Small photoresist mixing and filling device

Abstract

The utility model discloses a small-sized photoresist mixing and filling device which comprises an operating table, support frames are fixedly mounted on two sides of the upper surface of the operating table, a positioning mechanism is fixedly mounted in one group of support frames, a photoresist storage tank and a mounting plate are fixedly mounted on the upper surface of the other group of support frames, a centrifugal pump is fixedly mounted on the upper surface of the mounting plate, and the centrifugal pump is fixedly mounted on the lower surface of the operating table. A feeding port of the centrifugal pump communicates with the photoresist storage tank through a pipeline, a discharging port of the centrifugal pump communicates with the material passing pipe through a pipeline, the material passing pipe is fixedly installed on the lower surface of the photoresist storage tank, the outer surface of the material passing pipe communicates with the material supply pipe, and the material supply pipe can be flush with a filling bottle. The filling bottles can be conveyed to the lower end of the feeding pipe through the conveying belt. Through the design of the positioning mechanism, the positioning mechanism can exert sleeving, limiting and fixing functions on the bottle opening of the filling bottle, the deviation of the filling bottle can be effectively reduced, the filling precision is improved, automatic operation can be achieved, manual adjustment is reduced, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist production, in particular to a small-scale mixing, filling and bottling device for photoresist. Background Technique

[0002] A photoresist refers to a corrosion-resistant thin film material whose solubility changes upon irradiation or radiation by ultraviolet light, electron beam, ion beam, X-ray, etc., and is used as an anti-corrosion coating material in the photolithography process.

[0003] For example, the utility model patent with the national authorization patent announcement number CN217575847U discloses a filling device for photoresist production and processing to prevent leakage, including a base. On both sides of the top of the inner cavity of the base, limit blocks are fixedly connected. An adjustment seat is arranged at the bottom of the two limit blocks. Moving wheels are fixedly connected to both sides of the bottom of the adjustment seat. A first motor is fixedly connected between the top and the bottom of the inner cavity of the adjustment seat. Through the arrangement of the base, limit blocks, adjustment seat, moving wheels, first motor, first threaded rod, first threaded sleeve, conveying device, bracket, filling device body, adjustment box, second motor, second threaded rod, second threaded sleeve, lifting rod, lifting box, moving block, adjustment wheel, moving frame, adjustment block, return spring, clamping plate and limit wheel, the utility model solves the problem that the existing filling device for photoresist production and processing is prone to leakage, and the filling device for photoresist production and processing has the advantage of preventing leakage.

[0004] However, during the filling process of the above-mentioned filling device for photoresist production and processing to prevent leakage, it does not have the function of accurately positioning the discharge port and the mouth of the filling bottle automatically. Therefore, it is necessary for workers to frequently manually adjust the relative positions of the discharge port and the bottle, increasing the operation complexity and time, and affecting the filling efficiency. Content of the Utility Model

[0005] The purpose of the utility model is to provide a small-scale mixing, filling and bottling device for photoresist, so as to solve the problem that during the filling process of photoresist, it does not have the function of automatically and accurately positioning the discharge port and the mouth of the filling bottle as mentioned in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solutions:

[0007] A small-scale mixing, filling and packaging device for photoresist, comprising: an operating table, on both sides of the upper surface of the operating table, support frames are fixedly installed. A positioning mechanism is fixedly installed inside one of the support frames, and a photoresist storage tank and a mounting plate are fixedly installed on the upper surface of the other support frame. A centrifugal pump is fixedly installed on the upper surface of the mounting plate. The feed inlet of the centrifugal pump is communicated with the photoresist storage tank through a pipeline, and the discharge outlet of the centrifugal pump is communicated with a material passing pipe through a pipeline. The material passing pipe is fixedly installed at the lower surface of the photoresist storage tank, and a feeding pipe is communicated and installed on the outer surface of the material passing pipe.

