Fixing device for semiconductor product detection

Abstract

The utility model relates to the technical field of semiconductor product production, in particular to a fixing device for semiconductor product detection, which comprises a bottom plate, the bottom of the bottom plate is fixedly connected with a first motor, and one side of an output shaft of the first motor is fixedly connected with a turntable. Compared with the prior art, the fixing device for semiconductor product detection has the advantages that a third motor is started, the semiconductor product is clamped when two limiting plates get close to each other under the action of a screw rod and sliding, and a second motor and a first motor are started, so that the rotation angle of a placement table is more comprehensive; the fixing device for detecting the semiconductor product can detect the semiconductor product from different angles, so that the detection effect is more accurate, and the problems that the fixing device for detecting the semiconductor product can only detect a specific part from a specific direction and cannot detect and compare defects from multiple angles, and the detection efficiency is high are solved. And a detection instrument needs to be frequently adjusted, and a subsequent detection process is added to ensure the detection accuracy.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor product production, in particular to a fixing device for semiconductor product detection. Background Technique

[0002] In semiconductor production, from a semiconductor single crystal wafer to a final finished product, dozens or even hundreds of processes must be experienced. The detection of semiconductors will run through the entire semiconductor manufacturing process. Detecting defective products in a timely manner can avoid the exponential growth of manufacturing losses. Currently, when detecting semiconductor products, most of them directly fix the semiconductor on the detection table and detect specific parts from a specific direction. It is impossible to perform defect detection and comparison from multiple angles, and it is necessary to frequently adjust the detection instrument and increase subsequent detection processes to ensure the accuracy of detection. At the same time, the fixing device cannot fix semiconductors of different models and sizes, resulting in a reduction in detection efficiency.

[0003] In response to this, the utility model proposes a fixing device for semiconductor product detection to solve the problem. Summary of the Utility Model

[0004] The purpose of the utility model aims to solve at least one of the technical defects.

[0005] For this reason, an object of the utility model is to propose a fixing device for semiconductor product detection to solve the problems mentioned in the background technique and overcome the deficiencies existing in the prior art.

[0006] To achieve the above object, an embodiment of one aspect of the utility model provides a fixing device for semiconductor product detection, including a bottom plate. A first motor is fixedly connected to the bottom of the bottom plate. A turntable is fixedly connected to one side of the output shaft of the first motor. A second motor is fixedly connected to the top of the turntable. A first gear is fixedly connected to one side of the output shaft of the second motor. A second gear is meshed with one side of the first gear. A rotating shaft is fixedly connected to the inside of the second gear. A placing table is fixedly connected to the outer surface of the rotating shaft. A third motor is fixedly connected to one side of the placing table. A lead screw is fixedly connected to one side of the output shaft of the third motor. Two limiting plates are threadedly connected to the outer surface of the lead screw. A guide rod is slidably connected to one side of the two limiting plates. One side of the guide rod is fixedly connected to one side of the placing table.

[0007] By adopting the above technical solution, the utility model has the function of multi-angle detection, avoiding the problem of reduced detection efficiency caused by only detecting specific parts from a specific direction.

[0008] Preferably, according to any of the above solutions, it includes a bottom plate, a first motor is fixedly connected to the bottom of the bottom plate, a turntable is fixedly connected to one side of the output shaft of the first motor, a second motor is fixedly connected to the top of the turntable, a first gear is fixedly connected to one side of the output shaft of the second motor, a second gear is meshed with one side of the first gear, a rotating shaft is fixedly connected to the inside of the second gear, a placement table is fixedly connected to the outer surface of the rotating shaft, a third motor is fixedly connected to one side of the placement table, a lead screw is fixedly connected to one side of the output shaft of the third motor, two limit plates are threadedly connected to the outer surface of the lead screw, and one side of the two limit plates is slidably connected to a guide rod, and one side of the guide rod is fixedly connected to one side of the placement table.

[0009] Preferably, according to any of the above solutions, a fixed column is fixedly connected to the bottom of the turntable, and the outer surface of the fixed column is slidably connected to the inside of the slot hole.

[0010] Preferably, according to any of the above solutions, two fixing plates are fixedly connected to the top of the turntable, a second fixing hole is opened on one side of each of the two fixing plates, and the outer surface of the rotating shaft is inserted into the inside of the two second fixing holes.

