Wafer clamping plug box clamp
By designing a highly automated fixture for wafer jam cartridges, the problems of workers' labor intensity and health damage during the cleaning process are solved, and stable clamping and efficient cleaning of jam cartridges are achieved, reducing the harm to workers' health.
Patent Information
- Application Number
- CN202421818169.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-06-20
- Estimated Expiration
- 2034-07-30
AI Technical Summary
During the wafer production process, workers in the prior art need to manually put the jam box into an acid-base solution to clean it. The labor intensity is high and long-term exposure to an acidic or alkaline environment is seriously harmful to workers' health.
A wafer jam box fixture is designed, including a robot, a driving mechanism, a first clamping frame and a second clamping frame. The driving mechanism drives the clamping frame to move relative to each other in the first direction to achieve clamping the jam box, and the jam box is placed in the cleaning solution through the robot for shaking and cleaning. A limiting boss is provided on the jamming clamp, and a locking slot is provided on the jamming box to prevent the jamming box from slipping during cleaning.
A highly automated jam box clamping and cleaning process is achieved, reducing workers' labor intensity and avoiding the health risks of workers' long-term exposure to acidic or alkaline environments.
Smart Images
Figure CN223000606U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer production, in particular to a wafer cassette clamp. Background Art
[0002] In the process of wafer production, the wafer needs to be cleaned after grinding, that is, the ground wafer is passed through a metal cleaning agent, then through acid and alkali solutions, and then cleaned with ultrapure water. The purpose is to remove organic residues, metal impurities, grinding residues, etc. on the wafer. Among them, the pH value of the acid solution used is <6, and the pH value of the alkali solution is >10.
[0003] In the prior art, in order to improve the wafer cleaning efficiency, wafers are generally arranged in a cassette, and the cassette is manually placed into the acid and alkali solutions for cleaning. The labor intensity of workers is relatively large. In addition, although workers wear labor protection supplies during cleaning, long-term exposure to acidic or alkaline environments will seriously affect the health of workers. Summary of the Utility Model
[0004] The purpose of the utility model is to provide a wafer cassette clamp with high automation degree, which can replace manual labor to clamp the cassette and put it into the acid solution or alkali solution for cleaning, reduce the labor intensity of workers, and avoid affecting the health of workers.
[0005] To achieve the above purpose, the utility model provides a wafer cassette clamp, which includes a manipulator, a driving mechanism, a first clamping bracket and a second clamping bracket;
[0006] The driving mechanism is arranged at the output end of the manipulator. The driving mechanism has two power output ends, and the two power output ends are respectively fixed to the first clamping bracket and the second clamping bracket;
[0007] The first clamping bracket and the second clamping bracket are arranged at intervals along a first direction, and clamping plates for the cassette are oppositely arranged on the first clamping bracket and the second clamping bracket. The clamping plates for the cassette are provided with a first limiting boss and a second limiting boss at intervals along a third direction;
[0008] Wherein, the driving mechanism drives the first clamping bracket and the second clamping bracket to move towards each other along the first direction, and the two clamping plates for the cassette clamp the cassette. The first limiting boss and the second limiting boss are clamped in a clamping groove on the cassette for clamping and limiting the cassette in a second direction and the third direction. The first direction, the second direction and the third direction are perpendicular to each other in pairs.
[0009] Furthermore, a guide post is arranged between the first clamping bracket and the second clamping bracket. The guide post is arranged along the first direction and is arranged at the opening of the cassette for preventing the wafer from sliding out of the opening of the cassette.
[0010] Further, the first clamping bracket is provided with a mounting hole along the first direction, the second clamping bracket is provided with a guiding hole along the first direction, the first clamping bracket is provided with a threaded hole communicating with the mounting hole, the axis of the threaded hole is vertically intersecting with the axis of the mounting hole, a locking screw is arranged in the threaded hole, one end of the guiding post is arranged in the mounting hole and fixed to the first clamping bracket through the locking screw, and the other end of the guiding post penetrates through the guiding hole.
[0011] Further, the number of the guiding posts is at least two.
[0012] Further, the driving mechanism includes a jaw cylinder, a first baffle plate and a second baffle plate. Power output ends are arranged at both ends of the jaw cylinder. The two power output ends of the jaw cylinder are respectively located inside the first baffle plate and the second baffle plate. The first clamping bracket is fixedly connected to the first baffle plate, the second clamping bracket is fixedly connected to the second baffle plate, and the first baffle plate and the second baffle plate can slide relatively along the first direction.
[0013] Further, the first baffle plate and the second baffle plate have the same structure. The first baffle plate is provided with a U-shaped sliding groove along the first direction, and the jaw cylinder is located in the U-shaped sliding groove.