[0008] Preferably, the feeding pipe can be flush with the filling bottle. The filling bottle can be conveyed by the conveyor belt to the lower end of the feeding pipe, and is fixed by the positioning mechanism so that it can be flush with the discharge outlet of the feeding pipe. The conveyor belt is drivingly installed inside the connecting plate, and the connecting plate is fixedly installed between the two support frames.

[0009] Preferably, guide rods are fixedly installed on the upper surface of the connecting plate, and both ends of the guide rods are in a flared shape.

[0010] Preferably, the conveyor belt is divided into two groups and drivingly installed inside the connecting plate, and a gap is reserved between the two groups of conveyor belts.

[0011] Preferably, a connecting cylinder is fixedly installed inside the two connecting plates, and a photoelectric sensor is fixedly installed inside the connecting cylinder. The sensing end of the photoelectric sensor penetrates out from the gap and is flush with the surface of the conveyor belt.

[0012] Preferably, the positioning mechanism includes a connecting arm, two connecting columns are slidably installed inside the connecting arm, guide plates are fixedly installed at the ends of the two connecting columns, and an arc-shaped groove is opened at one end of the guide plate.

[0013] Preferably, an electric push rod is fixedly installed in the middle of the connecting arm, and the piston rod of the electric push rod is fixedly installed at one end of the guide plate.

[0014] Preferably, the guide plate is flush with the mounting plate. After the guide plate is pushed by the electric push rod and abuts against one end of the mounting plate, it can drive the arc-shaped groove to be sleeved on the outer surface of the bottle mouth of the filling bottle at the same time, and at the same time, the center of the arc-shaped groove will also be flush with the discharge outlet of the feeding pipe, so as to drive the bottle mouth of the filling bottle to be flush with the discharge outlet of the feeding pipe.

[0015] Preferably, the signal transmitting end of the photoelectric sensor is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the electric control ends of the electric push rod and the centrifugal pump.

[0016] Preferably, the photoelectric sensor is flush with the discharge port of the feeding pipe of the first group and is also located at the central part of the guiding rod. The models of the photoelectric sensor and the controller are W12-2 and S7-1214C respectively.

[0017] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0018] 1. Through the design of the centrifugal pump, feeding pipe, positioning mechanism, conveyor belt, photoelectric sensor, mounting plate and guiding rod, when filling the photoresist, the filling bottle can be placed on the upper surface of the conveyor belt and conveyed into the two groups of guiding rods. And through the limiting effect of the guiding rod, the filling bottle can be squeezed to the central part of the upper surface of the conveyor belt. And as the continuous conveying, the bottom of the filling bottle can pass over the upper end of the photoelectric sensor, and then it is detected by the photoelectric sensor and sends a signal to the controller. And as the filling bottle is continuously conveyed, until four groups of filling bottles have passed over the upper end of the photoelectric sensor, four signals will be sent to the controller. After receiving the four signals, the controller will control the positioning mechanism and the centrifugal pump through the electric control end. The positioning mechanism will slide and sleeve on the outer surface of the bottle mouth of the filling bottle, making the bottle mouth of the filling bottle flush with the discharge port of the feeding pipe. At the same time, the centrifugal pump will pump the photoresist in the photoresist storage tank into the feeding pipe, and the feeding pipe will supply the photoresist into the four groups of feeding pipes, and the feeding pipe will discharge the photoresist into the filling bottle. Until after the set filling time, the controller will control the positioning mechanism to return to its original position and turn off the centrifugal pump to stop supplying the photoresist through the electric control end. And the unrestricted filling bottle will be continuously conveyed by the conveyor belt for the next sealing operation until four groups of filling bottles pass over the upper end of the photoelectric sensor again and will be sleeved and fixed again for filling operation. And the function of sleeving, fixing and making the bottle mouth of the filling bottle flush with the discharge port of the feeding pipe in this process can effectively reduce the offset of the filling bottle, improve the filling accuracy, and can realize automatic operation, reduce manual adjustment and improve production efficiency.