[0011] Preferably, according to any of the above solutions, two sliding grooves are opened on one side of the placement table, and the outer surfaces of the limit plates are slidably connected to the inside of the two sliding grooves.

[0012] Preferably, according to any of the above solutions, the two limit plates are symmetrically arranged, and the bottoms of the two limit plates are both lapped with one side of the placement table.

[0013] Compared with the prior art, the advantages and beneficial effects of the present utility model are:

[0014] 1. When the fixing device for semiconductor product detection fixes a semiconductor product, the third motor is started, the output shaft of the third motor rotates to drive the lead screw to rotate, and the rotation of the lead screw causes the two limit plates to move. By setting the two limit plates to be slidably connected to the guide rod, the two limit plates will not rotate. Therefore, when the two limit plates approach each other, the semiconductor product is clamped. By setting the two limit plates, not only can the semiconductor product be fixed, but also semiconductor products of different models can be fixed, improving the calibration efficiency.

[0015] 2. When the fixing device for semiconductor product detection needs to perform multi-angle detection on a semiconductor product, start the second motor. The output shaft of the second motor rotates to drive the first gear to rotate. The first gear rotates to drive the second gear to rotate. The second gear rotates to drive the rotating shaft to rotate. The rotating shaft rotates to drive the placement table to rotate. The rotation of the placement table then completes the angle adjustment. By setting the first motor and starting the first motor, the output shaft of the first motor rotates to drive the turntable to rotate. The rotation of the turntable then causes the placement table to rotate, thus completing the rotation of the placement table on the horizontal plane, making the rotation angle more comprehensive, enabling the detection of different angles of the semiconductor product, making the detection effect more accurate, and solving the problem that the fixing device for semiconductor product detection can only detect specific parts from a specific direction, cannot perform defect detection and comparison from multiple angles, and requires frequent adjustment of the detection instrument and additional subsequent detection processes to ensure the accuracy of the detection.

[0016] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be understood through the practice of the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and / or additional aspects and advantages of the present utility model will become apparent and be readily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0018] Figure 1 is a schematic structural diagram of State 1 according to an embodiment of the present utility model;

[0019] Figure 2 is a schematic structural diagram of State 2 according to an embodiment of the present utility model;

[0020] Figure 3 is a front view structural schematic diagram according to an embodiment of the present utility model;

[0021] Figure 4 is a side view structural schematic diagram according to an embodiment of the present utility model;

[0022] Figure 5 is an exploded structural schematic diagram according to an embodiment of the present utility model.

[0023] In the figure: 1 - bottom plate, 101 - slot hole, 2 - first motor, 3 - turntable, 4 - second motor, 5 - first gear, 6 - second gear, 7 - rotating shaft, 8 - placement table, 801 - chute, 9 - third motor, 10 - lead screw, 11 - limiting plate, 12 - guide rod. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] Embodiment 1: As Figures 1 to 5As shown in the figure, a fixing device for semiconductor product detection includes a bottom plate 1. A first motor 2 is fixedly connected to the bottom of the bottom plate 1. On one side of the output shaft of the first motor 2, a turntable 3 is fixedly connected. On the top of the turntable 3, a second motor 4 is fixedly connected. On one side of the output shaft of the second motor 4, a first gear 5 is fixedly connected. A second gear 6 is meshed with one side of the first gear 5. A rotating shaft 7 is fixedly connected inside the second gear 6. A placing table 8 is fixedly connected to the outer surface of the rotating shaft 7. A third motor 9 is fixedly connected to one side of the placing table 8. On one side of the output shaft of the third motor 9, a lead screw 10 is fixedly connected. Two limiting plates 11 are threadedly connected to the outer surface of the lead screw 10. One side of the two limiting plates 11 is slidably connected to a guide rod 12. One side of the guide rod 12 is fixedly connected to one side of the placing table 8.