[0014] Further, an installation plate is fixedly arranged on the jaw cylinder back to the first clamping bracket, and the installation plate is used for fixedly connecting with the output end of the manipulator.
[0015] Further, limiting grooves for installing and limiting the plug clamping plate are arranged on the opposite side walls of the first clamping bracket and the second clamping bracket.
[0016] Compared with the prior art, the wafer plug box fixture of the embodiment of the present utility model has the beneficial effects that: including a manipulator, a driving mechanism, a first clamping bracket, a second clamping bracket, plug clamping plates are oppositely arranged on the first clamping bracket and the second clamping bracket, the first clamping bracket and the second clamping bracket are driven by the two power output ends of the driving mechanism to move relatively along the first direction respectively, so as to clamp the plug box. When the plug box is put into cleaning by the manipulator and the plug box is shaken for wafer cleaning, due to the first limiting boss and the second limiting boss arranged on the plug clamping plate and being clamped with the clamping groove on the plug box, the plug box is limited in the second direction and the third direction, so as to avoid the position movement and slippage of the plug box during the shaking process. The structure is stable and reliable, the automation degree is high, it can replace manual work to clamp the plug box and put it into acid solution or alkali solution for cleaning, reduce the labor intensity of workers, and avoid affecting the physical health of workers. Description of the Drawings
[0017] Figure 1 It is a reference schematic diagram of the usage state of the wafer cassette clamp in the embodiment of the present utility model;
[0018] Figure 2 It is a schematic structural diagram of the cassette;
[0019] Figure 3 It is a schematic structural diagram of the wafer cassette clamp in the embodiment of the present utility model;
[0020] Figure 4 It is a schematic structural diagram of the wafer cassette clamp in the embodiment of the present utility model;
[0021] Figure 5 It is an assembly schematic diagram of the cassette clamping plate of the wafer cassette clamp in the embodiment of the present utility model;
[0022] Figure 6 It is a schematic structural diagram of the cassette clamping plate of the wafer cassette clamp in the embodiment of the present utility model;
[0023] Figure 7 It is the front view of the wafer cassette clamp in the embodiment of the present utility model;
[0024] Figure 8 It is the side view of the structure of the wafer cassette clamp in the embodiment of the present utility model;
[0025] Figure 9 It is the top view of the structure of the wafer cassette clamp in the embodiment of the present utility model.
[0026] In the figure, 1, robot arm; 2, driving mechanism; 21, jaw cylinder; 22, first baffle; 23, second baffle; 24, mounting plate; 3, first clamping bracket; 31, mounting hole; 32, locking screw; 4, second clamping bracket; 5, cassette clamping plate; 51, first limiting boss; 52, second limiting boss; 6, guide post; 7, limiting groove; a, cassette; a1, clamping groove; b, wafer; X, first direction; Y, second direction; Z, third direction. Detailed implementation manners
[0027] The following combines the drawings and embodiments to further describe in detail the specific implementation manners of the present utility model. The following embodiments are used to illustrate the present utility model, but do not limit the scope of the present utility model.
[0028] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "inner", "outer", etc. in the present utility model is based on the positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the devices and elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model.
[0029] In the description of the present utility model, it should be understood that in the present utility model, terms such as "first" and "second" are used to describe various information, but this information should not be limited to these terms, and these terms are only used to distinguish the same type of information from each other. For example, without departing from the scope of the present utility model, the "first" information can also be referred to as the "second" information, and similarly, the "second" information can also be referred to as the "first" information.
[0030] Refer to Figures 1 to 9 , a wafer cassette clamping fixture of a preferred embodiment of the present utility model includes a manipulator 1, a driving mechanism 2, a first clamping bracket 3, and a second clamping bracket 4. As Figure 2 , Figure 3 shown, the cassette a is provided with an opening for placing the wafer b, and the wafers b are evenly distributed in the cassette a. In order to facilitate the positioning when clamping the cassette a, a clamping groove a1 is provided on the cassette a. For the convenience of explanation, refer to Figure 3 , define the movement direction of the power output end of the jaw cylinder 21 as the first direction X, the width direction of the first clamping bracket 3 as the second direction Y, and define the length direction of the first clamping bracket 3 as the third direction Z. The first direction X, the second direction Y, and the third direction Z are perpendicular to each other pairwise.