[0019] 2. Through the design of the electric push rod, guide plate, arc groove and mounting plate, when the photoresist is filled and conveyed by the conveyor belt, the bottom of the filling bottle can pass over the upper end of the photoelectric sensor, and then it is detected by the photoelectric sensor and a signal is sent to the controller. As the filling bottles are continuously conveyed, until four groups of filling bottles have all passed over the upper end of the photoelectric sensor, four signals will be sent to the controller. After receiving the four signals, the controller will control the electric push rod to push the guide rod to move to one end through the electric control end. During the process of the guide rod being pushed, the arc groove will be driven to separate the four groups of filling bottles and fit the bottle mouths of the filling bottles inside. The guide plate pushed by the electric push rod will drive the arc groove to be flush with the discharge port of the feeding pipe. Thus, the bottle mouths of the filling bottles fitted in the arc groove can be flush with the discharge port of the feeding pipe, preventing the photoresist from splashing outside the bottle and reducing material waste. When the centrifugal pump is started by the controller, the photoresist in the photoresist storage tank will be pumped into the material passing pipe, and the material passing pipe will supply the photoresist into the four feeding pipes. The feeding pipes will discharge the photoresist into the filling bottles to complete the filling operation. The function of fitting and fixing the bottle mouths of the filling bottles can effectively reduce the offset of the filling bottles, improve the filling accuracy, and can realize automatic operation, reduce manual adjustment, improve production efficiency, and the overall structure is compact and small, which is helpful for its placement. Brief Description of the Drawings

[0020] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0021] Figure 2 is a schematic diagram of the conveyor belt and the spacing opening of the present utility model;

[0022] Figure 3 is a schematic diagram of the feeding pipe structure of the present utility model;

[0023] Figure 4 is a schematic diagram of the positioning mechanism structure of the present utility model;

[0024] Figure 5 is a schematic diagram of the guide plate and the arc groove of the present utility model.

[0025] In the figure: 1, operating table; 101, support frame; 102, material passing pipe; 103, photoresist storage tank; 104, centrifugal pump; 105, feeding pipe; 2, positioning mechanism; 201, connecting arm; 202, connecting column; 203, guide plate; 204, arc groove; 205, electric push rod; 3, conveyor belt; 301, spacing opening; 302, guide rod; 303, connecting cylinder; 304, photoelectric sensor; 305, connecting plate; 4, mounting plate. Detailed Description of the Embodiment

[0026] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0027] Please refer to Figures 1-5 , the following technical solutions are provided in this embodiment:

[0028] As Figures 1-3 shown, a small mixing, filling and packaging device for photoresist includes: an operating table 1. On both sides of the upper surface of the operating table 1, support frames 101 are fixedly installed. A positioning mechanism 2 is fixedly installed inside one group of support frames 101. A photoresist storage tank 103 and a mounting plate 4 are fixedly installed on the upper surface of the other group of support frames 101. A centrifugal pump 104 is fixedly installed on the upper surface of the mounting plate 4. The feed port of the centrifugal pump 104 is connected to the photoresist storage tank 103 through a pipeline, and the discharge port of the centrifugal pump 104 is connected to a material conveying pipe 102 through a pipeline. The material conveying pipe 102 is fixedly installed at the lower surface of the photoresist storage tank 103. A feeding pipe 105 is connected and installed on the outer surface of the material conveying pipe 102.

[0029] The feeding pipe 105 can be flush with the filling bottle. The filling bottle can be conveyed by a conveyor belt 3 to the lower end of the feeding pipe 105, and is fixed by the positioning mechanism 2 so that it can be flush with the discharge port of the feeding pipe 105. The conveyor belt 3 is drivingly installed inside a connecting plate 305. The connecting plate 305 is fixedly installed between the two groups of support frames 101.