[0025] It includes a bottom plate 1. A first motor 2 is fixedly connected to the bottom of the bottom plate 1. By setting the first motor 2 and starting the first motor 2, the output shaft of the first motor 2 rotates to drive the turntable 3 to rotate. The rotation of the turntable 3 further causes the placing table 8 to rotate, thus completing the rotation of the placing table 8 on the horizontal plane and making the rotation angle more comprehensive. On one side of the output shaft of the first motor 2, a turntable 3 is fixedly connected. On the top of the turntable 3, a second motor 4 is fixedly connected. By starting the second motor 4, the output shaft of the second motor 4 rotates to drive the first gear 5 to rotate. The rotation of the first gear 5 drives the second gear 6 to rotate. The rotation of the second gear 6 drives the rotating shaft 7 to rotate. The rotation of the rotating shaft 7 drives the placing table 8 to rotate, and the rotation of the placing table 8 further adjusts the angle, enabling the detection of semiconductor products at different angles. On one side of the output shaft of the second motor 4, a first gear 5 is fixedly connected. A second gear 6 is meshed with one side of the first gear 5. A rotating shaft 7 is fixedly connected inside the second gear 6. A placing table 8 is fixedly connected to the outer surface of the rotating shaft 7. A third motor 9 is fixedly connected to one side of the placing table 8. By starting the third motor 9, the output shaft of the third motor 9 rotates to drive the lead screw 10 to rotate. The rotation of the lead screw 10 causes the two limiting plates 11 to move. By setting the two limiting plates 11 to be slidably connected to the guide rod 12, the two limiting plates 11 will not rotate. Thus, when the two limiting plates 11 approach each other, the semiconductor product is clamped. When the output shaft of the third motor 9 rotates clockwise, the two limiting plates 11 approach each other. When the output shaft of the third motor 9 rotates counterclockwise, the two limiting plates 11 move away from each other. On one side of the output shaft of the third motor 9, a lead screw 10 is fixedly connected. The lead screw 10 is a bidirectional lead screw. Two limiting plates 11 are threadedly connected to the outer surface of the lead screw 10. One side of the two limiting plates 11 is slidably connected to a guide rod 12. One side of the guide rod 12 is fixedly connected to one side of the placing table 8.

[0026] A fixed column is fixedly connected to the bottom of the turntable 3. The outer surface of the fixed column is slidably connected to the inside of the slot hole 101. By arranging the fixed column to be slidably connected to the inside of the slot hole 101, when the turntable 3 rotates, the fixed column makes a circular motion along the slot hole 101 on the bottom plate 1, which plays a supporting role for the turntable 3 and increases the stability of the turntable 3 during rotation.

[0027] Two fixing plates are fixedly connected to the top of the turntable 3. A second fixing hole is provided on one side of each of the two fixing plates. The outer surface of the rotating shaft 7 is inserted into the inside of each of the two second fixing holes.

[0028] Two sliding slots 801 are provided on one side of the placing table 8. The outer surface of the limiting plate 11 is slidably connected to the inside of each of the two sliding slots 801. By arranging the limiting plate 11 to be slidably connected to the inside of the sliding slot 801, the rotation of the limiting plate 11 is limited, making the movement more stable.

[0029] The two limiting plates 11 are symmetrically arranged. The bottom of each of the two limiting plates 11 is lapped with one side of the placing table 8. By arranging the two limiting plates 11, not only can semiconductor products be fixed, but also semiconductor products of different models can be fixed, improving the calibration efficiency.

[0030] Embodiment 2: In this embodiment, the original first gear 5, second gear 6 and second motor 4 are replaced with a second motor 4. The second motor 4 is fixedly connected to one side of one of the fixing plates. The outer surface of the output shaft of the second motor 4 is inserted into the inside of one of the second fixing holes. One side of the output shaft of the second motor 4 is fixedly connected to one side of the rotating shaft 7. During operation, the second motor 4 is started, and the output shaft of the second motor 4 rotates to drive the rotating shaft 7 to rotate. The rotating shaft 7 rotates to drive the placing plate 8 to rotate, thereby completing the adjustment of the angle of the placing plate 8.

[0031] A fixing device for semiconductor product detection has the following working principle:

[0032] When the fixing device for semiconductor product detection fixes a semiconductor product, the third motor 9 is started. The output shaft of the third motor 9 rotates to drive the lead screw 10 to rotate. The rotation of the lead screw 10 causes the two limit plates 11 to move. By arranging the two limit plates 11 to be slidably connected to the guide rod 12, the two limit plates 11 are prevented from rotating. Thus, when the two limit plates 11 approach each other, the semiconductor product is clamped. When it is necessary to perform multi-angle detection on the semiconductor product, the second motor 4 is started. The output shaft of the second motor 4 rotates to drive the first gear 5 to rotate. The rotation of the first gear 5 drives the second gear 6 to rotate. The rotation of the second gear 6 drives the rotating shaft 7 to rotate. The rotation of the rotating shaft 7 drives the placement table 8 to rotate. The rotation of the placement table 8 then completes the angle adjustment. By arranging the first motor 2 and starting the first motor 2, the output shaft of the first motor 2 rotates to drive the turntable 3 to rotate. The rotation of the turntable 3 then causes the placement table 8 to rotate, thereby completing the rotation of the placement table 8 on the horizontal plane and making the rotation angle more comprehensive.