[0031] Specifically, the driving mechanism 2 is arranged at the output end of the manipulator 1. The driving mechanism 2 has two power output ends, and the two power output ends are respectively fixed to the first clamping bracket 3 and the second clamping bracket 4. The two power output ends can drive the first clamping bracket 3 and the second clamping bracket 4 to move towards or away from each other along the first direction X, so as to clamp the cassette. Refer to Figure 3 , Figure 6 , the first clamping bracket 3 and the second clamping bracket 4 are arranged at intervals along the first direction X, and clamping plates 5 for the cassette are oppositely arranged on the first clamping bracket 3 and the second clamping bracket 4. The clamping plates 5 are provided with a first limiting boss 51 and a second limiting boss 52 at intervals along the third direction Z. When clamping the cassette, the driving mechanism 2 drives the first clamping bracket 3 and the second clamping bracket 4 to move towards each other along the first direction X, and the two clamping plates 5 clamp the cassette, and the first limiting boss 51 and the second limiting boss 52 are clamped in the clamping groove on the cassette, so as to clamp and position the cassette in the second direction Y and the third direction Z. When the manipulator 1 drives the cassette to be placed in an acid solution or an alkali solution to shake and clean the wafers, it can avoid the position movement and slipping of the cassette, and the structure is stable and reliable, and the degree of automation is high.
[0032] Furthermore, in order to prevent the wafers from slipping out of the cassette when the manipulator 1 shakes the cassette to clean the wafers. Refer to Figure 3, a guide post 6 is arranged between the first clamping bracket 3 and the second clamping bracket. The guide post 6 is arranged along the first direction X and is located at the opening of the cassette, and is used to prevent the wafer from sliding out of the opening of the cassette. Specifically, in this embodiment, in order to facilitate the installation of the guide post 6, the first clamping bracket 3 is provided with an installation hole 31 along the first direction X, the second clamping bracket 4 is provided with a guiding hole along the first direction X, the first clamping bracket 3 is provided with a threaded hole communicating with the installation hole 31, the axis of the threaded hole is vertically intersected with the axis of the installation hole 31, a locking screw 32 is arranged in the threaded hole, one end of the guide post 6 is inserted into the installation hole 31 and is fixed to the first clamping bracket 3 through the locking screw 32, and the other end of the guide post 6 penetrates through the guiding hole. Since one end of the guide post 6 is fixed to the first clamping bracket 3 and the other end is slidably connected to the second clamping bracket 4, the guide post 6 can also be used for guiding when the driving mechanism 2 drives the first clamping bracket 3 and the second clamping bracket 4 to move along the first direction X, so as to improve the movement accuracy. Further, the number of the guide posts 6 is at least 2, which can provide a good guiding effect while blocking the wafer, and the number of the guide posts 6 can also be adjusted according to the size of the wafer.
[0033] Further, the driving mechanism 2 can be driven by a double-axis motor, a jaw cylinder 21, etc. as the power, and it only needs to have two power output ends. In this embodiment, refer to Figure 3 , Figure 4 , Figure 5 , Figure 7 , Figure 8 , Figure 9 , the driving mechanism 2 includes a jaw cylinder 21, a first baffle 22 and a second baffle 23. Among them, the two ends of the jaw cylinder 21 are provided with power output ends, which are respectively fixedly connected to the first clamping bracket 3 and the second clamping bracket 4. In order to prevent the acid-base solution from splashing on the jaw cylinder 21 during cleaning, corroding the jaw cylinder 21 and reducing the service life, the first baffle 22 and the second baffle 23 are used to protect the jaw cylinder 21. The two power output ends of the jaw cylinder 21 are respectively located inside the first baffle 22 and the second baffle 23. Specifically, the first clamping bracket 3 is fixedly connected to the first baffle 22, the second clamping bracket 4 is fixedly connected to the second baffle 23, and the first baffle 22 and the second baffle 23 can slide relatively along the first direction X. Further, in this embodiment, the first baffle 22 and the second baffle 23 have the same structure, and the first baffle 22 is provided with a U-shaped sliding groove along the first direction X, and the jaw cylinder 21 is located in the U-shaped sliding groove.
[0034] Further, in order to facilitate the quick connection between the jaw cylinder 21 and the manipulator 1, an installation plate 24 is fixedly arranged on the jaw cylinder 21 facing away from the first clamping bracket 3, and the installation plate 24 is used for fixedly connecting with the output end of the manipulator 1. Further, in order to facilitate the limit during the installation of the cassette clamping plate 5 and improve the assembly accuracy, the opposite side walls of the first clamping bracket 3 and the second clamping bracket 4 are provided with limit grooves 7 for the installation limit of the cassette clamping plate 5.