[0030] Guide rods 302 are fixedly installed on the upper surface of the connecting plate 305. Both ends of the guide rods 302 are in a flared shape.

[0031] The conveyor belt 3 is divided into two groups and drivingly installed inside the connecting plate 305. A gap 301 is reserved between the two groups of conveyor belts 3.

[0032] Connecting cylinders 303 are fixedly installed inside the two groups of connecting plates 305. Photoelectric sensors 304 are fixedly installed inside the connecting cylinders 303. The sensing ends of the photoelectric sensors 304 penetrate out from the gap 301 and are flush with the surface of the conveyor belt 3.

[0033] Through the design of the centrifugal pump 104, the feeding pipe 105, the positioning mechanism 2, the conveyor belt 3, the photoelectric sensor 304, the mounting plate 4 and the guide rod 302, when filling the photoresist, the filling bottle can be placed on the upper surface of the conveyor belt 3 and conveyed into the two groups of guide rods 302. And through the limiting effect of the guide rod 302, the filling bottle can be squeezed to the center of the upper surface of the conveyor belt 3. And as the continuous conveying continues, the bottom of the filling bottle can pass over the upper end of the photoelectric sensor 304, and then it is detected by the photoelectric sensor 304 and a signal is sent to the controller. And as the filling bottle is continuously conveyed, until four groups of filling bottles have passed over the upper end of the photoelectric sensor 304, four signals will be sent to the controller. After receiving the four signals, the controller will control the positioning mechanism 2 and the centrifugal pump 104 through the electric control end. And the positioning mechanism 2 will slide and push to one end and be sleeved on the outer surface of the bottle mouth of the filling bottle, making the bottle mouth of the filling bottle flush with the discharge port of the feeding pipe 105. At the same time, the centrifugal pump 104 will pump the photoresist in the photoresist storage tank 103 into the material passing pipe 102. And the material passing pipe 102 will supply the photoresist into the four groups of feeding pipes 105. And the feeding pipe 105 will discharge the photoresist into the filling bottle. Until after reaching the set filling time, the controller will control the positioning mechanism 2 to return to its original position and turn off the centrifugal pump 104 to stop the supply of the photoresist. And the unrestricted filling bottle will be continuously conveyed by the conveyor belt 3 for the next sealing operation. Until another four groups of filling bottles pass over the upper end of the photoelectric sensor 304, they will be sleeved and fixed again for the filling operation. And the function of sleeving, fixing and being flush with the discharge port of the feeding pipe 105 on the bottle mouth of the filling bottle in this process can effectively reduce the offset of the filling bottle, improve the filling accuracy, and can realize automatic operation, reduce manual adjustment and improve production efficiency.

[0034] As Figures 4-5 shown, the positioning mechanism 2 includes a connecting arm 201. Two connecting columns 202 are slidably installed in the connecting arm 201. Guide plates 203 are fixedly installed at the ends of the two connecting columns 202. An arc-shaped groove 204 is opened at one end of the guide plate 203.

[0035] An electric push rod 205 is fixedly installed in the middle of the connecting arm 201. The piston rod of the electric push rod 205 is fixedly installed at one end of the guide plate 203.

[0036] The guide plate 203 is flush with the mounting plate 4. After the guide plate 203 is pushed by the electric push rod 205 and touches one end of the mounting plate 4, it can drive the arc-shaped groove 204 to be sleeved on the outer surface of the bottle mouth of the filling bottle at the same time. And at the same time, the center of the arc-shaped groove 204 will also be flush with the discharge port of the feeding pipe 105. Furthermore, it can drive the bottle mouth of the filling bottle to be flush with the discharge port of the feeding pipe 105.

[0037] The signal transmitting end of the photoelectric sensor 304 is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the electric control ends of the electric push rod 205 and the centrifugal pump 104.