[0033] Compared with the prior art, the present utility model has the following beneficial effects over the prior art:

[0034] 1. When the fixing device for semiconductor product detection fixes a semiconductor product, the third motor 9 is started. The output shaft of the third motor 9 rotates to drive the lead screw 10 to rotate. The rotation of the lead screw 10 causes the two limit plates 11 to move. By arranging the two limit plates 11 to be slidably connected to the guide rod 12, the two limit plates 11 are prevented from rotating. Thus, when the two limit plates 11 approach each other, the semiconductor product is clamped. By arranging the two limit plates 11, not only can the semiconductor product be fixed, but also semiconductor products of different models can be fixed, improving the calibration and measurement efficiency.

[0035] 2. When it is necessary to perform multi-angle detection on the semiconductor product with the fixing device for semiconductor product detection, the second motor 4 is started. The output shaft of the second motor 4 rotates to drive the first gear 5 to rotate. The rotation of the first gear 5 drives the second gear 6 to rotate. The rotation of the second gear 6 drives the rotating shaft 7 to rotate. The rotation of the rotating shaft 7 drives the placement table 8 to rotate. The rotation of the placement table 8 then completes the angle adjustment. By arranging the first motor 2 and starting the first motor 2, the output shaft of the first motor 2 rotates to drive the turntable 3 to rotate. The rotation of the turntable 3 then causes the placement table 8 to rotate, thereby completing the rotation of the placement table 8 on the horizontal plane and making the rotation angle more comprehensive, enabling the detection of different angles of the semiconductor product and making the detection effect more accurate. This solves the problem that the fixing device for semiconductor product detection can only detect specific parts from a specific direction, cannot perform defect detection and comparison from multiple angles, and requires frequent adjustment of the detection instrument and additional subsequent detection processes to ensure the accuracy of detection.

Claims

1. A fixture for semiconductor product testing, characterized in that: The invention comprises a bottom plate (1), wherein a first motor (2) is fixedly connected to the bottom of the bottom plate (1), a turntable (3) is fixedly connected to one side of the output shaft of the first motor (2), a second motor (4) is fixedly connected to the top of the turntable (3), a first gear (5) is fixedly connected to one side of the output shaft of the second motor (4), a second gear (6) is meshed with one side of the first gear (5), a rotating shaft (7) is fixedly connected inside the second gear (6), a placing table (8) is fixedly connected to the outer surface of the rotating shaft (7), a third motor (9) is fixedly connected to one side of the placing table (8), a lead screw (10) is fixedly connected to one side of the output shaft of the third motor (9), two limit plates (11) are threadedly connected to the outer surface of the lead screw (10), one side of the two limit plates (11) is slidably connected to a guide rod (12), and one side of the guide rod (12) is fixedly connected to one side of the placing table (8).

2. A fixing device for semiconductor product testing according to claim 1, characterized in that: A first fixing hole is provided at the top of the base plate (1), the interior of the first fixing hole is plugged into the outer surface of the output shaft of the first motor (2), and a slot hole (101) is provided at the top of the base plate (1).

3. A fixing device for semiconductor product testing according to claim 2, characterized in that: A fixing column is fixedly connected to the bottom of the rotating disk (3), and the outer surface of the fixing column is slidably connected to the inside of the slot (101).

4. A fixing device for semiconductor product testing according to claim 3, characterized in that: Two fixing plates are fixedly connected to the top of the rotating disk (3), one side of each of the two fixing plates is provided with a second fixing hole, and the insides of the two second fixing holes are plugged into the outer surface of the rotating shaft (7).

5. A fixing device for semiconductor product testing according to claim 4, characterized in that: Two slide grooves (801) are provided on one side of the placement platform (8), and the interiors of the two slide grooves (801) are both slidably connected to the outer surface of the limiting plate (11).

6. A fixing device for semiconductor product testing according to claim 5, characterized in that: The two limiting plates (11) are symmetrically arranged, and the bottoms of the two limiting plates (11) overlap with one side of the placement platform (8).

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