises a first driving member (221), a horizontal connecting seat (222), a first transmission screw (223) and a first screw slider (224); the horizontal connecting seat (222) is connected to the lifting module (23); the first driving member (221) is connected to the horizontal connecting seat (222) and is connected to one end of the first transmission screw (223); the first driving member (221) is configured to drive the first transmission screw (223) to rotate; the first screw slider (224) is slidably connected to the horizontal connecting seat (222); the other end of the first transmission screw (223) is rotatably connected to the first screw slider (224).

8. The substrate peeling device according to claim 7, characterized in that: The horizontal module (22) further comprises a horizontal slide rail (225) and a horizontal slider (226); the horizontal slide rail (225) is connected to the horizontal connecting seat (222); the horizontal slider (226) is slidably disposed on the horizontal slide rail (225); and the first lead screw slider (224) is connected to the horizontal slider (226).

9. The substrate peeling device according to claim 1, characterized in that: The lifting module (23) comprises a second driving member (231), a lifting connection seat (232), a second transmission screw (233), a second screw slider (234) and a connecting platform (235); the second driving member (231) is connected to the lifting connection seat (232) and is connected to one end of the second transmission screw (233); the second driving member (231) is configured to drive the second transmission screw (233) to rotate; the second screw slider (234) is slidably disposed on the lifting connection seat (232); the other end of the second transmission screw (233) is rotatably inserted into the second screw slider (234); and the connecting platform (235) is connected to the second screw slider (234).

10. The substrate peeling device according to claim 9, characterized in that: The lifting module (23) further comprises a lifting rail (236) and a lifting slider (237); the lifting rail (236) is connected to the lifting connection seat (232); the lifting slider (237) is slidably disposed on the lifting rail (236); and the connection platform (235) is connected to the lifting slider (237).

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