[0038] The photoelectric sensor 304 is flush with the discharge port of the feeding pipe 105 of the first group and is also located at the center of the guide rod 302. The models of the photoelectric sensor 304 and the controller are W12-2 and S7-1214C respectively.

[0039] Through the design of the electric push rod 205, the guide plate 203, the arc-shaped groove 204 and the mounting plate 4, when the photoresist is filled and conveyed by the conveyor belt 3, the bottom of the filling bottle can pass over the upper end of the photoelectric sensor 304, and then it is detected by the photoelectric sensor 304 and a signal is sent to the controller. As the filling bottle is continuously conveyed, until four groups of filling bottles have all passed over the upper end of the photoelectric sensor 304, four signals will be sent to the controller. After receiving the four signals, the controller will control the electric push rod 205 to push the guide rod 302 to move towards one end through the electric control end. During the process of the guide rod 302 being pushed, the arc-shaped groove 204 will separate the four groups of filling bottles and fit the mouths of the filling bottles inside. The guide plate 203 pushed by the electric push rod 205 will drive the arc-shaped groove 204 to be flush with the discharge port of the feeding pipe 105. Thus, the mouths of the filling bottles fitted inside the arc-shaped groove 204 can be flush with the discharge port of the feeding pipe 105, which can prevent the photoresist from splashing outside the bottle and reduce material waste. When the centrifugal pump 104 is started by the controller, the photoresist in the photoresist storage tank 103 will be pumped into the material passing pipe 102. The material passing pipe 102 will supply the photoresist into the four feeding pipes 105, and the feeding pipes 105 will discharge the photoresist into the filling bottles to complete the filling operation. The function of fitting and fixing the mouths of the filling bottles can effectively reduce the offset of the filling bottles, improve the filling accuracy, and can realize automatic operation, reduce manual adjustment, improve production efficiency, and the overall structure is compact and small, which is helpful for its placement.

[0040] Summarize and sort out the working steps of this solution according to the above technical solution: When filling the photoresist, the filling bottle can be placed on the upper surface of the conveyor belt 3 and conveyed into the two sets of guide rods 302. And through the limiting effect of the guide rods 302, the filling bottle can be squeezed to the center of the upper surface of the conveyor belt 3. And with continuous conveying, the bottom of the filling bottle can pass over the upper end of the photoelectric sensor 304, and then it is detected by the photoelectric sensor 304 and a signal is sent to the controller. And as the filling bottle is continuously conveyed, until four sets of filling bottles have passed over the upper end of the photoelectric sensor 304, four signals will be sent to the controller. After receiving the four signals, the controller will control the electric push rod 205 through the electric control end to push the guide rod 302 to move to one end. During the process of pushing the guide rod 302, the arc groove 204 will separate the four sets of filling bottles and fit the bottle mouths of the filling bottles inside. And the guide plate 203 pushed by the electric push rod 205 will drive the arc groove 204 to be flush with the discharge port of the feed pipe 105. Thus, the bottle mouths of the filling bottles fitted in the arc groove 204 can be flush with the discharge port of the feed pipe 105. And when the centrifugal pump 104 is started by the controller, the photoresist in the photoresist storage tank 103 will be pumped into the through pipe 102. And the through pipe 102 will supply the photoresist into the four feed pipes 105. And the feed pipes 105 will discharge the photoresist into the filling bottles. Until after reaching the set filling time, the controller will control the electric push rod 205 through the electric control end to pull the guide plate 203 back to its original position and turn off the centrifugal pump 104 to stop supplying the photoresist. And the unrestricted filling bottles will be continuously conveyed by the conveyor belt 3 for the next sealing operation until four more sets of filling bottles pass over the upper end of the photoelectric sensor 304 and are again fitted and fixed for filling operation.

[0041] In summary: Through the function of fitting and fixing applied to the bottle mouths of the filling bottles, the offset of the filling bottles can be effectively reduced, the filling accuracy can be improved, and automated operation can be achieved, manual adjustment can be reduced, and production efficiency can be improved.