[0035] The working process of the present utility model is as follows: The output end of the manipulator 1 drives the first clamping frame 3 and the second clamping frame 4 to move above the cartridge box, and adjusts the position and pose so that the first convex platform and the second convex platform on the two cartridge clamping plates 5 are aligned with the clamping grooves on the cartridge box. The driving mechanism 2 drives the first clamping frame 3 and the second clamping frame 4 to move towards each other along the first direction X. The two cartridge clamping plates 5 clamp the cartridge box. At the same time, the first limiting convex platform 51 and the second limiting convex platform 52 are clamped in the clamping grooves on the cartridge box, so as to fix the position of the cartridge box after clamping. Subsequently, the manipulator 1 puts the cartridge box into the cleaning solution for shaking and cleaning.
[0036] In summary, the embodiment of the present utility model provides a wafer cartridge box fixture, including a manipulator 1, a driving mechanism 2, a first clamping frame 3, and a second clamping frame 4. Cartridge clamping plates 5 are relatively arranged on the first clamping frame 3 and the second clamping frame 4. The two power output ends of the driving mechanism 2 drive the first clamping frame 3 and the second clamping frame 4 to move relatively along the first direction X respectively to clamp the cartridge box. When the manipulator 1 puts the cartridge box into the cleaning solution and shakes the cartridge box for wafer cleaning, since the first limiting convex platform 51 and the second limiting convex platform 52 are provided on the cartridge clamping plate 5 and are clamped with the clamping grooves on the cartridge box, the cartridge box is limited in the second direction Y and the third direction Z, avoiding the position movement and slippage of the cartridge box during the shaking process. The structure is stable and reliable, and the degree of automation is high. It can replace manual labor to clamp the cartridge box and put it into the acid solution or alkali solution for cleaning, reducing the labor intensity of workers and avoiding affecting the physical health of workers.
[0037] The above are only the preferred embodiments of the present utility model. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present utility model, several improvements and replacements can still be made, and these improvements and replacements should also be regarded as the protection scope of the present utility model.
Claims
1. A wafer plug box fixture, characterized in that: It includes a manipulator, a driving mechanism, a first clamping frame, and a second clamping frame; The driving mechanism is arranged at the output end of the manipulator, and the driving mechanism has two power output ends, and the two power output ends are respectively fixed to the first clamping frame and the second clamping frame; The first clamping frame and the second clamping frame are spaced apart along the first direction, and the first clamping frame and the second clamping frame are provided with a plugging plate opposite to each other, and the plugging plate is spaced apart along the third direction with a first limiting boss and a second limiting boss; Among them, the driving mechanism drives the first clamping frame and the second clamping frame to move toward each other along the first direction, the two plugging clamps clamp the plug box, and the first limiting boss and the second limiting boss are clamped in the clamping groove on the plug box, which are used for clamping and limiting the plug box in the second direction and the third direction, and the first direction, the second direction and the third direction are perpendicular to each other.
2. The wafer cartridge holder according to claim 1, wherein: A guide post is provided between the first clamping frame and the second clamping frame. The guide post is provided along the first direction and at the opening of the plug box to prevent the wafer from sliding out of the opening of the plug box.
3. The wafer cartridge holder according to claim 2, wherein: The first clamping frame is provided with a mounting hole along the first direction, the second clamping frame is provided with a guide hole along the first direction, the first clamping frame is provided with a threaded hole connected to the mounting hole, the axis of the threaded hole is perpendicularly intersected with the axis of the mounting hole, a locking screw is provided in the threaded hole, one end of the guide column is passed through the mounting hole and is fixed to the first clamping frame by the locking screw, and the other end of the guide column passes through the guide hole.
4. The wafer cartridge holder according to claim 2, wherein: The number of the guide pillars is at least 2.
5. The wafer cartridge holder according to claim 2, wherein: The driving mechanism includes a clamping cylinder, a first baffle and a second baffle, the power output ends are provided at both ends of the clamping cylinder, the two power output ends of the clamping cylinder are respectively located on the inner sides of the first baffle and the second baffle, the first clamping frame is fixedly connected to the first baffle, the second clamping frame is fixedly connected to the second baffle, and the first baffle and the second baffle can slide relative to each other along the first direction.
6. The wafer cartridge holder according to claim 5, wherein: The first baffle plate has the same structure as the second baffle plate. The first baffle plate is provided with a U-shaped slide groove along the first direction, and the clamping claw cylinder is located in the U-shaped slide groove.
7. The wafer cartridge holder according to claim 5, wherein: The gripper cylinder is fixedly provided with a mounting plate facing away from the first clamping frame, and the mounting plate is used for being fixedly connected to the output end of the manipulator.
8. The wafer cartridge fixture according to claim 1, wherein: The side walls of the first clamping frame and the second clamping frame opposite to each other are provided with limiting grooves for the installation and limiting of the plugging clamp.