[0042] Parts not involved in the present utility model are the same as or can be implemented by using the prior art. Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A small photoresist mixing and filling device, characterized in that: include: An operating table (1), wherein support frames (101) are fixedly installed on both sides of the upper surface of the operating table (1), wherein a positioning mechanism (2) is fixedly installed inside one group of the support frames (101), and a photoresist storage tank (103) and a mounting plate (4) are fixedly installed on the upper surface of another group of the support frames (101), and a centrifugal pump (104) is fixedly installed on the upper surface of the mounting plate (4), wherein the feed inlet of the centrifugal pump (104) is connected to the photoresist storage tank (103) through a pipeline, and the discharge outlet of the centrifugal pump (104) is connected to a feed pipe (102) through a pipeline, and the feed pipe (102) is fixedly installed at the lower surface of the photoresist storage tank (103), and a feed pipe (105) is installed on the outer surface of the feed pipe (102).

2. A small-scale photoresist mixing and filling device according to claim 1, characterized in that: The feeding tube (105) can be flush with the filling bottle, and the filling bottle can be transported to the lower end of the feeding tube (105) by the conveyor belt (3), and is fixed by the positioning mechanism (2) so that it can be flush with the discharge port of the feeding tube (105). The conveyor belt (3) is driven and installed in the connecting plate (305), and the connecting plate (305) is fixedly installed between the two groups of support frames (101).

3. A small-scale photoresist mixing and filling device according to claim 2, characterized in that: A guide rod (302) is fixedly mounted on the upper surface of the connecting plate (305), and both ends of the guide rod (302) are in a constricted shape.

4. A small-scale photoresist mixing and filling device according to claim 2, characterized in that: The conveyor belt (3) is divided into two groups and is installed in the connecting plate (305). A spacing opening (301) is reserved between the two groups of conveyor belts (3).

5. A small-scale photoresist mixing and filling device according to claim 4, characterized in that: A connecting tube (303) is fixedly installed in the two groups of connecting plates (305), and a photoelectric sensor (304) is fixedly installed in the connecting tube (303). The sensing end of the photoelectric sensor (304) passes through the spacing opening (301) and is flush with the surface of the conveyor belt (3).

6. A small-scale photoresist mixing and filling device according to claim 5, characterized in that: The positioning mechanism (2) comprises a connecting arm (201), two groups of connecting columns (202) are slidably mounted inside the connecting arm (201), guide plates (203) are fixedly mounted at the ends of the two groups of connecting columns (202), and an arc-shaped groove (204) is formed at one end of the guide plate (203).

7. A small-scale photoresist mixing and filling device according to claim 6, characterized in that: An electric push rod (205) is fixedly mounted on the middle portion of the connecting arm (201), and a piston rod of the electric push rod (205) is fixedly mounted on one end of the guide plate (203).

8. A small-scale photoresist mixing and filling device according to claim 7, characterized in that: The guide plate (203) is flush with the mounting plate (4). After the guide plate (203) is pushed by the electric push rod (205) to touch one end of the mounting plate (4), it can simultaneously drive the arc groove (204) to be sleeved on the outer surface of the bottle mouth of the filling bottle, and at the same time, the center of the arc groove (204) will also be flush with the discharge port of the feeding tube (105), thereby driving the bottle mouth of the filling bottle to be flush with the discharge port of the feeding tube (105).

9. A small-scale photoresist mixing and filling device according to claim 8, characterized in that: The signal transmitting end of the photoelectric sensor (304) is connected to the signal receiving end of the controller, and the control output end of the controller is electrically connected to the electric push rod (205) and the electric control end of the centrifugal pump (104).

10. A small-scale photoresist mixing and filling device according to claim 9, characterized in that: The photoelectric sensor (304) is flush with the discharge port of the first group of feed pipes (105) and is also located at the center of the guide rod (302).

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